JP2018093031A - Method of taking out glass substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To take out a glass substrates arranged in a vertical posture in a basket without damage.SOLUTION: In a method of taking out a glass substrate from a basket 1 in a state in which a bottom side part of a glass substrate G is locked by a first groove part 5 and a side part of the glass substrate G is locked by a second groove part 6 located immediately above the first groove part 5, two or more glass substrates G are arranged in rows in the basket 1, the basket 1 is inclined such that the lengthwise direction of the basket 1 which is the row direction of the two or more glass substrates is inclined with respect to the horizontal direction, and the glass substrate G is taken out from the basket 1.SELECTED DRAWING: Figure 5

Description

  More particularly, the present invention relates to a method for taking out a glass substrate from a container in a state where a plurality of glass substrates are arranged in a vertical orientation in a thickness direction by a basket-like container. About.

  Conventionally, when performing a cleaning process, a plating process, or the like on a square glass substrate having a thickness of about 0.1 to 1.0 mm and having a thickness of about 20 to 300 mm, In general, it is generally arranged in a posture to be aligned in the thickness direction and accommodated in a basket-like container (hereinafter also simply referred to as a basket), and a cleaning process or a plating process is performed in the state of being accommodated in the basket. .

  In the basket used at this time, a plurality of grooves for locking the bottom side of the glass substrate are formed at the bottom, and the side side of the glass substrate is also locked at the inner side of the basket. For this purpose, a plurality of grooves are formed. And using such a basket, the bottom part of the glass substrate is locked by the groove part of the bottom part, and the side part of the glass substrate is fixed by the groove part of the side part located immediately above the groove part of the bottom part. The plurality of glass substrates are arranged in a vertical posture in a basket and accommodated in a basket.

Conventionally, when the glass substrate is taken out of the basket after the cleaning process or the like is finished, the basket is placed on a horizontal surface, and the direction of the glass substrates is horizontally held with a suction pad or the like. The glass substrate is adsorbed and taken out.
As a method of extracting the aligned glass substrates, the technique disclosed in Patent Document 1 is known.

JP2013-152975A

  In recent years, the thickness of the glass substrate has become thinner, and in the basket, the clearance between the glass substrate and the groove portion for locking the glass substrate has become larger. Therefore, in recent years, as shown in FIGS. 6A and 6B, the glass substrates G, G,... Accommodated in the basket 1 are easily moved or tilted in the basket 1. The arrangement state of the plurality of glass substrates G, G,.

For this reason, conventionally, when the glass substrate is taken out from the basket, the glass substrate is often touched to cause damage to the glass substrate.
However, the conventional technology disclosed in Patent Document 1 cannot handle glass substrates arranged in a vertical posture. For this reason, it has been desired to develop a technique for taking out glass substrates arranged in a vertical posture in a basket without damaging them.

  The present invention has been made in view of such current problems, and provides a glass substrate taking-out method that can take out glass substrates arranged in a vertical posture in a basket without breaking them. It is aimed.

  The problem to be solved by the present invention is as described above. Next, means for solving the problem will be described.

That is, the glass substrate take-out method according to the present invention is a basket that accommodates a plurality of glass substrates arranged in a vertical direction in the thickness direction, and locks the bottom side of the glass substrate at the bottom of the basket. A plurality of first groove portions for forming the basket, and a plurality of second groove portions for locking side portions of the glass substrate are formed on the inner side portion of the basket. The bottom side of the glass substrate is locked by the first groove, and the second side of the glass substrate is disposed at a position corresponding to the first groove. In a state in which the plurality of glass substrates are arranged and accommodated in the basket, and the glass substrates are taken out from the basket. As direction is inclined with respect to the horizontal direction, it allowed to tilt the basket, but to take out the glass substrate from the basket.
According to such a configuration, a plurality of glass substrates can be reliably aligned and arranged. Thereby, the glass substrates arranged in a vertical posture in the basket can be taken out without being damaged.

Moreover, the glass substrate taking-out method according to the present invention is to support and take out the lower surface side of the glass substrate in order from the glass substrate located at a lower position among the plurality of glass substrates.
According to such a structure, when taking out a glass substrate from a basket, it can prevent reliably that a glass substrate is damaged.

In the glass substrate take-out method according to the present invention, the basket is inclined so that the arrangement direction of the plurality of glass substrates is inclined at an angle of 2 degrees or more and 45 degrees or less with respect to the horizontal direction. is there.
According to such a configuration, a plurality of glass substrates can be arranged in a more reliable manner, and damage to the glass substrate can be prevented.

  As effects of the present invention, the following effects can be obtained.

  According to the method for taking out a glass substrate according to the present invention, a plurality of glass substrates can be surely arranged in alignment. Thereby, when taking out a glass substrate from a basket, a glass substrate can be taken out, without touching another glass substrate.

The perspective schematic diagram which shows the whole structure of the basket used for the taking-out method of the glass substrate which concerns on one Embodiment of this invention. The schematic diagram which shows the basket used for the taking-out method of the glass substrate which concerns on one Embodiment of this invention, (A) Plane schematic diagram, (B) Side surface schematic diagram. The side surface schematic diagram which shows the inclination state of the basket in the taking-out method of the glass substrate which concerns on one Embodiment of this invention. The side surface schematic diagram which shows the aspect which inclines a basket using a jig | tool. The side surface schematic diagram which shows the taking-out condition of the glass substrate from a basket. The schematic diagram which shows the arrangement | positioning condition of the glass substrate in case a basket is not inclined, (A) Plane schematic diagram, (B) Side surface schematic diagram.

Next, embodiments of the invention will be described.
First, a basket used for a glass substrate take-out method according to an embodiment of the present invention will be described.
As shown in FIGS. 1 and 2A and 2B, a basket 1 used for a glass substrate take-out method according to an embodiment of the present invention has an opening for inserting or taking out a glass substrate G at the top. And has a frame portion 2, lower locking portions 3 and 3, and upper locking portions 4 and 4.
In this embodiment, for convenience of explanation, a coordinate system as shown in FIG. 1 is defined around the basket 1, the width direction of the basket 1 is the X-axis direction, the length direction is the Y-axis direction, and the height. Each direction is defined as a Z-axis direction. Each axis defines the direction of the arrow as the positive side.

  The frame portion 2 has an inner dimension in the width direction (X-axis direction) larger than the width of the glass substrate G. Further, the frame part 2 has an inner dimension in the length direction (Y-axis direction) that can accommodate a plurality of glass substrates G, G,. Further, the frame portion 2 has a height direction (Z-axis direction) dimension lower than that of the glass substrate G, and the upper end portion of the glass substrate G accommodated in the frame portion 2 is the frame. It is configured to protrude upward from the portion 2.

The lower locking portion 3 is a substantially serrated portion that locks the lower side portion of the vertically oriented glass substrate G from below, and includes a plurality of first groove portions 5 corresponding to trough portions of the saw tooth. The basket 1 includes two lower locking portions 3.
In addition, in the basket 1 shown by this embodiment, although the structure provided with the two lower latching | locking parts 3 was illustrated, the lower latching | locking part 3 should just be one or more. However, in the viewpoint of accommodating the glass substrate G in a more stable state in the basket 1, it is preferable that the basket 1 includes two or more lower locking portions 3.

The upper locking portion 4 is a substantially serrated portion that locks the end in the width direction of the glass substrate G in the vertical posture from the side, and includes a plurality of second groove portions 6 corresponding to trough portions of the saw tooth. In the basket 1, one upper locking portion 4 is provided on each of the two upper side portions extending in the length direction of the frame portion 2 so as to correspond to both side portions in the width direction of the glass substrate G (two in total). Yes.
In addition, in the basket 1 shown by this embodiment, although the structure provided with the two upper latching | locking parts 4 was illustrated, the upper latching | locking part 4 should just be one or more. However, in the viewpoint of accommodating the glass substrate G in a more stable state in the basket 1, it is preferable that the basket 1 is configured to include two upper locking portions 4.

  In addition, in the basket 1 shown by this embodiment, although the case where each groove part 5 * 6 was a V-shaped recessed part was illustrated, the shape of each groove part 5 * 6 in the basket 1 is not limited to this, Moreover, a groove part It may replace with, and the structure provided with a convex part may be sufficient.

  As shown in FIGS. 2A and 2B, the first groove portion 5 of the lower locking portion 3 and the second groove portion 6 of the upper locking portion 4 are formed at the same pitch in the Y-axis direction and have the same XZ plane. Each groove part 5 * 6 is arrange | positioned so that each top part of the two 1st groove parts 5 * 5 and the 2nd groove part 6 * 6 may be located in the upper corresponding position.

Next, the accommodation situation of the glass substrate G in the basket 1 will be described.
As shown in FIG. 1, the glass substrate G accommodated in the basket 1 has a lower side portion that falls into the first groove portions 5, 5 of the lower locking portions 3, 3. The upper part which is locked and whose side part (width direction end part) is disposed at a position corresponding to each of the first groove parts 5 and 5 (that is, the top part of the groove is located on the same XZ plane) By being fitted in the second groove portions 6 and 6 of the locking portions 4 and 4, the second groove portions 6 and 6 are locked.

  And in the basket 1, toward the length direction (Y-axis direction), a plurality of glass substrates G, G.

  At this time, the lower side portion of the glass substrate G is locked (positioned) by dropping to a position where the glass substrate G contacts the inside of the first groove portion 5 by its own weight.

On the other hand, at this time, the side part of the glass substrate G is locked by contacting the inner side of either the positive side or the negative side of the second groove part 6 in the Y-axis direction.
That is, the glass substrate G accommodated in the basket 1 has a margin to be tilted to either the Y axis direction positive side or the negative side inside the second groove 6, and either the Y axis direction positive side or the negative side. The second groove portion 6 is locked in a state of being tilted to the right.

That is, the plurality of glass substrates G, G,... Accommodated in the basket 1 may be tilted to either the positive side or the negative side in the Y-axis direction when the basket 1 is placed on a horizontal plane. Since the posture is not determined, the arrangement state may be disturbed as shown in FIGS. 6 (A) and 6 (B).
If the glass substrates G, G,... Accommodated in the basket 1 are in a disturbed arrangement, the adjacent glass substrates G, G may come into contact with each other. There is a possibility that G may be damaged, or when the glass substrate G is taken out from the basket 1, it may come into contact with the adjacent glass substrate G and be damaged.

  Therefore, the method for taking out the glass substrate G according to one embodiment of the present invention is configured such that the basket 1 is inclined as shown in FIG. 3 and the glass substrate G is taken out from the basket 1 in this state.

  As shown in FIG. 3, the method of taking out the glass substrate G according to an embodiment of the present invention is to lift the other end portion in the length direction while grounding one end portion in the length direction of the basket 1, Each side portion extending in the length direction of 1 is inclined at an angle θ from the ground plane. Thereby, the arrangement direction of the glass substrates G accommodated in the basket 1 is inclined at an angle θ from the ground plane.

In this state, the plurality of glass substrates G, G,... Accommodated in the basket 1 are all tilted toward the negative side in the Y-axis direction by their own weight, and the side portion of the glass substrate G is the second groove portion. 6 is held in contact with the negative inner side in the Y-axis direction.
That is, in the method for taking out the glass substrate G according to the embodiment of the present invention, the plurality of glass substrates G · G... Accommodated in the basket 1 are determined to be inclined to the Y axis direction negative side. As shown in FIG. 3, it can be surely arranged in an aligned row.

  In order to incline the basket 1 at a desired angle θ, for example, a jig 7 as shown in FIG. 4 can be used. The jig 7 includes a locking portion 8 that locks one end of the basket 1 in the length direction and a support portion 9 that supports the lower surface of the basket 1 in an inclined state at an angle θ. Then, the basket 1 can be easily put into a posture suitable for taking out the glass substrate G only by placing the basket 1 on the support portion 9 while pressing one end of the basket 1 against the locking portion 8.

Next, a method for taking out the plurality of glass substrates G, G... Accommodated in the basket 1 will be described.
As shown in FIG. 5, in the method for taking out the glass substrate G according to one embodiment of the present invention, the transfer device 10 moves the glass substrate G · G... In order from the glass substrate G which is located, the lower surface of the glass substrate G located at the lowest position is supported and taken out.

  The transfer device 10 is a device for taking out one glass substrate G from the basket 1, is constituted by an articulated robot, and has a suction pad 11 at the end of the hand. The suction pad 11 is a sucker-like member, and is connected to a vacuum facility (not shown). By vacuuming the inside of the suction pad 11 in contact with the surface of the glass substrate G, the glass substrate G is drawn. It is comprised so that it can adsorb | suck.

For example, the structure which takes out in order from the glass substrate G located in the uppermost position among the glass substrates G * G ... accommodated in the inclined basket 1 can be considered.
When the glass substrate G located at the uppermost position is taken out in order, the distance from the glass substrate G located at the lower position is very small, so that it is difficult to insert the suction pad 11 into the gap. For this reason, in the structure which takes out in order from the glass substrate G located in the uppermost part, it is normal that the suction pad 11 of the transfer device 10 is brought into contact with the upper surface of the glass substrate G and the glass substrate G is taken out. Conceivable.

  In such a configuration, when the suction pad 11 is brought into contact with the upper surface of the glass substrate G, the glass substrate G is pressed from the top to the bottom, and the glass is formed on the inner surface of the second groove portion 6 that supports the lower surface of the glass substrate G. The substrate G may be pressed and the glass substrate G may be damaged.

  On the other hand, when the glass substrate G is sequentially removed from the lowermost position, the glass substrate G does not exist below the glass substrate G. Therefore, it is easy to secure a space for inserting the suction pad 11. The suction pad 11 can be brought into contact with the lower surface of the plate.

