CN206848312U - Gauging fixture and the check device for possessing the gauging fixture - Google Patents

Abstract

It the utility model is related to gauging fixture and possess the check device of the gauging fixture.Gauging fixture includes：Fixture head；And electrode installation portion, fixture head include：Run through the through hole on fixture head along the vertical direction；And one or more probe through through hole.Fixture head is provided with the first stopper section, and the stopper section of ratio first on fixture head is provided with the second stopper section by the position of electrode installation portion side, and probe has：The first abutting part abutted from electrode installation portion side with the first stopper section；The second abutting part abutted from check object side with the second stopper section；And the pars intermedia between the first abutting part and the second abutting part, the pars intermedia have the elastic part in the state compressed in the vertical direction.

Description

Gauging fixture and the check device for possessing the gauging fixture

Technical field

It the utility model is related to gauging fixture and possess the check device of the gauging fixture, more particularly, to circuit base The check objects such as plate carry out galvanoscopic gauging fixture and possess the check device of the gauging fixture.

Background technology

In the past, when looking into electric-examinations such as the check objects such as circuit substrate progress short circuit, open circuits, usually make in check device With the gauging fixture for possessing probe.

As above-mentioned gauging fixture, it is used for sometimes using the gauging fixture 10X shown in Fig. 4, gauging fixture 10X to circuit The check object such as substrate 100X checked, and including：Fixture head 11X, fixture head 11X is provided with to be passed through along the vertical direction Wear fixture head 11X through hole THX；Electrode installation portion 12X, the electrode installation portion 12X are arranged in a manner of it can load and unload The side opposite with the check object 100X of the fixture head 11X, and it is provided with electrode 13X；And probe 14X, should Probe 14X runs through the through hole THX, also, one end (upper end in Fig. 4) of the probe 14X can be with check object 100X Contact, the other end (lower end in Fig. 4) of the probe 14X electrically connect with the electrode 13X.

When being checked using above-mentioned gauging fixture, it is necessary to by check object placing in the 11X (placings of fixture head Face) so that check object 100X check point and the probe 14X exposed from fixture head 11X (putting surface) one end Contact.

But, in practice, the check point of the check object ideal position in off-design sometimes.For example, checking Object be by accumulation and the substrate that manufactures in the case of, because each layer is crimped to be fixed in by high temperature when by each layer stackup Together, the base material of substrate is formed it some times happens that shrinking, therefore the ideal position in the easy off-design of check point of substrate. Particularly in the case where check object is flexible base board, because the raw material of substrate use relatively thin flexible material Material, therefore the tendency that substrate extends in the fabrication process is notable, the check point of substrate is easier the ideal bit in off-design Put.Once there is the situation of the ideal position in the check point off-design of check object, when checking, the spy of gauging fixture Pin is just not easy to touch the check point of check object, the problems such as leading to not successfully be checked.To being in including multiple It is above-mentioned to ask when the larger assembly substrate of the area of the unit substrate of rectangular arrangement is checked (referring for example to patent document 1) Inscribe especially prominent.

Patent document 1：Japanese Patent Laid-Open 8-21867 publications

In order to solve the above problems, it is contemplated that fixture head is moved relative to electrode installation portion, with the inspection of offset substrate Look into departure of the position relative to the ideal position in design.But, in this case, in fixture head, probe leans on The end of electrode installation portion side may be moved by the collision of electrode installation portion etc..Once probe leans on electrode installation portion The end movement of side, the amount protruded from the check object side on fixture head of probe are easy for being decreased or increased.In probe The amount protruded from the check object side on fixture head when reducing, probe possibly can not contact check object well and can not Successfully checked.On the other hand, in the amount protruded from the check object side on fixture head the increase of probe, probe can Check object can be stabbed, cause the quality variation of the product using check object.

Utility model content

The utility model is to complete in view of the above problems, and its object is to provide a kind of gauging fixture and possess the inspection The check device of fixture is looked into, even if because the flexible etc. of check object causes the check point of check object to deviate normal position and needed Fixture head is moved relative to electrode installation portion, also ensure that protruding from the check object side on fixture head for probe Measure constant.

