CN109715707B - 桥联有机硅树脂、膜、电子器件以及相关方法 - Google Patents

桥联有机硅树脂、膜、电子器件以及相关方法 Download PDF

Info

Publication number
CN109715707B
CN109715707B CN201780056884.4A CN201780056884A CN109715707B CN 109715707 B CN109715707 B CN 109715707B CN 201780056884 A CN201780056884 A CN 201780056884A CN 109715707 B CN109715707 B CN 109715707B
Authority
CN
China
Prior art keywords
silicone resin
bridged
film
group
sirr
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201780056884.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN109715707A (zh
Inventor
傅鹏飞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Silicones Corp
Original Assignee
Dow Corning Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Corp filed Critical Dow Corning Corp
Publication of CN109715707A publication Critical patent/CN109715707A/zh
Application granted granted Critical
Publication of CN109715707B publication Critical patent/CN109715707B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/48Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
    • C08G77/50Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms by carbon linkages
    • C08G77/52Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms by carbon linkages containing aromatic rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/12Polysiloxanes containing silicon bound to hydrogen
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/80Siloxanes having aromatic substituents, e.g. phenyl side groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04Polysiloxanes
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/14Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/14Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/18Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
    • H01B3/30Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
    • H01B3/46Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes silicones

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Silicon Polymers (AREA)
CN201780056884.4A 2016-09-30 2017-09-29 桥联有机硅树脂、膜、电子器件以及相关方法 Active CN109715707B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662402282P 2016-09-30 2016-09-30
US62/402282 2016-09-30
PCT/US2017/054435 WO2018064543A1 (en) 2016-09-30 2017-09-29 Bridged silicone resin, film, electronic device and related methods

Publications (2)

Publication Number Publication Date
CN109715707A CN109715707A (zh) 2019-05-03
CN109715707B true CN109715707B (zh) 2021-05-25

Family

ID=60190925

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780056884.4A Active CN109715707B (zh) 2016-09-30 2017-09-29 桥联有机硅树脂、膜、电子器件以及相关方法

Country Status (6)

Country Link
US (1) US10793680B2 (https=)
JP (1) JP7273710B2 (https=)
KR (1) KR102317299B1 (https=)
CN (1) CN109715707B (https=)
TW (1) TWI747956B (https=)
WO (1) WO2018064543A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6447557B2 (ja) * 2016-03-24 2019-01-09 日亜化学工業株式会社 発光装置の製造方法

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3159601A (en) 1962-07-02 1964-12-01 Gen Electric Platinum-olefin complex catalyzed addition of hydrogen- and alkenyl-substituted siloxanes
US3296291A (en) 1962-07-02 1967-01-03 Gen Electric Reaction of silanes with unsaturated olefinic compounds
US3220972A (en) 1962-07-02 1965-11-30 Gen Electric Organosilicon process using a chloroplatinic acid reaction product as the catalyst
NL131800C (https=) 1965-05-17
US3516946A (en) 1967-09-29 1970-06-23 Gen Electric Platinum catalyst composition for hydrosilation reactions
US3814730A (en) 1970-08-06 1974-06-04 Gen Electric Platinum complexes of unsaturated siloxanes and platinum containing organopolysiloxanes
GB1476314A (en) 1973-06-23 1977-06-10 Dow Corning Ltd Coating process
US3989668A (en) 1975-07-14 1976-11-02 Dow Corning Corporation Method of making a silicone elastomer and the elastomer prepared thereby
FR2414519A1 (fr) 1978-01-16 1979-08-10 Rhone Poulenc Ind Copolymeres organopolysiloxaniques polysequences cristallins et leurs procedes de preparation
US5036117A (en) 1989-11-03 1991-07-30 Dow Corning Corporation Heat-curable silicone compositions having improved bath life
GB9103191D0 (en) 1991-02-14 1991-04-03 Dow Corning Platinum complexes and use thereof
US5378790A (en) 1992-09-16 1995-01-03 E. I. Du Pont De Nemours & Co. Single component inorganic/organic network materials and precursors thereof
EP0661331B1 (en) 1993-12-28 2001-05-23 Kanegafuchi Chemical Industry Co., Ltd. Silicon-containing polymer, process for preparing the same and monomer thereof
JP2000265065A (ja) 1999-03-17 2000-09-26 Dow Corning Asia Ltd 有機溶剤可溶性の水素化オクタシルセスキオキサン−ビニル基含有化合物共重合体の製造方法
US6252030B1 (en) * 1999-03-17 2001-06-26 Dow Corning Asia, Ltd. Hydrogenated octasilsesquioxane-vinyl group-containing copolymer and method for manufacture
US6368535B1 (en) * 1999-08-06 2002-04-09 Dow Corning Corporation Condensation reaction curable silsesquioxane resin composition and methods for the synthesis and cure thereof
JP2001214127A (ja) * 2000-01-31 2001-08-07 Dow Corning Toray Silicone Co Ltd 電気絶縁性薄膜形成性樹脂組成物、および電気絶縁性薄膜の形成方法
US6710450B2 (en) * 2001-02-28 2004-03-23 International Business Machines Corporation Interconnect structure with precise conductor resistance and method to form same
JP3757264B2 (ja) * 2001-03-27 2006-03-22 独立行政法人産業技術総合研究所 シルセスキオキサン系ポリマー成形体及びその製造方法
US6605734B2 (en) 2001-12-07 2003-08-12 Dow Corning Corporation Alkene-platinum-silyl complexes
JP4050631B2 (ja) * 2003-02-21 2008-02-20 株式会社ルネサステクノロジ 電子デバイスの製造方法
US7019100B2 (en) 2003-04-23 2006-03-28 Shin-Etsu Chemical Co., Ltd. Curable silicone resin composition
JP4338554B2 (ja) 2003-04-23 2009-10-07 信越化学工業株式会社 硬化性シリコーン樹脂組成物
WO2006065316A1 (en) 2004-12-17 2006-06-22 Dow Corning Corporation Method for forming anti-reflective coating
US9440869B2 (en) * 2005-09-30 2016-09-13 Abs Materials, Inc. Sol-gel derived compositions
JP2011510133A (ja) 2008-01-15 2011-03-31 ダウ・コーニング・コーポレイション シルセスキオキサン樹脂
WO2009111199A1 (en) 2008-03-04 2009-09-11 Dow Corning Corporation Silicone composition, silicone adhesive, coated and laminated substrates
US8026331B2 (en) 2009-04-21 2011-09-27 The United States Of America As Represented By The Secretary Of The Navy Polymers made from polyhedral oligomeric silsesquioxanes and diacetylene-containing compounds
KR101030019B1 (ko) * 2009-12-31 2011-04-20 제일모직주식회사 봉지재용 투광성 수지 및 이를 포함하는 전자 소자
JP5972544B2 (ja) * 2011-09-09 2016-08-17 株式会社カネカ オルガノポリシロキサン系組成物および硬化物
US8492208B1 (en) * 2012-01-05 2013-07-23 International Business Machines Corporation Compressive (PFET) and tensile (NFET) channel strain in nanowire FETs fabricated with a replacement gate process
CN104081282B (zh) * 2012-02-01 2019-07-30 日产化学工业株式会社 使用溶剂显影用形成含硅抗蚀剂下层膜的组合物的半导体装置的制造方法
JP2014205823A (ja) * 2013-03-21 2014-10-30 株式会社Adeka ケイ素含有硬化性組成物
JP5587520B1 (ja) 2013-05-08 2014-09-10 モメンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社 画像表示装置用のダム材組成物、及びそれを用いた画像表示装置
KR102289082B1 (ko) * 2014-08-13 2021-08-13 에스케이이노베이션 주식회사 하드코팅층 형성용 조성물

