CN110018412B - Substrate inspection device with adjustable carrying mechanism - Google Patents
Substrate inspection device with adjustable carrying mechanism Download PDFInfo
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- CN110018412B CN110018412B CN201910397994.8A CN201910397994A CN110018412B CN 110018412 B CN110018412 B CN 110018412B CN 201910397994 A CN201910397994 A CN 201910397994A CN 110018412 B CN110018412 B CN 110018412B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 228
- 239000000758 substrate Substances 0.000 title claims abstract description 91
- 238000007689 inspection Methods 0.000 title claims abstract description 88
- 239000002184 metal Substances 0.000 claims description 8
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 230000007723 transport mechanism Effects 0.000 abstract description 51
- 238000005086 pumping Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0425—Test clips, e.g. for IC's
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Tests Of Electronic Circuits (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
A substrate inspection apparatus with an adjustable carrying mechanism is provided, which can carry and inspect circuit substrates of different sizes conveniently. The substrate inspection apparatus with an adjustable conveying mechanism of the invention can electrically inspect the wiring of a circuit substrate, and comprises: inspecting the fixture; a moving mechanism for moving the inspection jig; a carrying mechanism for carrying the circuit substrate; a holding mechanism for holding the circuit substrate at the inspection position; a control unit for controlling at least one of the moving mechanism, the conveying mechanism, and the holding mechanism; and a display unit for displaying a result of the inspection of the circuit board, wherein the transport mechanism has a transport mechanism fixing plate, a first transport arm mechanism and a second transport arm mechanism, the first transport arm mechanism and the second transport arm mechanism have a circuit board holding unit, and at least one of the first and second transport arm mechanisms is connected to the transport mechanism fixing plate so as to be capable of changing its position in a direction intersecting with a thickness direction of the transport mechanism fixing plate.
Description
Technical Field
The present invention relates to a substrate inspection apparatus, and more particularly, to a substrate inspection apparatus with an adjustable conveyance mechanism.
Background
Conventionally, when electrical inspection such as short circuit and disconnection is performed on a circuit board, an operator needs to sequentially place the circuit board at an inspection position and perform electrical inspection on the circuit board by an inspection jig. With the improvement of production efficiency and integration of devices, the conventional manual substrate conveying operation is replaced, the circuit substrates to be electrically inspected are picked up from one substrate placing frame or the previous process by the conveying mechanism, are sequentially placed at the inspection position, and are conveyed to another substrate placing frame or the next process after the inspection is finished.
In practice, there are cases where circuit boards to be electrically inspected have a plurality of sizes, and particularly there are cases where circuit boards of different sizes have very different sizes and shapes, and therefore, conventionally, a plurality of conveying mechanisms of different sizes are often provided to convey circuit boards of different sizes.
However, there are cases where the circuit boards requiring electrical inspection have a very large number of sizes, and in such cases, the number of transport mechanisms required to be prepared for transporting circuit boards of different sizes is greatly increased, which leads to a significant increase in equipment cost and a reduction in efficiency of handling, debugging, management, and the like of the transport mechanisms.
Disclosure of Invention
The present invention has been made to solve the above problems, and an object of the present invention is to provide a substrate inspection apparatus with an adjustable carrying mechanism, which can carry and inspect circuit substrates of different sizes conveniently.
In order to achieve the above object, the present invention provides a substrate inspection apparatus with an adjustable conveyance mechanism, which can electrically inspect a plurality of wirings formed on a circuit substrate, the apparatus comprising: inspecting the fixture; a moving mechanism for moving the inspection jig; a carrying mechanism for carrying the circuit board; a holding mechanism for holding the circuit substrate at an inspection position; a control unit for controlling at least one of the moving mechanism, the conveying mechanism, and the holding mechanism; and a display unit for displaying a result of the inspection of the circuit board, wherein the transport mechanism includes a transport mechanism fixing plate, a first transport arm mechanism and a second transport arm mechanism, the first transport arm mechanism and the second transport arm mechanism each include a circuit board holding unit, and at least one of the first transport arm mechanism and the second transport arm mechanism is connected to the transport mechanism fixing plate so as to be capable of changing a position in a direction intersecting a thickness direction of the transport mechanism fixing plate.
