CN110137306A - A kind of chemical etching method of the battery with transparent conductive oxide film - Google Patents
A kind of chemical etching method of the battery with transparent conductive oxide film Download PDFInfo
- Publication number
- CN110137306A CN110137306A CN201910378794.8A CN201910378794A CN110137306A CN 110137306 A CN110137306 A CN 110137306A CN 201910378794 A CN201910378794 A CN 201910378794A CN 110137306 A CN110137306 A CN 110137306A
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- Prior art keywords
- battery
- etching
- transparent conductive
- oxide film
- conductive oxide
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- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000003486 chemical etching Methods 0.000 title claims abstract description 28
- 239000007788 liquid Substances 0.000 claims abstract description 82
- 239000000126 substance Substances 0.000 claims abstract description 72
- 238000005530 etching Methods 0.000 claims abstract description 71
- 230000007723 transport mechanism Effects 0.000 claims description 11
- 239000003814 drug Substances 0.000 claims 1
- 229940079593 drug Drugs 0.000 claims 1
- 238000002955 isolation Methods 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000003028 elevating effect Effects 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
- H01L31/1888—Manufacture of transparent electrodes, e.g. TCO, ITO methods for etching transparent electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
Abstract
The invention discloses a kind of chemical etching methods of battery with transparent conductive oxide film, battery has front, the back side and four sides, is performed etching using the side of the chemical liquid to the battery to remove the transparent conductive oxide film for the side for being deposited on the battery.The chemical etching method of the battery with transparent conductive oxide film can perform etching processing to the side with transparent conductive oxide film of such as hetero-junction solar cell one kind, and the performance of the front and back of battery is not interfered with, so that the battery be made to form the isolation strip that surrounding insulate.
Description
Technical field
The present invention relates to cell manufacturing techniques fields, and in particular to a kind of change of the battery with transparent conductive oxide film
Learn lithographic method.
Background technique
In photovoltaic solar industry, the manufacture of solar battery is needed by making herbs into wool, diffusion, etching, plated film, silk-screen printing
Solar battery is being avoided just wherein the purpose etched is to remove the PN junction for being diffused into silicon wafer surrounding with this six big process is sintered
Short circuit occurs for face and the back side, and hetero-junction solar cell is also required to carry out absolutely conductive film edge when making transparent conductive film (TCO)
Edge processing, i.e., disposably by transparent conductive film layer, amorphous silicon film layer etc., delineation to fully transparent shape, formed surrounding insulation every
From band.
There are mainly two types of the lithographic methods for being directed to conventional solar cell in the prior art: one is wet etching, secondly
It is dry etching.Wherein, wet etching is placed on silicon wafer on the swing roller of etching acid tank, the liquid of control etching acid solution
Position, makes medical fluid only infiltrate the side and the back side of silicon wafer, and idler wheel drives silicon wafer by etching acid tank, completes silicon wafer side PN junction and back
The etching of face PN junction, prevents battery short circuit.Due to hetero-junction solar cell transparency conducting layer be ceramic material, be by chemistry or
The method of physical deposition is prepared, and only needs to handle the side of battery when insulating to tco layer, and etch
Lines require very thin, generally more than ten microns of width.Thus the technique of existing wet etching is not particularly suited for hetero-junctions electricity
The etching of pond transparency conducting layer.
Summary of the invention
The purpose of the present invention is being directed to the problems of the prior art, a kind of battery with transparent conductive oxide film is provided
Chemical etching method.
In order to achieve the above objectives, the technical solution adopted by the present invention is that:
A kind of chemical etching method of the battery with transparent conductive oxide film, battery have front, the back side and four sides,
Performed etching using the side of the chemical liquid to the battery with remove be deposited on the battery the side it is transparent
Electric conductive oxidation film.
Preferably, the battery vertical is placed in the chemical liquid, makes a side of the battery
It is partly or entirely immersed in the chemical liquid.
Further, the battery is immersed in the side in the chemical liquid and the liquid level phase of the chemical liquid
In parallel.
Further, the battery be immersed in the side in the chemical liquid and the chemical liquid liquid level it
Between shape have angle.
Further, the battery vertical is placed in etching box, and spacing side by side is placed with multi-disc institute in the etching box
Battery is stated, the chemical liquid is contained in etching groove, and the etching box is located in the etching groove.
Further, the etching box and/or the etching groove can be arranged to oscilaltion.
Further, the battery is placed in the etching box by the way that support device is vertical, and four of the battery
The exposed outside in the support device in the side.
Further, battery overturning is subjected to next side after the completion of one of the battery side etching
The etching in face.