Also Published As

Publication number Publication date
CN109715707A (zh) 2019-05-03
TW201829557A (zh) 2018-08-16
KR102317299B1 (ko) 2021-10-26
JP2019529642A (ja) 2019-10-17
TWI747956B (zh) 2021-12-01
US10793680B2 (en) 2020-10-06
KR20190051027A (ko) 2019-05-14
JP7273710B2 (ja) 2023-05-15
US20200172679A1 (en) 2020-06-04
WO2018064543A1 (en) 2018-04-05

Similar Documents

Publication Publication Date Title
JP5010098B2 (ja) 分子多面体型シルセスキオキサンを用いた半導体層間絶縁膜の形成方法
KR102414008B1 (ko) 퍼하이드로폴리실라잔 조성물 및 이를 사용하여 질화물 막을 형성하는 방법
KR20010050215A (ko) 실리콘 수지 및 이의 제조방법
JP2002075982A (ja) 低誘電率多孔質シリカ質膜、半導体装置およびコーティング組成物
CN100393730C (zh) 多官能环状硅酸盐(或酯)化合物,由该化合物制得的基于硅氧烷的聚合物和使用该聚合物制备绝缘膜的方法
CN111902359A (zh) 全氢聚硅氮烷组合物和用于使用其形成氧化物膜的方法
CN109689735B (zh) 桥联有机硅树脂、膜、电子器件以及相关方法
TW419719B (en) Method of producing coatings on electronic substrates
CN109715707B (zh) 桥联有机硅树脂、膜、电子器件以及相关方法
TWI812824B (zh) 包含嵌段共聚物而成之矽質膜形成組成物、及使用其之矽質膜的製造方法
TWI751367B (zh) 包含聚碳矽烷之矽碳膜形成組成物及使用其製造矽碳膜的方法
KR101058963B1 (ko) 화학 기계 연마 스토퍼, 그의 제조 방법 및 화학 기계연마 방법
US8080286B2 (en) Low dielectric constant silicon coating, method for the preparation and application thereof to integrated circuits
JP5133475B2 (ja) 良好な溶解性と安定性を有するシリコーン樹脂組成物
JP5099301B2 (ja) 絶縁膜形成用組成物、ポリマーおよびその製造方法、絶縁膜の製造方法、ならびにシリカ系絶縁膜
JP2000319400A (ja) 低誘電率材料及び層間絶縁膜の製造方法
JP2004250585A (ja) ケイ素含有芳香族ポリマーおよびその用途
JP2005200515A (ja) 絶縁膜形成用材料及びそれを用いた絶縁膜

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant