CN110228709B - Step-by-step circulation system of semiconductor device - Google Patents
Step-by-step circulation system of semiconductor device Download PDFInfo
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- CN110228709B CN110228709B CN201910529538.4A CN201910529538A CN110228709B CN 110228709 B CN110228709 B CN 110228709B CN 201910529538 A CN201910529538 A CN 201910529538A CN 110228709 B CN110228709 B CN 110228709B
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- clamping block
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- suction
- material placing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G29/00—Rotary conveyors, e.g. rotating discs, arms, star-wheels or cones
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/915—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rotary movements only
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Automatic Assembly (AREA)
Abstract
The invention relates to a step-by-step circulation system of a semiconductor electric element, which comprises an indexing rotary seat, a rotary table, a clamp base, a material placing table, an inner clamping block, an outer clamping block and a loose clamp assembly, wherein the indexing rotary seat is arranged on the rotary table; the indexing rotary seat is fixedly arranged on the frame, and the center position of the rotary disk is arranged on an output shaft of the indexing rotary seat; the fixture base is fixedly arranged on the periphery of the turntable, the material placing table is arranged above the fixture base and comprises a placing part and a positioning part; the inner clamping block and the outer clamping block are arranged oppositely and are rotatably connected to the convex column of the clamp base, and the inner clamping block and the outer clamping block are respectively positioned on two sides of the material placing table; the loose clamp assembly is positioned below the outer clamping block; the invention can ensure that the position of the workpiece is not loosened in the transferring process, and the clamping force is generated by the spring, thereby avoiding arranging a motor or an air cylinder and leading the structure of the mechanism to be compact; the opening of the tool clamp is facilitated; the contact of the rollers makes the contact smoother.
Description
Technical Field
The invention relates to the technical field of electronic device production and manufacturing, in particular to a step-by-step circulation system of a semiconductor device.
Background
The appearance detection of the semiconductor power device is an important link in the semiconductor process manufacturing, because the chip manufacturing process has more figure defects, dirty, damaged, defective and other appearance defects, and 100% microscopic examination needs to be performed on the appearance part in order to improve the yield and the product reliability of the subsequent process links.
The patent publication No. CN109100366A discloses a system and a method for detecting the end face appearance of a semiconductor laser chip by the patent name of the national intellectual property office 2018.12.28, and the system comprises a chip carrier, a downward-looking camera, a chip pick-up device, an upward-looking camera light source, an optical device and an upward-looking group machine, wherein the chip pick-up device sucks the semiconductor laser chip to a specified working area of the optical device, the upward-looking camera light source is arranged in the specified working area of the optical device and provides a light source for the upward-looking camera, the optical device projects the amplified images of the lower surface and four sides of the semiconductor laser chip into the upward-looking camera, and the upward-looking camera acquires the amplified images of the lower surface and the four sides of the chip. This patent is the drive of direct pneumatic tong to the transport of chip, does not have corresponding anchor clamps, and detection efficiency is slow.
The patent name of the semiconductor packaging appearance detection device is CN204346940U disclosed by the national intellectual property office of 2015.05.20, and the device comprises a first resistance regulator, a first resistance light source control box, a first camera, a second resistance regulator, a second resistance light source control box, a second light source control box and a second camera, wherein the first resistance regulator, the first resistance light source control box, the first light source control box and the first camera are sequentially connected in series, and the second resistance regulator, the second resistance light source control box, the second light source control box and the second camera are sequentially connected in series. The detection degree of automation of this patent is low, carries out getting of part by the manual work and puts, is unsuitable for high-speed large batch detection task.
Disclosure of Invention
The purpose of the invention is: the tooling clamping and transporting device and the step-by-step circulation system are accurate in positioning, convenient to clamp, simple in mechanism and capable of carrying efficient semiconductor devices.
For the purpose of the invention, the following technical scheme is adopted for realizing the purpose: a tool clamping and conveying device for semiconductor devices comprises an indexing rotary seat, a rotary table, a clamp base, a material placing table, an inner clamping block, an outer clamping block and a loose clamp assembly; the indexing rotary seat is fixedly arranged on the frame, and the center position of the rotary disk is arranged on an output shaft of the indexing rotary seat; the clamp base is fixedly arranged on the periphery of the turntable, the clamp base is T-shaped, protruding columns are arranged at two ends of a horizontal section of the T-shape, and circular blind holes are arranged on a vertical section of the T-shape; the material placing table is arranged above the clamp base and comprises a placing part and a positioning part, the placing part is in a horizontal plane shape, and the positioning part is two vertical flanges at the top end of the placing part; the inner clamping block and the outer clamping block are arranged oppositely and are rotatably connected to the convex column of the clamp base, and the inner clamping block and the outer clamping block are respectively positioned on two sides of the material placing table; the inner clamping block comprises an inclined clamping section, a vertical section and a horizontal section; the inclined clamping section is obliquely arranged and is positioned above the material placing table in height, a hinge hole is formed in the turning part of the inclined clamping section and the vertical section, and the hinge hole is rotatably connected with the convex column on the clamp base; the upper surface of the horizontal section is provided with a short shaft, and the short shaft is matched in a round blind hole of the clamp base and connected through a cylindrical spring; an arc bead is arranged below the horizontal section; the shape of the outer clamping block is similar to that of the inner clamping block, and the lower end of the outer clamping block is provided with a roller which is in contact with the arc-shaped convex edge of the inner clamping block; the loose clamp assembly comprises a right-angle support plate, a control cylinder and a loose clamp head; the control cylinder is vertically fixed on the frame through the right-angle support plate, the loosening fixture head is fixedly arranged at the telescopic end of the control cylinder, a small ball is arranged on the loosening fixture head and corresponds to the roller, and the position of the small ball is located right below the roller.
Preferably, the periphery of the turntable is provided with mounting grooves, and the number of the mounting grooves is sixteen.
Preferably, the upper end of the cylindrical spring abuts against the clamp base, and the lower end of the cylindrical spring abuts against the short shaft.
Preferably, the loose clamp assemblies are arranged in two groups and are respectively positioned at the stations for receiving and discharging.
Preferably, the heights of the upper end clamping parts of the inner clamping block and the outer clamping block are flush.
Preferably, the indexing rotary seat is internally provided with a worm gear and a worm for transmission, the output end rotates in a stepping mode, and the whole circle is divided into sixteen working steps.
Preferably, the loose clamp assemblies are provided with two groups corresponding to the stations for feeding and discharging.
Preferably, the tops of the side surfaces of the inner clamping block and the outer clamping block, which are contacted with the workpiece, are provided with inclined surfaces which incline inwards.
Preferably, the diameter of the circular blind hole of the clamp base is larger than that of the short shaft of the inner clamping block.
A step-by-step transfer system of a semiconductor device comprises a rotary carrying device and a tool clamping and carrying device, wherein the carrying tracks of the rotary carrying device and the tool clamping and carrying device are provided with an intersection part, the tool clamping and carrying device is the tool clamping and carrying device of the semiconductor device according to the technical scheme, and the rotary carrying device comprises a divider, a suction assembly, a direction correcting assembly, a lifting assembly and a protection assembly; the separator is arranged in the middle of the rack, the suction assembly is arranged at the telescopic end of the separator, the lifting assembly is positioned right above the suction assembly, the lifting assembly and the suction assembly correspond to each other one by one, and the protection assembly is arranged on the lifting assembly; the conveying tracks of the rotary conveying device and the tool clamping and conveying device are provided with an intersection part, when the rotary conveying device and the tool clamping and conveying device reach a transfer station, the lifting assembly drives the suction assembly to descend a workpiece, the workpiece is placed into the material placing table, and the workpiece is clamped by the inner clamping block and the outer clamping block on the material placing table.