According to the substrate inspection apparatus with an adjustable transport mechanism of the present invention, the transport mechanism has a transport mechanism fixing plate, a first transport arm mechanism and a second transport arm mechanism, the first transport arm mechanism and the second transport arm mechanism have circuit substrate holding portions, respectively, at least one of the first transport arm mechanism and the second transport arm mechanism is connected to the transport mechanism fixing plate so as to be capable of changing its position in a direction intersecting with a thickness direction of the transport mechanism fixing plate, therefore, by changing the position of at least one of the first transfer arm mechanism and the second transfer arm mechanism in the direction intersecting the thickness direction of the transfer mechanism fixing plate, it is possible to easily move the circuit board holding portion of the first transfer arm mechanism and/or the second transfer arm mechanism to an appropriate position in accordance with the circuit boards of different sizes, and to transfer and inspect the circuit boards of different sizes.
In the substrate inspection apparatus with an adjustable transfer mechanism according to the present invention, it is preferable that at least one of the first transfer arm mechanism and the second transfer arm mechanism is detachably fixed to the transfer mechanism fixing plate.
According to the substrate inspection apparatus with an adjustable transport mechanism of the present invention, as compared with the case where the first transport arm mechanism and the second transport arm mechanism are not detachable from the transport mechanism fixing plate, it is possible to more flexibly change the position of the first transport arm mechanism and/or the second transport arm mechanism in the direction intersecting the thickness direction of the transport mechanism fixing plate, that is, it is possible to quickly adjust the position of the first transport arm mechanism and/or the second transport arm mechanism, and it is easy to avoid difficulty in work due to the blockage of one of the first transport arm mechanism and the second transport arm mechanism or the blockage of the other when the position of the one of the first transport arm mechanism and the second transport arm mechanism is changed. Further, the first transfer arm mechanism or the second transfer arm mechanism can be used alone to transfer the circuit board according to the circuit board of different sizes.
In the substrate inspection apparatus with an adjustable transfer mechanism according to the present invention, it is preferable that the first transfer arm mechanism includes an air cylinder for driving the first transfer arm to move in a vertical direction, and at least two first transfer arms, one end of each of the first transfer arms is connected to the air cylinder, and a first suction pad for sucking the circuit substrate, which constitutes the circuit substrate holding portion, is provided at the other end of each of the first transfer arms.
According to the substrate inspection device with the adjustable conveying mechanism, when the circuit substrate is conveyed only by the first conveying arm mechanism, the whole conveying mechanism can be kept still in the vertical direction, and the two first conveying arms are driven by the air cylinders to move in the vertical direction.
In the substrate inspection apparatus with an adjustable transport mechanism according to the present invention, it is preferable that the second transport arm mechanism is detachably attached to the transport mechanism fixing plate by magnetic attraction.
According to the substrate inspection apparatus with an adjustable transport mechanism of the present invention, since the second transport arm mechanism can be easily attached to and detached from the transport mechanism fixing plate, as compared with the case where the second transport arm mechanism is fixed to the transport mechanism fixing plate by a mechanical connection structure such as a screw or a nut, the work efficiency can be improved when the second transport arm mechanism needs to be changed in position.
In the substrate inspection apparatus with an adjustable transfer mechanism according to the present invention, it is preferable that the transfer mechanism fixing plate is a metal plate capable of attracting a magnet, the second transfer arm mechanism includes a plurality of second transfer arms, one end of each of the second transfer arms includes a magnet, and the other end of each of the second transfer arms includes a second suction pad for attracting the circuit substrate, the second suction pad constituting the circuit substrate holding portion.
According to the substrate inspection device with the adjustable conveying mechanism, the conveying mechanism fixing plate is a metal plate capable of adsorbing the magnet, and the magnet is arranged at one end of the second conveying arm, so that the fixing position of the second conveying arm (namely the second conveying arm mechanism) relative to the conveying mechanism fixing plate can be conveniently adjusted within the plate surface range of the conveying mechanism fixing plate, and circuit substrates with more sizes can be conveniently conveyed and inspected.
In the substrate inspection apparatus with an adjustable conveyance mechanism according to the present invention, it is preferable that the conveyance mechanism has an air passage, and both the first chuck and the second chuck are in communication with the air passage.
According to the substrate inspection apparatus with the adjustable transport mechanism of the present invention, the first suction pad and the second suction pad can suck the circuit substrate by adjusting the air pressure, so that the circuit substrate can be sucked more reliably, and the damage of the circuit substrate caused by the suction operation of the transport mechanism in the vertical direction can be prevented.
In the substrate inspection apparatus with an adjustable transport mechanism according to the present invention, it is preferable that the transport mechanism fixing plate further includes a mounting portion for connecting to a main body portion of the substrate inspection apparatus with an adjustable transport mechanism, and the mounting portion is located on one side in a direction perpendicular to a thickness direction of the transport mechanism fixing plate.
According to the substrate inspection apparatus with the adjustable conveying mechanism of the present invention, the mounting portion connected to the main body portion of the substrate inspection apparatus is positioned on the side of the fixing plate of the conveying mechanism, so that the position of the conveying mechanism relative to the main body portion of the substrate inspection apparatus can be adjusted in different mounting orientations, and the substrate inspection apparatus can be applied to conveying and inspection of circuit substrates of more sizes.
In the substrate inspection apparatus with an adjustable transport mechanism according to the present invention, it is preferable that the transport mechanism fixing plate further includes a plurality of through grooves in an outer edge portion thereof, and the first transport arm mechanism is fixable at an arbitrary position in the through grooves.
According to the substrate inspection apparatus with an adjustable transfer mechanism of the present invention, the fixed position of the first transfer arm mechanism can be appropriately guided by the through groove, and when the first transfer arm mechanism includes a plurality of first transfer arms, the plurality of first transfer arms can be easily arranged in a balanced manner.
In the substrate inspection apparatus with an adjustable transfer mechanism according to the present invention, it is preferable that the second transfer arm is vertically compressible.
According to the substrate inspection apparatus with the adjustable transport mechanism of the present invention, the circuit substrate can be sucked by the second suction pad in a state where the second transport arm has appropriate elasticity in the vertical direction, and damage to the circuit substrate due to the suction operation of the transport mechanism in the vertical direction can be prevented.
In the substrate inspection apparatus with an adjustable transfer mechanism according to the present invention, it is preferable that the second transfer arm mechanism further includes a position sensor for detecting a compression amount of the second transfer arm in a vertical direction.
According to the substrate inspection apparatus with an adjustable transfer mechanism of the present invention, it is easy to determine whether or not the second transfer arm is in a position capable of properly holding the circuit substrate based on the detection signal of the position sensor.
(effect of the invention)
According to the present invention, since the transfer mechanism includes the transfer mechanism fixing plate, the first transfer arm mechanism and the second transfer arm mechanism each have the circuit board holding part, and at least one of the first transfer arm mechanism and the second transfer arm mechanism is connected to the transfer mechanism fixing plate so as to be capable of changing its position in a direction intersecting with the thickness direction of the transfer mechanism fixing plate, it is possible to easily move the circuit board holding part of the first transfer arm mechanism and/or the second transfer arm mechanism to an appropriate position in accordance with the circuit boards of different sizes by changing the position of at least one of the first transfer arm mechanism and the second transfer arm mechanism in a direction intersecting with the thickness direction of the transfer mechanism fixing plate, and to transfer and inspect the circuit boards of different sizes.
Drawings
Fig. 1 is a side view schematically showing the overall structure of a substrate inspection apparatus in which a conveyance mechanism is adjustable according to an embodiment of the present invention.
Fig. 2 is a side view schematically showing the structure of a conveyance mechanism in the substrate inspection apparatus with an adjustable conveyance mechanism according to the embodiment of the present invention.
Fig. 3 is a perspective view schematically showing the structure of a conveyance mechanism in the substrate inspection apparatus with an adjustable conveyance mechanism according to the embodiment of the present invention.
(symbol description)
1 substrate inspection device with adjustable carrying mechanism
10 inspection jig
11 head of clamp
12 electrode mounting part
20 moving mechanism
21 jig mounting part
30 conveying mechanism
31 first transfer arm mechanism
311 circuit board holding part
312 cylinder
313 first carrying arm
313a one end of the first carrying arm
313b the other end of the first carrying arm
32 second carrier arm mechanism
321 circuit board holding part
322 second transfer arm
322a one end of the second carrying arm
322b other end of the second carrying arm
33 conveying mechanism fixing plate
331 mounting part
332 run through the groove
40 holding mechanism
50 control part
60 display part
100 circuit board
ZT body section
Detailed Description
Next, a substrate inspection apparatus with an adjustable transport mechanism according to an embodiment of the present invention will be described with reference to the drawings, in which fig. 1 is a side view schematically showing the entire structure of the substrate inspection apparatus with an adjustable transport mechanism according to the embodiment of the present invention, fig. 2 is a side view schematically showing the structure of the transport mechanism in the substrate inspection apparatus with an adjustable transport mechanism according to the embodiment of the present invention, and fig. 3 is a perspective view schematically showing the structure of the transport mechanism in the substrate inspection apparatus with an adjustable transport mechanism according to the embodiment of the present invention.
For convenience of explanation, the vertical direction in fig. 1 and the like is assumed to be a vertical direction, and the direction perpendicular to the vertical direction in fig. 1 and the like is assumed to be a horizontal direction.
(Structure of substrate inspecting apparatus with Adjustable carrying mechanism)
As shown in fig. 1, the substrate inspection apparatus 1 with an adjustable conveyance mechanism, which can electrically inspect the wiring of a circuit substrate 100 on which a plurality of wirings are formed, includes: the inspection jig 10; a moving mechanism 20, the moving mechanism 20 being used for moving the inspection jig 10; a conveying mechanism 30, the conveying mechanism 30 being used for conveying the circuit substrate 100; a holding mechanism 40, the holding mechanism 40 holding the circuit substrate 100 at the inspection position; a control unit 50 for controlling at least one of the moving mechanism 20, the conveying mechanism 30, and the holding mechanism 40 (in the present embodiment, three of the moving mechanism 20, the conveying mechanism 30, and the holding mechanism 40 are controlled); and a display unit 60, the display unit 60 displaying the result of the inspection of the circuit board 100.
Here, the circuit board 100 may be a flexible board or a rigid board.
In the present embodiment, the circuit substrate 100 is a flexible substrate having a substantially rectangular shape when viewed in the vertical direction.
Further, the inspection jig 10 includes a jig head portion 11 and an electrode mounting portion 12, wherein the jig head portion 11 includes a plurality of probes, and the electrode mounting portion 12 is detachably connected to the jig head portion 11 and is mounted with an electrode. In addition, the clamp head may be a non-contact clamp head.
In the present embodiment, the inspection jig 10 includes an upper inspection jig and a lower inspection jig, and the upper inspection jig and the lower inspection jig may be of the same configuration or of different configurations.
Further, the moving mechanism 20 has a jig mounting portion 21, and the jig mounting portion 21 is used for mounting the inspection jig 10 (specifically, the electrode mounting portion 12 on which the inspection jig 10 is mounted).
In the present embodiment, the moving mechanism 20 drives the inspection jig 10 to move, for example, in the left-right direction in fig. 1, and the jig mounting portion 21 includes an upper jig mounting portion and a lower jig mounting portion corresponding to the inspection jig 10, and the upper jig mounting portion and the lower jig mounting portion have the same configuration.
As shown in fig. 2 and 3, the transport mechanism 30 includes a transport mechanism fixing plate 33, and a first transport arm mechanism 31 and a second transport arm mechanism 32, wherein the first transport arm mechanism 31 and the second transport arm mechanism 32 include circuit board holding portions 311 and 321, respectively, and at least one of the first transport arm mechanism 31 and the second transport arm mechanism 32 is connected to the transport mechanism fixing plate 33 so as to be capable of changing its position in a direction intersecting with the thickness direction (coinciding with the vertical direction) of the transport mechanism fixing plate 33.
In the present embodiment, the transport mechanism 30 is provided in the main body ZT of the substrate inspection apparatus whose transport mechanism is adjustable so that the entire body can move in the vertical direction and the horizontal direction, and both the first transport arm mechanism 31 and the second transport arm mechanism 32 are connected to the transport mechanism fixing plate 33 so that the positions thereof can be changed in the horizontal direction perpendicular to the thickness direction of the transport mechanism fixing plate 33.
As shown in fig. 2, the first transfer arm mechanism 31 includes an air cylinder 312 for driving the first transfer arm 313 to move in the vertical direction, and at least two first transfer arms 313, wherein one end 313a (upper end in fig. 2) of each first transfer arm 313 is connected to the air cylinder 312, and a first suction pad for sucking the circuit board 100 constituting the circuit board holding portion 311 is provided at the other end 313b (lower end in fig. 2) of each first transfer arm 313.