Preferably, the battery levels are placed, and makes the side of the battery and is soaked with the chemical liquid
Object is in contact, to be performed etching by the chemical liquid to the side.
Further, the battery is transmitted by transport mechanism, and the object for being soaked with the chemical liquid is respectively set
In the opposite sides of the transport mechanism, the battery two sides parallel with direction of transfer simultaneously be soaked with the chemistry
The object of medical fluid is in contact, to be performed etching simultaneously to two sides by the chemical liquid.
Further, battery overturning is carried out other two after the completion of two of the battery side etchings
The etching of the side.
Further, the object for being soaked with the chemical liquid is separately positioned on four sides of the battery, the battery
Four sides simultaneously be located at one side the object for being soaked with the chemical liquid be in contact, to pass through describedization
Medical fluid is learned simultaneously to perform etching four sides.
Further, the object for being soaked with the chemical liquid can be slidably arranged in the one of the battery
Side is soaked with the object sliding of the chemical liquid when performing etching processing to the battery to carve close to the battery
After the completion of erosion processing, the object sliding of the chemical liquid is soaked with far from the battery.
Preferably, the chemical liquid is aqueous slkali.
Preferably, transparent conductive oxide film include ITO, IWO, ItiO, IMO, InbO, IgdO, IZO, IzrO, AZO,
At least one of BZO, GZO and FTO.
Due to the application of the above technical scheme, compared with the prior art, the invention has the following advantages: using of the invention
The chemical etching method of battery with transparent conductive oxide film can have electrically conducting transparent to such as hetero-junction solar cell one kind
The side of sull performs etching processing, and does not interfere with the performance of the front and back of battery, to make the electricity
Pond forms the isolation strip of surrounding insulation.
Detailed description of the invention
Attached drawing 1 is the structural schematic diagram of the chemical etching method of the battery with transparent conductive oxide film of the invention
(embodiment 1)；
Attached drawing 2 is the side view (embodiment 1) of attached drawing 1；
Attached drawing 3 is that the structural schematic diagram of the chemical etching method of the battery with transparent conductive oxide film of the invention (is implemented
Example 2)；
Attached drawing 4 is that the structural schematic diagram of the chemical etching method of the battery with transparent conductive oxide film of the invention (is implemented
Example 3)；
Attached drawing 5 is the top view (embodiment 3) of attached drawing 4.
Specific embodiment
Technical solution of the present invention is further elaborated below.
Battery 10(hereinafter referred to as battery with transparent conductive oxide film of the invention) its front and back is logical
Cross RPD PVD method and be deposited with transparent conductive oxide film, transparent conductive oxide film herein include ITO, IWO,
At least one of ItiO, IMO, InbO, IgdO, IZO, IzrO, AZO, BZO, GZO and FTO.It is thin in deposition transparent conductive oxide
In membrane process, what four sides of battery 10 can be different degrees of is deposited with transparent conductive oxide film, to will affect battery
10 performance, such as hetero-junction solar cell, it is therefore desirable to the transparent conductive oxide film of 10 4 sides of battery is removed, so that battery
10 form the isolation strip of surrounding insulation.
The present invention removes the method that the transparent conductive oxide film of four sides of battery 10 mainly uses chemical etching, i.e.,
It is performed etching using side of the chemical liquid 20 to battery 10 thin to remove the transparent conductive oxide for the side for being deposited on battery 10
Film, cannot be to the performance of the front and back of battery 10 in the transparent conductive oxide film for the side that removal is deposited on battery 10
It impacts, specifically includes following several processing methods:
Embodiment 1
As depicted in figs. 1 and 2, be placed in battery 10 is vertical in chemical liquid 20, make a side of battery 10 part or
It is fully immersed in chemical liquid 20, to be carried out by chemical liquid 20 to the transparent conductive oxide film that this side deposits
Etching.
In the embodiment, when battery 10 is vertical to be placed in chemical liquid 20, battery 10 is immersed in chemical liquid 20
Side can be parallel with the liquid level of chemical liquid 20, i.e., the side is fully immersed in chemical liquid 20, at this point, can be whole to this
A side carries out chemical etching.Alternatively, the side that battery 10 can also be made to be immersed in chemical liquid 20 and chemical liquid 20
Shape has angle between liquid level, but need to guarantee that one end of the side is immersed in chemical liquid 20, i.e. the lateral parts of battery 10
It is immersed in chemical liquid 20.
When being performed etching using side of the method in this implementation to battery 10, battery 10 is vertical to be placed in etching box 1.