To achieve the above object, first aspect of the present utility model provides a kind of gauging fixture, and it, which is arranged on, is used for inspection Check in the check device as being checked, including：Fixture head；And connected in a manner of it can load and unload with the fixture head Connect, and the side that the same check object for being arranged on the fixture head is opposite, and the electrode installation portion of electrode is installed, its In, the fixture head includes：Run through the through hole on the fixture head along the vertical direction；And through the through hole, preceding End is prominent from the fixture head and can contact with the check object, rear end from fixture head protrusion and with the electricity One or more probe of pole contact, wherein, the fixture head is provided with the first stopper section, described in the ratio on the fixture head First stopper section is provided with the second stopper section by the position of the electrode installation portion side, and the probe has：From the electrode The first abutting part that installation portion side abuts with first stopper section；From the check object side and second stopper section The second abutting part abutted；And the pars intermedia between first abutting part and second abutting part, the pars intermedia With the elastic part in the state compressed in the vertical direction.

Herein, it is not meant to that through hole must be strictly along upper " along the vertical direction through the through hole on the fixture head " Lower direction extension, through hole can also tilt relative to above-below direction.

According to the gauging fixture of the utility model first aspect, because of the inspection for causing check object such as flexible of check object When looking into position and deviateing normal position and needing and the fixture head is moved in the horizontal direction relative to electrode installation portion, even if probe Moved by the other end of electrode installation portion side by the collision of electrode installation portion etc., in the effect of the elastic part of pars intermedia Under, it can also be led by the second stopper section and the abutting of the second abutting part to prevent probe overall towards the movement of electrode installation portion side Cause the amount protruded from the check object side on fixture head of probe to reduce, and the first stopper section and the first abutting part can be passed through Abut to prevent the amount protruded from the check object side on fixture head the increase of probe, accordingly, it is capable to prevent probe good Ground contacts check object and can not successfully checked, and can prevent that probe from stabbing check object, causes to use check object Product quality variation.

The gauging fixture of the utility model second aspect be on the basis of the gauging fixture of the utility model first aspect, First stopper section and/or second stopper section are arranged in the through hole.

According to the gauging fixture of the utility model second aspect, with through hole it is outside set the first stopper section and/or Second stopper section is compared, and helps to reduce the size of fixture head in the vertical direction.

The gauging fixture of the utility model third aspect be on the basis of the gauging fixture of the utility model first aspect, The elastic part helically shape.

According to the gauging fixture of the utility model third aspect, the structure of elastic part is simple, probe easy to manufacture, because This, helps to reduce the manufacturing cost of gauging fixture.

The gauging fixture of the utility model fourth aspect be on the basis of the gauging fixture of the utility model first aspect, A side in the fixture head and the electrode installation portion is provided with multiple adjustment holes, and the adjustment hole is in the clamp head Portion and the surface opening relative with the opposing party of the side in the electrode installation portion, pacify on the fixture head and the electrode The opposing party in dress portion is provided with adjustment pin, and the adjustment pin, which can be inserted, is arranged at the fixture head and the electrode installation portion In a side the adjustment hole.

According to the gauging fixture of the utility model fourth aspect, by presetting the interval between multiple adjustment holes, only Adjustment pin is inserted to different adjustment holes, it is relative just accurately to adjust fixture head according to the interval between multiple adjustment holes , therefore, also can easily offset substrate in the case that check object is flexible base board in the position of electrode installation portion Check point relative to the ideal position in design departure.

The gauging fixture of the aspect of the utility model the 5th be on the basis of the gauging fixture of the utility model fourth aspect, The opposing party in the fixture head and the electrode installation portion sets mounting hole, and the adjustment pin is set in a manner of it can assemble and disassemble Put in the mounting hole.

According to the gauging fixture of the aspect of the utility model the 5th, when adjustment pin is worn, adjustment pin only need to be changed i.e. Can, without changing whole fixture head or whole electrode installation portion, help to reduce the use cost of gauging fixture.

The gauging fixture of the aspect of the utility model the 6th be on the basis of the gauging fixture of the aspect of the utility model the 5th, The fixture head is laminated by plurality of plates along above-below direction, in the plurality of plates included by the fixture head, with The adjustment hole or the mounting hole are set on the opposite plate of the electrode installation portion.

According to the gauging fixture of the aspect of the utility model the 6th, with setting adjustment hole on the plurality of plates for forming fixture head Or mounting hole is compared, processing capacity can be reduced, therefore, helps to reduce the manufacturing cost of gauging fixture.