Compared with the prior art, the invention has the beneficial effects that: the clamping part which keeps normally closed is arranged in the tool clamping and transporting device, so that the position of a workpiece can be ensured not to be loosened in the transporting process, and the clamping force is generated by the spring, so that a motor or an air cylinder is avoided, and the structure of the mechanism is compact; a loose clamp assembly is arranged at a specific position, so that the opening of a tool clamp is facilitated; the clamp and the loose clamp assembly are in contact through the roller, so that the contact is smoother, the working procedure is smoother in the operation process, and the working efficiency is improved; the advantage of setting up substep circulation system is through the mode of getting of difference clamp, can all detect the upper and lower surface of work piece.
Drawings
Fig. 1 is a schematic diagram of an explosive structure according to an embodiment of the present invention.
Fig. 2 is an exploded view of the rotary handling apparatus.
Fig. 3 is an exploded view of the suction assembly and the direction correcting assembly.
In the figure: the automatic feeding device comprises an indexing rotary seat 41, a rotary disk 42, a clamp base 43, a material placing table 44, an inner clamping block 45, an outer clamping block 46, a loose clamp assembly 47, a right-angle support plate 471, a control cylinder 472, a loose clamp head 473, a rotary carrying device 3, a divider 31, a suction assembly 32, a direction correcting assembly 33, a lifting assembly 34, a protective assembly 35, a folded support 341, a disk 342, a lifting cylinder 343, a spoke plate 344, a protective cover 351, a connecting plate 352, a protective cylinder 353, a guide pillar 354, a connecting bar 321, a sleeve 322, a movable rod sleeve 323, a butting seat 324, a suction plate 325, a spring 326, a bearing seat 331, a stepping motor 332, a folded support plate 333, a bottom adjusting block 334 and a height adjusting block 335.
Detailed Description
A step-by-step circulation system of a semiconductor device comprises a rotary carrying device and a tool clamping and carrying device.
As shown in fig. 1, the semiconductor device tooling clamping and transporting device comprises an indexing rotary seat 41, a rotary table 42, a clamp base 43, a material placing table 44, an inner clamping block 45, an outer clamping block 46 and a loose clamp assembly 47; the indexing rotary seat 41 is fixedly arranged on the machine frame, the center position of the rotary disk 42 is arranged on an output shaft of the indexing rotary seat 41, mounting grooves are formed in the periphery of the rotary disk 42, and the number of the mounting grooves is sixteen; the clamp base 43 is fixedly arranged on the periphery of the turntable 42, the clamp base 43 is T-shaped, convex columns are arranged at two ends of a horizontal section of the T-shape, and circular blind holes are arranged on a vertical section of the T-shape; the material placing table 44 is installed above the clamp base 43, the material placing table 44 comprises a placing part and a positioning part, the placing part is in a horizontal plane shape, and the positioning part is two vertical flanges at the top end of the placing part; the inner clamping block 45 and the outer clamping block 46 are oppositely arranged and are rotatably connected to the convex column of the clamp base 43, and the inner clamping block 45 and the outer clamping block 46 are respectively positioned at two sides of the material placing table 44; the inner clamping block 45 comprises an inclined clamping section, a vertical section and a horizontal section; the inclined clamping section is obliquely arranged and is positioned above the material placing table 44 in height, and a hinge hole is formed in the turning part of the inclined clamping section and the vertical section and is rotationally connected with the convex column on the clamp base 43; a short shaft is arranged on the horizontal section, the short shaft is matched in a round blind hole of the clamp base 43 and is connected with the clamp base 43 through a cylindrical spring, the upper end of the cylindrical spring is abutted against the clamp base 43, and the lower end of the cylindrical spring is abutted against the short shaft; an arc bead is arranged below the horizontal section; the outer clamping block 46 is similar to the inner clamping block 45 in shape, and a roller 461 is arranged on the lower end of the outer clamping block 46 and is in contact with the arc-shaped rib of the inner clamping block 45; the heights of the upper end clamping parts of the inner clamping block 45 and the outer clamping block 46 are flush; the loose clamp assembly 47 comprises a right-angle support plate 471, a control cylinder 472 and a loose clamp head 473; the control cylinder 472 is vertically fixed on the frame through a right-angle support plate 471, the loosening clamp head 473 is fixedly arranged at the telescopic end of the control cylinder 472, a small ball is arranged on the loosening clamp head 473, the ball corresponds to the roller 461, and the small ball is positioned right below the roller 461; the loose clamp assemblies 47 are provided with two groups and are respectively positioned at the stations for receiving and discharging.
When the tooling clamping and transporting device 4 works, the indexing rotary seat 41 drives the rotary table 42 to rotate step by step, and the rotary table rotates sixteen times in a whole circle, when a workpiece is placed, the clamp loosening assembly 47 at the position works, the control cylinder 472 drives the clamp loosening head 473 to jack up the inner clamping block 45 and the outer clamping block 46 upwards, the clamping part at the upper end of the inner clamping block 45 and the outer clamping block 46 are expanded outwards through the lever principle, and the workpiece to be detected is put down at the moment; after the indexing rotary seat 41 rotates, the fixture leaves the loose fixture assembly 47, the inner clamping blocks 45 and the outer clamping blocks 46 keep clamping the workpiece under the action of the springs, and until the blanking needs to be carried, the loose fixture assembly 47 releases the tool fixture again.
The clamping and transporting device for the tooling of the semiconductor device solves the problems of poor precision and complex structure of a positioning and clamping mechanism of a semiconductor power device in the transporting process, can ensure that the position of the workpiece is not loosened in the transporting process by arranging a clamping part which is kept normally closed, and avoids arranging a motor or an air cylinder because the clamping force is generated by a spring, so that the structure of the mechanism is compact; a loose clamp assembly 47 is arranged at a specific position, so that the opening of the tool clamp is facilitated; the clamp and the loose clamp assembly 47 are in contact through the roller 461, so that the contact is smoother, the working procedure is smoother in the operation process, and the working efficiency is improved.
As shown in fig. 2, the rotary handling device 3 includes a divider 31, a suction assembly 32, a direction correcting assembly 33, a lifting assembly 34 and a protection assembly 35; the divider 31 is arranged in the middle of the frame, a connecting flange plate is arranged on an output shaft at the upper end of the divider 31, a plurality of suction assemblies 32 are uniformly arranged on the periphery of the connecting flange plate, and the number of the suction assemblies 32 is multiple; the direction correcting assemblies 33 are arranged right below the suction assembly 32, and the direction correcting assemblies 33 are provided with three groups; the lifting assembly 34 is positioned right above the suction assembly 32, and the lifting assembly 34 corresponds to the suction assembly 32 one by one; a guard assembly 35 is mounted on the lift assembly 34 for protecting the internal mechanisms. The lifting assembly 34 comprises a fold bracket 341, a disc 342, a lifting cylinder 343, a spoke plate 344 and a lower pressing column 345; the disc 342 is fixedly connected with the folded bracket 341 through a connecting column, and a spoke plate 344 is arranged right below the disc 342; the fixed end of the lifting cylinder 343 is connected and installed on the disc 342, the telescopic end of the lifting cylinder 343 is connected with the lower pressing column 345, the lower pressing column 345 is matched with the spoke plate 344, and the lower end of the lower pressing column 345 corresponds to the suction assembly 32. The protection assembly 35 comprises a protection cover 351, a connecting plate 352, a protection cylinder 353 and a guide post 354; the protection cylinder 353 is vertically arranged at the end part of the folded support 341, the connecting plate 352 is arranged at the vertical telescopic end of the protection cylinder 353, the guide post 354 is fixedly arranged at the bottom of the connecting plate 352, the guide post 354 is movably matched on the folded support 341, the connecting plate 352 is fixedly connected with the top end of the protection cover 351, the protection cover 351 is cylindrical, and the side edge of the protection cover is provided with a vertical groove.
