CN109860359B - Gallium nitride-based light emitting diode epitaxial wafer and manufacturing method thereof - Google Patents
Gallium nitride-based light emitting diode epitaxial wafer and manufacturing method thereof Download PDFInfo
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Abstract
The invention discloses a gallium nitride-based light emitting diode epitaxial wafer and a manufacturing method thereof, belonging to the technical field of semiconductors. The GaN-based light emitting diode epitaxial wafer comprises a substrate, an N-type semiconductor layer, an active layer and a P-type semiconductor layer, wherein the N-type semiconductor layer, the active layer and the P-type semiconductor layer are sequentially stacked on the substrate; the N-type semiconductor layer is a GaN layer doped with Si; at least one composite layer is inserted into the N-type semiconductor layer, and the composite layer comprises a first sublayer, a second sublayer and a third sublayer which are sequentially stacked; the first sublayer is a GaN layer doped with Mg, the second sublayer is an undoped AlGaN layer, and the third sublayer is a GaN layer doped with Ge. The invention can effectively promote the transverse expansion of electrons, so that the electrons are uniformly distributed in the N-type semiconductor layer, and the antistatic capability of the LED is improved.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a gallium nitride-based light emitting diode epitaxial wafer and a manufacturing method thereof.
Background
A Light Emitting Diode (LED) is a semiconductor electronic component capable of Emitting Light. The LED has received much attention because of its advantages of energy saving, environmental protection, high reliability, long service life, etc., and in recent years, it has been widely used in the fields of background light sources and display screens, and has started to advance to the civil illumination market. Since the civil lighting focuses on the power saving, energy saving and service life of the product, it is very critical to reduce the series resistance of the LED and improve the antistatic capability of the LED.
The epitaxial wafer is a primary finished product in the LED preparation process. The conventional LED epitaxial wafer includes a substrate, an N-type semiconductor layer, an active layer, and a P-type semiconductor layer, which are sequentially stacked on the substrate. The P-type semiconductor layer is used for providing holes for carrying out compound luminescence, the N-type semiconductor layer is used for providing electrons for carrying out compound luminescence, the active layer is used for carrying out radiation compound luminescence of the electrons and the holes, and the substrate is used for providing a growth surface for the epitaxial material.
In the process of implementing the invention, the inventor finds that the prior art has at least the following problems:
the material of the substrate is generally sapphire, and the materials of the N-type semiconductor layer, the active layer and the P-type semiconductor layer are generally gallium nitride-based materials. Since the substrate material and the gallium nitride-based material are heterogeneous materials and the difference of lattice constants is large, large lattice mismatch exists between the substrate and the N-type semiconductor layer. Stress and defects generated by lattice mismatch are more introduced into the gallium nitride-based material and are continuously accumulated in the epitaxial growth process, so that more stress and defects are accumulated in the N-type semiconductor layer.
In a normal chip or a flip chip formed by a chip process using an epitaxial wafer, electrons in an N-type semiconductor layer migrate in a direction perpendicular to a stacking direction of the epitaxial wafer. In order to avoid an excessively high forward voltage of the front chip or the flip chip, the N-type semiconductor layer is generally thick, so that when an N-type dopant such as silicon is heavily doped in the N-type semiconductor layer, a large number of defects and impurities are easily introduced.
More defects in the N-type semiconductor layer affect the expansion of electrons, resulting in non-uniform distribution of electrons in the N-type semiconductor layer and affecting the antistatic ability of the LED.
Disclosure of Invention
The embodiment of the invention provides a gallium nitride-based light emitting diode epitaxial wafer and a manufacturing method thereof, which can solve the problem that the expansion of electrons is influenced by more defects in an N-type semiconductor layer in the prior art. The technical scheme is as follows:
in one aspect, an embodiment of the present invention provides a gallium nitride-based light emitting diode epitaxial wafer, where the gallium nitride-based light emitting diode epitaxial wafer includes a substrate, an N-type semiconductor layer, an active layer, and a P-type semiconductor layer, where the N-type semiconductor layer, the active layer, and the P-type semiconductor layer are sequentially stacked on the substrate; the N-type semiconductor layer is a GaN layer doped with Si; at least one composite layer is inserted into the N-type semiconductor layer, and the composite layer comprises a first sublayer, a second sublayer and a third sublayer which are sequentially stacked; the first sublayer is a GaN layer doped with Mg, the second sublayer is an undoped AlGaN layer, and the third sublayer is a GaN layer doped with Ge.
Optionally, the composite layer has a thickness of 35nm to 100 nm.
Alternatively, the number of the composite layers is 2 to 10, and a plurality of the composite layers are sequentially stacked.
Optionally, a doping concentration of Mg in the first sublayer is less than or equal to a doping concentration of Ge in the third sublayer.
Preferably, the doping concentration of Ge in the third sublayer is less than the doping concentration of Si in the N-type semiconductor layer.
More preferably, the doping concentration of Ge in the third sublayer differs from the doping concentration of Si in the N-type semiconductor layer by at least one order of magnitude.
Optionally, a content of the Al component in the second sublayer is less than a content of the Ga component in the second sublayer.
Optionally, the thickness of the first sub-layer is greater than the thickness of the second sub-layer, and the thickness of the second sub-layer is less than the thickness of the third sub-layer.
In another aspect, an embodiment of the present invention provides a method for manufacturing a gallium nitride-based light emitting diode epitaxial wafer, where the method includes:
providing a substrate;
growing an N-type semiconductor layer, an active layer and a P-type semiconductor layer on the substrate in sequence;
the N-type semiconductor layer is a GaN layer doped with Si; at least one composite layer is inserted into the N-type semiconductor layer, and the composite layer comprises a first sublayer, a second sublayer and a third sublayer which are sequentially stacked; the first sublayer is a GaN layer doped with Mg, the second sublayer is an undoped AlGaN layer, and the third sublayer is a GaN layer doped with Ge.
Optionally, the growth conditions of the composite layer are the same as those of the N-type semiconductor layer, and the growth conditions include growth temperature and growth pressure.
The technical scheme provided by the embodiment of the invention has the following beneficial effects:
through inserting at least one composite layer in N type semiconductor layer, the composite layer includes first sublayer, second sublayer and the third sublayer that stacks gradually, and the second sublayer is undoped AlGaN layer, and the extension of dislocation and defect can be blockked to the AlGaN layer, improves the crystal quality of N type semiconductor layer, improves the warpage that causes because the defect accumulation, avoids more defect in the N type semiconductor layer can influence the expansion of electron. Meanwhile, the first sublayer is a GaN layer doped with Mg, the third sublayer is a GaN layer doped with Ge, and two-dimensional electron gas exists at the interface of the GaN layer and the AlGaN layer, so that the transverse expansion of electrons can be effectively promoted, the electrons are uniformly distributed in the N-type semiconductor layer, and the antistatic capability of the LED is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a gan-based led epitaxial wafer according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a composite layer provided in an embodiment of the present invention;
fig. 3 is a flowchart of a method for manufacturing an epitaxial wafer of a gallium nitride-based light emitting diode according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
The embodiment of the invention provides a gallium nitride-based light emitting diode epitaxial wafer. Fig. 1 is a schematic structural diagram of a gallium nitride-based light emitting diode epitaxial wafer according to an embodiment of the present invention. Referring to fig. 1, the gan-based light emitting diode epitaxial wafer includes a substrate 10, an N-type semiconductor layer 20, an active layer 30, and a P-type semiconductor layer 40, and the N-type semiconductor layer 20, the active layer 30, and the P-type semiconductor layer 40 are sequentially stacked on the substrate 10.
In the present embodiment, the N-type semiconductor layer 20 is a Si-doped GaN layer. As shown in fig. 1, at least one composite layer 100 is inserted into the N-type semiconductor layer 20. Fig. 2 is a schematic structural diagram of a composite layer according to an embodiment of the present invention. Referring to fig. 2, the composite layer 100 includes a first sub-layer 101, a second sub-layer 102, and a third sub-layer 103, which are sequentially stacked. The first sublayer 101 is a GaN layer doped with Mg, the second sublayer 102 is an undoped AlGaN layer, and the third sublayer 103 is a GaN layer doped with Ge.
