CN109030509B - Detection device, color film repair equipment and detection method - Google Patents
Detection device, color film repair equipment and detection method Download PDFInfo
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- 230000008439 repair process Effects 0.000 title claims abstract description 44
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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Abstract
The invention provides a detection device, a color film repair device and a detection method, wherein the detection device comprises: a bearing table; the alignment fixture is used for clamping a product to be detected so as to align the product to be detected; the adsorption unit is used for adsorbing and fixing the product to be detected on the bearing table; the driving unit can drive the alignment fixture to perform lifting motion in a vertical direction perpendicular to the bearing surface of the bearing table, and drive the alignment fixture to translate to a first alignment position and a second alignment position in a horizontal direction parallel to the bearing surface of the bearing table; and the control unit is connected with the driving unit and used for controlling the working state of the driving unit to enable the driving unit to drive the alignment fixture to be positioned at the first alignment position or the second alignment position, so that the product to be detected can be aligned for the second time in the horizontal direction. The method and the device can solve the problem that the color film repair equipment in the prior art has a repair blind area, and can improve the yield of products to be detected.
Description
Technical Field
The invention relates to the technical field of display, in particular to a detection device, a color film repair device and a detection method.
Background
In the production process of a color film substrate of a liquid crystal display panel, BM (black matrix), R (red color film), G (green color film), B (blue color film), OC (flat layer) and PS (spacer mat) processes need to be sequentially carried out, microscopic defects are inevitably generated in the production process of each section of process, and the product yield is reduced due to the defects, so that the microscopic defects are repaired by color film repair equipment after each section of process, and the product yield can be greatly improved.
The existing color film repair equipment has the repair mode that: and (3) carrying out Auto Laser repair (repair under a transmission light source) after the BM process is finished, carrying out Auto Tape repair (repair under a reflection light source) after the R, G, B, OC process is finished, and carrying out all the defect judgment (joint judgment of the transmission light source and the reflection light source) on the color film substrate section after the PS process is finished.
The existing color film repairing equipment mainly adopts a reflection type transmission light source, namely, a bearing table of the equipment is formed by paving a glass plate on an aluminum alloy material, a reflection light source is arranged outside the equipment, and light rays emitted by the light source are captured by an image collector after being reflected by the aluminum alloy material, so that a transmission light effect is achieved.
The existing color film repairing equipment takes and puts a film as a mechanical arm (Robot), and carries out one-time alignment on a color film substrate on a bearing table through an alignment fixture (a driving cylinder of the alignment fixture is a one-section cylinder), and then repairs the color film substrate. Because supporting rod (Pin) hole sites, vacuum adsorption hole (VCD) hole sites, glass plate fixing and bearing platform flatness adjusting screw holes and the like are distributed on the bearing platform, after the color film substrate is aligned, a hole is formed in the bearing platform, the reflective transmission light source cannot normally work, and therefore, transmission repairing and judgment dead zones exist, and the area percentage of the dead zones is 4.6%.
Disclosure of Invention
The invention aims to provide a detection device, a color film repair device and a detection method, which can solve the problem that the color film repair device in the prior art has a repair blind area and can improve the yield of products to be detected.
The technical scheme provided by the invention is as follows:
a detection device, comprising:
the bearing table is used for bearing a product to be detected;
the alignment fixture is used for clamping the product to be detected so as to align the product to be detected;
the adsorption unit is used for adsorbing and fixing the product to be detected on the bearing table;
the driving unit is used for driving the alignment fixture to move, the driving unit can drive the alignment fixture to perform lifting movement in a vertical direction perpendicular to the bearing surface of the bearing table, and the driving unit can drive the alignment fixture to translate to a first alignment position and a second alignment position in a horizontal direction parallel to the bearing surface of the bearing table;
and the control unit is connected with the driving unit and used for controlling the working state of the driving unit, so that the driving unit drives the alignment fixture to be positioned at the first alignment position or the second alignment position, and the product to be detected can be aligned for the second time in the horizontal direction.
For example, the bearing surface of the bearing table includes a first side and a second side which are opposite to each other, the alignment fixture includes a reference fixture and a pushing fixture, the reference fixture is disposed on the first side of the bearing table, and the pushing fixture is disposed on the second side of the bearing table;
the detection device further comprises:
the position sensing component is used for acquiring the current position information of the product to be detected and at least comprises a first sensor arranged at the first side edge of the bearing surface of the bearing table and a second sensor arranged at the second side edge of the bearing surface of the bearing table;
the air floatation unit is used for blowing air to the bearing surface of the bearing table so as to enable the product to be detected to float, and comprises a plurality of air channels which are sequentially arranged from the first side to the second side of the bearing surface of the bearing table;
the control unit is further connected with the position sensing component, the adsorption unit and the air floatation unit and used for receiving sensing information sensed by the position sensing component so as to control the working states of the air floatation unit, the adsorption unit and the driving unit.
Exemplarily, the control unit comprises at least:
the parameter determining module is used for determining working parameters of the driving unit according to control parameters, the working parameters of the driving unit comprise a motion parameter of the alignment fixture in the vertical direction, a first alignment position parameter of the alignment fixture in the horizontal direction and a second alignment position parameter of the alignment fixture in the horizontal direction, and the control parameters are parameters input by a user or parameters stored in advance;
the receiving module is used for receiving the sensing information of the position sensing component to obtain the current position information of the product to be detected;
the signal generating module is used for generating control signals, the control signals comprise control signals generated according to the current position information of the product to be detected and control signals generated according to the working parameters of the driving unit, and the current position information of the product to be detected comprises: the product to be detected is located at a position deviated to one side where the first side is located, the product to be detected is located at a position deviated to one side where the second side is located, or the product to be detected is located at a preset non-deviated position between the first side and the second side;
the air floatation control module is used for controlling the working state of the air floatation unit according to the control signal, and the working state of the air floatation unit comprises: the ventilation volume of a first gas channel in the plurality of gas channels is greater than that of a second gas channel, the ventilation volume of the first gas channel is less than that of the second gas channel, or the ventilation volume of the first gas channel is equal to that of the second gas channel, wherein the first gas channel is at least one gas channel which is positioned at the side, close to the first side, of the center of the bearing surface of the bearing platform, and the second gas channel is at least one gas channel which is positioned at the side, close to the second side, of the center of the bearing surface of the bearing platform;
the driving control module is used for controlling the working state of the driving unit according to the control signal, and the working state of the driving unit comprises: driving the alignment fixture to ascend, driving the alignment fixture to descend, driving the alignment fixture to translate to the first alignment position, or driving the alignment fixture to translate to the second alignment position;
and the adsorption control module is used for controlling the adsorption unit to be opened or closed according to the control signal.
