CN110087867B - 具有等离子体粒子表面涂层的柔性基底及其制备方法 - Google Patents

具有等离子体粒子表面涂层的柔性基底及其制备方法 Download PDF

Info

Publication number
CN110087867B
CN110087867B CN201780078020.2A CN201780078020A CN110087867B CN 110087867 B CN110087867 B CN 110087867B CN 201780078020 A CN201780078020 A CN 201780078020A CN 110087867 B CN110087867 B CN 110087867B
Authority
CN
China
Prior art keywords
nanometers
degrees
particles
thickness
plasmonic material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201780078020.2A
Other languages
English (en)
Chinese (zh)
Other versions
CN110087867A (zh
Inventor
姜明灿
E·K·L·Y·哈吉梅
D·L·埃尔莫雷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN110087867A publication Critical patent/CN110087867A/zh
Application granted granted Critical
Publication of CN110087867B publication Critical patent/CN110087867B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C61/00—Shaping by liberation of internal stresses; Making preforms having internal stresses; Apparatus therefor
    • B29C61/02—Thermal shrinking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
    • B29C71/0072—After-treatment of articles without altering their shape; Apparatus therefor for changing orientation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
    • B29C71/02—Thermal after-treatment
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/043—Improving the adhesiveness of the coatings per se, e.g. forming primers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/06—Coating with compositions not containing macromolecular substances
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2323/00—Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers
    • C08J2323/02—Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers not modified by chemical after treatment
    • C08J2323/04—Homopolymers or copolymers of ethene
    • C08J2323/06—Polyethene
CN201780078020.2A 2016-12-19 2017-12-12 具有等离子体粒子表面涂层的柔性基底及其制备方法 Active CN110087867B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662436072P 2016-12-19 2016-12-19
US62/436,072 2016-12-19
PCT/US2017/065735 WO2018118511A1 (en) 2016-12-19 2017-12-12 Flexible substrate having a plasmonic particle surface coating and method of making the same

Publications (2)

Publication Number Publication Date
CN110087867A CN110087867A (zh) 2019-08-02
CN110087867B true CN110087867B (zh) 2021-07-09

Family

ID=60972350

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780078020.2A Active CN110087867B (zh) 2016-12-19 2017-12-12 具有等离子体粒子表面涂层的柔性基底及其制备方法

Country Status (6)

Country Link
US (1) US11479844B2 (ja)
EP (1) EP3554808A1 (ja)
JP (1) JP7115807B2 (ja)
KR (1) KR102351205B1 (ja)
CN (1) CN110087867B (ja)
WO (1) WO2018118511A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111999784B (zh) * 2020-09-07 2024-03-22 科竟达生物科技有限公司 聚合物用作生物芯片的基底的用途
CN114324438B (zh) * 2020-10-10 2023-07-21 北京大学 一种室温纳米谷极化荧光的等离激元激发方法
CN113237866B (zh) * 2021-05-27 2023-11-21 昆明理工大学 一种固态表面增强拉曼散射基底及其制备方法和应用

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63280625A (ja) * 1987-05-14 1988-11-17 Kanto Auto Works Ltd 合成樹脂シ−ト及びその製造方法
CN1177577A (zh) * 1996-04-25 1998-04-01 Ppg工业公司 带涂层的制品
CN101511543A (zh) * 2006-09-11 2009-08-19 3M创新有限公司 具有机械紧固件的磨料制品
CN102421256A (zh) * 2010-09-24 2012-04-18 光宏精密股份有限公司 非导电性载体形成电路结构的制造方法
CN102883870A (zh) * 2010-05-03 2013-01-16 3M创新有限公司 制备纳米结构的方法
CN103189164A (zh) * 2010-11-01 2013-07-03 3M创新有限公司 用于制备成形陶瓷磨粒的激光法、成形陶瓷磨粒以及磨料制品
CN103328686A (zh) * 2010-11-16 2013-09-25 凯普卓尼克技术公司 采用等离子体聚合预处理对物件的金属涂覆

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY114512A (en) * 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
US7738096B2 (en) * 2004-10-21 2010-06-15 University Of Georgia Research Foundation, Inc. Surface enhanced Raman spectroscopy (SERS) systems, substrates, fabrication thereof, and methods of use thereof
US20060148104A1 (en) * 2004-10-29 2006-07-06 Massachusetts Institute Of Technology Detection of ion channel or receptor activity
US7274458B2 (en) * 2005-03-07 2007-09-25 3M Innovative Properties Company Thermoplastic film having metallic nanoparticle coating
US8080073B2 (en) 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
WO2010132612A2 (en) * 2009-05-13 2010-11-18 The Regents Of The University Of California Metal-coated shrinkable polystyrene and methods for using same
KR101117220B1 (ko) 2010-02-11 2012-03-20 연세대학교 산학협력단 플라즈모닉 광학 장치의 병렬 프로브의 제조방법
US8771801B2 (en) 2011-02-16 2014-07-08 3M Innovative Properties Company Electrostatic abrasive particle coating apparatus and method
US9922746B2 (en) * 2013-03-01 2018-03-20 The Regents Of The University Of Michigan Stretchable composite conductors for flexible electronics, stretchable plasmonic devices, optical filters, and implantable devices and methods for manufacture thereof
KR101448111B1 (ko) * 2013-09-17 2014-10-13 한국기계연구원 표면 증강 라만 분광용 기판 및 이의 제조방법
WO2016031140A1 (ja) 2014-08-27 2016-03-03 富士フイルム株式会社 光電場増強デバイス
KR101621437B1 (ko) 2014-09-03 2016-05-19 한국광기술원 다층 박막 구조와 나노 구조가 결합된 플라즈모닉 센서
US20180162078A1 (en) 2015-07-08 2018-06-14 3M Innovative Properties Company Article and method of making the same