The gauging fixture of the aspect of the utility model the 7th be on the basis of the gauging fixture of the aspect of the utility model the 5th, In the horizontal direction on a direction, the spacing between the adjacent adjustment hole is equal, and the mounting hole is multiple, in the level On the direction of direction one, the spacing between the adjacent mounting hole is equal, and multiple mounting holes and multiple adjustment holes Correspondingly set, the not phase of the spacing between the spacing between the adjacent adjustment hole and the adjacent mounting hole Deng.

According to the gauging fixture of the aspect of the utility model the 7th, by by the spacing between adjacent adjustment hole and adjacent installation The difference of spacing between hole be set to it is smaller, can in the horizontal direction to fixture head relative to electrode installation portion position carry out Fine setting.

The gauging fixture of the utility model eighth aspect be on the basis of the gauging fixture of the aspect of the utility model the 7th, Multiple adjustment holes and multiple mounting holes are arranged separately on the straight line on the direction of horizontal direction one or phase Mutually on parallel a plurality of straight line.

According to the gauging fixture of the utility model eighth aspect, the handling ease of multiple adjustment holes and multiple mounting holes, because This, helps to reduce the manufacturing cost of gauging fixture.

The gauging fixture of the aspect of the utility model the 9th be on the basis of the gauging fixture of the aspect of the utility model the 5th, The adjustment pin is cylindric, and the adjustment hole and the mounting hole are the internal diameter hole equal with the external diameter of the adjustment pin, institute The both ends for stating adjustment pin have chamfering.

It is internal diameter and adjustment pin by making adjustment hole and mounting hole according to the gauging fixture of the aspect of the utility model the 9th The equal hole of external diameter, adjustment pin wobble effects positioning precision in adjustment hole and mounting hole can be prevented.Also, by making regulation The both ends of pin have chamfering, can easily facilitate and insert adjustment pin in adjustment hole and mounting hole, improve operating efficiency.

In addition, to achieve the above object, the tenth aspect of the present utility model provides a kind of check device, and it includes：This reality With the gauging fixture of new first aspect either side into the 9th aspect；Travel mechanism, the travel mechanism are used to make the inspection Look into fixture movement；Carrying mechanism, the carrying mechanism are used to carry the check object；Clamping device, the clamping device is to described Check object is clamped, so that the check object is in the state that can be examined；Control unit, the control unit is to the shifting Motivation structure and the clamping device are controlled；And display part, the display part show the result to the check object inspection.

Utility model effect

According to the new gauging fixture of this practicality and possesses the check device of the gauging fixture, flexible etc. because of check object Cause check object check point deviate normal position and needing make fixture head relative to electrode installation portion in the horizontal direction When mobile, even if the other end by electrode installation portion side of probe is moved by the collision of electrode installation portion etc., in centre In the presence of the elastic part in portion, also by the abutting of the second stopper section and the second abutting part probe can be prevented overall towards electrode Installation portion side is mobile and causes the amount protruded from the check object side on fixture head of probe to reduce, and can stop by first Stopper is abutted to prevent the amount protruded from the check object side on fixture head of probe from increasing with the first abutting part, therefore, It can prevent probe from can not contact check object well and can not successfully be checked, and can prevent probe from stabbing inspection pair As causing the quality variation for using the product of check object.

Brief description of the drawings

Fig. 1 is the integrally-built figure for the check device for schematically illustrating the utility model embodiment.

Fig. 2 is schematically illustrate gauging fixture included by the check device of the utility model embodiment integrally-built Sectional view, wherein being also shown for check object.

Fig. 3 is the part-structure for schematically illustrating the gauging fixture included by the check device of the utility model embodiment Stereogram.

Fig. 4 is the integrally-built sectional view for the gauging fixture for schematically illustrating prior art.

(symbol description)

1 check device

10 gauging fixtures

11 fixture heads

20 travel mechanisms

21 jig-attachment parts

30 clamping devices

40 control units

50 display parts

100 check objects

111 first plates

112 second plates

113 the 3rd plates

114 the 4th plates

115 the 5th plates

116 the 6th plates

12 electrode installation portions

121 electrode holes

1221st, 1222,1223,1224 mounting hole

13 electrodes

14 probes

141 first abutting parts

142 second abutting parts

143 pars intermedias

15 adjustment pins

TH through holes

H1, H2, H3, H4, H5, H6 hole

H11, H61 large diameter hole portion

H12, H62 path hole portion

LS putting surfaces

BS bottom surfaces

The stopper sections of ST1 first

The stopper sections of ST2 second

AH1, AH2, AH3, AH4 adjustment hole

Embodiment

Below, the check device of the utility model embodiment is illustrated referring to figs. 1 to Fig. 3, wherein, Fig. 1 is to show Expectation shows the integrally-built figure of the check device of the utility model embodiment, and Fig. 2 is to schematically illustrate the utility model implementation The integrally-built sectional view of gauging fixture included by the check device of mode, wherein being also shown for check object, Fig. 3 is to show Expectation shows the stereogram of the part-structure of the gauging fixture included by the check device of the utility model embodiment.In addition, In the application, the left and right directions in Fig. 1 etc. is set to horizontal direction, the above-below direction in Fig. 1 etc. is set to above-below direction.

(overall structure of check device)

As shown in figure 1, the check device 1 of present embodiment includes：Gauging fixture 10；Travel mechanism 20, the travel mechanism 20 are used to move gauging fixture 10, and it has jig-attachment part 21, and the jig-attachment part 21 is used for the (tool of installation check fixture 10 Body is that following electrode installation portions 12 of gauging fixture 10 are supported)；Carrying mechanism (not shown), the carrying mechanism are used to remove Transport check object 100；Clamping device 30, the clamping device 30 clamp to the check objects such as circuit substrate 100, so as to check Object 100 is in the state that can be examined；Control unit 40, the control unit is to travel mechanism 20, carrying mechanism and clamping device 30 are controlled；And display part 50, the display part 50 show the result checked check object 100.

(overall structure of gauging fixture)

As shown in Fig. 2 gauging fixture 10 is arranged in the check device 1 for being used for being checked check object 100, bag Include：Fixture head 11；And be connected in a manner of it can load and unload with fixture head 11, and it is arranged on the same inspection pair on fixture head 11 As 100 opposite sides (downside in Fig. 2), and the electrode installation portion 12 of electrode 13 is installed, wherein, fixture head 11 is wrapped Include：Run through the through hole TH on fixture head 11 along the vertical direction；And through through hole TH, front end (upper end in Fig. 2) from folder Tool head 11 protrudes and can contacted with check object 100, one that rear end protrudes and contacted with electrode 13 from fixture head 11 Or more probes 14.

Also, as shown in Fig. 2 fixture head 11 is provided with the first stopper section ST1, the stopper section of ratio first on fixture head 11 ST1 is provided with the second stopper section ST2 by the position of the side of electrode installation portion 12, also, probe 14 has：From electrode installation portion 12 The first abutting part 141 that side abuts with the first stopper section ST1；Abutted from the side of check object 100 with the second stopper section ST2 Second abutting part 142；And the pars intermedia 143 between the first abutting part 141 and the second abutting part 142, the pars intermedia 143 With the elastic part in the state compressed in the vertical direction.

In the present embodiment, the first stopper section ST1 and the second stopper section ST2 are arranged in through hole TH.It is specific and Speech, as shown in Fig. 2 fixture head 11 is by the first plate 111, the second plate 112, the 3rd plate 113, the 4th plate 114, the and of the 5th plate 115 6th plate 116 stacks gradually along above-below direction from top to bottom to be formed, wherein, the first plate 111 is formed with composition through hole TH's The hole H1 of a part, hole H2 of second plate 112 formed with the part for forming through hole TH, the 3rd plate 113 pass through formed with composition The hole H3 of a through hole TH part, hole H4 of the 4th plate 114 formed with the part for forming through hole TH, the 5th plate 115 are formed There are the hole H5 for the part for forming through hole TH, hole H6 of the 6th plate 116 formed with the part for forming through hole TH, also, First stopper section ST1 is arranged in the hole H6 of the 6th plate 116, and the second stopper section ST2 is arranged in the hole H1 of the first plate 111.More Specifically, the hole H6 of the 6th plate 116 include large diameter hole portion H61 and than large diameter hole portion H61 by the side of check object 100 and directly The footpath path hole portion H62 smaller than large diameter hole portion H61, path hole portion H62 form the first stopper section ST1, also, the first plate 111 Hole H1 include large diameter hole portion H11 and lean on the side of electrode installation portion 12 and diameter than large diameter hole portion H11 than large diameter hole portion H11 Small path hole portion H12, path hole portion H12 form the second stopper section ST2.

In addition, in the present embodiment, one end of probe 14 has the first abutting part 141, and the other end of probe 14 has Second abutting part 142, the side of pars intermedia 143 are connected with the first abutting part 141, and the opposite side of pars intermedia 143 abuts with second Portion 142 connects.Specifically, as shown in Fig. 2 in the cross of cross shape when one end of probe 14 is with cutting along the vertical direction Shape portion, the cross shape portion form the first abutting part 141, and similarly, the other end of probe 14 also has to be cutd open along the vertical direction In the cross shape portion of cross shape when cutting, the cross shape portion forms the second abutting part 142, also, the entirety of pars intermedia 143 is in It is spiral-shaped, i.e. elastic part helically shape.More specifically, the cross shape portion of the one end of probe 14 has horizontal extension With upper lower extension, wherein, horizontal extension form with the first stopper section ST1 the first abutting part 141, upper lower extension it is upper End is somewhat prominent upward from fixture head 11 (putting surface LS), similarly, the cross shape portion of the other end of probe 14 With horizontal extension and upper lower extension, wherein, horizontal extension forms the first abutting part abutted with the second stopper section ST2 142, from fixture head 11 (bottom surface BS), somewhat protrusion (is prominent in the example in figure 2 downward for the lower end of upper lower extension Go out into the electrode hole 121 of electrode installation portion 12) and electrically connected with electrode 13.

In addition, in the present embodiment, as shown in Figures 2 and 3, fixture head 11 be provided with multiple adjustment hole AH1, AH2, AH3, AH4, this multiple adjustment hole AH1, AH2, AH3, AH4 are opened on the surface relative with electrode installation portion 12 on fixture head 11 Mouthful, also, electrode installation portion 12 is provided with columned adjustment pin 15, and the adjustment pin 15 can be inserted and be arranged at fixture head 11 Adjustment hole AH1, AH2, AH3, AH4.Specifically, in the first plate 111 included by fixture head 11, the second plate 112, the 3rd plate 113rd, in the 4th plate 114, the 5th plate 115 and the 6th plate 116, it is provided with first plate 111 opposite with electrode installation portion 12 Multiple adjustment hole AH1, AH2, AH3, AH4, also, these adjustment holes AH1, AH2, AH3, AH4 direction (Fig. 2 in the horizontal direction In left and right directions) on be equally spaced arranged in order, that is to say, that the spacing between adjacent adjustment hole is equal, also, these Adjustment hole AH1, AH2, AH3, AH4 diameter are equal to each other, and adjustment hole AH1, AH2, AH3, AH4 diameter are than adjustment pin 15 Diameter is slightly larger.

In addition, in the present embodiment, as shown in Figures 2 and 3, electrode installation portion 12 is provided with electrode hole 121 and multiple Mounting hole 1221,1222,1223,1224, electrode 13 is arranged at electrode hole 121, and is electrically connected with the other end of probe 14, regulation Pin 15 is arranged in a manner of it can assemble and disassemble in mounting hole 1221,1222,1223,1224.Specifically, multiple mounting holes 1221, 1222nd, 1223,1224 it is arranged in order adjacent to each other on a direction (left and right directions in Fig. 2) in the horizontal direction, that is to say, that adjacent Mounting hole between spacing be 0, also, multiple mounting holes 1221,1222,1223,1224 and multiple adjustment hole AH1, AH2, AH3, AH4 are correspondingly set, and the diameter of these mounting holes 1221,1222,1223,1224 is equal to each other, and mounting hole 1221, 1222nd, 1223,1224 diameter is equal with adjustment hole AH1, AH2, AH3, AH4 diameter, and more slightly larger than the diameter of adjustment pin 15.

Herein, on the direction vertical with Fig. 2 paper, through hole TH, multiple adjustment hole AH1, AH2, AH3, AH4 are set On same position, similarly, on the direction vertical with Fig. 2 paper, electrode hole 121 and multiple mounting holes 1221,1222, 1223rd, 1224 it is also disposed on same position.

It may be mentioned that as shown in Fig. 2 adjustment pin 15 is inserted into adjustment hole AH1 and mounting hole 1221 and makes fixture head 11 and the situation that a direction (left and right directions in Fig. 2) is mutually located in the horizontal direction of electrode installation portion 12 correspond to check object The 100 check point situation consistent with the ideal position in design, now, the other end of probe 14 and the central portion of electrode 13 (central portion in Fig. 2 on left and right directions, and be the central portion on the direction vertical with Fig. 2 paper) abuts.Though in addition, not Diagram, but make fixture head 11 and electrode installation portion 12 in water adjustment pin 15 is inserted into adjustment hole AH4 and mounting hole 1224 In the case of square being mutually located to a direction (left and right directions in Fig. 2), the other end of probe 14 with electrode 13 in fig. 2 The position that right and left is upwardly deviated from the central portion of the electrode 13 abuts.