Illustratively, the driving unit includes: the driving cylinder is connected with the alignment fixture and the control unit and is a two-section cylinder; and/or a servo motor connected with the alignment fixture and the control unit.
The color film repairing device is used for detecting and repairing a color film substrate, and is characterized by comprising the detecting device, and a product to be detected is the color film substrate.
A detection method applied to the detection device as described above, the method comprising:
placing a product to be detected on the bearing table;
controlling the alignment fixture to ascend from an initial standby position;
controlling the alignment fixture to clamp the product to be detected to move to a first alignment position, and performing first alignment on the product to be detected;
starting the adsorption unit, adsorbing and fixing the product to be detected, controlling the alignment fixture to descend to the initial standby position, and detecting the product to be detected for the first time;
after the first detection is finished, closing the adsorption unit and controlling the alignment fixture to ascend from the initial standby position;
controlling the alignment fixture to clamp the product to be detected and move to a second alignment position, and performing second alignment on the product to be detected;
starting the adsorption unit, adsorbing and fixing the product to be detected, controlling the alignment fixture to descend to the initial standby position, and performing secondary detection on the product to be detected;
and after the second detection is finished, closing the adsorption unit.
For example, after the aligning fixture is controlled to ascend from the initial standby position, the aligning fixture is controlled to clamp the product to be detected and move to the first aligning position, and before the product to be detected is aligned for the first time, the method further includes:
controlling the air floatation unit to be started;
detecting the current position information of the product to be detected through the position sensing component;
and controlling the working state of the air floatation unit according to the current position information detected by the position sensing component so as to perform first pre-alignment on the product to be detected under the action of the air floatation unit.
Illustratively, the controlling the working state of the air floating unit according to the current position information detected by the position sensing component to enable the product to be detected to perform the first pre-alignment under the action of the air floating unit specifically includes:
when the position sensing component senses that the product to be detected is located at a position offset to one side of the first side, the control unit controls the ventilation volume of a first gas channel in the plurality of gas channels to be larger than the ventilation volume of a second gas channel, so that the product to be detected moves from the first side to the second side to perform first pre-alignment, and when the position sensing component senses that the product to be detected is located at a predetermined non-offset position between the first side and the second side, the control unit controls the ventilation volume in the first gas channel to be equal to the ventilation volume in the second gas channel;
when the position sensing component senses that the product to be detected is located at a position offset to one side of the second side, the control unit controls the ventilation volume of a first gas channel in the plurality of gas channels to be smaller than the ventilation volume of a second gas channel, so that the product to be detected moves from the second side to the first side to perform first pre-alignment, and until the position sensing component senses that the product to be detected is located at a predetermined non-offset position between the first side and the second side, the control unit controls the ventilation volume in the first gas channel to be equal to the ventilation volume in the second gas channel.
For example, in the method, after the first detection is completed, the adsorption unit is closed, and after the alignment fixture is controlled to ascend from the initial standby position, the alignment fixture is controlled to clamp the product to be detected and move to a second alignment position, and before the product to be detected is aligned for the second time, the method further includes:
determining working parameters of the driving unit according to control parameters, wherein the working parameters of the driving unit comprise a motion parameter of the alignment fixture in the vertical direction, a first alignment position parameter of the alignment fixture in the horizontal direction, and a second alignment position parameter of the alignment fixture in the horizontal direction, and the control parameters are parameters input by a user or parameters stored in advance;
controlling the air floatation unit to be started;
detecting the current position information of the product to be detected through the position sensing component;
and controlling the working state of the air floatation unit according to the working parameters of the driving unit so as to perform secondary pre-alignment on the product to be detected under the action of the air floatation unit.
For example, in the method, according to the working parameters of the driving unit, the working state of the air floating unit is controlled, so that the product to be detected is subjected to the second pre-alignment under the action of the air floating unit, which specifically includes:
the horizontal direction comprises an X-axis direction and a Y-axis direction, the Y-axis direction is the extending direction of the edge of the first side or the second side, and the X-axis direction is perpendicular to the Y-axis direction;
when the offset direction of the second alignment position compared with the first alignment position is in the direction of the X axis and the second alignment position is located at the position close to the second side of the first alignment position, the control unit controls the ventilation volume of a first gas channel in the plurality of gas channels to be larger than that of a second gas channel, so that the product to be detected moves from the first side to the second side for second pre-alignment;
when the offset direction of the second alignment position is in the X-axis direction compared with the first alignment position, and the second alignment position is located in a direction close to the first side of the first alignment position, the control unit controls the ventilation amount of a first gas channel of the plurality of gas channels to be smaller than the ventilation amount of a second gas channel, so that the product to be detected moves from the second side to the first side to perform the second pre-alignment.
The beneficial effects brought by the invention are as follows:
the detection device, the color film repair equipment and the detection method provided by the invention improve the driving unit of the contraposition clamp, so that the contraposition clamp can move to a first contraposition position and a second contraposition in the horizontal direction, when a product to be detected is detected, the product to be detected can be clamped by the contraposition clamp to carry out secondary contraposition on the bearing table, therefore, on the premise that the original contraposition mode does not influence normal repair, the relative position between the product to be detected and the bearing table is changed in a secondary contraposition mode, the position of microscopic defects on the product to be detected relative to the bearing table is changed, the defects in the position of a detection blind area are far away from the position of the blind area, and the defects which cannot be normally identified, repaired and judged in the primary contraposition state can be normally identified, repaired and judged, the defect repair rate is improved, so that the yield of the product to be detected is effectively improved.
Drawings
FIG. 1 is a schematic structural diagram of a detection apparatus provided in an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a detecting apparatus provided in an embodiment of the present invention before a first alignment is performed;
fig. 3 is a schematic structural diagram of the detection apparatus provided in the embodiment of the present invention after the first pre-alignment;
FIG. 4 is a schematic structural view of a reference fixture of the detecting device provided in the embodiment of the present invention moving to a first alignment position;
FIG. 5 is a schematic view of the pushing jig of the detecting device provided in the embodiment of the present invention moving to the first alignment position;
fig. 6 is a schematic structural view illustrating the reference fixture and the pushing fixture retreating after the detection device provided in the embodiment of the present invention performs the first alignment on the product to be detected;
FIG. 7 is a schematic structural diagram of a detection device provided in an embodiment of the present invention when performing a first detection;
fig. 8 is a schematic structural diagram of the detection apparatus according to the embodiment of the present invention after performing the second pre-alignment;
FIG. 9 is a schematic structural diagram illustrating the detecting device moving to a second alignment position according to an embodiment of the present invention;
FIG. 10 is a schematic view of the pushing jig of the detecting device provided in the embodiment of the present invention moving to the second alignment position;
fig. 11 is a schematic structural view illustrating the reference fixture and the pushing fixture retreating after the detection device provided in the embodiment of the present invention performs the second alignment on the product to be detected;
fig. 12 is a schematic structural diagram of the detection device provided in the embodiment of the present invention when performing the first detection.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
Aiming at the technical problem that a repair blind area exists in a color film repair substrate in the prior art, the embodiment of the invention provides a detection device, color film repair equipment and a detection method, which can overcome the defect that the repair blind area exists in the color film repair equipment in the prior art and improve the yield of products to be detected.
As shown in fig. 1, the detection apparatus provided in the embodiment of the present invention includes:
a carrying table 100 for carrying a product 10 to be detected;
the alignment fixture 200 is used for clamping the product 10 to be detected so as to align the product 10 to be detected;
the adsorption unit is used for adsorbing and fixing the product 10 to be detected on the bearing table 100 and comprises a plurality of vacuum adsorption holes 300 arranged on the bearing table;
the driving unit 400 is used for driving the alignment fixture 200 to move, the driving unit 400 can drive the alignment fixture 200 to perform lifting motion in a vertical direction perpendicular to the bearing surface of the bearing table 100, and the driving unit 400 can drive the alignment fixture 200 to translate to a first alignment position and a second alignment position in a horizontal direction parallel to the bearing surface of the bearing table 100;
and the control unit 600 is connected to the driving unit 400, and is configured to control a working state of the driving unit 400, so that the driving unit 400 drives the alignment fixture 200 to be located at the first alignment position or the second alignment position, so that the product 10 to be detected can be aligned in the horizontal direction for the second time.
In the detecting apparatus provided by the embodiment of the present invention, the alignment jig 200 can move to the first alignment position and the second alignment position in the horizontal direction, so that, when the product 10 to be detected is detected, the product 10 to be detected can be clamped by the aligning clamp 200 to perform secondary alignment on the bearing table 100, therefore, on the premise of satisfying the original alignment mode without influencing normal repair, the relative position between the product 10 to be detected and the bearing platform 100 is changed through the secondary alignment mode, so that the position of the microscopic defect on the product 10 to be detected relative to the bearing platform 100 is changed, the defect in situ on the detection blind area position is far away from the blind area position, therefore, defects which cannot be normally identified, repaired and judged in the one-time alignment state can be normally identified, repaired and judged, the defect repair rate is improved, and the yield of the products to be detected 10 is effectively improved.
It should be noted that the detection device provided by the embodiment of the present invention can be applied to a color film repair device to repair a color film substrate, and can also be applied to other occasions to detect other products 10 to be detected, so as to avoid a detection blind area by a secondary alignment manner, and improve the detection accuracy.
For convenience of understanding, the detection device provided in the embodiment of the present invention is described in detail below by taking the product 10 to be detected as a color film substrate and taking the detection device applied to a color film repair device as an example.
When the detection device provided by the embodiment of the invention repairs the defects of the color film substrate, the color film substrate can be clamped by the alignment fixture 200 to carry out first alignment, at the moment, the defects in the repair blind area are filtered, and the defects in the visible area are repaired; and after the defect in the visible area is repaired, carrying out second alignment on the color film substrate, moving the part of the color film substrate above the repair blind area in the first alignment to the repair visible area, and then repairing the defect of the repair blind area in the first alignment.
The following describes a preferred embodiment of the detection apparatus provided by the embodiment of the present invention.
In the embodiment provided by the present invention, the driving unit 400 includes: the driving air cylinder is connected with the alignment fixture 200 and the control unit 600, and the driving air cylinder is a two-section air cylinder; and/or a servo motor connected to the alignment jig 200 and the control unit 600.
As shown in fig. 1, in order to achieve the translation of the alignment fixture in both directions of the horizontal direction, i.e., the X-axis direction and the Y-axis direction, the driving unit 400 may include a horizontal driving portion 401 and a vertical driving portion 402, and both the horizontal driving portion and the vertical driving portion may be implemented by using a two-stage cylinder or a servo motor.
In the color film repair device in the prior art, the driving cylinders of the alignment fixture 200 are all a horizontal one-stage driving cylinder and a vertical one-stage driving cylinder, and by adopting the above scheme, in the detection device in the embodiment of the present invention, the driving unit 400 of the alignment fixture 200 is improved, and a two-stage cylinder or a servo motor can be adopted to realize secondary alignment of the alignment fixture 200.
In addition, in the embodiment of the invention, as shown in fig. 1, the carrying surface of the carrier 100 includes a first side and a second side opposite to each other, the aligning jig 200 includes a reference jig 210 and a pushing jig 220, the reference jig 210 is disposed on the first side of the carrier 100, and the pushing jig 220 is disposed on the second side of the carrier 100.
In the above solution, the alignment fixture 200 may be implemented by using a reference fixture 210 and a pushing fixture 220 respectively disposed at two opposite sides (i.e. the first side and the second side) of the plummer 100, wherein both the reference fixture 210 and the pushing fixture 220 can be driven by the driving unit 400 to be lifted in a vertical direction, so as to be lifted from an initial standby position for alignment or lowered from an alignment position to the initial standby position; when the product 10 to be detected is aligned, the reference fixture 210 may be controlled to move to the alignment position first to serve as the reference point of the alignment position of the product 10 to be detected, and then the pushing fixture 220 is controlled to move to the alignment position to push the product 10 to be detected, so as to achieve alignment.
It is understood, of course, that in practical applications, the implementation manner of the alignment fixture 200 is not limited thereto, and other manners may also be adopted, which are only exemplary and not limited thereto.
In addition, it should be noted that, in the above solution, the reference fixture 210 and the pushing fixture 220 are disposed on two opposite sides of the carrier table 100, in practical applications, the carrier table 100 includes a first side and a second side opposite to each other, and further includes a third side and a fourth side opposite to each other, and the reference fixture 210 and the pushing fixture 220 may have a group (i.e., a group including one reference fixture 210 and one pushing fixture 220) disposed only on the first side and the second side opposite to each other of the carrier table 100; two sets of the reference jigs 210 and the pushing jigs 220 may be provided, and thus, one set of the reference jig 210 and the aligning jig 200 may be provided on the third side and the fourth side of the carrier 100, so that the product 10 to be detected may be aligned in two directions, i.e., the X axis and the Y axis in the horizontal direction, where the Y axis is the extending direction of the first side edge or the second side edge, and the X axis is perpendicular to the Y axis.
For convenience of description, a set of the reference jig 210 and the pushing jig 220 is used as an example for description.
In an embodiment provided by the present invention, as shown in fig. 1, the detecting device further includes:
a position sensing component for acquiring current position information of the product 10 to be detected, wherein the position sensing component at least includes a first sensor 410 arranged at the first side edge of the bearing surface of the bearing table 100 and a second sensor 420 arranged at the second side edge of the bearing surface of the bearing table 100;
and an air floating unit for blowing air onto the bearing surface of the bearing table 100 to float the product 10 to be detected, wherein the air floating unit includes a plurality of air channels, and the plurality of air channels are sequentially arranged from the first side to the second side of the bearing surface of the bearing table 100;
the control unit 600 is further connected to the position sensing component, the adsorption unit and the air floatation unit, and is configured to receive sensing information sensed by the position sensing component, so as to control the working states of the air floatation unit, the adsorption unit and the driving unit 400.
In the above solution, the control unit 600 may adopt a PLC controller to control the working states of the position sensing component, the adsorption unit, the air flotation unit and the driving unit 400 in the detection device, so as to realize the automatic control of the whole detection device; a first sensor 410 and a second sensor are respectively arranged at the first side edge and the second side edge of the carrying surface of the carrying table 100, so as to sense the current position of the product 10 to be detected; the carrying table 100 is further provided with an air floating unit, which can be used for floating the product 10 to be detected, so that on one hand, when the position of the product 10 to be detected held by the alignment fixture 200 changes relative to the carrying table 100, the air floating unit can be controlled to be opened, so as to reduce damage to the product 10 to be detected, on the other hand, the air floating unit can be matched with the position sensing component before the product 10 to be detected is aligned by the alignment fixture 200, and under the control of the control unit 600, the product 10 to be detected is blown up according to the position information sensed by the position sensing component, and the product 10 to be detected is shifted through the change of air flow, so as to pre-align the product 10 to be detected, so that the air floating unit is linked with the position sensing component and the alignment fixture 200, the overall offset of the product 10 to be detected relative to the final alignment position can be shortened, the contact force between the product 10 to be detected and the alignment fixture 200 is reduced, and the damage risk of the product 10 to be detected is reduced.
Specifically, as shown, the control unit 600 at least includes:
a parameter determining module, configured to determine working parameters of the driving unit 400 according to control parameters, where the working parameters of the driving unit 400 include a motion parameter of the alignment fixture 200 in the vertical direction, a first alignment position parameter of the alignment fixture 200 in the horizontal direction, and a second alignment position parameter of the alignment fixture 200 in the horizontal direction, and the control parameters are parameters input by a user or parameters stored in advance;
the receiving module is used for receiving the sensing information of the position sensing component to obtain the current position information of the product 10 to be detected;
a signal generating module, configured to generate a control signal, where the control signal includes a control signal generated according to current position information of the product 10 to be detected and a control signal generated according to the operating parameter of the driving unit 400, and the current position information of the product 10 to be detected includes: the product 10 to be detected is located at a position shifted to the side where the first side is located, the product 10 to be detected is located at a position shifted to the side where the second side is located, or the product 10 to be detected is located at a predetermined non-shifted position between the first side and the second side;
the air floatation control module is used for controlling the working state of the air floatation unit according to the control signal, and the working state of the air floatation unit comprises: a ventilation of a first gas channel 510 of the plurality of gas channels is greater than a ventilation of a second gas channel 520, the ventilation of the first gas channel 510 is less than the ventilation of the second gas channel 520, or the ventilation of the first gas channel 510 is equal to the ventilation of the second gas channel 520, wherein the first gas channel 510 is at least one gas channel located at a side of the bearing surface center of the susceptor 100 near the first side, and the second gas channel 520 is at least one gas channel located at a side of the bearing surface center of the susceptor 100 near the second side;
a driving control module, configured to control a working state of the driving unit 400 according to the control signal, where the working state of the driving unit 400 includes: driving the alignment fixture 200 to ascend, driving the alignment fixture 200 to descend, driving the alignment fixture 200 to translate to the first alignment position, or driving the alignment fixture 200 to translate to the second alignment position;
and the adsorption control module is used for controlling the adsorption unit to be opened or closed according to the control signal.
In the above scheme, in the control unit 600, the parameter determining module may determine the working parameters of the driving unit 400 (for example, the relative stroke of the alignment fixture 200 in the X-axis direction and the Y-axis direction between the first alignment position and the second alignment position) according to the second alignment position input by the user relative to the first alignment position, and the offset direction and the offset amount of the product 10 to be detected, which are required to be offset (taking the color film repairing apparatus as an example, the offset amount may be determined according to the maximum opening diameter of each opening on the carrier 100, and the general offset amount Z is less than or equal to 20 mm); the receiving module is configured to receive sensing information of the position sensing component to determine a current position of the product 10 to be detected, and the air flotation unit control module may control a working state of each gas channel according to the current position of the product 10 to be detected to achieve pre-alignment of the product 10 to be detected.
It should be noted that, for convenience of description, a set of the reference fixture 210 and the pushing fixture 220 is taken as an example to illustrate, so as to realize the alignment of the product to be detected in the X-axis direction; in practical applications, it is preferable that two sets of the reference jig 210 and the pushing jig 220 are provided, that is, the reference jig 210 is provided on the third side of the carrier, and the pushing jig 220 is provided on the fourth side of the carrier, so as to realize the alignment in the Y-axis direction, and at this time,
the position sensing component also comprises a third inductor and a fourth inductor which are respectively arranged on the third side edge and the fourth side edge of the bearing table; the plurality of gas passages of the air floating unit are further sequentially arranged from the third side to the fourth side of the carrying surface of the carrying table 100; the control unit 600 is connected to the position sensing part, the adsorption unit and the air floatation unit, and is configured to receive sensing information sensed by the position sensing part, so as to control the working states of the air floatation unit, the adsorption unit and the driving unit 400.
Specifically, at this time, the signal generating module in the control unit 600 is configured to generate a control signal, where the control signal includes a control signal generated according to the current position information of the product 10 to be detected and a control signal generated according to the operating parameter of the driving unit 400, and the current position information of the product 10 to be detected includes: the product 10 to be detected is located at a position shifted to the side where the third side is located, the product 10 to be detected is located at a position shifted to the side where the fourth side is located, or the product 10 to be detected is located at a predetermined non-shifted position between the third side and the fourth side;
the air floatation control module is used for controlling the working state of the air floatation unit according to the control signal, and the working state of the air floatation unit comprises the following steps: the ventilation of a third gas channel of the plurality of gas channels is greater than the ventilation of a fourth gas channel, the ventilation of the third gas channel is less than the ventilation of the fourth gas channel, or the ventilation of the third gas channel is equal to the ventilation of the fourth gas channel, wherein the third gas channel is at least one gas channel located at the center of the carrying surface of the susceptor 100 and close to the third side, and the fourth gas channel is at least one gas channel located at the center of the carrying surface of the susceptor 100 and close to the fourth side.
The following describes the detailed operation of the detecting device according to the preferred embodiment of the present invention with reference to the accompanying drawings:
step S1, placing the product 10 to be detected on the bearing table 100, and controlling the alignment fixture 200 to ascend from the initial standby position;
fig. 1 is a schematic structural diagram of the product 10 to be detected before the first alignment, as shown in fig. 1, at this time, the reference fixture 210 and the pushing fixture 220 are lifted from the initial standby position to be located at a lifted position, and the product 10 to be detected is conveyed to the bearing table 100 by the manipulator and is located between the reference fixture 210 and the pushing fixture 220.
Step S11, controlling the air floatation unit to be opened;
the control unit 600 controls the air floating unit to be normally opened, the product 10 to be detected can move on the bearing table 100, and at this time, because the reference fixture 210 and the pushing fixture 220 are both in a rising state, the product 10 to be detected cannot deviate from the alignment range on the bearing table 100.
Step S12, detecting the current position information of the product 10 to be detected through the position sensing component;
due to static electricity and the like, the product 10 to be detected may greatly shift in a certain direction, so that the position sensing component at the edge of a certain side of the bearing table 100 cannot sense the existence of the product 10 to be detected, and as shown in fig. 1, the product 10 to be detected is located at a position shifted to the side where the second side is located.
Step S13, controlling the working state of the air floating unit according to the current position information detected by the position sensing component, so that the product 10 to be detected is pre-aligned for the first time under the action of the air floating unit;
as shown in fig. 2 and fig. 3, when the substrate has a large deviation in a certain direction, which causes the sensor at the corresponding side of the carrier 100 to be unable to sense and trigger, the control unit 600 controls the gas channel at the opposite side of the un-triggered sensor to increase the air flotation amount, and induces the product 10 to be detected to move to the side of the un-triggered sensor, until the position sensing component on the carrier 100 senses that the product 10 to be detected is located at the predetermined un-deviated position (i.e. when each sensor on the carrier 100 can sense the product 10 to be detected), controls each gas channel to recover the normal air flotation amount, specifically, taking the pre-alignment in the X-axis direction as an example:
when the position sensing component senses that the product 10 to be detected is located at a position offset to the side where the first side is located, the control unit 600 controls the ventilation amount of a first gas channel 510 of the plurality of gas channels to be greater than the ventilation amount of a second gas channel 520, so that the product 10 to be detected moves from the first side to the second side for performing first pre-alignment, until the position sensing component senses that the product 10 to be detected is located at a predetermined non-offset position between the first side and the second side, the ventilation amount in the first gas channel 510 is controlled to be equal to the ventilation amount in the second gas channel 520;
when the position sensing component senses that the product 10 to be detected is located at a position offset to the side where the second side is located, the control unit 600 controls the ventilation amount of a first gas channel 510 of the plurality of gas channels to be smaller than the ventilation amount of a second gas channel 520, so that the product 10 to be detected moves from the second side to the first side for performing first pre-alignment, until the position sensing component senses that the product 10 to be detected is located at a predetermined non-offset position between the first side and the second side, the ventilation amount in the first gas channel 510 is controlled to be equal to the ventilation amount in the second gas channel 520.
It should be noted that after the first pre-alignment is completed in the X-axis direction, the first pre-alignment is performed in the Y-axis direction, and the working process and principle of the pre-alignment in the Y-axis direction are similar to those in the X-axis direction, and are not described again.
Step S2, controlling the alignment fixture 200 to clamp the product 10 to be detected and translate to a first alignment position, and performing first alignment on the product 10 to be detected;
fig. 4 is a schematic diagram illustrating the alignment operation of the reference fixture 210 when the product 10 to be detected is aligned for the first time. As shown in fig. 4, the reference fixture 210 is advanced to a first alignment position as a fixed position reference point, and at this time, each gas channel in the air floating unit is in a normal open state; fig. 5 is a schematic diagram illustrating the alignment action of the pushing fixture 220 when the product 10 to be detected is aligned for the first time, as shown in fig. 5, after the reference fixture 210 moves to the first alignment position, the pushing fixture 220 moves forward, because each gas channel of the air floating unit is uniformly opened, the air volume of each gas channel is equal, the product 10 to be detected can move along with the movement of the alignment fixture 200, and when the pushing fixture 220 moves to the first alignment position, the position of the product 10 to be detected is uniquely fixed, and the first alignment is completed (it should be noted that the reference fixture 210 and the pushing fixture 220 can complete the translation in four directions of the X axis and the Y axis);
step S3, starting the adsorption unit, adsorbing and fixing the product to be detected 10, controlling the alignment fixture 200 to descend to the initial standby position, and performing a first detection on the product to be detected 10;
fig. 7 is a schematic structural diagram of the product 10 to be detected during the first detection. At this time, the product 10 to be detected is aligned for the first time, the air flotation unit is turned off, the adsorption unit is turned on, so that the product 10 to be detected is fixed on the carrier 100, the reference fixture 210 and the pushing fixture 220 move backward under the control of the driving unit 400 (shown in fig. 7), the product 10 to be detected is fixed by the adsorption unit, the position does not shift, the reference fixture 210 and the pushing fixture 220 descend to the initial standby position, the detection device performs the first detection, taking the color film repair device as an example, at this time, the color film repair device can perform the repair action, and the defect outside the detection blind area is repaired and determined.
Step S4, after the first detection is completed, closing the adsorption unit, and controlling the alignment fixture 200 to ascend from the initial standby position;
fig. 8 is a schematic structural diagram of the product 10 to be detected before the second alignment, at this time, the product 10 to be detected is fixed on the bearing table 100 by the adsorption unit, the defects outside the detection blind area of the product 10 to be detected are repaired and judged, and then the defects inside the detection blind area need to be repaired.
Step S41, determining working parameters of the driving unit 400 according to control parameters, where the working parameters of the driving unit 400 include a motion parameter of the alignment fixture 200 in the vertical direction, a first alignment position parameter of the alignment fixture 200 in the horizontal direction, and a second alignment position parameter of the alignment fixture 200 in the horizontal direction, and the control parameters are parameters input by a user or parameters stored in advance;
determining the offset direction and the offset required by the secondary alignment on the control unit 600 through the parameters input by the user or stored in advance, wherein at the moment, the reference fixture 210 and the pushing fixture 220 are in the rising positions, and the adsorption unit is closed;
step S42, controlling the air floatation unit to be opened;
the control unit 600 controls the air floating unit to be normally opened, and the product 10 to be detected can move on the bearing table 100.
Step S43, detecting the current position information of the product 10 to be detected through the position sensing component;
step S44, controlling the working state of the air floating unit according to the working parameters of the driving unit 400, so that the product 10 to be detected is pre-aligned for the second time under the action of the air floating unit;
as shown in fig. 8, the driving unit 400 determines the offset direction and the offset amount of the second alignment position relative to the first alignment position according to the working parameters determined by the control unit 600, the control unit 600 controls the gas channel with the coaxial and opposite offset direction to increase the air flotation amount, and induces the product 10 to be detected to offset toward the set offset direction, because the reference fixture 210 and the alignment fixture 200 are both in the ascending state, the product 10 to be detected will not be offset out of the alignment moving range of the susceptor 100, specifically, pre-alignment in the X-axis direction is taken as an example:
when the offset direction of the second alignment position compared to the first alignment position is in the X-axis direction and the second alignment position is located in the direction close to the second side of the first alignment position, the control unit 600 controls the ventilation of the first gas channel 510 of the plurality of gas channels to be greater than the ventilation of the second gas channel 520, so that the product 10 to be detected moves from the first side to the second side for the second pre-alignment;
when the offset direction of the second alignment position compared to the first alignment position is in the X-axis direction, and the second alignment position is located in a direction close to the first side of the first alignment position, the control unit 600 controls the ventilation amount of the first gas channel 510 of the plurality of gas channels to be smaller than the ventilation amount of the second gas channel 520, so that the product 10 to be detected moves from the second side to the first side for the second pre-alignment.
It should be noted that after the second pre-alignment is completed in the X-axis direction, the second pre-alignment is performed in the Y-axis direction, and the working process and principle of the pre-alignment in the Y-axis direction are the same as those in the X-axis direction, and are not described again.
Step S5, controlling the alignment fixture 200 to clamp the product 10 to be detected and move to a second alignment position, and performing second alignment on the product 10 to be detected;
fig. 9 is a schematic diagram illustrating the alignment operation of the reference fixture 210 during the second alignment of the product 10 to be inspected. As shown in fig. 9, the reference fixture 210 is advanced to a second alignment position as a fixed position reference point, and at this time, each gas channel in the air floating unit is in a normal open state; fig. 10 is a schematic diagram illustrating the alignment action of the pushing fixture 220 when the product 10 to be detected is aligned for the second time, as shown in fig. 10, after the reference fixture 210 moves to the second alignment position, the pushing fixture 220 moves forward, because each gas channel of the air floating unit is uniformly opened, the air volume of each gas channel is equal, the product 10 to be detected can move along with the movement of the alignment fixture 200, and when the pushing fixture 220 moves to the second alignment position, the position of the product 10 to be detected is uniquely fixed, and the second alignment is completed (it should be noted that the reference fixture 210 and the pushing fixture 220 can complete the displacement in the four directions of the X axis and the Y axis);
step S6, starting the adsorption unit, adsorbing and fixing the product 10 to be detected, controlling the alignment fixture 200 to descend to the initial standby position, and performing secondary detection on the product 10 to be detected;
fig. 12 is a schematic structural diagram of the product 10 to be detected during the second detection. At this time, the product 10 to be detected is aligned for the second time, the air flotation unit is turned off, the adsorption unit is turned on, so that the product 10 to be detected is fixed on the carrier 100, the reference fixture 210 and the pushing fixture 220 move backward under the control of the driving unit 400 (shown in fig. 11), the product 10 to be detected is fixed by the adsorption unit, the position does not shift, the reference fixture 210 and the pushing fixture 220 descend to the initial standby position, the detection device performs the second detection, taking the color film repair device as an example, at this time, the color film repair device can perform the repair action, and the defect in the detection blind area during the first detection is repaired and determined.
And step S7, closing the adsorption unit after the second detection is finished.
It should be noted that other devices that use a transmission light source and have a transmission light source blind area for the product 10 to be detected can all use the detection device provided in the embodiments of the present invention, such as coating of organic and inorganic film layers, film surface foreign matter treatment, and the like.
The embodiment of the invention also provides color film repairing equipment for detecting and repairing the color film substrate, wherein the color film repairing equipment comprises the detection device, and the product 10 to be detected is the color film substrate.
The embodiment of the invention also provides a detection method which is applied to the detection device, and the method comprises the following steps:
step S1, placing the product 10 to be detected on the bearing table 100, and controlling the alignment fixture 200 to ascend from the initial standby position;
step S2, controlling the alignment fixture 200 to clamp the product 10 to be detected and translate to a first alignment position, and performing first alignment on the product 10 to be detected;
step S3, starting the adsorption unit, adsorbing and fixing the product to be detected 10, controlling the alignment fixture 200 to descend to the initial standby position, and performing a first detection on the product to be detected 10;
step S4, after the first detection is completed, closing the adsorption unit, and controlling the alignment fixture 200 to ascend from the initial standby position;
step S5, controlling the alignment fixture 200 to clamp the product 10 to be detected and move to a second alignment position, and performing second alignment on the product 10 to be detected;
step S6, starting the adsorption unit, adsorbing and fixing the product 10 to be detected, controlling the alignment fixture 200 to descend to the initial standby position, and performing secondary detection on the product 10 to be detected;
and step S7, closing the adsorption unit after the second detection is finished.
Illustratively, after the step S1 and before the step S2, the method further comprises:
step S11, controlling the air floatation unit to be opened;
step S12, detecting the current position information of the product 10 to be detected through the position sensing component;
step S13, controlling the working state of the air floating unit according to the current position information detected by the position sensing component, so that the product 10 to be detected is pre-aligned for the first time under the action of the air floating unit.