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63280625A (ja) * 1987-05-14 1988-11-17 Kanto Auto Works Ltd 合成樹脂シ−ト及びその製造方法
CN1177577A (zh) * 1996-04-25 1998-04-01 Ppg工业公司 带涂层的制品
CN101511543A (zh) * 2006-09-11 2009-08-19 3M创新有限公司 具有机械紧固件的磨料制品
CN102883870A (zh) * 2010-05-03 2013-01-16 3M创新有限公司 制备纳米结构的方法
CN102421256A (zh) * 2010-09-24 2012-04-18 光宏精密股份有限公司 非导电性载体形成电路结构的制造方法
CN103189164A (zh) * 2010-11-01 2013-07-03 3M创新有限公司 用于制备成形陶瓷磨粒的激光法、成形陶瓷磨粒以及磨料制品
CN103328686A (zh) * 2010-11-16 2013-09-25 凯普卓尼克技术公司 采用等离子体聚合预处理对物件的金属涂覆

Also Published As

Publication number Publication date
EP3554808A1 (en) 2019-10-23
KR102351205B1 (ko) 2022-01-17
JP7115807B2 (ja) 2022-08-09
JP2020514108A (ja) 2020-05-21
KR20190095309A (ko) 2019-08-14
CN110087867A (zh) 2019-08-02
US20200087775A1 (en) 2020-03-19
US11479844B2 (en) 2022-10-25
WO2018118511A1 (en) 2018-06-28

Similar Documents

Publication Publication Date Title
CN110087867B (zh) 具有等离子体粒子表面涂层的柔性基底及其制备方法
JP6788013B2 (ja) 接着剤と１つ又は複数のナノファイバーシートとを備える複数層複合材
Li et al. High‐performance transparent and flexible triboelectric nanogenerators based on PDMS‐PTFE composite films
Wu et al. Electrospun ZnO nanowires as gas sensors for ethanol detection
US8794582B2 (en) Carbon nanotube film supporting structure and method for using same
KR102342005B1 (ko) 그래핀이 코팅된 전자 부품
Kunwar et al. Various silver nanostructures on sapphire using plasmon self-assembly and dewetting of thin films
Bachan et al. A comparative investigation on the structural, optical and electrical properties of SiO 2–Fe 3 O 4 core–shell nanostructures with their single components
JP6994390B2 (ja) 物品及びその製造方法
KR101468334B1 (ko) 탄소 나노입자가 배열된 전도성이 있는 고투과도·초발수성 기판의 제조방법
Saviers et al. Roll‐to‐Roll Production of Graphitic Petals on Carbon Fiber Tow
Chhetri et al. Flexible graphite nanoflake/polydimethylsiloxane nanocomposites with promising solar–thermal conversion performance
Banerjee et al. Enhancement of field emission and hydrophobic properties of silicon nanowires by chemical vapor deposited carbon nanoflakes coating
TW201823035A (zh) 包含奈米體層及塗層（較佳透明塗層）之複合物
Kim et al. Enhancing solar radiant heat transfer using supersonically sprayed rGO/AgNW textured surfaces
Zhigunov et al. Single-walled carbon nanotube membranes as non-reflective substrates for nanophotonic applications
CN108699708A (zh) 石墨烯以及石墨烯的制法
Pooja et al. Annealing effect of glancing angle electron beam deposited TiO2/In2O3 nanowires array on surface wettability
Rymarczyk et al. The influence of technological PVD process parameters on the topography, crystal and molecular structure of nanocomposite films containing palladium nanograins
Chiba et al. Improved Performance of Heat Source Free Water‐Floating Carbon Nanotube Thermoelectric Generators Controlling Wettability Using Atmospheric‐Pressure Plasma Jet and Waterproof Spray
Humud et al. Nanostructured polyaniline thin films prepared by plasma polymerization at atmospheric pressure
CN108369295B (zh) 光学制品上的硬质多涂层
Chen et al. Tribological thermostability of carbon film with vertically aligned graphene sheets
US20170130326A1 (en) Evaporating source for vacuum evaporation
US20170292184A1 (en) Evaporating source for vacuum evaporation and vacuum evaporation apparatus

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant