CN109655729A - Vibration device applied to test processor - Google Patents
Vibration device applied to test processor Download PDFInfo
- Publication number
- CN109655729A CN109655729A CN201811178277.8A CN201811178277A CN109655729A CN 109655729 A CN109655729 A CN 109655729A CN 201811178277 A CN201811178277 A CN 201811178277A CN 109655729 A CN109655729 A CN 109655729A
- Authority
- CN
- China
- Prior art keywords
- pallet
- vibration
- conveyer belt
- support portion
- test processor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
Abstract
The present invention relates to a kind of vibration devices applied to test processor.Specifically, an embodiment according to the present invention, the vibration device applied to test processor may include: conveyer belt, for conveying the pallet facing one direction；Idler wheel is set to the two sides of the conveyer belt, matches with the conveyer belt and is merged into capable rotation；Band support portion, is arranged between the idler wheel of the two sides of the conveyer belt, is supported to the conveyer belt, so that the pallet and the conveyer belt are close to mutually；Disengaging-proof portion, for preventing the pallet to be detached from from the conveyer belt；And exciting unit, apply vibration at least any one party in support portion and the disengaging-proof portion.
Description
Technical field
The present invention relates to a kind of vibration devices applied to test processor.
Background technique
For testing electronic parts (especially semiconductor element), needs and the electronic component of electrical connection is tested
Tester (TESTER) and for making electronic component be electrically connected to the device, i.e. test processor (TEST of the tester
HANDLER)。
Test processor uses test pallet (TEST TRAY) to increase processing capacity, and the test pallet is being incited somebody to action
Multiple semiconductor elements can be carried disposably in the state of loading in the matrix form.
Since semiconductor element is in the state of being loaded into test pallet (also referred to as support plate (CARRIER BOARD)), electricity
It is connected to the socket for inspection (TEST SOCKET) of tester, therefore between being loaded between the semiconductor element of test pallet
Interval between the socket for inspection that need to correspond to tester.
On the other hand, it is tested processor semiconductor element to be tested, to be loaded into user tray (CUSTOMER
TRAY state supply).Since the main purpose of user tray is loading and the keeping of semiconductor element, in order to increase dress
Capacity is carried, the loading interval of semiconductor element is formed as the loading interval of the semiconductor element less than test pallet.
Test processor is provided with pickup and apparatus for placing (PICK AND PLACE APPARATUS), the pickup and
Apparatus for placing is used for user tray is loaded into and the semiconductor element in non-test mode is moved to test pallet, or will
It is loaded into test pallet and is moved to user tray in the semiconductor element for terminating test mode.Further, since being loaded into use
The interval of the loading of the semiconductor element of family pallet and test pallet is different, and therefore, test processor also needs partly leading
What volume elements part was adjusted when user tray and test pallet are moved between each other for the interval to semiconductor element
Structure.
Fig. 1 is the exemplary top view of the logic processor in the test processor for conceptually illustrate the prior art.Ginseng
According to Fig. 1, the test processor TH of the prior art includes test pallet TT, high-temperature atmosphere region HZ, lower-temperature atmosphere region LZ, test
Position TP, test shuttle (SHUTTLE) S, the first conveyer M1, second conveyor M2 and third conveyer M3 etc., this test
Processor TH, which is provided with, to be introduced position IP, resurveys position RP, holding fix SP, storage position AP and extracting position WP.
Test pallet TT is configured to be moved to from extracting position according to the test to be executed by the first conveyer M1
The lower-temperature atmosphere region LZ or high-temperature atmosphere region HZ of plate mode pass through test shuttle S direction test position after being heated or cooled
It is mobile to set TP.Test pallet TT after regulation test, is transmitted to second conveyor M2 in this test position TP.Second conveying
The semiconductor element for being placed in test shuttle S and terminating to test is transported to empty user tray by machine M2.At this point, second conveyor M2
Classified according to test result to semiconductor element, the semiconductor element division sorted out is transported to mutually different user's support
Disk.User tray according to the test result of semiconductor element, semiconductor element is transported to introduce position IP, resurvey position RP,
One in holding fix SP, storage position AP and extracting position WP.
In extracting position WP, all semiconductor elements for being loaded into user tray CT can be taken out, empty user later
Pallet CT is transported to storage position AP by third conveyer M3, is moved to the first storage stacker (STACK) ST1 later and deposits
It puts.