As shown in fig. 3, the suction assembly 32 includes a connecting bar 321, a sleeve 322, a movable rod cover 323, a support seat 324, a suction plate 325 and a spring 326; one end of the connecting bar 321 is connected with a flange on the divider 31, the other end of the connecting bar 321 is provided with a sleeve 322, the movable rod sleeve 323 is movably matched in the sleeve 322, the upper end of the movable rod sleeve 323 is fixedly provided with a support seat 324, the lower end of the movable rod sleeve 323 is provided with an air suction plate 325, and the lower end surface of the air suction plate 325 is provided with an air suction hole; the sleeve 322 is provided with a spring 326, and the upper end and the lower end of the spring 326 respectively abut against the abutting seat 324 and the sleeve 322 to lift the air suction plate 325 upwards.
As shown in fig. 3, the direction correcting assembly 33 includes a receiving base 331, a stepping motor 332, a folding support plate 333, a bottom adjusting block 334, and a height adjusting block 335; the folding support plate 333 is fixedly arranged on the frame through a bottom adjusting block 334, and the depth distance can be adjusted; the height adjusting block 335 is connected to the vertical section of the fold-shaped support plate 333 through a set screw, and the height can be adjusted; the stepping motor 332 is mounted on the height adjusting block 335, a bearing base 331 is arranged on the rotating end of the stepping motor 332, and a T-shaped sinking groove is formed in the bearing base 331 and used for placing the semiconductor power device 001.
When the rotary carrying device 3 works, the lifting component 34 independently drives each air suction plate 325 on the suction component 32 to lift, and the lifting is realized when the picking, placing and direction correction are carried out; the air suction plate 325 sucks the workpiece and then rotates step by the divider 31, when the direction correction is needed, the air suction plate 325 is pressed down by the pressing column 345, the workpiece is placed into the bearing seat 331, then the air suction plate 325 is loosened, the stepping motor 332 rotates the workpiece to a certain angle and then the air suction plate 325 is sucked again for moving.
The rotary carrying device 3 solves the problem that the posture of a semiconductor power device needs to be changed in the carrying process, and the lifting component 34 with a fixed position is arranged, and the suction component 32 rotates below the lifting component, so that the workpiece only needs to be lifted at a specific station, and the mechanism is simple; the direction correcting component 33 is arranged, so that the change of multiple postures required by the workpiece is better adapted, and the subsequent processing speed and the detection precision are improved; the protection component 35 is arranged, so that the interference influence of dust is avoided, and the follow-up detection precision is improved.
When the step-by-step circulation system of the semiconductor device works, a workpiece is firstly sucked and conveyed by the rotary conveying device 3, when the material is discharged, the lifting assembly 34 drives the sucking assembly 32 to descend the workpiece to be placed in the material placing table 44, the workpiece is clamped on the material placing table 44 by the inner clamping block 45 and the outer clamping block 46 and is conveyed by the tool clamping and conveying device; when receiving materials, the loosening clamp assembly 47 loosens the inner clamping block 45 and the outer clamping block 46, the suction assembly 32 is put down to be close to a workpiece, and suction is carried out to transfer the workpiece to the rotary carrying device 3 again for carrying; the advantage of setting up the substep circulation is that through the mode of pressing from both sides of difference, can all detect the upper and lower surface of work piece.
Claims (8)
1. A step-by-step circulation system of a semiconductor device comprises a rotary carrying device (3) and a tool clamping and conveying device; the tool clamping and conveying device comprises an indexing rotary seat (41), a rotary table (42), a clamp base (43), a material placing table (44), an inner clamping block (45), an outer clamping block (46) and a loose clamp assembly (47); the indexing rotary seat (41) is fixedly arranged on the machine frame, and the central position of the rotary disc (42) is arranged on an output shaft of the indexing rotary seat (41); the clamp base (43) is fixedly arranged on the periphery of the turntable (42), the clamp base (43) is T-shaped, convex columns are arranged at two ends of a horizontal section of the T-shape, and circular blind holes are arranged on a vertical section of the T-shape; the material placing platform (44) is arranged above the clamp base (43), the material placing platform (44) comprises a placing part and a positioning part, the placing part is in a horizontal plane shape, and the positioning part is two vertical flanges at the top end of the placing part; the inner clamping block (45) and the outer clamping block (46) are arranged oppositely and are rotatably connected to the convex column of the clamp base (43), and the inner clamping block (45) and the outer clamping block (46) are respectively positioned at two sides of the material placing table (44); the inner clamping block (45) comprises an inclined clamping section, a vertical section and a horizontal section; the inclined clamping section is obliquely arranged and is positioned above the material placing table (44), a hinge hole is formed in the turning part of the inclined clamping section and the vertical section, and the hinge hole is rotationally connected with the convex column on the clamp base (43); a short shaft is arranged on the horizontal section, and the short shaft is matched in a round blind hole of a clamp base (43) and connected through a cylindrical spring; an arc bead is arranged below the horizontal section; the shape of the outer clamping block (46) is similar to that of the inner clamping block (45), the lower end of the outer clamping block (46) is provided with a roller (461), and the roller is in contact with the arc-shaped convex edge of the inner clamping block (45); the loose clamp assembly (47) comprises a right-angle support plate (471), a control cylinder (472) and a loose clamp head (473); the control cylinder (472) is vertically fixed on the frame through a right-angle support plate (471), the loosening clamp head (473) is fixedly arranged at the telescopic end of the control cylinder (472), a small ball is arranged on the loosening clamp head (473), the ball corresponds to the roller (461), and the position of the small ball is positioned right below the roller (461);
the rotary carrying device (3) comprises a divider (31), a suction assembly (32), a direction correcting assembly (33), a lifting assembly (34) and a protection assembly (35); the separator (31) is arranged in the middle of the rack, the suction assembly (32) is arranged at the telescopic end of the separator (31), the lifting assembly (34) is positioned right above the suction assembly (32), and the lifting assembly (34) corresponds to the suction assembly (32) one by one; the protection component (35) is arranged on the lifting component (34); the conveying tracks of the rotary conveying device (3) and the tool clamping and conveying device have an intersection part, when arriving at a transfer station, the lifting component (34) drives the suction component (32) to descend the workpiece, the workpiece is placed into the material placing table (44), and the workpiece is clamped on the material placing table (44) by the inner clamping block (45) and the outer clamping block (46);
the separator (31) is arranged in the middle of the rack, a connecting flange plate is arranged on an output shaft at the upper end of the separator (31), and a suction assembly (32) is uniformly arranged on the periphery of the connecting flange plate; direction correcting assemblies (33) are arranged right below the suction assembly (32), and three groups of the direction correcting assemblies (33) are arranged; the lifting component (34) is positioned right above the suction component (32), and the lifting component (34) corresponds to the suction component (32); the protection component (35) is arranged on the lifting component (34) and is used for protecting the internal mechanism;
the suction assembly (32) comprises a connecting strip (321), a sleeve (322), a movable rod sleeve (323), a pressing seat (324), a suction plate (325) and a spring (326); one end of the connecting bar (321) is connected with a flange on the divider (31), the other end of the connecting bar (321) is provided with a sleeve (322), the movable rod sleeve (323) is movably matched in the sleeve (322), the upper end of the movable rod sleeve (323) is fixedly provided with a butting seat (324), and the lower end of the movable rod sleeve (323) is provided with an air suction plate (325); a spring (326) is arranged in the sleeve (322), the upper end and the lower end of the spring (326) are respectively abutted against the abutting seat (324) and the sleeve (322), and the air suction plate (325) is lifted upwards;
the direction correcting component (33) comprises a bearing seat (331), a stepping motor (332), a folding support plate (333), a bottom adjusting block (334) and a height adjusting block (335); the folding support plate (333) is fixedly arranged on the frame through a bottom adjusting block (334) and can adjust the depth distance; the height adjusting block (335) is connected to the vertical section of the fold-shaped support plate (333) through a set screw, and the height can be adjusted; the stepping motor (332) is arranged on the height adjusting block (335), and the rotating end of the stepping motor (332) is provided with a bearing seat (331).