Illustratively, the step S13 specifically includes:
when the position sensing component senses that the product 10 to be detected is located at a position offset to the side where the first side is located, the control unit 600 controls the ventilation amount of a first gas channel 510 of the plurality of gas channels to be greater than the ventilation amount of a second gas channel 520, so that the product 10 to be detected moves from the first side to the second side for performing first pre-alignment, until the position sensing component senses that the product 10 to be detected is located at a predetermined non-offset position between the first side and the second side, the ventilation amount in the first gas channel 510 is controlled to be equal to the ventilation amount in the second gas channel 520;
when the position sensing component senses that the product 10 to be detected is located at a position offset to the side where the second side is located, the control unit 600 controls the ventilation amount of a first gas channel 510 of the plurality of gas channels to be smaller than the ventilation amount of a second gas channel 520, so that the product 10 to be detected moves from the second side to the first side for performing first pre-alignment, until the position sensing component senses that the product 10 to be detected is located at a predetermined non-offset position between the first side and the second side, the ventilation amount in the first gas channel 510 is controlled to be equal to the ventilation amount in the second gas channel 520.
It should be noted that, the above-mentioned scheme is only for completing the first pre-alignment process in the X-axis direction in step S13, and the method for performing the first pre-alignment in the Y-axis direction is the same as that in the X-axis direction, and is not described again.
For example, after the step S4, the method further includes, before the step S5:
step S41, determining working parameters of the driving unit 400 according to control parameters, where the working parameters of the driving unit 400 include a motion parameter of the alignment fixture 200 in the vertical direction, a first alignment position parameter of the alignment fixture 200 in the horizontal direction, and a second alignment position parameter of the alignment fixture 200 in the horizontal direction, and the control parameters are parameters input by a user or parameters stored in advance;
step S42, controlling the air floatation unit to be opened;
step S43, detecting the current position information of the product 10 to be detected through the position sensing component;
step S44, controlling the working state of the air floating unit according to the working parameters of the driving unit 400, so that the product 10 to be detected is pre-aligned for the second time under the action of the air floating unit.
Illustratively, the method specifically includes, according to step S44:
the horizontal direction comprises an X-axis direction and a Y-axis direction, the Y-axis direction is the extending direction of the edge of the first side or the second side, and the X-axis direction is perpendicular to the Y-axis direction;
when the offset direction of the second alignment position compared to the first alignment position is in the X-axis direction and the second alignment position is located in the direction close to the second side of the first alignment position, the control unit 600 controls the ventilation of the first gas channel 510 of the plurality of gas channels to be greater than the ventilation of the second gas channel 520, so that the product 10 to be detected moves from the first side to the second side for the second pre-alignment;
when the offset direction of the second alignment position compared to the first alignment position is in the X-axis direction, and the second alignment position is located in a direction close to the first side of the first alignment position, the control unit 600 controls the ventilation amount of the first gas channel 510 of the plurality of gas channels to be smaller than the ventilation amount of the second gas channel 520, so that the product 10 to be detected moves from the second side to the first side for the second pre-alignment.
It should be noted that, in the above-mentioned scheme, only the process of completing the second pre-alignment in the X-axis direction in step S44 is performed, and the method of performing the second pre-alignment in the Y-axis direction is the same as that in the X-axis direction, and is not described again.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.
Claims (7)
1. A detection device, comprising:
the bearing table is used for bearing a product to be detected;
the alignment fixture is used for clamping the product to be detected so as to align the product to be detected;
the adsorption unit is used for adsorbing and fixing the product to be detected on the bearing table;
characterized in that, the detection device further comprises:
the driving unit is used for driving the alignment fixture to move, the driving unit can drive the alignment fixture to perform lifting movement in a vertical direction perpendicular to the bearing surface of the bearing table, and the driving unit can drive the alignment fixture to translate to a first alignment position and a second alignment position in a horizontal direction parallel to the bearing surface of the bearing table;
the control unit is connected with the driving unit and used for controlling the working state of the driving unit, so that the driving unit drives the alignment fixture to be located at the first alignment position or the second alignment position, and the product to be detected can be aligned for the second time in the horizontal direction;
the bearing surface of the bearing table comprises a first side and a second side which are opposite, the alignment clamp comprises a reference clamp and a pushing clamp, the reference clamp is arranged on the first side of the bearing table, and the pushing clamp is arranged on the second side of the bearing table;
the detection device further comprises:
the position sensing component is used for acquiring the current position information of the product to be detected and at least comprises a first sensor arranged at the first side edge of the bearing surface of the bearing table and a second sensor arranged at the second side edge of the bearing surface of the bearing table;
the air floatation unit is used for blowing air to the bearing surface of the bearing table so as to enable the product to be detected to float, and comprises a plurality of air channels which are sequentially arranged from the first side to the second side of the bearing surface of the bearing table; the ventilation volume of a first gas channel in the plurality of gas channels is greater than that of a second gas channel, the ventilation volume of the first gas channel is less than that of the second gas channel, or the ventilation volume of the first gas channel is equal to that of the second gas channel, wherein the first gas channel is at least one gas channel which is positioned at the side, close to the first side, of the center of the bearing surface of the bearing platform, and the second gas channel is at least one gas channel which is positioned at the side, close to the second side, of the center of the bearing surface of the bearing platform;
the control unit is further connected with the position sensing component, the adsorption unit and the air floatation unit and used for receiving sensing information sensed by the position sensing component so as to control the working states of the air floatation unit, the adsorption unit and the driving unit.
2. The detection apparatus according to claim 1,
the control unit includes at least:
the parameter determining module is used for determining working parameters of the driving unit according to control parameters, the working parameters of the driving unit comprise a motion parameter of the alignment fixture in the vertical direction, a first alignment position parameter of the alignment fixture in the horizontal direction and a second alignment position parameter of the alignment fixture in the horizontal direction, and the control parameters are parameters input by a user or parameters stored in advance;
the receiving module is used for receiving the sensing information of the position sensing component to obtain the current position information of the product to be detected;
the signal generating module is used for generating control signals, the control signals comprise control signals generated according to the current position information of the product to be detected and control signals generated according to the working parameters of the driving unit, and the current position information of the product to be detected comprises: the product to be detected is located at a position deviated to one side where the first side is located, the product to be detected is located at a position deviated to one side where the second side is located, or the product to be detected is located at a preset non-deviated position between the first side and the second side;
the air floatation control module is used for controlling the working state of the air floatation unit according to the control signal, and the working state of the air floatation unit comprises: a ventilation of a first gas tunnel of the plurality of gas tunnels is greater than a ventilation of a second gas tunnel, a ventilation of the first gas tunnel is less than a ventilation of the second gas tunnel, or a ventilation of the first gas tunnel is equal to a ventilation of the second gas tunnel;
the driving control module is used for controlling the working state of the driving unit according to the control signal, and the working state of the driving unit comprises: driving the alignment fixture to ascend, driving the alignment fixture to descend, driving the alignment fixture to translate to the first alignment position, or driving the alignment fixture to translate to the second alignment position;
and the adsorption control module is used for controlling the adsorption unit to be opened or closed according to the control signal.