In addition, being located at when semiconductor element is stuffed entirely with being located at the user tray CT for introducing position IP and introducing position
The user tray CT of IP is moved to the second storage stacker ST2, resurveys position RP's when semiconductor element is stuffed entirely with being located at
When user tray CT, third storage stacker ST3 is moved to positioned at the user tray CT for resurveying position RP.Accordingly, if from introducing
Position IP or resurvey position RP move user tray CT go out, then third conveyer M3 can will be located at holding fix SP user tray
CT is transported to introducing position IP or resurveys position RP.Herein, in holding fix SP, waiting has to move from waiting stacker ST4 in advance
The empty user tray CT for moving and arriving.Certainly, according to actual implementation, the user tray CT positioned at extracting position WP can pass through
Three conveyer M3 are transported to holding fix SP, and can also be delivered directly to positioned at the empty user tray CT of extracting position WP
The introducing position IP or resurvey position RP that user tray CT is moved out of.
While by this process, when terminating the new test for a collection of (lot), it is loaded into third storage and stacks
The user tray CT of device ST3 is moved to one by one resurveys position RP, and third conveyer M3 resurveys the user tray of position RP by being located at
CT is transported to extracting position WP.Also, the first conveyer M1 removes half resurveyed from the user tray CT positioned at extracting position WP
Conductor element is simultaneously loaded into loading plate, executes process identical with novel test later and is resurveyed.Certainly, according to actual
Implement, the user tray CT whole mobile test batch that will be conveyed first by third conveyer M3 to extracting position WP
(Test Lot) stacker ST5 is simultaneously stored, and is later moved to the user tray CT for depositing in test lot stacker ST5 one by one
Extracting position WP, while being able to carry out and resurveying.
But the prior art as described above has following problem.
In general, arranging and being formed with more in user tray CT2 to individually load or configure multiple semiconductor elements
A bag (pocket).When semiconductor element is loaded into this user tray CT2, can generate from bag (pocket
Leave) phenomenon.Specifically, referring to from bag phenomenon, the semiconductor element for terminating test is being placed in backhaul plate (set
Plate during the above-mentioned bag of the user tray CT2 on), a part of semiconductor element is not placed in user tray completely
Defined bag, the phenomenon that a part of semiconductor element is located on the outside of the partition of bag.
The user tray CT2 that the loading of semiconductor element has terminated will be moved to stacker and (be set to test processor
User tray CT2 keeping at) and stack keeping, if, the user occurred from bag phenomenon is placed in new user tray
In the case where on pallet, semiconductor element from bag is it is possible that crack (crack), or is located at semiconductor element lower part
Terminal (Ball in BGA type) may be subjected to damage.
Further, since user tray is possible to constantly level to be deposited in top, therefore, when the user's support that will be stacked
When disk is moved out from unloading stacker towards outside, user tray can not be correctly carried, so that there are half in user tray
The problem of a possibility that conductor element is lost will increase.
In addition, the applicant passes through installation four or six vibrating motors, and using the exciting force of vibrating motor, to try
Figure will be back to bag in the semiconductor element of disengaged position, still, with the motor for using a greater number (such as: six),
The management issue that vibrating motor can be generated becomes complicated, and the problem of increase weight excessively because of multiple vibrating motors.
Summary of the invention
The present invention is proposed to solve the problems, such as described above, it is intended that providing a kind of light-weighted application
In the vibration device of test processor, by installing the exciting unit of minimum limit quantity, will by exciting unit exciting and
The vibration of formation is transferred to user tray, and thus, it is possible to will place improperly semiconductor element to be correctly placed in bag.
According to an embodiment of the present invention, a kind of vibration device applied to test processor is provided, is to pallet
The vibration device of vibration is provided comprising: conveyer belt is used to facing one direction convey the pallet；Idler wheel
(roller), the two sides of the conveyer belt are set to, matches with the conveyer belt and is merged into capable rotation；Band support portion, setting
Between the idler wheel for being located at the conveyor belt two sides, the conveyer belt is supported, so that the pallet and the biography
Band is sent to be close to mutually；Disengaging-proof portion is used to that the pallet to be prevented to be detached from from the conveyer belt；And exciting unit, to institute
It states and applies vibration at least any one party in support portion and the disengaging-proof portion.
Can also include: position adjustment unit applied to the vibration device of test processor, be used to making the pallet into
Row movement, so that the pallet is in contact with by the disengaging-proof portion of the exciting unit exciting.
It is furthermore possible to also provide being applied to the vibration device of test processor, further includes bracket, be attached to the band branch
Support part, the exciting unit, which is configured to apply to the bracket, to be vibrated.