(one of the inspection action of check device)

When checking, adjustment pin 15 is inserted into adjustment hole AH1 and mounting hole 1221 in advance and makes fixture head 11 and electrode A direction (left and right directions in Fig. 2) is mutually located installation portion 12 in the horizontal direction, and in this case, gauging fixture 10 is installed In jig-attachment part 21.

Then, check object 100 is carried to close to the position of gauging fixture 10 using carrying mechanism (not shown).

Then, check object 100 is clamped using clamping device 30.

Then, move jig-attachment part 21 using travel mechanism 20, so that gauging fixture 10 is moved to check object 100 Lower section, and the probe 14 of gauging fixture 10 is contacted with the predetermined portion (such as Wiring pattern etc.) of check object 100.

Then, probe 14 is powered from power supply unit (not shown), now, display part 50 is shown to check object 100 The result of inspection.

The position adjustment of electrode installation portion (fixture head relative to)

, can be to fixture head 11 if the ideal position in the check point off-design of check object 100 when checking Suitably adjusted relative to the position of electrode installation portion 12.

Specifically, for example, adjustment pin 15 can be inserted into adjustment hole AH2 and mounting hole 1222, in this case, with inciting somebody to action Adjustment pin 15 is inserted adjustment hole AH1 and compared with the situation of mounting hole 1221, and fixture head 11 corresponds to towards the left side movement in Fig. 2 The distance of the difference of the spacing between spacing and adjacent mounting hole between adjacent adjustment hole, therefore, one end of probe 14 can be towards Fig. 2 In left side move corresponding distance.

In addition, if the ideal position in the check point off-design of check object 100 is more, can attempt adjustment pin 15 insertion adjustment hole AH3 and mounting hole 1223, or even adjustment pin 15 is inserted into adjustment hole AH4 and mounting hole 1224.

(effect of present embodiment)

According to present embodiment, the check point of check object 100 is being caused to deviate just because of the flexible etc. of check object 100 When normal position and needing makes the fixture head 11 be moved in the horizontal direction relative to electrode installation portion 12, even if probe 14 leans on electrode The other end of the side of installation portion 12 is moved by the collision of the grade of electrode installation portion 12, in the work of the elastic part of pars intermedia 143 Under, also by the abutting of the second stopper section ST2 and the second abutting part 142 probe 14 can be prevented overall towards electrode installation portion 12 Side is mobile and causes the amount protruded from the side of check object 100 on fixture head 11 of probe 14 to reduce, and can pass through first The abutting of stopper section ST1 and the first abutting part 141 prevents being protruded from the side of check object 100 on fixture head 11 for probe 14 Amount increase, accordingly, it is capable to prevent probe 14 from can not contact check object 100 well and can not successfully be checked, and energy Prevent probe 14 from stabbing check object 100, cause the quality variation of the product using check object 100.

In addition, according to present embodiment, with setting the first stopper section ST1 and/or the second backstop in the outside of through hole RH Portion ST2 is compared, and helps to reduce 11 size in the vertical direction of fixture head.

In addition, according to present embodiment, the structure of pars intermedia 143 is simple, the easy to manufacture of probe 14, therefore, helps to drop The manufacturing cost of low gauging fixture 10.

In addition, according to present embodiment, by presetting the interval between multiple adjustment holes, as long as adjustment pin 15 is inserted Enter different adjustment holes, can just be installed according to the interval between multiple adjustment holes accurately to adjust fixture head 11 relative to electrode The position in portion 12, therefore, in the case that check object 100 is flexible base board, also can easily offset substrate inspection Position relative to the ideal position in design departure.

In addition, according to present embodiment, when adjustment pin 15 is worn, adjustment pin 15 only need to be changed, without Whole fixture head 11 or whole electrode installation portion 12 are changed, helps to reduce the use cost of gauging fixture 10.

In addition, according to present embodiment, with setting adjustment hole on the plurality of plates for forming fixture head, processing can be reduced Amount, therefore, help to reduce the manufacturing cost of gauging fixture 10.