According to the embodiment of the invention, at least one composite layer is inserted into the N-type semiconductor layer, the composite layer comprises a first sublayer, a second sublayer and a third sublayer which are sequentially stacked, the second sublayer is an undoped AlGaN layer, and the AlGaN layer can block dislocation and extension of defects, so that the crystal quality of the N-type semiconductor layer is improved, the warpage caused by accumulation of the defects is improved, and the phenomenon that the expansion of electrons is influenced by more defects in the N-type semiconductor layer is avoided. Meanwhile, the first sublayer is a GaN layer doped with Mg, the third sublayer is a GaN layer doped with Ge, and two-dimensional electron gas exists at the interface of the GaN layer and the AlGaN layer, so that the transverse expansion of electrons can be effectively promoted, the electrons are uniformly distributed in the N-type semiconductor layer, and the antistatic capability of the LED is improved.
In addition, although the GaN layer doped with Mg can provide holes and is in direct contact with the N-type semiconductor layer providing electrons, two-dimensional electron gas exists at the interface of the GaN layer doped with Mg and the AlGaN layer, and the two-dimensional electron gas can avoid the direct non-radiative recombination of the holes provided by the GaN layer doped with Mg and the electrons provided by the N-type semiconductor layer. And the Ge-doped GaN layer has better lattice matching degree, so that the overall crystal quality can be improved.
Alternatively, the number of the composite layers 100 may be 2 to 10, such as 6, and a plurality of the composite layers 100 are sequentially stacked. The composite layers are sequentially stacked, dislocation and defects can be further reduced by utilizing a superlattice structure, negative influence of insertion of the composite layers on the crystal quality of the N-type semiconductor layer is avoided, and meanwhile, the electronic expansion effect is enhanced.
Alternatively, the composite layer 100 may have a thickness of 35nm to 100nm, such as 70 nm. Under the condition of effectively improving the crystal quality of the N-type semiconductor layer and promoting the electron expansion in the N-type semiconductor layer, the damage to the crystal structure of the N-type semiconductor layer is avoided, and the sufficient quantity of electrons are provided for the active layer.
Alternatively, the thickness of the first sub-layer 101 may be greater than the thickness of the second sub-layer 102, and the thickness of the second sub-layer 102 may be less than the thickness of the third sub-layer 103. The thicknesses of the first sublayer and the third sublayer are larger, so that the whole GaN crystal structure can be kept, and the damage to the crystal structure of the N-type semiconductor layer can be avoided.
In particular, the thickness of the first sub-layer 101 may be 20nm to 50nm, such as 30 nm. The thickness of the second sub-layer 102 may be between 10nm and 30nm, such as 20 nm. The thickness of the third sub-layer 103 may be 20nm to 50nm, such as 30 nm.
Alternatively, the thickness of the N-type semiconductor layer 20 may be 5 times to 20 times, for example, 10 times, the thickness of the composite layer inserted in the N-type semiconductor layer 20 to maintain the main structure of the N-type semiconductor layer and ensure that a sufficient number of electrons are supplied to the active layer.
Preferably, the thickness of the N-type semiconductor 20 may be 1 μm to 3 μm, such as 2 μm.
Alternatively, the doping concentration of Mg in the first sub-layer 101 may be less than or equal to the doping concentration of Ge in the third sub-layer 103. The whole composite layer can present a state of providing electrons, and negative influence on the N-type semiconductor layer to provide the electrons to the active layer is avoided.
Preferably, the doping concentration of Ge in the third sublayer 103 may be less than the doping concentration of Si in the N-type semiconductor layer 20. The whole doping concentration of the composite layer is lower than that of the N-type semiconductor layer, so that the negative influence of too many impurities on the crystal quality of the N-type semiconductor layer is avoided.
More preferably, the doping concentration of Ge in the third sublayer 103 and the doping concentration of Si in the N-type semiconductor layer 20 may differ by at least one order of magnitude, which is good for implementation. For example, the doping concentration of Ge in the third sub-layer 103 is 1017/cm3N type halfThe doping concentration of Si in the conductor layer 20 is 1019/cm3The doping concentration of Ge in the third sublayer 103 differs by two orders of magnitude from the doping concentration of Si in the N-type semiconductor layer 20.
In particular, the doping concentration of Mg in the first sublayer 101 may be 5 × 1015/cm3～6*1017/cm3E.g. 5 x 1016cm3. The doping concentration of Ge in the third sub-layer 103 may be 5 x 1016/cm3～6*1017/cm3E.g. 1017/cm3. The doping concentration of Si in the N-type semiconductor layer 20 may be 1018/cm3～1020/cm3E.g. 1019/cm3。
Alternatively, the content of the Al component in the second sublayer 102 may be smaller than the content of the Ga component in the second sublayer 102. The second sublayer integrally maintains the crystal structure of the GaN, the crystal matching degree with the first sublayer and the third sublayer is high, and the phenomenon that the content of Al is too high and blocking is formed on an electron injection active layer can be avoided.
