CN109860091A - Silicon wafer boat transfer device and transfer method - Google Patents
Silicon wafer boat transfer device and transfer method Download PDFInfo
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- CN109860091A CN109860091A CN201910169519.5A CN201910169519A CN109860091A CN 109860091 A CN109860091 A CN 109860091A CN 201910169519 A CN201910169519 A CN 201910169519A CN 109860091 A CN109860091 A CN 109860091A
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Abstract
The invention discloses a kind of silicon wafer boat transfer device, including substrate, lifting cylinder is installed, X-axis reforms unit and Y-axis is reformed unit on the substrate, is connected with vacuum chuck in the lifting cylinder bottom；The lifting cylinder is mounted below the substrate, for driving the vacuum chuck to rise or fall；The vacuum chuck is for drawing silicon wafer boat；The X-axis reforms unit for the silicon wafer boat that vacuum chuck drawn of reforming along the x axis, and the Y-axis reforms unit for silicon wafer boat that vacuum chuck of reforming along the y axis is drawn.The silicon wafer boat transfer device improves the efficiency and effect being carried to silicon wafer boat on transport trolley, and then improves the processing efficiency of silicon chip of solar cell, it can be achieved that the automation that crystal silicon solar energy battery processes, reduces production cost.The present invention also provides a kind of silicon wafer boat transfer methods using the silicon wafer boat transfer device.
Description
Technical field
The present invention relates to crystal silicon solar energy battery manufacture fields, and in particular to a kind of silicon wafer boat transfer device and transfer side
Method.
Background technique
In the processing of crystal silicon solar energy battery, silicon wafer by the gaily decorated basket be packed into silicon wafer boat (such as metal boat) with
Afterwards, it needs for the silicon wafer boat for filling silicon wafer to be transported in technique furnace and carries out corresponding process.
In the prior art, silicon wafer boat is placed on vertically after filling silicon wafer and sets to fetch bit, small by will manually be carried to conveying
Che Zhong, then push the transport trolley and enter and carry out corresponding process in technique furnace.Due to heavier after silicon wafer boat loading silicon wafer,
Manual handling large labor intensity, inefficiency, and misoperation are easy to appear silicon wafer boat placement location inaccuracy, silicon wafer boat damage
The problems such as, reduce the processing efficiency of solar battery.With improved day by day, the realization crystal silicon solar electricity of automated production
Pond processing automation, raising production efficiency are trends of the times.
Summary of the invention
In view of this, the present invention provides the silicon wafer boats of a kind of silicon wafer boat transfer device and application the silicon wafer boat transfer device
Transfer method.
One technical scheme adopted by the invention is that: a kind of silicon wafer boat transfer device, including substrate are provided, in the substrate
On lifting cylinder is installed, X-axis reforms unit and Y-axis is reformed unit, be connected with vacuum chuck in the lifting cylinder bottom,
In,
Lifting cylinder: it is mounted below the substrate, for driving the vacuum chuck to rise or fall；
Vacuum chuck: for drawing silicon wafer boat；
X-axis is reformed unit: the silicon wafer boat drawn for vacuum chuck of reforming along the x axis, including installation is on the substrate
X-axis reform cylinder and the X-axis reform plate that is connected in the X-axis reform cylinder, the X-axis reform cylinder X-axis can be driven to return
Positive plate moves along the x axis；
Y-axis is reformed unit: the silicon wafer boat drawn for vacuum chuck of reforming along the y axis, including is mounted on the X-axis and is reformed
Y-axis reform cylinder on plate and the Y-axis reform plate being connected in the Y-axis reform cylinder, the Y-axis reform cylinder can drive Y
Axis reform plate moves along the y axis.
As the improvement to above scheme, a Horizontal limiting plate, the Horizontal limiting are provided at the vacuum chuck
The top for the silicon wafer boat that plate is drawn for positioning vacuum chuck.
As the improvement to above scheme, the Horizontal limiting sleeve-board is set on the outside of the vacuum chuck, the horizontal limit
The area of position plate is greater than the area of the vacuum chuck.
As the improvement to above scheme, roller group is fixedly installed in the Y-axis reform plate, the roller group includes
At least two idler wheels arranged side by side, the idler wheel can be parallel to the Y-axis reform plate around its central axis, the axis.