In addition, according to present embodiment, by by the spacing between the spacing between adjacent adjustment hole and adjacent mounting hole Difference be set to smaller, fixture head 11 can be finely adjusted relative to the position of electrode installation portion 12 in the horizontal direction.

In addition, according to present embodiment, multiple adjustment holes and multiple mounting holes are arranged separately on the direction of horizontal direction one Straight line on, the handling ease of multiple adjustment holes and multiple mounting holes, therefore, helping, which reduces gauging fixture, is manufactured into This.

The utility model is exemplarily described above in conjunction with accompanying drawing, it is clear that specific implementation of the present utility model is not Limited by above-mentioned embodiment.

For example, in the above-described embodiment, the overall helically shape, but not office of pars intermedia 143 included by probe 14 It is limited to this, pars intermedia may be alternatively formed to only one section helically shape, in addition, the elastic part that pars intermedia has also can be by substantially The part extended in a plane is formed, and is formed for example, can be joined end to end by multiple parts in S fonts, zigzag etc..

In addition, in the above-described embodiment, fixture head 11 is by the first plate 111, the second plate 112, the 3rd plate the 113, the 4th Plate 114, the 5th plate 115 and the 6th plate 116 stack gradually along above-below direction form from top to bottom, but this is fixture head A kind of form, the form on fixture head can suitably change according to actual conditions, for example, the quantity for forming the plate on fixture head 11 can Appropriate adjustment as needed.

In addition, in the above-described embodiment, the first stopper section ST1 and the second stopper section ST2 are arranged in through hole TH, But it is not limited thereto, one or both in the first stopper section and the second stopper section may also be arranged on outside through hole, for example, Stop tab protruded in the horizontal direction towards the center of through hole etc. can be set on the putting surface on fixture head and/or bottom surface.

In addition, in the above-described embodiment, forming first plate 111, the second plate 112, the 3rd plate on fixture head 11 113rd, in the 4th plate 114, the 5th plate 115 and the 6th plate 116, the second stopper section ST2 is set on the first plate 111, in the 6th plate First stopper section ST1 is set on 116, but is not limited thereto, the first stopper section ST1 plate is set and the second stopper section is set ST2 plate can be changed suitably as needed.

In addition, in the above-described embodiment, in the ten of cross shape when one end of probe 14 has cutting along the vertical direction Word shape portion, in the cross shape portion of cross shape when the other end of probe 14 is with cutting along the vertical direction, but do not limit to In this, the cross sectional shape during cutting along the vertical direction of one end of probe 14 and the other end can be changed suitably as needed, for example, It is formed as triangle, trapezoidal etc..

In addition, in the above-described embodiment, fixture head 11 is provided with adjustment hole AH1, AH2, AH3, AH4, electrode installation Portion 12 is provided with adjustment pin 15, but is not limited thereto, and also electrode installation portion can be provided with multiple adjustment holes, this multiple regulation Hole is in the surface opening relative with fixture head of electrode installation portion, also, fixture head is provided with adjustment pin, the adjustment pin energy Insertion is arranged at the adjustment hole of electrode installation portion.

In addition, in the above-described embodiment, electrode installation portion 12 be provided with multiple mounting holes 1221,1222,1223, 1224, adjustment pin 15 is arranged in a manner of it can assemble and disassemble in mounting hole 1221,1222,1223,1224, but is not limited thereto, Also multiple mounting holes can be provided with fixture head, adjustment pin is arranged in mounting hole in a manner of it can assemble and disassemble.Now, in fixture In plurality of plates included by head, mounting hole is set on the plate opposite with electrode installation portion.

In addition, the quantity of adjustment hole and mounting hole also can be according to appropriate adjustment, for example, also can only set a mounting hole.

In addition, in the above-described embodiment, multiple adjustment hole AH1, AH2, AH3, AH4 first-class an of direction in the horizontal direction Arranged every ground, a side arranges multiple mounting holes 1221,1222,1223,1224 upwardly against ground in the horizontal direction, but does not limit to In this, multiple adjustment holes can be also arranged to a side in the horizontal direction and arranged upwardly against ground, and multiple mounting holes are arranged to Equally spaced arranged on a direction in the horizontal direction, if by the spacing between adjacent adjustment hole be set to adjacent mounting hole it Between spacing it is unequal.