Furthermore it is possible to provide the vibration device applied to test processor, wherein the exciting unit includes effect of vibration
Portion, is arranged towards the bracket and is able to carry out and move forward and backward, and when being advanced, impacts the bracket and applies vibration
It is dynamic.
It is furthermore possible to also provide being applied to the vibration device of test processor, wherein the bracket includes: support portion, attached
In the band support portion；And vibration transfer part, prolong from the support portion towards the direction different from one direction
Stretch and formed, the exciting unit includes effect of vibration portion, be arranged towards the vibration transfer part be able to carry out advance and
It retreats, when being advanced, impacts the vibration transfer part and apply vibration.
Furthermore it is possible to provide the vibration device applied to test processor, further includes: limiter, be configured at directly or
Indirectly by the side of the disengaging-proof portion of the exciting unit exciting, for preventing the pallet along one direction
It is moved.
It is furthermore possible to also provide being applied to the vibration device of test processor, wherein the exciting unit makes the pallet court
It is vibrated indirectly to the direction different from one direction.
According to the vibration device applied to test processor of embodiment present invention as described above, by using minimum
The exciting unit of limit quantity can simplify maintenance management.
By the above, semiconductor element can be correctly placed at the bag of user tray by the present embodiment, and can make
The economy of manufacturing device maximizes, moreover, can prevent semiconductor element hair when user tray is deposited into unloading stacker
Raw damage.
In addition, when moving out the user tray stacked from unloading stacker, due to can correctly carry user tray,
Therefore the present embodiment can eliminate a possibility that semiconductor element in user tray is lost.
Detailed description of the invention
Fig. 1 is the conceptual top view for the test processor of the prior art.
Fig. 2 is the perspective view of the vibration device applied to test processor of the first embodiment of the present invention.
Fig. 3 is the rear side perspective view of the vibration device applied to test processor of Fig. 2.
Fig. 4 is the top view of the vibration device applied to test processor of Fig. 2.
Fig. 5 is the cross-sectional view of the X-X ' line of Fig. 2.
Fig. 6 is the solid for showing a part of the vibration device applied to test processor of the second embodiment of the present invention
Figure.
Fig. 7 is the solid for showing a part of the vibration device applied to test processor of the third embodiment of the present invention
Figure.
Specific embodiment
Hereinafter, the specific embodiment for realizing technical idea of the invention is described in detail referring to attached drawing.
Also, during illustrating the embodiment of the present invention, when judgement is for the specific of related known structure or function
When illustrating the purport of the fuzzy embodiment of the present invention, description is omitted.
In addition, when be mentioned to some structural element and other structures element " connection ", " connection ", " supply ", " transmitting ",
When " contact ", it should be understood that some described structural element and the other structures element be directly connected to, link, supplying, transmitting,
Contact, it is also understood that for there is also have another structural element therebetween.
Term as used in this specification is used only to illustrate specific embodiment, it is not intended that limits the present invention.Unless
Otherwise expressly specified in context, otherwise singular statement includes plural number.
In addition, in the present specification the statement on upside, downside, left side and right side etc. be based on the diagram in attached drawing and into
Row description, when the direction of the object is changed, can differently be stated.
Hereinafter, referring to Fig. 2 to Fig. 5, to the vibration device applied to test processor of an embodiment according to the present invention
10 specific structure is illustrated.
Referring to Fig. 2 to Fig. 5, the vibration device 10 applied to test processor can be to be held in the palm for mounting semiconductor element
The device of disk T.Herein, pallet T can be user tray, but technical idea of the invention is not necessarily limited to this.Another party
Face, the vibration device 10 applied to test processor can be installed on the test pallet that user tray is arranged to conveyer mode
Conveyer and use.In addition, the setting position of this vibration device 10 applied to test processor can be, position is introduced
IP, one in position RP and holding fix SP is resurveyed.But, technical idea of the invention is not necessarily limited to this.Therefore,
Vibration device 10 applied to test processor is also used as set transmission in common test processor
(transfer) structural body of module can also be applied in combination with the lifting device of transmission module.In addition, being applied to test processes
The vibration device 10 of device be installed on storage position AP, extracting position WP or other different test pallets transport path and use
It is also entirely possible.
Vibration device 10 applied to test processor may include: frame 100；Conveyer belt 200 is used for pallet T
It conveys facing one direction；Idler wheel 300 matches with the inner face of conveyer belt 200 and is merged into capable rotation；Driving portion 400 is used to drive
Dynamic idler wheel 300；Band support portion 500, is supported conveyer belt 200, is close to so that being formed between conveyer belt 200 and pallet；
Exciting unit 600 is used to apply vibration to band support portion 500；Position adjustment unit 700, to the pallet on conveyer belt 200
The position of T is adjusted；Disengaging-proof portion 800 is used to except preventing pallet T from conveyer belt 200 to prescribed limit be detached from；And
Limiter (stopper) 900 is used to prevent pallet T from crossing prescribed limit and being moved facing one direction.
Frame 100 can adjust idler wheel 300, driving portion 400, band support portion 500, exciting unit 600 and position single
More than one in member 700 is supported.This frame 100 is also possible to be wanted by multiple without that must be formed by a component
The assembly that element is combined into.
Conveyer belt 200 can be conveyed pallet T in a manner of conveyer along defined transport path.Pallet T passes through biography
Band 200 is sent to be moved from front side towards rear side.This conveyer belt 200 can be by set by the front side and rear side
Idler wheel 300 supports.Herein, " front side " can be defined as the direction that pallet T is transferred by conveyer belt 200, and " rear side " can
To be defined as the opposite side of front side.Conveyer belt 200 is formed as, and is in contact with idler wheel 300 and with support portion 500, and surround
These closed curve.In addition, conveyer belt 200 can be set to multiple, in the accompanying drawings, setting is illustrated there are two conveyer belt
200 can be supported pallet T in two sides.It may be arranged such that a left side to pallet T in multiple conveyer belts 200
Edge is supported, and another in multiple conveyer belts 200 is supported the right side edge of pallet T.
The driving force of driving portion 400 can be transmitted to conveyer belt 200 by idler wheel 300.Idler wheel 300 can be in conveyer belt 200
Inside and conveyer belt 200 cooperate, and can be set in the two sides of conveyer belt 200.For example, idler wheel 300 may include: preceding
The front side wheel 310 that square side is supported conveyer belt 200；And at the rear that rear side is supported conveyer belt 200
Side wheel 320.A pair can be set in front side wheel 310 and rear side wheel 320.In addition, being arranged in conveyer belt 200 multiple
In the case of, idler wheel 300 can be set in each conveyer belt 200.
Driving portion 400 can be such that at least one of front side idler wheel 310 and rear side wheel 320 is rotated.It is this
Driving portion 400 may include: transmission shaft (shaft) 410, be pivotably coupled to frame 100, be used to support idler wheel 300；It is sliding
Wheel 420, is connected to transmission shaft 410；Power device 430 is used to generate driving force；Driving force transfer tape 440, is connected to
Power device 430 and sliding idler wheel 420, so that sliding idler wheel 420 is able to carry out rotation by the rotary force of power device 430.
It is set between the idler wheel 310,320 set by the two sides of conveyer belt 200 with support portion 500, and can be with
The mode that conveyer belt 200 is able to carry out conveying is supported the conveyer belt 200.This band support portion 500 prevents conveyer belt 200
It is sagging, thus it enables that conveyer belt 200 is more tightly attached to pallet T, and pallet can be made to be more effectively carried out movement.For this purpose, band
The opposite side of the part abutted with pallet T in conveyer belt 200 can be set in support portion 500.For example, pallet T and upside
It, can be in the conveyer belt 200 of upside with support portion 500 in the case that the lateral surface of conveyer belt 200 is abutted against and conveyed
Medial surface is supported the conveyer belt 200 of upside.At this point, the conveyer belt 200 of upside is by being supported by band support portion 500 come energy
It enough prevents sagging.
In addition, can be propped up in the position for being higher by predetermined distance than idler wheel 300 conveyer belt 200 with support portion 500
Support.In other words, the part supported with support portion 500 in conveyer belt 200 is compared with the part supported by idler wheel 300, energy
Enough it is closer to pallet T.Therefore, it is sagging can to more efficiently prevent from conveyer belt 200 for band support portion 500.
Band contact portion can be defined as with the part being in contact with conveyer belt 200 in support portion 500；It is contacted in this band
More than one in the front side and rear side in portion, could be formed with rake 510.Due in the two side ends with support portion 500
Portion is formed with rake 510, therefore when conveying pallet T, and the edge with support portion 500 is not touched with the side edge of pallet T.
It is this to can be set with support portion 500 in the medial surface of disengaging-proof portion 800, but technical idea of the invention is not
It is necessarily limited to this.Therefore, band support portion 500 also can be set in frame 100, and in this case, band support portion 500 can be via
Frame 100 is indirectly attached to disengaging-proof portion 800.