In such a configuration, when the suction pad 11 is brought into contact with the lower surface of the glass substrate G, the glass substrate G is pressed upward from below, and the glass substrate G is slightly lifted by this pressing. Thus, the glass substrate G does not have to be pressed against the inner surface of the second groove portion 6.
For this reason, when taking out glass substrate G * G ... from the inclined basket 1, the structure which supports the lower surface of the glass substrate G located in the lowest order in order from the glass substrate G located in the lowest position, and takes it out It can be said that the damage to the glass substrate G is minimized.

That is, the method of taking out the glass substrate G according to an embodiment of the present invention is a basket that houses a plurality of glass substrates G, G,... In a vertical posture in a thickness direction, and at the bottom of the basket, A plurality of first grooves 5, 5... For locking the bottom side of the glass substrate G are formed, and for locking the side sides of the glass substrate G at the inner side of the basket. Using the basket 1 in which a plurality of second groove portions 6, 6... Are formed, the bottom portion of the glass substrate G is locked by the first groove portion 5 and at a position corresponding to the first groove portion 5. In the state in which the side portions of the glass substrate G are locked by the arranged second groove 6 and a plurality of glass substrates G, G,. The glass substrate G is taken out from The basket 1 is tilted at an angle θ so that the direction in which the glass substrates G, G,... Are aligned at an angle θ with respect to the horizontal direction (ie, the length direction of the basket 1 (Y-axis direction)). The glass substrate G is taken out from the basket 1.
According to the method for taking out the glass substrate G having such a configuration, the plurality of glass substrates G, G,. Accordingly, the glass substrates G, G,... Arranged in a vertical posture in the basket 1 can be taken out without being damaged.

In addition, the method for taking out the glass substrate G according to the embodiment of the present invention supports the lower surface side of the glass substrate G in order from the glass substrate G located at a lower position among the plurality of glass substrates G · G. And take it out.
According to the method for taking out the glass substrate G having such a configuration, when the glass substrate is taken out from the basket 1, it is possible to prevent damage to the glass substrate G because the most damage is not required.

Here, the inclination angle θ of the basket 1 is preferably 2 degrees or more and 45 degrees or less.
When the inclination angle θ of the basket 1 is less than 2 degrees, the plurality of glass substrates G · G... Accommodated in the basket 1 can be reliably tilted to the Y axis direction negative side by its own weight. This is because it is impossible to ensure the aligned state as shown in FIG.
Further, when the inclination angle θ of the basket 1 exceeds 45 degrees, when the basket 1 is inclined, the momentum when the glass substrate G • G ... tilts becomes too large, This is because the glass substrate G may be damaged.

That is, in the method of taking out the glass substrate G according to an embodiment of the present invention, the basket substrate G is arranged such that the arrangement direction of the plurality of glass substrates is inclined at an angle of 2 degrees to 45 degrees with respect to the horizontal direction. Is inclined.
According to the method for taking out the glass substrate G having such a configuration, the plurality of glass substrates G, G,... Can be arranged in a more reliable manner, and the glass substrate G can be prevented from being damaged.

  In addition, the method for taking out the glass substrate G according to an embodiment of the present invention is particularly effective when a thin glass substrate G having a thickness of about 0.1 to 1.0 mm is taken out from the basket 1. In addition, the method for taking out the glass substrate G according to an embodiment of the present invention is particularly effective when taking out a relatively small glass substrate G having a size of about 20 to 300 mm square from the basket 1.

1 basket 5 first groove (first groove)
6 Second groove (second groove)
G Glass substrate

Claims (3)

A basket that accommodates a plurality of glass substrates arranged in a vertical orientation in a thickness direction, and a plurality of first grooves for locking the bottom side of the glass substrate are formed at the bottom of the basket. And in the inner part of the basket, using the basket in which a plurality of second grooves for locking the side part of the glass substrate is formed,
The bottom side of the glass substrate is locked by the first groove, and the side of the glass substrate is locked by the second groove arranged at a position corresponding to the first groove. In the state where the plurality of glass substrates are accommodated in a row in the basket, the glass substrate is taken out from the basket,
Inclining the basket so that the row direction of the plurality of glass substrates is inclined with respect to the horizontal direction, and taking out the glass substrate from the basket,
A method for taking out a glass substrate. Among the plurality of glass substrates, in order from the glass substrate positioned below, the lower surface side of the glass substrate is supported and taken out.
The method for taking out a glass substrate according to claim 1. The row direction of the plurality of glass substrates is
Inclining the basket so as to incline at an angle of 2 degrees or more and 45 degrees or less with respect to the horizontal direction;
The method for removing a glass substrate according to claim 1 or 2, wherein the glass substrate is removed.

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