In addition, in the above-described embodiment, multiple adjustment hole AH1, AH2, AH3, AH4 arrangements are in the horizontal direction on a direction Straight line on, multiple mounting holes 1221,1222,1223,1224 also arrange the straight line in the horizontal direction on a direction On, but be not limited thereto, multiple adjustment holes can be also arranged on a plurality of straight line being parallel to each other in the horizontal direction on a direction, Multiple mounting holes can be also arranged on a plurality of straight line being parallel to each other in the horizontal direction on a direction.In addition, multiple adjustment holes and Multiple mounting holes can not also arrange mutually flat on straight line in the horizontal direction on a direction or on the direction of horizontal direction one On capable a plurality of straight line.

In addition, in the above-described embodiment, the diameter and adjustment hole AH1, AH2 of mounting hole 1221,1222,1223,1224, AH3, AH4 diameter are equal, and more slightly larger than the diameter of adjustment pin 15, but are not limited thereto, can also adjustment hole and mounting hole For the internal diameter hole equal with the external diameter of adjustment pin, and the both ends of adjustment pin have chamfering.

Claims (10)

1. a kind of gauging fixture, in the check device for being checked check object, including：

Fixture head；And

It is connected in a manner of it can load and unload with the fixture head, and the same check object for being arranged on the fixture head is opposite Side, and the electrode installation portion of electrode is installed,

Wherein, the fixture head includes：

Run through the through hole on the fixture head along the vertical direction；And

It is prominent from the fixture head through the through hole, front end and can be contacted with the check object, rear end is from described One or more probe that fixture head is prominent and is contacted with the electrode,

The gauging fixture is characterised by,

The fixture head is provided with the first stopper section, and the first stopper section described in the ratio on the fixture head is installed by the electrode The position of portion side is provided with the second stopper section,

The probe has：The first abutting part abutted from the electrode installation portion side with first stopper section；From described The second abutting part that check object side abuts with second stopper section；And positioned at first abutting part and described second Pars intermedia between abutting part, the pars intermedia have the elastic part in the state compressed in the vertical direction.

2. gauging fixture as claimed in claim 1, it is characterised in that

First stopper section and/or second stopper section are arranged in the through hole.

3. gauging fixture as claimed in claim 1, it is characterised in that

The elastic part helically shape.

4. gauging fixture as claimed in claim 1, it is characterised in that

A side in the fixture head and the electrode installation portion is provided with multiple adjustment holes, and the adjustment hole is in the folder Have head and the surface opening relative with the opposing party of the side in the electrode installation portion,

The opposing party in the fixture head and the electrode installation portion is provided with adjustment pin, and the adjustment pin can insert setting The adjustment hole of a side in the fixture head and the electrode installation portion.

5. gauging fixture as claimed in claim 4, it is characterised in that

The opposing party in the fixture head and the electrode installation portion sets mounting hole, side of the adjustment pin that can assemble and disassemble Formula is arranged in the mounting hole.

6. gauging fixture as claimed in claim 5, it is characterised in that

The fixture head is laminated by plurality of plates along above-below direction,

In the plurality of plates included by the fixture head, the adjustment hole is set on the plate opposite with the electrode installation portion Or the mounting hole.

7. gauging fixture as claimed in claim 5, it is characterised in that

In the horizontal direction on a direction, the spacing between the adjacent adjustment hole is equal,

The mounting hole is multiple, and on the direction of horizontal direction one, the spacing between the adjacent mounting hole is equal, and Multiple mounting holes are correspondingly set with multiple adjustment holes,

The spacing between spacing and the adjacent mounting hole between the adjacent adjustment hole is unequal.

8. gauging fixture as claimed in claim 7, it is characterised in that

Multiple adjustment holes and multiple mounting holes are arranged separately on the straight line on the direction of horizontal direction one Or on a plurality of straight line being parallel to each other.

9. gauging fixture as claimed in claim 5, it is characterised in that

The adjustment pin is cylindric, and the adjustment hole and the mounting hole are that internal diameter is equal with the external diameter of the adjustment pin Hole,

The both ends of the adjustment pin have chamfering.

A kind of 10. check device, it is characterised in that：Including

Gauging fixture any one of claim 1 to 9；

Travel mechanism, the travel mechanism are used to move the gauging fixture；

Carrying mechanism, the carrying mechanism are used to carry the check object；

Clamping device, the clamping device clamp to the check object, can be examined so that the check object is in State；

Control unit, the control unit are controlled to the travel mechanism and the clamping device；And

Display part, the display part show the result to the check object inspection.