Etching box 1 in can spacing side by side be placed with multi-disc battery 10, in this way, can simultaneously processing is performed etching to multi-disc battery 10, can mention
High efficiency.Spacing distance between adjacent two panels battery 10 needs to guarantee that siphonage will not be generated between this two panels battery 10.
Chemical liquid 20 is contained in etching groove 2, and etching box 1 is placed in etching groove 2.
When performing etching, it can make to etch the oscilaltion in etching groove 2 of box 1, so that chemical liquid 20 can submerge electricity
One side in pond 10 can also be such that the liquid level of chemical liquid 20 rises, so that chemical liquid 20 be enable to submerge battery 10
One side, increase the liquid level of chemical liquid 20 can be realized by way of increase etching groove 2, can also be used and etched
The method that chemical liquid 20 is injected in slot 2 is realized.
Battery 10 is placed in etching box 1 by the way that support device is vertical, when battery 10 passes through support device, battery 10
Four sides need the exposed outside in support device, in this way, convenient for being performed etching to four sides of battery 10.
Battery 10 is overturn to the etching for carrying out lower one side after the completion of the etching of a side of battery 10.Make battery 10
It when overturning, can make entirely to etch the overturning of box 1, be overturn to drive and be placed on battery 10 therein, machine can be used in the overturning of battery 10
Tool hand is overturn, and can also manually be overturn.
Embodiment 2
As shown in figure 3, it is horizontal positioned to make battery 10, and the side of battery 10 is made to be in contact with the object 3 for being soaked with chemical liquid 20,
To be performed etching by chemical liquid 20 to the side.The object of sponge one kind can be used in object 3 at this, will be changed by liquid pump
Medical fluid 20 is learned to inject in sponge.
Specifically, battery 10 is transmitted by transport mechanism 4, the object 3 for being soaked with chemical liquid 20 is separately positioned on conveyer
The opposite sides of structure 4, two sides parallel with direction of transfer of battery 10 connect with the object 3 for being soaked with chemical liquid 20 simultaneously
Touching, in this way, can be carved simultaneously to the two sides of battery 10 by chemical liquid 20 during battery 10 transmits
Erosion.
After the completion of above-mentioned two side etching of battery 10, transport mechanism 4 is again placed at after battery 10 is overturn and is uploaded
It send, transmission while performs etching other two side of battery 10.In this way, battery 10 overturns and wholeization once can be completed
Etching is learned, efficiency can be improved.The overturning of battery 10 equally both can be used manipulator and overturn, and can also manually overturn.
Embodiment 3
For the present embodiment with embodiment 2, battery 10 is horizontal positioned, and makes the side of battery 10 and be soaked with the object 3 of chemical liquid 20
It is in contact, to be performed etching by chemical liquid 20 to the side.
As shown in Figure 4 and Figure 5, the present embodiment is as different from Example 2: the object 3 for being soaked with chemical liquid 20 is set respectively
It sets in four sides of battery 10, four sides of battery 10 connect with the object 3 for being soaked with chemical liquid 20 for being located at one side simultaneously
Touching, in this way, can be performed etching simultaneously to four sides of battery 10 by chemical liquid 20.
Specifically, being soaked with the object 3 of chemical liquid 20 can be slidably arranged, battery 10 is carried out by transport mechanism 4
It transmits, the elevating mechanism 5 for driving battery 10 to go up and down is provided in transport mechanism 4.When performing etching processing to battery 10, battery
10, which pass through transport mechanism 4, is transmitted to stopping transmission behind setting position；Elevating mechanism 5 acts, and battery 10 is risen, and make battery 10
The exposed outside in elevating mechanism 5 in four sides；Positioned at 10 4 sides of battery the object 3 for being soaked with chemical liquid 20 to
It is slided close to the direction of battery 10, until four sides of battery 10 are in contact with the object 3 for being soaked with chemical liquid 20 respectively, from
And processing is performed etching to four sides of battery 10 simultaneously；After the completion of etching processing, the object 3 for being soaked with chemical liquid 20 is slided
Far from battery 10；Then drop to battery 10 by elevating mechanism 5 to fall in transport mechanism 4, then pass through transport mechanism 4
Continue to transmit.The present embodiment disposably can perform etching processing to four sides of battery 10, more efficient.
In above-mentioned three kinds of embodiments, used chemical liquid is aqueous slkali, such as KOH solution.
Chemical etching method through the invention can have transparent conductive oxide thin such as hetero-junction solar cell one kind
The side of film performs etching processing, and does not interfere with the performance of the front and back of battery, so that the battery be made to form four
The isolation strip of week insulation.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar can understand the contents of the present invention and be implemented, and it is not intended to limit the scope of the present invention, it is all according to the present invention
Equivalent change or modification made by Spirit Essence, should be covered by the scope of protection of the present invention.
Claims (15)
1. a kind of chemical etching method of the battery with transparent conductive oxide film, battery has front, the back side and four sides
Face, it is characterised in that: performed etching using the side of the chemical liquid to the battery to remove and be deposited on the battery
The transparent conductive oxide film of the side.
2. the chemical etching method of the battery according to claim 1 with transparent conductive oxide film, it is characterised in that:
The battery vertical is placed in the chemical liquid, some or all of side of the battery is immersed in
In the chemical liquid.
3. the chemical etching method of the battery according to claim 2 with transparent conductive oxide film, it is characterised in that:
It is parallel with the liquid level of the chemical liquid that the battery is immersed in the side in the chemical liquid.
4. the chemical etching method of the battery according to claim 2 with transparent conductive oxide film, it is characterised in that:
Shape has angle between the liquid level of the side and the chemical liquid that the battery is immersed in the chemical liquid.
5. the chemical etching method of the battery according to claim 2 with transparent conductive oxide film, it is characterised in that:
The battery vertical is placed in etching box, and spacing side by side is placed with battery described in multi-disc, the chemical drugs in the etching box
Liquid is contained in etching groove, and the etching box is located in the etching groove.
6. the chemical etching method of the battery according to claim 5 with transparent conductive oxide film, it is characterised in that:
The etching box and/or the etching groove can be arranged to oscilaltion.
7. the chemical etching method of the battery according to claim 5 with transparent conductive oxide film, it is characterised in that:
The battery is placed in the etching box by the way that support device is vertical, and four sides of the battery are exposed in the branch
The outside of support arrangement.
8. the chemical etching method of the battery according to claim 2 with transparent conductive oxide film, it is characterised in that:
Battery overturning is carried out to the etching of next side after the completion of the side etching of one of the battery.
9. the chemical etching method of the battery according to claim 1 with transparent conductive oxide film, it is characterised in that:
The battery levels are placed, and the side of the battery is made to be in contact with the object for being soaked with the chemical liquid, with logical
The chemical liquid is crossed to perform etching the side.
10. the chemical etching method of the battery according to claim 9 with transparent conductive oxide film, feature exist
In: the battery is transmitted by transport mechanism, and the object for being soaked with the chemical liquid is separately positioned on the transport mechanism
Opposite sides, the battery two sides parallel with direction of transfer simultaneously with the object that is soaked with the chemical liquid
It is in contact, to be performed etching simultaneously to two sides by the chemical liquid.
11. the chemical etching method of the battery according to claim 10 with transparent conductive oxide film, feature exist
In: the battery is overturn to the etching for carrying out other two side after the completion of the side etching of two of the battery.
12. the chemical etching method of the battery according to claim 9 with transparent conductive oxide film, feature exist
In: the object for being soaked with the chemical liquid is separately positioned on four sides of the battery, four sides of the battery
It is in contact simultaneously with the object for being soaked with the chemical liquid for being located at one side, by the chemical liquid while to four
A side performs etching.
13. the chemical etching method of the battery according to claim 12 with transparent conductive oxide film, feature exist
In: the object for being soaked with the chemical liquid can be slidably arranged in the side of the battery, when to the battery into
When row etching processing, the object sliding of the chemical liquid is soaked with to be soaked with after the completion of the battery, etching processing
The object sliding of the chemical liquid is far from the battery.
14. the chemical etching method of the battery according to claim 1 with transparent conductive oxide film, feature exist
In: the chemical liquid is aqueous slkali.
15. the chemical etching method of the battery according to claim 1 with transparent conductive oxide film, feature exist
In: transparent conductive oxide film includes in ITO, IWO, ItiO, IMO, InbO, IgdO, IZO, IzrO, AZO, BZO, GZO and FTO
At least one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910378794.8A CN110137306A (en) | 2019-05-08 | 2019-05-08 | A kind of chemical etching method of the battery with transparent conductive oxide film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910378794.8A CN110137306A (en) | 2019-05-08 | 2019-05-08 | A kind of chemical etching method of the battery with transparent conductive oxide film |
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|---|---|
| CN110137306A true CN110137306A (en) | 2019-08-16 |
Family
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| CN201910378794.8A Pending CN110137306A (en) | 2019-05-08 | 2019-05-08 | A kind of chemical etching method of the battery with transparent conductive oxide film |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113571603A (en) * | 2021-07-27 | 2021-10-29 | 安徽华晟新能源科技有限公司 | Preparation method of solar cell |
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