3. The detection apparatus according to claim 1,
the driving unit includes: the driving cylinder is connected with the alignment fixture and the control unit and is a two-section cylinder; and/or a servo motor connected with the alignment fixture and the control unit.
4. A color film repair device for detecting and repairing a color film substrate, wherein the color film repair device comprises the detection apparatus according to any one of claims 1 to 3, and the product to be detected is the color film substrate.
5. A detection method applied to the detection device according to any one of claims 1 to 3, wherein the method comprises:
placing a product to be detected on the bearing table, and controlling the alignment fixture to ascend from an initial standby position;
controlling the alignment fixture to clamp the product to be detected to move to a first alignment position, and performing first alignment on the product to be detected;
starting the adsorption unit, adsorbing and fixing the product to be detected, controlling the alignment fixture to descend to the initial standby position, and detecting the product to be detected for the first time;
after the first detection is finished, closing the adsorption unit and controlling the alignment fixture to ascend from the initial standby position;
controlling the alignment fixture to clamp the product to be detected and move to a second alignment position, and performing second alignment on the product to be detected;
starting the adsorption unit, adsorbing and fixing the product to be detected, controlling the alignment fixture to descend to the initial standby position, and performing secondary detection on the product to be detected;
after the second detection is finished, closing the adsorption unit;
the method comprises the following steps that after a product to be detected is placed on the bearing table and the aligning clamp is controlled to ascend from an initial standby position, the aligning clamp is controlled to clamp the product to be detected to move to a first aligning position, and before the product to be detected is aligned for the first time, the method further comprises the following steps:
controlling the air floatation unit to be started;
detecting the current position information of the product to be detected through the position sensing component;
controlling the working state of the air floatation unit according to the current position information detected by the position sensing component so as to enable the product to be detected to be subjected to primary pre-alignment under the action of the air floatation unit;
the controlling the working state of the air floating unit according to the current position information detected by the position sensing component so that the product to be detected is pre-aligned for the first time under the action of the air floating unit specifically comprises:
when the position sensing component senses that the product to be detected is located at a position offset to one side of the first side, the control unit controls the ventilation volume of a first gas channel in the plurality of gas channels to be larger than the ventilation volume of a second gas channel, so that the product to be detected moves from the first side to the second side to perform first pre-alignment, and when the position sensing component senses that the product to be detected is located at a predetermined non-offset position between the first side and the second side, the control unit controls the ventilation volume in the first gas channel to be equal to the ventilation volume in the second gas channel;
when the position sensing component senses that the product to be detected is located at a position offset to one side of the second side, the control unit controls the ventilation volume of a first gas channel in the plurality of gas channels to be smaller than the ventilation volume of a second gas channel, so that the product to be detected moves from the second side to the first side to perform first pre-alignment, and until the position sensing component senses that the product to be detected is located at a predetermined non-offset position between the first side and the second side, the control unit controls the ventilation volume in the first gas channel to be equal to the ventilation volume in the second gas channel.
6. The method according to claim 5, wherein after the first detection is completed, the suction unit is closed, the alignment fixture is controlled to ascend from the initial standby position, the alignment fixture is controlled to clamp the product to be detected and move to a second alignment position, and before the product to be detected is aligned for the second time, the method further comprises:
determining working parameters of the driving unit according to control parameters, wherein the working parameters of the driving unit comprise a motion parameter of the alignment fixture in the vertical direction, a first alignment position parameter of the alignment fixture in the horizontal direction, and a second alignment position parameter of the alignment fixture in the horizontal direction, and the control parameters are parameters input by a user or parameters stored in advance;
controlling the air floatation unit to be started;
detecting the current position information of the product to be detected through the position sensing component;
and controlling the working state of the air floatation unit according to the working parameters of the driving unit so as to perform secondary pre-alignment on the product to be detected under the action of the air floatation unit.
7. The method according to claim 6, wherein in the method, according to the operating parameters of the driving unit, the operating state of the air floating unit is controlled, so that the product to be detected is subjected to the second pre-alignment under the action of the air floating unit, specifically comprising:
the horizontal direction comprises an X-axis direction and a Y-axis direction, the Y-axis direction is the extending direction of the edge of the first side or the second side, and the X-axis direction is perpendicular to the Y-axis direction;
when the offset direction of the second alignment position compared with the first alignment position is in the direction of the X axis and the second alignment position is located at the position close to the second side of the first alignment position, the control unit controls the ventilation volume of a first gas channel in the plurality of gas channels to be larger than that of a second gas channel, so that the product to be detected moves from the first side to the second side for second pre-alignment;
when the offset direction of the second alignment position is in the X-axis direction compared with the first alignment position, and the second alignment position is located in a direction close to the first side of the first alignment position, the control unit controls the ventilation amount of a first gas channel of the plurality of gas channels to be smaller than the ventilation amount of a second gas channel, so that the product to be detected moves from the second side to the first side to perform the second pre-alignment.
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| CN115078402A (en) * | 2022-06-15 | 2022-09-20 | 西安奕斯伟材料科技有限公司 | System for detecting silicon wafer |
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| CN102998833A (en) * | 2012-12-14 | 2013-03-27 | 京东方科技集团股份有限公司 | Array substrate and color film substrate box alignment method |
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| US9048344B2 (en) * | 2008-06-13 | 2015-06-02 | Kateeva, Inc. | Gas enclosure assembly and system |
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| KR20160048549A (en) * | 2014-10-24 | 2016-05-04 | 삼성전기주식회사 | Printed circuit board test device |
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| CN107328791B (en) * | 2017-07-31 | 2020-06-30 | 京东方科技集团股份有限公司 | Defect detection method and device |
| CN107966458B (en) * | 2017-12-26 | 2024-02-09 | 苏州精濑光电有限公司 | Substrate half-plate detection device |
| CN108198168A (en) * | 2017-12-26 | 2018-06-22 | 合肥泰禾光电科技股份有限公司 | material analyzing method and device |
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| CN102998833A (en) * | 2012-12-14 | 2013-03-27 | 京东方科技集团股份有限公司 | Array substrate and color film substrate box alignment method |
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