In particular, the second sub-layer 102 may be AlxGa1-xN layer, x is more than 0.04 and less than 0.5.
Specifically, the material of the substrate 10 may be sapphire (alumina is a main material), for example, with a crystal orientation of [0001 ]]The sapphire of (4). The active layer 30 may include a plurality of quantum wells and a plurality of quantum barriers, which are alternately stacked; the quantum well material may be indium gallium nitride (InGaN), such as InyGa1-yN, 0 < y < 1, and the material of the quantum barrier can adopt gallium nitride. The P-type semiconductor layer 40 may be P-type doped (e.g., mg) gan.
Further, the thickness of the quantum well may be 3nm to 4nm, preferably 3.5 nm; the thickness of the quantum barrier can be 9 nm-20 nm, preferably 15 nm; the number of quantum wells is the same as the number of quantum barriers, and the number of quantum barriers may be 5 to 11, preferably 8. The thickness of the P-type semiconductor layer 40 may be 100nm to 800nm, preferably 450 nm; the doping concentration of the P-type dopant in the P-type semiconductor layer 40 may be 1018/cm3～1020/cm3Preferably 1019/cm3。
Optionally, as shown in fig. 1, the gan-based led epitaxial wafer may further include a buffer layer 51, where the buffer layer 51 is disposed between the substrate 10 and the N-type semiconductor layer 20 to relieve stress and defects generated by lattice mismatch between the substrate material and the gan and provide nucleation centers for epitaxial growth of the gan material.
Specifically, gallium nitride may be used as the material of the buffer layer 51.
Further, the thickness of the buffer layer 51 may be 15nm to 35nm, preferably 25 nm.
Preferably, as shown in fig. 1, the gan-based led epitaxial wafer may further include an undoped gan layer 52, where the undoped gan layer 52 is disposed between the buffer layer 51 and the N-type semiconductor layer 20 to further alleviate stress and defects caused by lattice mismatch between the substrate material and the gan, and provide a growth surface with good crystal quality for the main structure of the epitaxial wafer.
In a specific implementation, the buffer layer is a thin layer of gallium nitride that is first grown at low temperature on the patterned substrate, and is therefore also referred to as a low temperature buffer layer. Then, the longitudinal growth of gallium nitride is carried out on the low-temperature buffer layer, and a plurality of mutually independent three-dimensional island-shaped structures called three-dimensional nucleation layers can be formed; then, transverse growth of gallium nitride is carried out on all the three-dimensional island structures and among the three-dimensional island structures to form a two-dimensional plane structure which is called a two-dimensional recovery layer; and finally, growing a thicker gallium nitride layer called an intrinsic gallium nitride layer on the two-dimensional growth layer at a high temperature. The three-dimensional nucleation layer, two-dimensional recovery layer, and intrinsic gallium nitride layer are collectively referred to as undoped gallium nitride layer in this embodiment.
Further, the thickness of the undoped gallium nitride layer 52 may be 1 μm to 5 μm, preferably 3 μm.
Optionally, as shown in fig. 1, the gan-based LED epitaxial wafer may further include a stress release layer 60, where the stress release layer 60 is disposed between the N-type semiconductor layer 20 and the active layer 30 to release stress generated by lattice mismatch between sapphire and gan, so as to improve crystal quality of the active layer, facilitate radiation recombination of electrons and holes in the active layer for light emission, improve internal quantum efficiency of the LED, and further improve light emission efficiency of the LED.
Specifically, the material of the stress release layer 60 may be gallium indium aluminum nitride (AlInGaN), which can effectively release the stress generated by lattice mismatch between sapphire and gallium nitride, improve the crystal quality of the epitaxial wafer, and improve the light emitting efficiency of the LED.
Preferably, the molar content of the aluminum component in the stress relieving layer 60 may be less than or equal to 0.2, and the molar content of the indium component in the stress relieving layer 60 may be less than or equal to 0.05, so as to avoid causing adverse effects.
Further, the thickness of the stress relaxation layer 60 may be 50nm to 500nm, preferably 300 nm.
Optionally, as shown in fig. 1, the gan-based LED epitaxial wafer may further include an electron blocking layer 71, where the electron blocking layer 71 is disposed between the active layer 30 and the P-type semiconductor layer 40 to prevent electrons from jumping into the P-type semiconductor layer to combine with holes in a non-radiative manner, thereby reducing the light emitting efficiency of the LED.
Specifically, the electron blocking layer 71 may be made of P-type doped aluminum gallium nitride, such as AlzGa1-zN，0.1＜z＜0.5。
Further, the thickness of the electron blocking layer 71 may be 50nm to 150nm, preferably 100 nm.
Preferably, as shown in fig. 1, the gan-based led epitaxial wafer may further include a low-temperature P-type layer 72, where the low-temperature P-type layer 72 is disposed between the active layer 30 and the electron blocking layer 71, so as to avoid indium atoms in the active layer from being precipitated due to a high growth temperature of the electron blocking layer, which affects the light emitting efficiency of the led.
Specifically, the material of the low temperature P-type layer 72 may be the same as the material of the P-type semiconductor layer 40. In the present embodiment, the material of the low temperature P-type layer 72 may be P-type doped gan.
Further, the thickness of the low-temperature P-type layer 72 may be 10nm to 50nm, preferably 30 nm; the doping concentration of the P-type dopant in the low temperature P-type layer 72 may be 1018/cm3～1020/cm3Preferably 1019/cm3。
Optionally, as shown in fig. 1, the gan-based led epitaxial wafer may further include a contact layer 80, where the contact layer 80 is disposed on the P-type semiconductor layer 40 to form an ohmic contact with an electrode or a transparent conductive film formed in a chip manufacturing process.
Specifically, the contact layer 80 may be made of P-type doped indium gallium nitride or gallium nitride.
Further, the thickness of the contact layer 80 may be 5nm to 300nm, preferably 100 nm; the doping concentration of the P-type dopant in the contact layer 80 may be 1021/cm3～1022/cm3Preferably 5 x 1021/cm3。
The embodiment of the invention provides a method for manufacturing a gallium nitride-based light-emitting diode epitaxial wafer, which is suitable for manufacturing the gallium nitride-based light-emitting diode epitaxial wafer shown in figure 1. Fig. 3 is a flowchart of a method for manufacturing an epitaxial wafer of a gallium nitride-based light emitting diode according to an embodiment of the present invention. Referring to fig. 3, the manufacturing method includes:
step 201: a substrate is provided.
Optionally, the step 201 may include:
controlling the temperature to be 1000-1200 ℃ (preferably 1100 ℃), and annealing the substrate for 6-10 minutes (preferably 8 minutes) in a hydrogen atmosphere;
the substrate is subjected to a nitridation process.
The surface of the substrate is cleaned through the steps, impurities are prevented from being doped into the epitaxial wafer, and the growth quality of the epitaxial wafer is improved.
Step 202: an N-type semiconductor layer, an active layer and a P-type semiconductor layer are sequentially grown on a substrate.
The N-type semiconductor layer is a GaN layer doped with Si; at least one composite layer is inserted into the N-type semiconductor layer, and the composite layer comprises a first sublayer, a second sublayer and a third sublayer which are sequentially laminated; the first sublayer is a GaN layer doped with Mg, the second sublayer is an undoped AlGaN layer, and the third sublayer is a GaN layer doped with Ge.
Alternatively, the growth conditions of the composite layer and the N-type semiconductor layer may be the same, and the growth conditions include a growth temperature and a growth pressure. The same growth conditions are adopted, and the realization is simpler and more convenient.
Specifically, the growth temperature of the composite layer may be 1000 ℃ to 1200 ℃, such as 1100 ℃; the growth pressure of the composite layer may be 100-500 torr, such as 300 torr.
Specifically, this step 202 may include:
the method comprises the following steps of firstly, controlling the temperature to be 1000-1200 ℃ (preferably 1100 ℃) and the pressure to be 100-500 torr (preferably 300torr), growing an N-type semiconductor layer on a substrate, and growing at least one composite layer in the growth process of the N-type semiconductor layer;
secondly, growing an active layer on the N-type semiconductor layer; the growth temperature of the quantum well is 720 ℃ to 829 ℃ (preferably 760 ℃), and the growth pressure of the quantum well is 100torr to 500torr (preferably 300 torr); the growth temperature of the quantum barrier is 850 ℃ -959 ℃ (preferably 900 ℃), and the growth pressure of the quantum barrier is 100 torr-500 torr (preferably 300 torr);
and thirdly, controlling the temperature to be 850-1080 ℃ (preferably 960 ℃) and the pressure to be 100-300 torr (preferably 200torr), and growing the P-type semiconductor layer on the active layer.
Optionally, before the first step, the manufacturing method may further include:
a buffer layer is grown on a substrate.
Accordingly, an N-type semiconductor layer is grown on the buffer layer.
Specifically, growing a buffer layer on a substrate may include:
controlling the temperature to be 400-600 ℃ (preferably 500 ℃), and the pressure to be 400-600 torr (preferably 500torr), and growing a buffer layer on the substrate;
the buffer layer is subjected to in-situ annealing treatment for 5 to 10 minutes (preferably 8 minutes) at a controlled temperature of 1000 to 1200 c (preferably 1100 c) and a pressure of 400to 600torr (preferably 500 torr).
Preferably, after growing the buffer layer on the substrate, the manufacturing method may further include:
and growing an undoped gallium nitride layer on the buffer layer.
Accordingly, an N-type semiconductor layer is grown on the undoped gallium nitride layer.
Specifically, growing an undoped gallium nitride layer on the buffer layer may include:
an undoped gallium nitride layer is grown on the buffer layer at a temperature of 1000 ℃ to 1100 ℃ (preferably 1050 ℃) and a pressure of 100torr to 500torr (preferably 300 torr).
Optionally, before the second step, the manufacturing method may further include:
and growing a stress release layer on the N-type semiconductor layer.
Accordingly, an active layer is grown on the stress relieving layer.
Specifically, growing the stress relief layer on the N-type semiconductor layer may include:
the temperature is controlled to be 800 ℃ to 1100 ℃ (preferably 950 ℃) and the pressure is controlled to be 100torr to 500torr (preferably 300torr), and the stress release layer is grown on the N-type semiconductor layer.
Optionally, before the third step, the manufacturing method may further include:
an electron blocking layer is grown on the active layer.
Accordingly, a P-type semiconductor layer is grown on the electron blocking layer.
Specifically, growing an electron blocking layer on the active layer may include:
the temperature is controlled to be 850 ℃ to 1080 ℃ (preferably 960 ℃), the pressure is controlled to be 200torr to 500torr (preferably 350torr), and the electron blocking layer is grown on the active layer.
Preferably, before growing the electron blocking layer on the active layer, the manufacturing method may further include:
a low temperature P-type layer is grown on the active layer.
Accordingly, an electron blocking layer is grown on the low temperature P-type layer.
Specifically, growing the low temperature P-type layer on the active layer may include:
the temperature is controlled to be 600 ℃ to 850 ℃ (preferably 750 ℃) and the pressure is controlled to be 100torr to 600torr (preferably 300torr), and the low-temperature P type layer is grown on the active layer.
Optionally, after the third step, the manufacturing method may further include:
and growing a contact layer on the P-type semiconductor layer.
Specifically, growing a contact layer on the P-type semiconductor layer may include:
the contact layer is grown on the P-type semiconductor layer at a temperature of 850 to 1050 deg.C (preferably 950 deg.C) and a pressure of 100to 300torr (preferably 200 torr).
After the completion of the epitaxial growth, the temperature is lowered to 650 to 850 ℃ (preferably 750 ℃), the epitaxial wafer is annealed in a nitrogen atmosphere for 5 to 15 minutes (preferably 10 minutes), and then the temperature of the epitaxial wafer is lowered to room temperature.
The control of the temperature and the pressure both refer to the control of the temperature and the pressure in a reaction chamber for growing the epitaxial wafer, and specifically refer to the reaction chamber of a Metal-organic Chemical Vapor Deposition (MOCVD) device. During implementation, trimethyl gallium or triethyl gallium is used as a gallium source, high-purity ammonia gas is used as a nitrogen source, trimethyl indium is used as an indium source, trimethyl aluminum is used as an aluminum source, silane is used as a silicon source, tetramethyl germanium is used as a germanium source, and cyclopentadienyl magnesium is used as a magnesium source.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (8)
1. A gallium nitride-based light emitting diode epitaxial wafer comprises a substrate, an N-type semiconductor layer, an active layer and a P-type semiconductor layer, wherein the N-type semiconductor layer, the active layer and the P-type semiconductor layer are sequentially laminated on the substrate; the N-type semiconductor layer is a GaN layer doped with Si; the N-type semiconductor layer is characterized in that at least one composite layer is inserted into the N-type semiconductor layer, and the composite layer comprises a first sublayer, a second sublayer and a third sublayer which are sequentially laminated; the first sublayer is a GaN layer doped with Mg, the second sublayer is an undoped AlGaN layer, the third sublayer is a GaN layer doped with Ge,
the doping concentration of Mg in the first sublayer is less than or equal to that of Ge in the third sublayer, the doping concentration of Ge in the third sublayer is less than that of Si in the N-type semiconductor layer, the thickness of the first sublayer is 20 nm-50 nm, the thickness of the second sublayer is 10 nm-30 nm, and the thickness of the third sublayer is 20 nm-50 nm.
2. The GaN-based LED epitaxial wafer according to claim 1, wherein the composite layer has a thickness of 35nm to 100 nm.
3. The gan-based led epitaxial wafer according to claim 1 or 2, wherein the number of the composite layers is 2 to 10, and a plurality of the composite layers are sequentially stacked.
4. The GaN-based LED epitaxial wafer of claim 1, wherein the doping concentration of Ge in the third sublayer differs from the doping concentration of Si in the N-type semiconductor layer by at least one order of magnitude.
5. The gallium nitride-based light emitting diode epitaxial wafer according to claim 1 or 2, wherein the content of the Al component in the second sub-layer is less than the content of the Ga component in the second sub-layer.
6. The GaN-based LED epitaxial wafer according to claim 1 or 2, wherein the thickness of the first sub-layer is greater than that of the second sub-layer, and the thickness of the second sub-layer is less than that of the third sub-layer.
7. A manufacturing method of a gallium nitride-based light emitting diode epitaxial wafer is characterized by comprising the following steps:
providing a substrate;
growing an N-type semiconductor layer, an active layer and a P-type semiconductor layer on the substrate in sequence;
the N-type semiconductor layer is a GaN layer doped with Si; at least one composite layer is inserted into the N-type semiconductor layer, and the composite layer comprises a first sublayer, a second sublayer and a third sublayer which are sequentially stacked; the first sublayer is a GaN layer doped with Mg, the second sublayer is an undoped AlGaN layer, and the third sublayer is a GaN layer doped with Ge.
8. The method according to claim 7, wherein the growth conditions of the composite layer are the same as those of the N-type semiconductor layer, and the growth conditions include a growth temperature and a growth pressure.
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| CN113990990B (en) * | 2021-09-01 | 2023-05-09 | 华灿光电（浙江）有限公司 | Micro light-emitting diode epitaxial wafer and manufacturing method thereof |
| CN114284409B (en) * | 2022-03-08 | 2022-05-24 | 江西兆驰半导体有限公司 | Light emitting diode and preparation method thereof |
| CN116885066B (en) * | 2023-09-04 | 2023-12-01 | 江西兆驰半导体有限公司 | Light-emitting diode epitaxial wafer, preparation method thereof and light-emitting diode |
| CN117810332B (en) * | 2024-03-01 | 2024-05-17 | 江西兆驰半导体有限公司 | Gallium nitride-based light-emitting diode epitaxial wafer and preparation method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107195737A (en) * | 2017-06-30 | 2017-09-22 | 华灿光电(苏州）有限公司 | A kind of LED epitaxial slice and its manufacture method |
| CN108110098A (en) * | 2017-10-25 | 2018-06-01 | 华灿光电（浙江）有限公司 | Gallium nitride-based light emitting diode epitaxial wafer and manufacturing method thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100835116B1 (en) * | 2007-04-16 | 2008-06-05 | 삼성전기주식회사 | Nitride semiconductor light emitting device |
| CN206849857U (en) * | 2017-06-21 | 2018-01-05 | 安徽三安光电有限公司 | A kind of epitaxial structure and light emitting diode |
| CN107195738B (en) * | 2017-06-30 | 2019-07-02 | 华灿光电（浙江）有限公司 | Light emitting diode epitaxial wafer and manufacturing method thereof |
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Patent Citations (2)
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| CN108110098A (en) * | 2017-10-25 | 2018-06-01 | 华灿光电（浙江）有限公司 | Gallium nitride-based light emitting diode epitaxial wafer and manufacturing method thereof |
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