As shown in fig. 2, the second transfer arm mechanism 32 is detachably fixed to the transfer mechanism fixing plate 33 by magnetic attraction.
In the present embodiment, the second transfer arm mechanism 32 includes a plurality of second transfer arms 322, the plurality of second transfer arms 322 are horizontally positioned between at least two first transfer arms 313, one end 322a (upper end in fig. 2) of each second transfer arm 322 includes a magnet (not shown), and the other end 322b (lower end in fig. 2) of each second transfer arm 322 includes a second chuck for sucking the circuit board 100, which constitutes the circuit board holding portion 321 (the second chuck is positioned higher than the first chuck in the initial state, but is not limited thereto). The first transfer arm 313 may be positioned on one side of the transfer mechanism fixing plate 33 and the second transfer arm 322 may be positioned on the other side of the transfer mechanism fixing plate 33 in the horizontal direction, and other arrangement may be designed as necessary.
Also, the second carrying arm 322 can be compressed in the vertical direction. Specifically, the second transfer arm 322 includes a cylindrical portion, a rod portion, and a coil spring, and the second suction pad for sucking the circuit board 100 is provided at the lower end of the cylindrical portion, the rod portion is inserted into the cylindrical portion, the coil spring is inserted through the rod portion, the upper end of the coil spring abuts against the transfer mechanism fixing plate 33, and the lower end of the coil spring abuts against the upper end of the cylindrical portion.
Further, although not shown, the second transfer arm mechanism 32 further includes a position sensor for detecting a compression amount of the second transfer arm 322 in the vertical direction.
The conveying mechanism 30 has an air passage, although not shown, and the first and second suction pads are both communicated with the air passage and communicated with a vacuum-pumping device, not shown.
The conveyance mechanism fixing plate 33 is a metal plate capable of attracting the magnet. The metal plate referred to herein may be a plate-like member made of a metal material, or may be a plate-like member made of another material that contains a metal component and can adsorb the magnet. The conveying mechanism fixing plate may be a magnet, and one end (upper end in fig. 2) of the second conveying arm may be a metal member capable of attracting the magnet.
In the present embodiment, as shown in fig. 2 and 3, the conveying mechanism fixing plate 33 is substantially rectangular when viewed in the vertical direction.
Further, as shown in fig. 1 and 2, the conveyance mechanism fixing plate 33 further has a mounting portion 331 for connection with the main body portion ZT of the substrate inspection apparatus in which the conveyance mechanism is adjustable, and the mounting portion 331 is located on one side in a direction perpendicular to the thickness direction of the conveyance mechanism fixing plate 33.
As shown in fig. 2, the conveying mechanism fixing plate 33 further includes a plurality of through grooves 332 in the outer edge portion, and the first conveying arm mechanism 31 can be fixed to any position in the through grooves 332. Specifically, although not shown, the upper end of the cylinder 312 of the first transfer arm mechanism 31 has a flange, the bottom of the through groove 332 has a catching groove into which the flange is caught, and the first transfer arm mechanism 31 can be positioned at an arbitrary position in the through groove 332 by sliding the flange along the catching groove.
In the present embodiment, the through groove 332 extends in the circumferential direction substantially parallel to the outer edge portion, but the present invention is not limited to this.
As shown in fig. 1, the holding mechanism 40 has a claw capable of clamping and releasing the circuit board 100.
(example of inspecting a circuit board by means of a substrate inspection apparatus with an adjustable carrying mechanism)
First, it is determined whether to use the first and second transfer arm mechanisms 31 and 32 simultaneously or to use the first and second transfer arm mechanisms 31 and 32 alone, based on the size of the circuit substrate 100 to be inspected, and the position of the first and/or second transfer arm mechanisms 31 and 32 in the horizontal direction with respect to the transfer mechanism fixing plate 33 is appropriately adjusted.
Next, the circuit substrate 100 is sucked and held by the first suction pads and/or the second suction pads of the first transfer arm mechanism 31 and/or the second transfer arm mechanism 32 by vacuum pumping through the gas passage by the vacuum pumping equipment (for example, the circuit substrate 100 sucked by the two first suction pads is sucked by the two first suction pads of the first transfer arm mechanism 31, and in this state, the circuit substrate 100 sucked by the two first suction pads is raised by the air cylinder 312 until the upper surface of the circuit substrate 100 comes into contact with the second suction pads of the second transfer arm mechanism 32 and is sucked by the second suction pads).
Next, the circuit board 100 is conveyed to a predetermined inspection position by the conveying mechanism 30, and the circuit board 100 is held by the holding mechanism 40.
Then, the evacuation device is stopped to evacuate the gas path, so that the first suction pad and the second suction pad release the suction holding of the circuit board 100.
Then, the inspection jig 10 is moved toward the circuit board 100 by the moving mechanism 20 so that the probe of the inspection jig 10 is brought into contact with a predetermined wiring on the circuit board 100.
Thus, whether or not the circuit board 100 meets the requirements can be checked based on the display information of the display unit 60.
(main technical effects of the present embodiment)
According to the present embodiment, the transport mechanism 30 includes the transport mechanism fixing plate 33, the first transport arm mechanism 31, and the second transport arm mechanism 32, the first transport arm mechanism 31 and the second transport arm mechanism 32 include the circuit board holding portions 311, 321, respectively, at least one of the first transport arm mechanism 31 and the second transport arm mechanism 32 is connected to the transport mechanism fixing plate 33 so as to be capable of changing its position in a direction intersecting the thickness direction of the transport mechanism fixing plate 33, therefore, by changing the position of at least one of the first transfer arm mechanism 31 and the second transfer arm mechanism 32 in the direction intersecting the thickness direction of the transfer mechanism fixing plate 33, the circuit board holding portions 311 and 321 of the first transfer arm mechanism 31 and/or the second transfer arm mechanism 32 can be moved to appropriate positions according to the circuit boards 100 of different sizes, and the circuit boards 100 of different sizes can be transferred and inspected.
The present invention is described above by way of example with reference to the accompanying drawings, and it is to be understood that the specific implementations of the present invention are not limited to the above-described embodiments.
For example, in the above embodiment, the first transfer arm mechanism 31 has the air cylinder 312 and at least two first transfer arms 313, but the present invention is not limited to this, and the specific form of the first transfer arm mechanism 31 may be appropriately changed as needed, and for example, the same structure as the second transfer mechanism 32 may be adopted.
In the above embodiment, the second transfer arm mechanism 32 has the plurality of second transfer arms 322, one end 322a of each second transfer arm 322 has a magnet, and the other end 322b of each second transfer arm 322 has the second suction pad for sucking the circuit board 100, which constitutes the circuit board holding portion 321, but the present invention is not limited to this, and the specific form of the second transfer arm mechanism 32 may be appropriately changed as necessary, and for example, the same structure as the first transfer mechanism 31 may be adopted, and in this case, the transfer mechanism fixing plate 33 does not need to be a metal plate capable of sucking the magnet.
In the above embodiment, the shape of the conveyance mechanism fixing plate 33 is not limited, and can be appropriately selected as needed.
It should be understood that the present invention can freely combine the respective configurations in the embodiments, or appropriately change or omit the respective configurations in the embodiments within the scope thereof.
Claims (8)
1. A substrate inspection apparatus with an adjustable conveyance mechanism, which can electrically inspect a plurality of wirings formed on a circuit substrate, comprising:
inspecting the fixture;
a moving mechanism for moving the inspection jig;
a carrying mechanism for carrying the circuit board;
a holding mechanism for holding the circuit substrate at an inspection position;
a control unit for controlling at least one of the moving mechanism, the conveying mechanism, and the holding mechanism; and
a display unit for displaying a result of the inspection of the circuit board,
the substrate inspection apparatus with the adjustable carrying mechanism is characterized in that,
the carrying mechanism is provided with a carrying mechanism fixing plate, a first carrying arm mechanism and a second carrying arm mechanism,
the first transfer arm mechanism and the second transfer arm mechanism each have a circuit board holding portion,
at least one of the first and second transfer arm mechanisms is connected to the transfer mechanism fixing plate so as to be capable of changing its position in a direction intersecting with a thickness direction of the transfer mechanism fixing plate,
the conveying mechanism fixing plate is also provided with a mounting part for connecting with the main body part of the substrate inspection device with the adjustable conveying mechanism,
the mounting portion is located on one side in a direction perpendicular to a thickness direction of the conveying mechanism fixing plate and is offset from a center of the conveying mechanism fixing plate,
the second carrying arm mechanism is fixed on the carrying mechanism fixing plate in a detachable mode through magnetic attraction.
2. The substrate inspection apparatus with adjustable conveyance mechanism according to claim 1,
the first carrying arm mechanism is detachably fixed to the carrying mechanism fixing plate.
3. The substrate inspection apparatus with adjustable conveyance mechanism according to claim 1,
the first carrying arm mechanism has a cylinder and at least two first carrying arms,
the air cylinder is used for driving the first carrying arm to move along the vertical direction,
one end of the first carrying arm is connected with the air cylinder,
a first suction pad for sucking the circuit board is provided at the other end of the first transfer arm, the first suction pad constituting the circuit board holding unit.
4. The substrate inspection apparatus with adjustable conveyance mechanism according to claim 3,
the fixed plate of the carrying mechanism is a metal plate capable of adsorbing a magnet,
the second transfer arm mechanism has a plurality of second transfer arms,
one end of the second carrying arm is provided with a magnet,
a second suction pad for sucking the circuit board is provided at the other end of the second transfer arm, and the second suction pad constitutes the circuit board holding unit.
5. The substrate inspection apparatus with adjustable conveyance mechanism according to claim 4,
the carrying mechanism is provided with an air path,
the first sucker and the second sucker are both communicated with the gas circuit.
6. The substrate inspection apparatus with adjustable conveyance mechanism according to claim 1,
the conveying mechanism fixing plate further has a plurality of through grooves in an outer edge portion,
the first carrier arm mechanism can be fixed to any position in the through groove.
7. The substrate inspection apparatus with adjustable conveyance mechanism according to claim 4,
the second handling arm is compressible in a vertical direction.
8. The substrate inspection apparatus with adjustable conveyance mechanism according to claim 7,
the second transfer arm mechanism further has a position sensor to detect a compression amount of the second transfer arm in the vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910397994.8A CN110018412B (en) | 2019-05-14 | 2019-05-14 | Substrate inspection device with adjustable carrying mechanism |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910397994.8A CN110018412B (en) | 2019-05-14 | 2019-05-14 | Substrate inspection device with adjustable carrying mechanism |
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| CN110018412A CN110018412A (en) | 2019-07-16 |
| CN110018412B true CN110018412B (en) | 2021-01-15 |
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| CN111923991A (en) * | 2020-08-31 | 2020-11-13 | 刘德炳 | Six-degree-of-freedom convenient labor-saving free carrying mechanism for large-sized plates |
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| JP2013164381A (en) * | 2012-02-13 | 2013-08-22 | Nidec-Read Corp | Alignment method of substrate inspection device, and substrate inspection device |
| CN106044209A (en) * | 2016-07-20 | 2016-10-26 | 无锡先导智能装备股份有限公司 | Distance-adjustable battery piece carrying device |
| CN106629065A (en) * | 2016-12-28 | 2017-05-10 | 佛山市华普瑞联机电科技有限公司 | Ceramic substrate vacuum carrying device |
| CN206848312U (en) * | 2017-04-28 | 2018-01-05 | 日本电产理德机器装置(浙江)有限公司 | Gauging fixture and the check device for possessing the gauging fixture |
| CN106932615B (en) * | 2017-04-28 | 2024-02-13 | 尼得科精密检测设备(浙江)有限公司 | Inspection jig and inspection apparatus provided with the same |
| CN109030509B (en) * | 2018-07-02 | 2021-03-26 | 京东方科技集团股份有限公司 | Detection device, color film repair equipment and detection method |
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| CN110018412A (en) | 2019-07-16 |
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Address after: 314200 west side of Building 1, No. 550, Fanrong Road, Pinghu Economic Development Zone, Jiaxing City, Zhejiang Province Patentee after: NEDECO Precision Testing Equipment (Zhejiang) Co.,Ltd. Address before: 314200 West side of Building 1, No. 550, Fanrong Road, Pinghu Economic Development Zone, Jiaxing City, Zhejiang Province Patentee before: NIDEC-READ MACHINE APPARATUS (ZHEJIANG) CO.,LTD. |
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