CN109932561B - Microwave power sensor based on composite arched beam - Google Patents
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Abstract
The invention relates to a microwave power sensor based on a composite arched beam, which comprises a substrate, a coplanar waveguide transmission line and a composite arched beam; the middle of the substrate is provided with a coplanar waveguide transmission line, the two sides of the substrate are provided with ground wires, and the composite arched beam is fixed on the ground wires through an anchor area and is positioned below the composite arched beam; the composite arched beam is composed of an elastic material in the middle and graphene films wrapped up and down, one sides of the upper graphene film and the lower graphene film are connected through an anchor area, the other side of the upper graphene film and the lower graphene film is provided with two output ports, and the upper graphene film and the lower graphene film are respectively connected with one output port. The invention overcomes the problem that the length of the beam cannot be increased due to the limitation of the physical property of the traditional beam structure, not only greatly improves the sensitivity of the sensor, but also improves the precision of the microwave signal detection power and the stability of the system due to the physical property of the arched structure.
Description
Technical Field
The invention belongs to the technical field of microwave power sensors, and particularly relates to a microwave power sensor based on a composite arched beam.
Background
In the research of various links such as signal generation, transmission and reception of microwaves, the measurement of microwave power is an indispensable basic test technology. At present, the most common is a microwave power sensor with a clamped beam structure with a horizontal surface, when a microwave signal enters, an electrostatic force is generated to bend the clamped beam, so that capacitance changes, and finally microwave power is obtained. Theoretically, the longer the length of the beam structure, the higher the sensitivity of the power sensor and the better the performance. But the traditional clamped beam cannot be processed for a long time due to the limitation of the physical property of the traditional clamped beam, otherwise, the structure is unstable and is easy to collapse. The bottleneck of traditional beam structure leads to traditional sensor can not compromise high sensitivity and good structural stability, so traditional microwave power sensor's performance is perfect inadequately, or sensitivity is not high enough, or beam structure is stable inadequately.
Chinese patent CN108362936A (patent application number: 201810385519.4) discloses a clamped beam-based d31 piezoelectric microwave power sensor, which comprises a high-resistance silicon substrate, a coplanar waveguide transmission line and a clamped beam are arranged on a high-resistance silicon substrate, the coplanar waveguide transmission line comprises a central signal line and an earth wire, the earth wire is arranged at two sides of the central signal line, two ends of the clamped beam are fixed between the central signal line and the earth wire by using bridge piers, a mass block is embedded under the clamped beam, four piezoelectric material layers are arranged above the clamped beam, a dielectric layer is filled between the four piezoelectric material layers and the clamped beam, when the microwave power is transmitted in the coplanar waveguide, the clamped beam is pulled down by electrostatic force, the piezoelectric material layer is deformed accordingly, according to the piezoelectric effect, the distribution of charges on the piezoelectric material layer changes, voltages corresponding to the microwave power one by one are generated, and the microwave power is detected through detecting the voltages. The microwave power sensor of the utility model utilizes the matching of the clamped beam and the piezoelectric material to detect the microwave power by testing the voltage, but because the traditional clamped beam is applied in the patent, the electrostatic force received when the signal is larger is very large and is easy to collapse, thus the detection range is smaller; and the sensitivity needs to be further improved due to the machining size problem of the traditional clamped beam.
Chinese patent CN106814259B (patent application No. 201710052699.X) discloses a clamped beam direct heating type microwave signal detector, which is formed by cascading a six-port clamped beam coupler, a channel selection switch, a microwave frequency detector, a microwave phase detector and a direct heating type microwave power sensor; the six-port clamped beam coupler consists of a coplanar waveguide, a dielectric layer, an air layer and a clamped beam; the power coupling degrees from a first port to a third port, from a fourth port to a fifth port and from the first port to the sixth port of the six-port clamped beam coupler are respectively the same, a signal to be detected is input through the first port, is output from the second port to the direct heating type microwave power sensor, is output from the fourth port and the sixth port to the microwave phase detector, and is output from the third port and the fifth port to the channel selection switch; the seventh port and the eighth port of the channel selection switch are connected with a direct heating type microwave power sensor, the ninth port and the tenth port of the channel selection switch are connected with a microwave frequency detector; the power, the phase and the frequency of the microwave signal can be detected simultaneously. In the patent, the coplanar waveguide is input to a terminal resistor to be consumed and converted into heat, microwave power is tested by a method of detecting thermoelectric force by a thermocouple, direct current power consumption is avoided, but due to the adoption of a direct heating method, microwave signal loss is large, the microwave signal is difficult to be subsequently utilized, and the signal rate is not high.
Disclosure of Invention
The invention aims to solve at least one of the problems in the prior art, provides a microwave power sensor based on a composite arched beam, overcomes the problem that the length of the beam cannot be increased due to the limitation of the physical properties of the traditional beam structure, greatly improves the sensitivity of the sensor, and can improve the precision of microwave signal detection power and the stability of a system due to the physical properties of the arched structure.
The implementation mode of the invention is as follows: the microwave power sensor based on the composite arched beam comprises a substrate, a coplanar waveguide transmission line and the composite arched beam; the middle of the substrate is provided with a coplanar waveguide transmission line, the two sides of the substrate are provided with a ground wire, the composite arched beam is fixed on the ground wire through an anchor area, and the coplanar waveguide transmission line is positioned below the composite arched beam; the composite arched beam is composed of an elastic material in the middle and graphene films wrapped up and down, one sides of the upper graphene film and the lower graphene film are connected through an anchor area, the other sides of the upper graphene film and the lower graphene film are provided with two output ports, the first output port is connected with the upper graphene film, and the second output port is connected with the lower graphene film.
According to the microwave power sensor, the microwave power is tested by utilizing the piezoresistive effect of the graphene, the total resistance value of the graphene can be improved by covering the elastic material with the two graphene films, and when the elastic material is bent, the resistance value change of the graphene is doubled compared with that of single-layer graphene, so that the accuracy can be greatly improved for small deformation. The graphene has better response characteristic to deformation, so that the sensitivity of the system can be improved; due to the unique zero band gap structure of the graphene, the structure of the graphene is stable, the graphene can stably and repeatedly work, the graphene can stably work for 150 periods within the maximum stress range, and the reliability of a system is improved.
The invention adopts the composite arched beam structure, overcomes the problem that the traditional beam structure can not increase the length of the beam due to the limitation of the physical property of the beam structure, not only greatly improves the sensitivity of the sensor, but also improves the precision of the microwave signal detection power and the stability of the system due to the physical property of the arched structure. Compared with the traditional capacitance microwave power sensor, the sensor has the advantages of large allowable dynamic range of the power signal to be measured, large output signal, easy detection, strong overload resistance, large dynamic range and the like. The sensor of the application also has the advantages of simple structure and easy integration.
Preferably, the output port is a resistance measurement output port which is connected with the resistance test circuit and used for calculating the microwave power transmitted on the coplanar waveguide transmission line according to the measured resistance value.
Utilize resistance formula to detect microwave signal, belong to online, compare in traditional terminal thermoelectric type microwave power sensor, can not consume microwave signal completely, can continue advantages such as utilization by subsequent process.
Preferably, the composite arched beam is fixed to the ground line by anchor areas at both sides thereof.
Preferably, the composite arched beam has a radian of pi/6.
The anchor areas are positioned at two sides of the composite arched beam, so that the radian of the composite arched beam is pi/6, a large part of stress can be shared, and the stability of the elastic material is improved, so that the composite arched beam has a good protection effect on a circuit, and the overload resistance of the whole system is improved; the sensor has extremely high structural stability, and the power measurement range of the sensor is greatly expanded.
Preferably, the substrate is made of gallium nitride, has high electron mobility, and is suitable for a high-frequency sensor.
Preferably, the microwave power sensor is manufactured by adopting an MEMS planar processing method.
And the MEMS technology is adopted for processing, so that the sensor has the advantages of small volume, high integration level and the like compared with the traditional microwave power sensor.
The invention also discloses a method for testing microwave power by using the microwave power sensor based on the composite arched beam, which comprises the following steps: the output port is connected with a resistance testing circuit, when microwave signals enter the coplanar waveguide transmission line, electrostatic force can be generated to bend the composite arched beam, so that the graphene film attached to the elastic material deforms, the resistance value of the graphene film changes, different microwave powers correspond to different resistors one by one, and the microwave power can be calculated by measuring the variation of the resistance value of the graphene film.
In summary, the microwave power sensor and the method for testing microwaves of the present invention have the following advantages:
(1) the sensor with a simple structure is ingeniously designed and processed by adopting the MEMS process, so that the sensor has the advantages of small volume, high integration level and the like compared with the traditional microwave power sensor;
(2) the invention utilizes the resistance type to detect the microwave signal, belongs to the online type, and compared with the traditional terminal thermoelectric type microwave power sensor, the invention has the advantages that the microwave signal can not be completely consumed, and the microwave signal can be continuously utilized by the subsequent process;
(3) compared with the traditional capacitive microwave power sensor, the composite arched beam microwave power sensor has the advantages of large allowable dynamic range of the power signal to be detected, large output signal, easiness in detection, strong overload resistance, large dynamic range and the like.
(4) According to the microwave power sensor, the graphene film is used for detecting microwave signals, and the sensitivity of the microwave power sensor is greatly improved by using the piezoresistive effect of the graphene; and due to the unique zero band gap structure of the graphene, the stability of the system is greatly improved.
Drawings
FIG. 1 is a schematic front view of a composite arched beam-based microwave power sensor according to example 1;
FIG. 2 is a schematic diagram of the right-view structure of the microwave power sensor based on the composite arched beam of the embodiment 1;
in the figure: 1. a coplanar waveguide transmission line; 2. a ground wire; 3. an anchor area; 4. an elastic material; 5. a first output port; 6. a second output port; 7. an upper graphene film; 8. a lower graphene film.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and examples. It is to be understood that the specific drawings described herein are merely illustrative of the invention and are not intended to limit the invention. All other technical solutions obtained by a person skilled in the art without creative efforts based on the specific embodiments of the present invention belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Example 1
As shown in fig. 1-2, the microwave power sensor based on the composite arched beam in this embodiment is composed of a substrate, a coplanar waveguide transmission line 1, a ground line 2, an anchor area 3, a first output port 5, a second output port 6, and a composite arched beam; a coplanar waveguide transmission line 1 is arranged in the middle of the substrate, ground wires 2 are arranged on two sides of the substrate, the composite arched beam is fixed on the ground wires 2 through an anchor area, and the coplanar waveguide transmission line 1 is arranged below the composite arched beam; the composite arched beam is composed of an elastic material 4 made of middle weakly-doped monocrystalline silicon or monocrystalline germanium and graphene films which are wrapped up and down, the width of the elastic material is 50 micrometers, the thickness of the graphene films is 3 micrometers, one sides of an upper graphene film 7 and one side of a lower graphene film 8 are connected through an anchor area 3, two output ports are arranged on the other sides of the upper graphene film 7 and the lower graphene film 8, a first output port 5 is connected with the upper graphene film 7, and a second output port 6 is connected with the lower graphene film 8. The output port is a resistance measurement output port and is used for being connected with the resistance test circuit and calculating the microwave power transmitted on the coplanar waveguide transmission line according to the measured resistance value. The composite arched beam is fixed on the ground wire 2 by the anchor areas 3 positioned at two sides of the composite arched beam. The radian of the composite arched beam is pi/6. The substrate is made of gallium nitride. The microwave power sensor is manufactured by adopting an MEMS plane processing method.
The method for testing the microwave power of the microwave power sensor based on the composite arched beam comprises the following steps: the output port is connected with the resistance testing circuit, when microwave signals enter the coplanar waveguide transmission line, downward electrostatic force is generated on the elastic material 4, the elastic material 4 is deformed, the shape of graphene films attached to the upper side and the lower side of the elastic material is changed, and the graphene films attached to the elastic material are deformed, so that the resistance value of the graphene films is changed, different microwave powers correspond to different resistors one by one, and the size of the microwave power can be obtained by measuring the variation of the resistance value of the graphene films.
Compared with the traditional beam structure, the composite arched beam of the embodiment can be processed in a longer size due to the physical properties of the structure, the sensitivity and the stability of the system can be greatly improved through simulating the obtained arched beam, the sensitivity coefficient can be improved to 2.57, and the composite arched beam can be repeatedly operated for 1200 times.
The microwave power sensor based on the composite arched beam is characterized in that: the input matching is better, the transmission loss is lower, and the CMOS technology is compatible. The coplanar waveguide can be designed to be impedance matched to improve microwave characteristics, the anchor region 3 of the composite arched beam is designed to be a support structure with a bent shape to absorb stress and improve sensitivity, and the anchor region 3 is placed on the outer side of the coplanar waveguide transmission line 1 to remove the influence of parasitic capacitance, so that a more accurate measurement result is provided.
The sensor has high stability due to the application of the composite arched beam, can measure microwave signals with high power (up to 10W), and has good overload resistance; and provides a higher output signal, and the simulation proves that the device has long-term stability; the variation range of the sensitivity in the X wave band is relatively stable.
The microwave power sensor based on the composite arched beam adopts an MEMS (micro electro mechanical systems) plane processing technology, and has the advantages of small volume, high integration level, high sensitivity and the like. In addition, the composite arched beam is utilized, so that the power range of the microwave signal to be detected can be greatly improved, the overload resistance is good, and the detection system is protected; and the piezoresistive effect of the graphene film is utilized, so that the accuracy of a detection signal and the sensitivity of the system are greatly improved. In summary, the microwave power sensor based on the composite arched beam of the embodiment has the advantages of high precision, large measurement range, high sensitivity, high stability and the like.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The microwave power sensor based on the composite arched beam is characterized by comprising a substrate, a coplanar waveguide transmission line and the composite arched beam; the middle of the substrate is provided with a coplanar waveguide transmission line, the two sides of the substrate are provided with a ground wire, the composite arched beam is fixed on the ground wire through an anchor area, and the coplanar waveguide transmission line is positioned below the composite arched beam; the composite arched beam is composed of an elastic material in the middle and graphene films wrapped up and down, one sides of the upper graphene film and the lower graphene film are connected through an anchor area, the other sides of the upper graphene film and the lower graphene film are provided with two output ports, the first output port is connected with the upper graphene film, and the second output port is connected with the lower graphene film; the output port is connected with the resistance testing circuit, when microwave signals enter the coplanar waveguide transmission line, electrostatic force can be generated to bend the composite arched beam, so that the graphene film attached to the elastic material deforms, the resistance value of the graphene film changes, and the microwave power can be calculated by measuring the variation of the resistance value of the graphene film.
2. A composite arched beam-based microwave power sensor according to claim 1, wherein the composite arched beam is anchored to the ground by anchor areas on both sides of the composite arched beam.
3. A composite arched beam-based microwave power sensor according to claim 1, wherein the composite arched beam has a radian of pi/6.
4. A composite arched beam-based microwave power sensor according to claim 1, wherein the substrate is gallium nitride.
5. A composite arched beam-based microwave power sensor according to claim 1, wherein the microwave power sensor is fabricated using MEMS planar fabrication methods.
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| CN110579643A (en) * | 2019-09-16 | 2019-12-17 | 南京邮电大学 | Microwave power sensor based on arc-shaped clamped beam |
| CN111044796B (en) * | 2019-12-31 | 2022-03-29 | 东南大学 | Symmetrical thermoelectric MEMS microwave standing wave meter and preparation method thereof |
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| CN1885047B (en) * | 2006-06-09 | 2010-04-21 | 东南大学 | Piezoresistance type microwave power sensor and microwave power sensing method thereof |
| CN101332971B (en) * | 2008-07-29 | 2011-07-06 | 东南大学 | Passing type microwave power detector based on microelectronic mechanical cantilever beam and manufacturing method |
| CN102074771A (en) * | 2011-01-06 | 2011-05-25 | 东南大学 | Micro-clamped beam type radio frequency (RF) switch |
| AU2015370928A1 (en) * | 2014-12-23 | 2017-07-20 | Haydale Graphene Industries Plc | Piezoresistive device |
| CN105222932B (en) * | 2015-09-11 | 2017-10-13 | 东南大学 | A kind of high sensitivity piezoresistive pressure sensor and preparation method thereof |
| CN106814252A (en) * | 2017-01-24 | 2017-06-09 | 东南大学 | Online microwave phase detector device based on clamped beam |
| CN107919816B (en) * | 2017-12-18 | 2024-01-19 | 南京邮电大学 | Double-freedom-degree circular arc type piezoelectric energy collector |
| CN108362936A (en) * | 2018-04-26 | 2018-08-03 | 南京邮电大学 | The piezoelectric type microwave power detector of d31 based on clamped beam |
| CN108279330B (en) * | 2018-04-26 | 2023-09-19 | 南京邮电大学 | Cantilever beam-based d33 piezoelectric microwave power sensor |
| CN108594007B (en) * | 2018-05-04 | 2023-05-23 | 南京邮电大学 | Microwave power sensor based on piezoresistive effect of clamped beam |
| CN209486178U (en) * | 2019-01-15 | 2019-10-11 | 南京邮电大学 | A kind of power sensor of high conversion efficiency of thermoelectric |
-
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| Title |
|---|
| Integrated microwave power sensor;A.Dehe et al;《Electronics Letters》;19951207;2187-2188 * |
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Application publication date: 20190625 Assignee: NANJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS NANTONG INSTITUTE Co.,Ltd. Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS Contract record no.: X2021980011448 Denomination of invention: Microwave power sensor based on composite arch beam Granted publication date: 20210212 License type: Common License Record date: 20211027 |
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