CN109923683A - 微型发光二极管及其制作方法 - Google Patents
微型发光二极管及其制作方法 Download PDFInfo
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- CN109923683A CN109923683A CN201780049112.8A CN201780049112A CN109923683A CN 109923683 A CN109923683 A CN 109923683A CN 201780049112 A CN201780049112 A CN 201780049112A CN 109923683 A CN109923683 A CN 109923683A
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- 238000002360 preparation method Methods 0.000 title abstract description 5
- 239000004065 semiconductor Substances 0.000 claims abstract description 84
- 238000003475 lamination Methods 0.000 claims abstract description 75
- 229910052751 metal Inorganic materials 0.000 claims abstract description 66
- 239000002184 metal Substances 0.000 claims abstract description 66
- 238000012876 topography Methods 0.000 claims abstract description 9
- 238000012360 testing method Methods 0.000 claims description 78
- 239000000463 material Substances 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 35
- 238000004519 manufacturing process Methods 0.000 claims description 33
- 238000005520 cutting process Methods 0.000 claims description 19
- 238000005530 etching Methods 0.000 claims description 12
- 229920001187 thermosetting polymer Polymers 0.000 claims description 8
- 238000003491 array Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 230000005622 photoelectricity Effects 0.000 claims description 5
- 238000013316 zoning Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 97
- 238000000034 method Methods 0.000 description 13
- 239000011241 protective layer Substances 0.000 description 7
- 238000010276 construction Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910004205 SiNX Inorganic materials 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
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- 238000004020 luminiscence type Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 150000004767 nitrides Chemical class 0.000 description 2
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- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 241000208340 Araliaceae Species 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
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- 239000003822 epoxy resin Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
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- 230000010354 integration Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000013102 re-test Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2632—Circuits therefor for testing diodes
- G01R31/2635—Testing light-emitting diodes, laser diodes or photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/32—Additional lead-in metallisation on a device or substrate, e.g. additional pads or pad portions, lines in the scribe line, sacrificed conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0016—Processes relating to electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
Abstract
公开了一种微型发光二极管、显示装置及其制作方法,其至少在一个电极上设置连接区用于金属联线,达到Micro‑LED全测目的。微型发光二极管芯片(100)包括:外延叠层(110),依次包含第一类型半导体层(112)、有源层(113)、第二类型半导体层(114),其具有相对的第一表面和第二表面;第一电极(121),形成于外延叠层(110)的第二表面之上,与第一类型半导体层(112)连接;第二电极(122),形成于外延叠层(110)的第二表面之上,与第二类型半导体层(114)连接;第一电极(121)和第二电极(122)表面上分别设有第一连接区(123)。第一连接区(123)可从表面形貌或外观颜色上区别于所在电极的其他区域。
Description
PCT国内申请,说明书已公开。
Claims (1)
- PCT国内申请,权利要求书已公开。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210249309.9A CN114678453A (zh) | 2017-09-15 | 2017-09-15 | 微型发光二极管及其制作方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2017/101860 WO2019051764A1 (zh) | 2017-09-15 | 2017-09-15 | 微型发光二极管及其制作方法 |
Related Child Applications (1)
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CN202210249309.9A Division CN114678453A (zh) | 2017-09-15 | 2017-09-15 | 微型发光二极管及其制作方法 |
Publications (2)
Publication Number | Publication Date |
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CN109923683A true CN109923683A (zh) | 2019-06-21 |
CN109923683B CN109923683B (zh) | 2022-04-05 |
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CN201780049112.8A Active CN109923683B (zh) | 2017-09-15 | 2017-09-15 | 微型发光二极管及其制作方法 |
CN202210249309.9A Pending CN114678453A (zh) | 2017-09-15 | 2017-09-15 | 微型发光二极管及其制作方法 |
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CN202210249309.9A Pending CN114678453A (zh) | 2017-09-15 | 2017-09-15 | 微型发光二极管及其制作方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US11424387B2 (zh) |
CN (2) | CN109923683B (zh) |
TW (1) | TWI670869B (zh) |
WO (1) | WO2019051764A1 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112582383A (zh) * | 2019-09-27 | 2021-03-30 | 成都辰显光电有限公司 | 芯片结构及芯片检测方法 |
CN112750851A (zh) * | 2019-10-31 | 2021-05-04 | 成都辰显光电有限公司 | 微发光元件阵列基板、制备方法以及转移方法 |
CN113161499A (zh) * | 2021-04-13 | 2021-07-23 | 浙江大学 | 光电器件及其制造方法 |
CN114447173A (zh) * | 2022-01-28 | 2022-05-06 | 京东方晶芯科技有限公司 | 发光器件及其制备方法、发光装置 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109923683B (zh) * | 2017-09-15 | 2022-04-05 | 厦门市三安光电科技有限公司 | 微型发光二极管及其制作方法 |
TWI779242B (zh) * | 2019-10-28 | 2022-10-01 | 錼創顯示科技股份有限公司 | 微型發光二極體裝置 |
CN113450681A (zh) * | 2020-03-24 | 2021-09-28 | 重庆康佳光电技术研究院有限公司 | 一种微发光二极管显示器生产检测方法及其显示器 |
GB2593698B (en) * | 2020-03-30 | 2022-12-07 | Plessey Semiconductors Ltd | Monolithic electronic device |
CN111785751A (zh) * | 2020-06-23 | 2020-10-16 | 东莞市中晶半导体科技有限公司 | 可区块电测的Micro LED晶圆及转移方法 |
CN112259572B (zh) * | 2020-10-26 | 2022-11-08 | 錼创显示科技股份有限公司 | 微型发光二极管显示器 |
TWI824591B (zh) * | 2022-06-29 | 2023-12-01 | 晶呈科技股份有限公司 | Led電路基板結構、led測試封裝方法及led畫素封裝體 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102683529A (zh) * | 2011-03-11 | 2012-09-19 | 奇力光电科技股份有限公司 | 发光二极管元件及其制造方法 |
CN102903828A (zh) * | 2012-10-18 | 2013-01-30 | 四川虹视显示技术有限公司 | 有机发光二极管及封装效果的检测方法 |
CN103887407A (zh) * | 2014-03-19 | 2014-06-25 | 浙江古越龙山电子科技发展有限公司 | 一种微型贴片发光二极管及其生产工艺 |
CN106373895A (zh) * | 2016-10-27 | 2017-02-01 | 友达光电股份有限公司 | 过渡载板装置、显示面板及制造方法、微型发光件检测法 |
CN106486577A (zh) * | 2015-08-27 | 2017-03-08 | 美科米尚技术有限公司 | 微型发光二极管装置 |
CN106816408A (zh) * | 2016-09-07 | 2017-06-09 | 友达光电股份有限公司 | 微型发光二极管单元的中介结构及其制造方法 |
US20170236760A1 (en) * | 2016-02-16 | 2017-08-17 | Mikro Mesa Technology Co., Ltd. | Light-emitting diode lighting device and method for repairing the same |
CN206422062U (zh) * | 2016-11-03 | 2017-08-18 | 佛山市国星光电股份有限公司 | 一种led器件及led显示屏 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6410942B1 (en) * | 1999-12-03 | 2002-06-25 | Cree Lighting Company | Enhanced light extraction through the use of micro-LED arrays |
JP4330476B2 (ja) * | 2004-03-29 | 2009-09-16 | スタンレー電気株式会社 | 半導体発光素子 |
US7166483B2 (en) * | 2004-06-17 | 2007-01-23 | Tekcore Co., Ltd. | High brightness light-emitting device and manufacturing process of the light-emitting device |
CN102376826B (zh) * | 2010-08-06 | 2014-08-06 | 晶元光电股份有限公司 | 半导体光电元件及其制作方法 |
US20130292719A1 (en) * | 2012-05-04 | 2013-11-07 | Chi Mei Lighting Technology Corp. | Light-emitting diode structure and method for manufacturing the same |
US20140217355A1 (en) * | 2013-02-05 | 2014-08-07 | Rensselaer Polytechnic Institute | Semiconductor light emitting device |
KR102085897B1 (ko) * | 2013-06-10 | 2020-03-06 | 엘지이노텍 주식회사 | 발광 소자 및 발광 소자 패키지 |
US9590137B2 (en) * | 2014-05-30 | 2017-03-07 | Mikro Mesa Technology Co., Ltd. | Light-emitting diode |
CN107068665B (zh) * | 2017-04-18 | 2019-02-05 | 天津三安光电有限公司 | 微型发光二极管器件及其制作方法 |
CN109923683B (zh) * | 2017-09-15 | 2022-04-05 | 厦门市三安光电科技有限公司 | 微型发光二极管及其制作方法 |
-
2017
- 2017-09-15 CN CN201780049112.8A patent/CN109923683B/zh active Active
- 2017-09-15 CN CN202210249309.9A patent/CN114678453A/zh active Pending
- 2017-09-15 WO PCT/CN2017/101860 patent/WO2019051764A1/zh active Application Filing
-
2018
- 2018-09-13 TW TW107132173A patent/TWI670869B/zh active
-
2020
- 2020-03-13 US US16/818,872 patent/US11424387B2/en active Active
-
2022
- 2022-08-08 US US17/883,344 patent/US20220375992A1/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102683529A (zh) * | 2011-03-11 | 2012-09-19 | 奇力光电科技股份有限公司 | 发光二极管元件及其制造方法 |
CN102903828A (zh) * | 2012-10-18 | 2013-01-30 | 四川虹视显示技术有限公司 | 有机发光二极管及封装效果的检测方法 |
CN103887407A (zh) * | 2014-03-19 | 2014-06-25 | 浙江古越龙山电子科技发展有限公司 | 一种微型贴片发光二极管及其生产工艺 |
CN106486577A (zh) * | 2015-08-27 | 2017-03-08 | 美科米尚技术有限公司 | 微型发光二极管装置 |
US20170236760A1 (en) * | 2016-02-16 | 2017-08-17 | Mikro Mesa Technology Co., Ltd. | Light-emitting diode lighting device and method for repairing the same |
CN106816408A (zh) * | 2016-09-07 | 2017-06-09 | 友达光电股份有限公司 | 微型发光二极管单元的中介结构及其制造方法 |
CN106373895A (zh) * | 2016-10-27 | 2017-02-01 | 友达光电股份有限公司 | 过渡载板装置、显示面板及制造方法、微型发光件检测法 |
CN206422062U (zh) * | 2016-11-03 | 2017-08-18 | 佛山市国星光电股份有限公司 | 一种led器件及led显示屏 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112582383A (zh) * | 2019-09-27 | 2021-03-30 | 成都辰显光电有限公司 | 芯片结构及芯片检测方法 |
CN112582383B (zh) * | 2019-09-27 | 2022-12-20 | 成都辰显光电有限公司 | 芯片结构及芯片检测方法 |
CN112750851A (zh) * | 2019-10-31 | 2021-05-04 | 成都辰显光电有限公司 | 微发光元件阵列基板、制备方法以及转移方法 |
CN112750851B (zh) * | 2019-10-31 | 2023-01-20 | 成都辰显光电有限公司 | 微发光元件阵列基板、制备方法以及转移方法 |
CN113161499A (zh) * | 2021-04-13 | 2021-07-23 | 浙江大学 | 光电器件及其制造方法 |
CN113161499B (zh) * | 2021-04-13 | 2022-06-17 | 浙江大学 | 光电器件及其制造方法 |
US11818941B2 (en) | 2021-04-13 | 2023-11-14 | Zhejiang University | Mini/micro perovskite light-emitting diode and manufacturing method thereof |
CN114447173A (zh) * | 2022-01-28 | 2022-05-06 | 京东方晶芯科技有限公司 | 发光器件及其制备方法、发光装置 |
CN114447173B (zh) * | 2022-01-28 | 2024-04-16 | 京东方晶芯科技有限公司 | 发光器件及其制备方法、发光装置 |
Also Published As
Publication number | Publication date |
---|---|
CN109923683B (zh) | 2022-04-05 |
US11424387B2 (en) | 2022-08-23 |
US20220375992A1 (en) | 2022-11-24 |
TW201916409A (zh) | 2019-04-16 |
TWI670869B (zh) | 2019-09-01 |
CN114678453A (zh) | 2022-06-28 |
US20200220047A1 (en) | 2020-07-09 |
WO2019051764A1 (zh) | 2019-03-21 |
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