CN209486178U - A kind of power sensor of high conversion efficiency of thermoelectric - Google Patents
A kind of power sensor of high conversion efficiency of thermoelectric Download PDFInfo
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- CN209486178U CN209486178U CN201920061377.6U CN201920061377U CN209486178U CN 209486178 U CN209486178 U CN 209486178U CN 201920061377 U CN201920061377 U CN 201920061377U CN 209486178 U CN209486178 U CN 209486178U
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- thermoelectric
- load resistance
- power
- thermoelectric pile
- signal line
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Abstract
A kind of power sensor of high conversion efficiency of thermoelectric, including center signal line, ground wire, load resistance, graphene, thermoelectric pile, test electrode；The power sensor is used as substrate using High Resistivity Si, and the center signal line is arranged portion in the substrate, the two sides of the centrally disposed signal wire of ground wire, one end of center signal line load resistance in parallel with the ground wire of two sides respectively；On substrate, the two sides port of the filled graphite alkene between load resistance, the thermoelectric pile is respectively connected with test electrode for the thermoelectric pile setting.When microwave signal is in coplanar wave guide transmission, load resistance generates thermal energy, and expeditiously passes to thermoelectric pile hot end by graphene heat-conducting layer, thermoelectric pile generates temperature difference, using the generation of Seeback effect and the one-to-one voltage of microwave power, by detecting voltage, to realize the detection of power.Microwave power detector described in the utility model uses graphene and carries out heat transfer, improves sensitivity and convenient for integrated.
Description
Technical field
The present invention relates to technical field of microelectronic mechanical systems, and in particular to a kind of power sensing of high conversion efficiency of thermoelectric
Device.
Background technique
In recent years, the research of grapheme material being continued to develop, discovery graphene has excellent electrical and thermal conductivity performance,
Graphene has the advantages that corrosion-and high-temp-resistant simultaneously, and its good mechanical performance and lower density more allow it to have
The potentiality of thermo electric material field substituted metal.Therefore, grapheme material is applied on Thermoelectric Microwave Power Sensor, is utilized
Its excellent electrical and thermal conductivity performance improves conversion efficiency of thermoelectric.
In the microwave study of microelectromechanical systems (MEMS), microwave power is an important ginseng for characterizing microwave signal
Number.In the generation of microwave signal, transmission and the research of reception links, the detection of microwave power is essential.Most
Common microwave power detector is the microwave power detector based on heat to electricity conversion principle, and microwave signal is passed through load resistance
It is converted to heat, then recycles the Seebeck effect of thermoelectric pile this hot-cast socket at the direct current directly proportional to microwave power to be measured
Voltage output.However, the Heat transmission between load resistance and thermoelectric pile has loss since there are certain thermal conductivitys for substrate,
To reduce conversion efficiency of thermoelectric.
Summary of the invention
It is an object of that present invention to provide a kind of power sensors of high conversion efficiency of thermoelectric.The power sensor utilizes graphite
The high thermal conductivity of alkene improves the temperature difference between load resistance and thermoelectric pile cold end, to improve heat to electricity conversion, has considerable
The features such as electricity output performance, higher sensitivity, rate of good quality rate.
A kind of power sensor of high conversion efficiency of thermoelectric, including center signal line, ground wire, load resistance, graphene, heat
Pile, test electrode；
The power sensor is using High Resistivity Si as substrate, and portion in the substrate is arranged in the center signal line, describedly
The two sides of the centrally disposed signal wire of line, a load in parallel with the ground wire of two sides is electric respectively for one end of the center signal line
Resistance；
The thermoelectric pile is arranged on substrate, the filled graphite alkene between load resistance, the two sides port of the thermoelectric pile
It is respectively connected with test electrode.
Further, it when microwave signal is transmitted on center signal line, is inhaled by the load resistance in parallel of end two
Microwave power is received, power is converted to thermal energy by load resistance, recycles grapheme material that thermal energy is transmitted to thermoelectric pile hot end, then
Thermoelectric pile both ends generate temperature difference, according to Seebeck effect, test electrode generation and the one-to-one voltage of microwave power, by
The power of microwave signal can be obtained by measuring voltage in this.
The utility model has the advantages that
1. the power sensor of the high conversion efficiency of thermoelectric utilizes the high thermal conductivity of grapheme material, load electricity is reduced
Heat loss between resistance and thermoelectric pile hot end improves conversion efficiency of thermoelectric to improve the temperature difference at thermoelectric pile both ends, has
There is higher sensitivity.
2. the grapheme material defect that the power sensor of the high conversion efficiency of thermoelectric uses is few, internal crosslinking uses it
The heat transfer between load resistance and thermoelectric pile, thermal stability with higher are carried out, and graphene temperature rate is fast, significantly
Ground improves the performance of microwave power detector.
3. the power sensor of the high conversion efficiency of thermoelectric is had based on the optimization of Thermoelectric Microwave Power Sensor
There is a high linearity of Thermoelectric Microwave Power Sensor, the advantages that Measurement bandwidth is very wide and higher dynamic range.
4. there are the principal advantages of MEMS, such as small in size, light-weight, power consumption in addition, the utility model is based on MEMS technology
Low, convenient for integrated etc., this series of advantages is that traditional microwave power detector is incomparable, therefore it has and grinds well
Study carefully and application value.
Detailed description of the invention
Fig. 1 is a kind of top view of the microwave power detector of high conversion efficiency of thermoelectric of the present invention.
Identifier declaration: 1- center signal line；2- ground wire；3- load resistance；4- graphene；5- thermoelectric pile；6- tests electrode.
Specific embodiment
Technical solution of the present invention is described in further detail with reference to the accompanying drawings of the specification.
A kind of power sensor of high conversion efficiency of thermoelectric, including center signal line 1, ground wire 2, load resistance 3, graphene
4, thermoelectric pile 5, test electrode 6.
The power sensor is using High Resistivity Si as substrate, and portion in the substrate is arranged in the center signal line 1, describedly
The two sides of the centrally disposed signal wire 1 of line 2, the load in parallel with the ground wire 2 of two sides respectively of one end of the center signal line 1
Resistance 3.
The thermoelectric pile 5 is arranged on substrate, the filled graphite alkene 4 between load resistance 6, the two sides of the thermoelectric pile 5
Port is respectively connected with test electrode 6.
When microwave signal is transmitted on center signal line 1, microwave function is absorbed by the load resistance 3 in parallel of end two
Power is converted to thermal energy by rate, load resistance 3, recycles 4 material of graphene that thermal energy is transmitted to 5 hot end of thermoelectric pile, then thermoelectricity
5 both ends of heap generate temperature difference, according to Seebeck effect, test the generation of electrode 6 and the one-to-one voltage of microwave power, thus
The power of microwave signal can be obtained by measuring voltage.
The utility model utilizes the high thermal conductivity of grapheme material, reduces the heat between load resistance and thermoelectric pile hot end
Loss, to improve the temperature difference at thermoelectric pile both ends, improves conversion efficiency of thermoelectric, sensitivity with higher.
The grapheme material defect of use is few, internal crosslinking, carries out the heat transfer between load resistance and thermoelectric pile with it,
Thermal stability with higher, and graphene temperature rate is fast, greatly increases the performance of microwave power detector.
Optimization of the utility model based on Thermoelectric Microwave Power Sensor, therefore there is Thermoelectric Microwave Power Sensor
High linearity, the advantages that Measurement bandwidth is very wide and higher dynamic range.
In addition, the utility model is based on MEMS technology, the principal advantages with MEMS, such as small in size, light-weight, power consumption
Low, convenient for integrated etc., this series of advantages is that traditional microwave power detector is incomparable, therefore it has and grinds well
Study carefully and application value.
The foregoing is merely better embodiment of the invention, protection scope of the present invention is not with above embodiment
Limit, as long as those of ordinary skill in the art's equivalent modification or variation made by disclosure according to the present invention, should all be included in power
In the protection scope recorded in sharp claim.
Claims (2)
1. a kind of power sensor of high conversion efficiency of thermoelectric, including center signal line, ground wire, load resistance, graphene, thermoelectricity
Heap, test electrode, it is characterised in that:
The power sensor is using High Resistivity Si as substrate, and portion, the ground wire are set in the substrate for the center signal line setting
It sets in the two sides of center signal line, one end of center signal line load resistance in parallel with the ground wire of two sides respectively；
On substrate, the two sides port of the filled graphite alkene between load resistance, the thermoelectric pile connects for the thermoelectric pile setting
It is connected to test electrode.
2. a kind of power sensor of high conversion efficiency of thermoelectric according to claim 1, it is characterised in that: work as microwave signal
When transmitting on center signal line, microwave power is absorbed by the load resistance in parallel of end two, load resistance turns power
It being changed to thermal energy, recycles grapheme material that thermal energy is transmitted to thermoelectric pile hot end, then thermoelectric pile both ends generate temperature difference, according to
Seebeck effect, test electrode generates and the one-to-one voltage of microwave power, and microwave can be obtained from there through measurement voltage
The power of signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920061377.6U CN209486178U (en) | 2019-01-15 | 2019-01-15 | A kind of power sensor of high conversion efficiency of thermoelectric |
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| CN201920061377.6U CN209486178U (en) | 2019-01-15 | 2019-01-15 | A kind of power sensor of high conversion efficiency of thermoelectric |
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| CN209486178U true CN209486178U (en) | 2019-10-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109932561A (en) * | 2019-03-27 | 2019-06-25 | 南京邮电大学 | Microwave power detector based on compound arched girder |
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2019
- 2019-01-15 CN CN201920061377.6U patent/CN209486178U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109932561A (en) * | 2019-03-27 | 2019-06-25 | 南京邮电大学 | Microwave power detector based on compound arched girder |
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Effective date of registration: 20221209 Address after: Room 1284, Block D, Tengfei Building, No. 88, Jiangmiao Road, Yanchuangyuan, Nanjing District, China (Jiangsu) Pilot Free Trade Zone, 211800, Jiangsu Province Patentee after: Nanjing Erxin Electronic Co.,Ltd. Address before: No. 66, new model road, Nanjing, Jiangsu, 210033 Patentee before: NANJING University OF POSTS AND TELECOMMUNICATIONS |