2. The step-flow system for semiconductor devices as claimed in claim 1, wherein said turntable (42) is provided with mounting slots at its periphery, said number of mounting slots being sixteen.
3. A semiconductor device step-and-flow system as claimed in claim 1, wherein said cylindrical spring has an upper end abutting against the clamp base (43) and a lower end abutting against the stub shaft.
4. A semiconductor device step-and-flow system as claimed in claim 1, 2 or 3, wherein said loose clamp assemblies (47) are provided in two groups, one at each of the pick-up and feed stations.
5. The step-flow system of semiconductor devices as claimed in claim 1, 2 or 3, wherein the heights of the upper end clamping portions of the inner and outer clamping blocks (45, 46) are flush with each other.
6. The step-and-flow system of semiconductor devices as claimed in claim 1, 2 or 3, wherein said indexing turret (41) is internally provided with a worm gear drive, and the output end is rotated in a step-by-step manner, and is divided into sixteen steps in one full circle.
7. A semiconductor device step-and-flow system as claimed in claim 1, 2 or 3, wherein the inner and outer blocks (45, 46) are provided with an inclined inward slope on the top of the side contacting the workpiece.
8. A step flow system for semiconductor devices according to claim 1, wherein the diameter of the circular blind hole of the jig base (43) is larger than the diameter of the minor axis of the inner jig (45).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910529538.4A CN110228709B (en) | 2019-06-19 | 2019-06-19 | Step-by-step circulation system of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910529538.4A CN110228709B (en) | 2019-06-19 | 2019-06-19 | Step-by-step circulation system of semiconductor device |
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| CN110228709A CN110228709A (en) | 2019-09-13 |
| CN110228709B true CN110228709B (en) | 2021-06-11 |
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| CN201910529538.4A Expired - Fee Related CN110228709B (en) | 2019-06-19 | 2019-06-19 | Step-by-step circulation system of semiconductor device |
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| CN113371408A (en) * | 2021-08-11 | 2021-09-10 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Semiconductor product size detector and detection method thereof |
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| US4915210A (en) * | 1986-07-07 | 1990-04-10 | Cmb Packaging (Uk) Limited | Positioning a can on a rotating turret |
| CA2010553A1 (en) * | 1989-02-22 | 1990-08-22 | Akira Kawaguchi | Apparatus for rotating top ends of cans |
| CN201873029U (en) * | 2010-11-23 | 2011-06-22 | 上海骏图电子科技有限公司 | Subsequent packaging test device for plastic package surface-mounted diode |
| CN103831644A (en) * | 2013-12-05 | 2014-06-04 | 中国第一汽车股份有限公司无锡油泵油嘴研究所 | Special clamp for fuel spray nozzle spray hole electrosparking |
| EP3190068A1 (en) * | 2016-01-07 | 2017-07-12 | Tyrolon-Schulnig GmbH | Support plate with integrated fixing sockets for gripping devices |
| CN109360726A (en) * | 2018-11-19 | 2019-02-19 | 东莞荣晟智能科技有限公司 | A kind of magnetic core of transformer kludge |
| CN109500465A (en) * | 2019-01-15 | 2019-03-22 | 张玉仙 | Turntable board migration device and circular capacitor production equipment |
| CN109625961A (en) * | 2019-01-25 | 2019-04-16 | 江苏信息职业技术学院 | Rotating disc type IC chip handling device vacuum distribution module and handling device |
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| CN110228709A (en) | 2019-09-13 |
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