As the improvement to above scheme, the vacuum chuck includes vacuum evacuation device and organ type sucker, the organ
Formula sucker is connected to the lifting cylinder bottom, and the vacuum evacuation device is connected with organ type sucker by pipeline.
As the improvement to above scheme, which further includes automatic centering unit, the automatic centering
Unit is connected between the substrate and the lifting cylinder；The automatic centering unit includes floating cylinder, when the floating
When cylinder is ventilated, the horizontal position of the lifting cylinder is fixed；When the floating cylinder is held one's breath, the level of the lifting cylinder
Position is variable.
As the improvement to above scheme, the floating cylinder includes cylinder body and the company being fixedly connected on the substrate
The float portion for being connected to above the cylinder body, can moving horizontally and rotate relative to the cylinder body, the lifting cylinder connection
The float portion.
Another technical solution used in the present invention is: providing a kind of silicon wafer boat using above-mentioned silicon wafer boat transfer device turn
Shifting method includes the following steps:
(1) it is moved to the silicon wafer boat transfer device and takes boat position, the vacuum chuck vacuumizes, and draws the silicon for being located at and taking on boat position
Piece boat；
(2) increase the silicon wafer boat transfer device, Y-axis unit of reforming is reformed the silicon wafer boat along the y axis, the X-axis
Unit of reforming is reformed the silicon wafer boat along the x axis；
(3) it is moved to the silicon wafer boat transfer device and puts boat position, vacuum chuck stopping vacuumizes, and places silicon wafer boat to putting boat
On position；
(4) the silicon wafer boat transfer device resets；
(5) step (1)~(4) are repeated.
As the improvement to above scheme, which further includes automatic centering unit, the automatic centering
Unit is connected between the substrate and the lifting cylinder；The automatic centering unit includes floating cylinder, when the floating
When cylinder is ventilated, the horizontal position of the lifting cylinder is fixed；When the floating cylinder is held one's breath, the level of the lifting cylinder
Position is variable；
In step (1), the floating cylinder is made to ventilate first, after the silicon wafer boat transfer device is moved to take boat position；
In step (2), after the silicon wafer boat transfer device rises, the floating cylinder is held one's breath, and the Y-axis reform cylinder drives institute
It states Y-axis reform plate to be moved along the y axis to reform the silicon wafer boat in Y direction, the X-axis reform cylinder drives the X-axis
Reform plate is moved along the x axis to reform the silicon wafer boat in X-direction, the rear floating cylinder ventilation；
In step (4), after the silicon wafer boat transfer device resets, the floating cylinder is held one's breath.
As the improvement to above scheme, in step (1), the X-axis reform cylinder, Y-axis reform cylinder and lifting cylinder
It is in cylinder rod and stretches out state；
In step (2), after the silicon wafer boat transfer device rises, the cylinder rod of lifting cylinder is retracted, and the floating cylinder is held one's breath, institute
The cylinder rod for stating Y-axis reform cylinder, which retracts, drives the Y-axis reform plate to move along the y axis to reform the silicon wafer in Y direction
Boat, the cylinder rod of the X-axis reform cylinder, which retracts, drives the X-axis reform plate mobile described to reform in X-direction along the x axis
Silicon wafer boat；
In step (3), the silicon wafer boat transfer device, which is moved to, to be put above boat position, the Y-axis reform cylinder, X-axis reform cylinder,
The cylinder rod of lifting cylinder is successively stretched out, and vacuum chuck stopping vacuumizes, and places silicon wafer boat to putting on boat position.
Silicon wafer boat transfer device and transfer method provided by the present invention, improve and silicon wafer boat are carried on transport trolley
Efficiency and effect, and then improve silicon chip of solar cell processing efficiency, it can be achieved that crystal silicon solar energy battery process
Automation, reduce production cost.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of silicon wafer boat transfer device in the embodiment of the present invention;
Fig. 2 is the flow diagram of silicon wafer boat transfer method in the embodiment of the present invention.
Specific embodiment
The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawing, so that advantages and features of the invention energy
It is easier to be readily appreciated by one skilled in the art, so as to make a clearer definition of the protection scope of the present invention.
In the description of the present invention, it is to be understood that, term "horizontal", "vertical", "upper", "lower", "front", "rear",
The orientation or positional relationship of the instructions such as "left", "right", "top", "bottom", "inner", "outside" is orientation based on the figure or position
Relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must have
There is specific orientation, be constructed and operated in a specific orientation, therefore is not considered as limiting the invention.It is retouched in of the invention
In stating, it should be noted that unless otherwise clearly defined and limited, term " installation ", " connected ", " connection " should do broad sense reason
Solution, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be directly connected, it can also be with
Indirectly connected through an intermediary, it can be the connection inside two elements.For the ordinary skill in the art, may be used
To understand the concrete meaning of above-mentioned term in the present invention by concrete condition.
The present invention provides a kind of silicon wafer boat transfer device and transfer methods, for that will fill the silicon wafer boat of silicon wafer (such as gold
Belong to boat) it is transferred on transport trolley, it improves and silicon wafer boat is carried to efficiency on transport trolley and effect, it can be achieved that solar energy
The automation of battery processing, reduces production cost.
Embodiment one:
Present embodiments provide a kind of silicon wafer boat transfer device, for grabbing the silicon wafer boat for filling silicon wafer, and to the silicon wafer boat into
Line position is set reform after, silicon wafer boat is placed to transport trolley.The silicon wafer boat transfer device is mountable on manipulator, by machine
Tool hand-motion, which is travelled to and fro between, to be taken boat position (being located at silicon slice loading station) and puts between boat position (being located on transport trolley).
Referring to Fig. 1, Fig. 1 shows the structure of silicon wafer boat transfer device described in the present embodiment, the silicon wafer boat transfer
Mechanism includes substrate 10, lifting cylinder 20 is equipped on the substrate 10, X-axis reforms unit and Y-axis is reformed unit, described
20 bottom of lifting cylinder is connected with vacuum chuck 30.The silicon wafer boat transfer device can be installed by the substrate 10 to manipulator
On.
Wherein, the lifting cylinder 20 is mounted on 10 lower section of substrate, for driving the vacuum chuck 30 vertical
It rises or declines；The vacuum chuck 30 takes the silicon wafer boat that silicon wafer is filled on boat position described in being used to draw；The X-axis reform unit use
In the silicon wafer boat that vacuum chuck 30 of reforming along the x axis is drawn, the Y-axis reforms unit for vacuum of reforming along the y axis
The silicon wafer boat that sucker 30 is drawn.It should be noted that herein, the X-direction refers to the left and right directions in Fig. 1, the Y-axis
Direction refers to the front-rear direction in Fig. 1 (i.e. perpendicular to the inward-outward direction of paper).
Wherein, X-axis unit of reforming includes the X-axis reform cylinder 41 being mounted on the substrate 10 and is connected to described
X-axis reform plate 42 in X-axis reform cylinder 41, the X-axis reform cylinder 41 can drive X-axis reform plate 42 to move along the x axis.
In the present embodiment, there are two the settings of X-axis reform cylinder 41, is mounted on the top of the substrate 10, two X-axis are reformed
Two pieces of X-axis reform plates 42 that cylinder 41 is correspondingly connected with are located at the lower section of the substrate 10, the drawn silicon wafer of the vacuum chuck 30
The left and right sides of boat, two pieces of X-axis reform plates 42 can act under the drive of the X-axis reform cylinder 41 from the left and right sides
On the left and right side of the silicon wafer boat, thus the silicon wafer boat of reforming in the X-axis direction.
Y-axis unit of reforming includes the Y-axis reform cylinder 51 being mounted in the X-axis reform plate 42 and is connected to described
Y-axis reform plate 52 in Y-axis reform cylinder 51, the Y-axis reform cylinder 51 can drive Y-axis reform plate 52 to move along the y axis.
In the present embodiment, Y-axis unit of reforming is mounted on the following side of the X-axis reform plate 42, in every piece of X-axis reform plate 42
On, the opposite installation in front and back is there are two the Y-axis reform cylinder 51, two pieces of Y that this two Y-axis reform cylinders 51 are correspondingly connected with
Axis reform plate 52 is located at the front and rear sides of the drawn silicon wafer boat of the vacuum chuck 30；It is installed in left side X-axis reform plate 42
Two pieces of Y-axis reform plates 52, two pieces of Y-axis reform plates 52 installing in right side X-axis reform plate 42 can reform gas in its corresponding Y-axis
Cylinder 51 drive under from front and back double side acting on the front and back sides of the silicon wafer boat, thus the silicon wafer boat of reforming in the Y-axis direction.
In the present embodiment, on taking boat position, after the vacuum chuck 30 draws silicon wafer boat, reformed unit, X by the Y-axis
Axis unit of reforming successively is set and reforms in Y direction, the enterprising line position of X-direction to the silicon wafer boat, it is ensured that silicon wafer boat turns with manipulator
Moving axis is maintained at same central point, prevents the silicon wafer boat from tilting in the horizontal direction, with fast and accurately by silicon wafer boat place to
Boat position is put, the transfer efficiency of silicon wafer boat is improved.It should be understood that in other examples, the vacuum chuck 30 is drawn
After silicon wafer boat, first can also be carried out position in the X-axis direction to the silicon wafer boat by X-axis unit of reforming and reformed, after by the Y-axis
Unit of reforming carries out position in the Y-axis direction to the silicon wafer boat and reforms.
In the present embodiment, the vacuum chuck 30 includes vacuum evacuation device and organ type sucker, and the organ type sucker connects
It connects in 20 bottom of lifting cylinder, the vacuum evacuation device is connected with organ type sucker by pipeline, when drawing silicon wafer boat, is made
The organ type sucker contacts at the top of the silicon wafer boat, and squeezes compression, while by the vacuum evacuation device to the organ
It is vacuumized in formula sucker, negative pressure is generated in the organ type sucker, the silicon wafer boat is sucked.Wherein, the vacuum evacuation device
It can be vacuum pump or negative-pressure air fan etc..
In the present embodiment, a Horizontal limiting plate 60 is provided at the vacuum chuck, the Horizontal limiting plate 60 is used for
The top for the silicon wafer boat that positioning vacuum chuck 30 is drawn.After the vacuum chuck 30 draws silicon wafer boat, at the top of the silicon wafer boat
It abuts to the bottom of the Horizontal limiting plate 60, the silicon wafer boat as caused by 60 own material relationship of vacuum chuck can be effectively prevent
Horizontal jitter improves the Transfer Stability of the silicon wafer boat.
Further, the Horizontal limiting plate 60 is sheathed on 30 outside of vacuum chuck, it is possible to understand that, the organ
The decrement of formula sucker is bigger, and the negative pressure generated is lower, bigger to the suction force of silicon wafer boat, when the pressure of the organ type sucker
When contracting amount is excessive, it is easy to appear the sucker problem for leading to silicon wafer boat damage and unclamping difficulty excessive to the suction force of silicon wafer boat, institute
The degree that the setting of Horizontal limiting plate 60 can control the organ type sucker to be squeezed and compress is stated, the organ type sucker is prevented
Decrement it is excessive, so that the organ type sucker is generated suitable negative pressure, improve the transfer efficiency of the silicon wafer boat.Preferably,
The Horizontal limiting plate 60 is set to the middle part of the organ type sucker up and down direction.
The area of the Horizontal limiting plate 60 is greater than the base area of the organ type sucker, to ensure to draw silicon wafer boat
Afterwards, the top of silicon wafer boat can abut the bottom of the Horizontal limiting plate 60.
In the present embodiment, roller group 520, the roller group 520 are fixedly installed in each Y-axis reform plate 52
Including at least two idler wheels 5201 arranged side by side, the idler wheel 5201 can be parallel to the Y around its central axis, the axis
Axis reform plate 52.The idler wheel 5201 is arranged side by side along the vertical direction, and the axis is vertically arranged.
The Y-axis silicon wafer boat that unit draws the vacuum chuck 30 of reforming carries out after Y direction reforms, the silicon wafer boat
Front and back sides be in contact with the Y-axis reform plate 52, next by the X-axis reform unit to the silicon wafer boat carry out X-axis side
To when reforming, under the thrust of the X-axis reform plate 42, the front and back sides of the silicon wafer boat and the Y-axis reform plate 52
Between be also easy to produce frictional resistance, after the roller group 520 is arranged in the Y-axis reform plate 52, when 42 edge of X-axis reform plate
X-direction reform the silicon wafer boat when, all face contacts of the front and back sides of the silicon wafer boat and each idler wheel 5201, each rolling
Wheel 5201 around its central axis on the front and back sides of the silicon wafer boat, return by the front and back sides and the Y-axis for reducing the silicon wafer boat
Frictional resistance between positive plate 52, improves the efficiency of reforming of silicon wafer boat.
On taking boat position, the placement position of silicon wafer boat is more, places putting for silicon wafer boat on position at each and exists centainly
Error, and in order to improve efficiency, the manipulator of the silicon wafer boat transfer device is installed, boat point is taken to be usually fixed setting
(after i.e. the silicon wafer boat transfer device is installed to the manipulator, crawl orientation is fixed).For taking silicon wafer boat on boat position to put
Set error problem, settable vision system monitors the physical location of each silicon wafer boat, after the silicon wafer boat transfer device is adaptively adjusted
Orientation and angle, to taking each silicon wafer boat on boat position efficiently to be grabbed, but structure is complicated and cost is excessively high for vision system.
In view of this, the silicon wafer boat transfer device further includes automatic centering unit in the present embodiment, the automatic centering list
Member is connected between the substrate 10 and the lifting cylinder 20, the automatic centering unit it is horizontally moveable under the state of holding one's breath and
Rotation, and its move horizontally and the range that rotate be greater than take silicon wafer boat on boat position put error range, thus, it is described automatically right
Middle unit can drive the lifting cylinder 20 and vacuum chuck 30 to move horizontally and rotate in a certain range, take boat position to overcome
Upper each silicon wafer boat puts error problem, smoothly grabs silicon wafer boat.Therefore, the setting of the automatic centering unit, overcomes and takes boat
Each silicon wafer boat puts error on position, and within the scope of Controllable Error, the manipulator can take boat point to fix for silicon wafer boat position
In the case where drive the silicon wafer boat transfer device to taking each silicon wafer boat on boat position to grab, improve the crawl accuracy of silicon wafer boat
And reliability.And the automatic centering unit its horizontal position under aeration status is fixed, and the water of the lifting cylinder 20 can be fixed
Prosposition is set, thus the horizontal position of the fixed vacuum chuck 30 being connect with the lifting cylinder 20 and the silicon wafer boat drawn,
After the vacuum chuck 30 draws silicon wafer boat and carries out Y direction, the reforming of X-direction, automatic centering unit ventilation is kept
The horizontal position of the silicon wafer boat is fixed, it is ensured that silicon wafer boat is maintained at same central point with manipulator rotation axis, after by the silicon wafer boat
It places to boat position is put, improve the silicon wafer boat transfer device puts boat accuracy and efficiency.
Further, the automatic centering unit includes floating cylinder 71, when the floating cylinder 71 is held one's breath, the liter
The horizontal position of sending down abnormally ascending cylinder 20 is variable；When the floating cylinder 71 ventilation, the horizontal position of the lifting cylinder 20 is fixed.
Further, the floating cylinder 71 includes the cylinder body being fixedly connected on the substrate 10 and is connected to institute
The float portion stated cylinder body top, can move horizontally and rotate relative to the cylinder body, when the floating cylinder 71 is held one's breath,
The float portion can be moved horizontally and be rotated relative to the cylinder body, when the floating cylinder 71 ventilation, the float portion
It is fixed relative to the cylinder body position.The lifting cylinder 20 connects the float portion.Wherein, the cylinder body passes through level
Connecting plate 72 and vertical connecting rod 73 are connected to 10 bottom of substrate.
Embodiment two:
The silicon wafer boat transfer method for present embodiments providing silicon wafer boat transfer device in a kind of Application Example one, please refer to
Fig. 2, Fig. 2 shows the process of the silicon wafer boat transfer method, the silicon wafer boat transfer device is in the description of embodiment one
It is described in detail, details are not described herein again.
The silicon wafer boat transfer method includes the following steps:
S1. it is moved to the silicon wafer boat transfer device and takes boat position, the vacuum chuck 30 vacuumizes, and absorption, which is located at, to be taken on boat position
Silicon wafer boat；
Wherein, so that the floating cylinder 71 is ventilated first, fix the horizontal position of the lifting cylinder 20, thus fixed and institute
State the horizontal position of the vacuum chuck 30 of the connection of lifting cylinder 20, after the silicon wafer boat transfer device is moved to take boat position；The silicon
Piece boat transfer device is moved to by the mechanical hand-motion and takes boat position, is in the organ type sucker being located at the top of silicon wafer boat
It is extruded compressive state, the vacuum evacuation device is opened, which is drawn.
Increase the silicon wafer boat transfer device, Y-axis unit of reforming is reformed the silicon wafer boat along the y axis, described
X-axis unit of reforming is reformed the silicon wafer boat along the x axis；
Wherein, after which rises to certain altitude by the mechanical hand-motion, the floating cylinder 71 is held one's breath,
The Y-axis reform cylinder 51 drives the Y-axis reform plate 52 to be moved along the y axis to reform the silicon wafer boat in Y direction, institute
Stating X-axis reform cylinder 41 drives the X-axis reform plate 42 to be moved along the x axis to reform the silicon wafer boat in X-direction, rear institute
The ventilation of floating cylinder 71 is stated, with the horizontal position of the silicon wafer boat after fixed reform, in the process, the vacuum evacuation device
It keeps it turning on.
S3. it is moved to the silicon wafer boat transfer device and puts boat position, the stopping of vacuum chuck 30 vacuumizes, and places silicon wafer boat
To putting on boat position；
Wherein, which is moved to by the mechanical hand-motion put above boat position after, 20 edge of lifting cylinder
The silicon wafer boat is placed in and puts on boat position by vertical direction, and the rear vacuum evacuation device is closed, and the silicon wafer boat, which is placed in, described puts boat
On position.
S4. the silicon wafer boat transfer device resets；
Wherein, which is resetted by the mechanical hand-motion, described floating after the silicon wafer boat transfer device resets
Cylinder 71 of taking offence is held one's breath.
S5. step S1~S4 is repeated.
Further, in step S1, the X-axis reform cylinder 41, Y-axis reform cylinder 51 and lifting cylinder 20 are in cylinder
Bar stretches out state.
In step S2, after the silicon wafer boat transfer device rises, the cylinder rod of the lifting cylinder 20 is retracted, the floating gas
Cylinder 71 is held one's breath, and the cylinder rod of the Y-axis reform cylinder 51, which retracts, drives the Y-axis reform plate 52 to move along the y axis in Y-axis side
To the silicon wafer boat of reforming, the cylinder rod of the X-axis reform cylinder 41, which retracts, drives the X-axis reform plate 42 to move along the x axis
To reform the silicon wafer boat in X-direction；
In step S3, the silicon wafer boat transfer device, which is moved to, to be put above boat position, the Y-axis reform cylinder 51, X-axis reform cylinder
41 cylinder rod is successively stretched out, and so that the Y-axis reform plate 52, X-axis reform plate 51 is not contacted the silicon wafer boat, to ensure silicon wafer boat
It smoothly places, the silicon wafer boat is placed in by the cylinder rod stretching of the rear lifting cylinder 20 to be put on boat position, and the vacuum chuck 30 stops
It only vacuumizes, silicon wafer boat, which is placed on, to be put on boat position.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills
Art field, is included within the scope of the present invention.
Claims (10)
1. a kind of silicon wafer boat transfer device, which is characterized in that including substrate, be equipped with lifting cylinder on the substrate, X-axis is returned
Positive unit and Y-axis are reformed unit, are connected with vacuum chuck in the lifting cylinder bottom, wherein
Lifting cylinder: it is mounted below the substrate, for driving the vacuum chuck to rise or fall；
Vacuum chuck: for drawing silicon wafer boat；
X-axis is reformed unit: the silicon wafer boat drawn for vacuum chuck of reforming along the x axis, including installation is on the substrate
X-axis reform cylinder and the X-axis reform plate that is connected in the X-axis reform cylinder, the X-axis reform cylinder X-axis can be driven to return
Positive plate moves along the x axis；
Y-axis is reformed unit: the silicon wafer boat drawn for vacuum chuck of reforming along the y axis, including is mounted on the X-axis and is reformed
Y-axis reform cylinder on plate and the Y-axis reform plate being connected in the Y-axis reform cylinder, the Y-axis reform cylinder can drive Y
Axis reform plate moves along the y axis.
2. silicon wafer boat transfer device according to claim 1, which is characterized in that be provided with a water at the vacuum chuck
Flat limit plate, the top for the silicon wafer boat that the Horizontal limiting plate is drawn for positioning vacuum chuck.
3. silicon wafer boat transfer device according to claim 2, which is characterized in that the Horizontal limiting sleeve-board is set to described true
On the outside of suction disk, the area of the Horizontal limiting plate is greater than the area of the vacuum chuck.
4. silicon wafer boat transfer device according to claim 1, which is characterized in that be fixedly mounted in the Y-axis reform plate
There is roller group, the roller group includes at least two idler wheels arranged side by side, and the idler wheel can be around its central axis, the axis
It is parallel to the Y-axis reform plate.
5. silicon wafer boat transfer device according to claim 1, which is characterized in that the vacuum chuck includes vacuum evacuation device
With organ type sucker, the organ type sucker is connected to the lifting cylinder bottom, the vacuum evacuation device and organ type sucker
It is connected by pipeline.
6. silicon wafer boat transfer device described in any one of -5 according to claim 1, which is characterized in that the silicon wafer boat transfer
Structure further includes automatic centering unit, and the automatic centering unit is connected between the substrate and the lifting cylinder；It is described from
Dynamic centering unit includes floating cylinder, and when floating cylinder ventilation, the horizontal position of the lifting cylinder is fixed；When described
When floating cylinder is held one's breath, the horizontal position of the lifting cylinder is variable.
7. silicon wafer boat transfer device according to claim 6, which is characterized in that the floating cylinder includes being fixedly connected on
It cylinder body on the substrate and is connected to above the cylinder body, floating of can moving horizontally and rotate relative to the cylinder body
Dynamic portion, the lifting cylinder connect the float portion.
8. a kind of silicon wafer boat transfer method for applying silicon wafer boat transfer device as described in claim 1, which is characterized in that including such as
Lower step:
(1) it is moved to the silicon wafer boat transfer device and takes boat position, the vacuum chuck vacuumizes, and draws the silicon for being located at and taking on boat position
Piece boat；
(2) increase the silicon wafer boat transfer device, Y-axis unit of reforming is reformed the silicon wafer boat along the y axis, the X-axis
Unit of reforming is reformed the silicon wafer boat along the x axis；
(3) it is moved to the silicon wafer boat transfer device and puts boat position, vacuum chuck stopping vacuumizes, and places silicon wafer boat to putting boat
On position；
(4) the silicon wafer boat transfer device resets；
(5) step (1)~(4) are repeated.
9. silicon wafer boat transfer method according to claim 8, which is characterized in that the silicon wafer boat transfer device further includes automatic
Centering unit, the automatic centering unit are connected between the substrate and the lifting cylinder；The automatic centering unit packet
Floating cylinder is included, when floating cylinder ventilation, the horizontal position of the lifting cylinder is fixed；When the floating cylinder is held one's breath
When, the horizontal position of the lifting cylinder is variable；
In step (1), the floating cylinder is made to ventilate first, after the silicon wafer boat transfer device is moved to take boat position；
In step (2), after the silicon wafer boat transfer device rises, the floating cylinder is held one's breath, and the Y-axis reform cylinder drives institute
It states Y-axis reform plate to be moved along the y axis to reform the silicon wafer boat in Y direction, the X-axis reform cylinder drives the X-axis
Reform plate is moved along the x axis to reform the silicon wafer boat in X-direction, the rear floating cylinder ventilation；
In step (4), after the silicon wafer boat transfer device resets, the floating cylinder is held one's breath.
10. silicon wafer boat transfer method according to claim 9, which is characterized in that in step (1), the X-axis is reformed gas
Cylinder, Y-axis reform cylinder and lifting cylinder are in cylinder rod and stretch out state；
In step (2), after the silicon wafer boat transfer device rises, the cylinder rod of lifting cylinder is retracted, and the floating cylinder is held one's breath, institute
The cylinder rod for stating Y-axis reform cylinder, which retracts, drives the Y-axis reform plate to move along the y axis to reform the silicon wafer in Y direction
Boat, the cylinder rod of the X-axis reform cylinder, which retracts, drives the X-axis reform plate mobile described to reform in X-direction along the x axis
Silicon wafer boat；
In step (3), the silicon wafer boat transfer device, which is moved to, to be put above boat position, the Y-axis reform cylinder, X-axis reform cylinder,
The cylinder rod of lifting cylinder is successively stretched out, and vacuum chuck stopping vacuumizes, and places silicon wafer boat to putting on boat position.
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| CN201910169519.5A CN109860091B (en) | 2019-03-06 | 2019-03-06 | Silicon wafer boat transfer mechanism and transfer method |
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| CN201910169519.5A CN109860091B (en) | 2019-03-06 | 2019-03-06 | Silicon wafer boat transfer mechanism and transfer method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110854051A (en) * | 2019-09-11 | 2020-02-28 | 芜湖德锐电子技术有限公司 | Chip picking device |
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