In addition, the case where upper surface with support portion 500 is formed by rigid body is shown in the attached drawing of the present embodiment, this
The technical idea of invention is not necessarily limited to this, can also be in band support portion in order to more effectively realize the conveying of conveyer belt 200
The rotating part of 500 upper surface setting idler wheel etc..
Exciting unit 600 can make any side in the left and right side on transport path band support portion 500 and
The disengaging-proof portion 800 of any side in left and right side on transport path is vibrated.For example, exciting unit 600 can be with
Directly apply impact to band support portion 500, can be vibrated by this impact come not only support portion 500, but also propped up with band
The disengaging-proof portion 800 for the side that support part 500 connects can also vibrate indirectly.Exciting unit 600 is by propping up the band of side
The disengaging-proof portion 800 of support part 500 and side directly/indirectly vibrates, and indirectly to apply pallet T and vibrate.
In other words, exciting unit 600 indirectly vibrates pallet T.Exciting unit 600 pallet T is applied
One vibration component is by the vibration on the left and right directions with support portion 500.In other words, exciting unit 600 supports band
Portion 500 vibrates, and makes that vibration (direction occurs with the conveyer belt 200 on support portion 500 by the vibration with support portion 500
The indirect exciting of conveyer belt 200), make the pallet T for being placed in conveyer belt 200 that vibration (court occur by the vibration of conveyer belt 200
To the indirect exciting of pallet T).Second vibration component that exciting unit 600 applies pallet T, is by disengaging-proof portion 800
Vibration on left and right directions.In other words, exciting unit 600 vibrates band support portion 500, by with support portion 500
It vibrates to make disengaging-proof portion 800 that vibration (towards the indirect exciting of disengaging-proof portion 800) occur, passes through the vibration of disengaging-proof portion 800
To make the pallet T being in contact with the medial surface of disengaging-proof portion 800 that vibration occur (towards the indirect exciting of pallet T).
In addition, exciting unit 600 can be in direction (another side different from the conveying direction of pallet T (direction)
To) on to pallet T apply shock and vibration.For example, exciting unit 600 can apply shock and vibration in the lateral direction.By
The vibration that exciting unit 600 is occurred is transferred to conveyer belt 200, is transferred to pallet T later, as a result, a part is to hang over support
The semiconductor element that the state of the bag of disk T is detached from can be placed in the correct position of bag by vibrating.
Exciting unit 600 may include: driving portion 610, provide the driving force for generating vibration；And effect of vibration
Portion 620 is used to apply vibration to band support portion 500.Driving portion 610 can be formed by cylinder or in a manner of piston, and
Frame 100 can be fixed on.Effect of vibration portion 620 carries out straight reciprocating motion by this driving portion 610, so as to so that
Band support portion 500 vibrates.Effect of vibration portion 620 may include elastic component, to prevent other portions of stop-band support portion 500 etc.
Because being impacted breakage occurs for part.
In addition, direction of the exciting unit 600 to the pallet T vibration applied, the vibration being mainly horizontally oriented.For example,
It is moved in the effect of vibration portion 620 of exciting unit 600 towards left and right directions, thus, it is possible to swash indirectly to pallet T
In the case where vibration, with support portion 500 and disengaging-proof portion 800 by the impact of exciting unit 600 come also it is main in the lateral direction
It vibrates.Accordingly, pallet T also mainly vibrates indirectly in the lateral direction.
In addition, control unit can control exciting unit 600, its impulse period is enable to change.This control
Portion processed can be by including that the arithmetic unit of microprocessor is realized.
On the other hand, it in the attached drawing of the present embodiment, shows exciting unit 600 and the band support portion 500 of side is applied
The case where impact, technical idea of the invention are not necessarily limited to this.It is used as other examples as a result, exciting unit 600 can be straight
It connects and impact is applied to the disengaging-proof portion 800 of side.In this case, not only disengaging-proof portion 800 vibrates, with disengaging-proof portion
The band support portion 500 of 800 connections also vibrates indirectly, and accordingly, pallet T can vibrate indirectly.In addition, exciting list
Member 600, which can also apply both band support portion 500 and disengaging-proof portion 800, impacts.
Position adjustment unit 700 can make to be conveyed along conveyer belt 200 in pallet T towards and pallet T conveying
Contrary direction is mobile.For example, position adjustment unit 700 passes through the pallet T that will be placed on conveyer belt 200 towards left side
Direction or right direction are moved, and the position of the pallet T on adjustable conveyer belt 200 is come.For example, position adjustment unit
700 can press to the edge of pallet T, so that the center direction of pallet T is excited the disengaging-proof portion of 600 exciting of unit
It is moved 800 sides.In the case where pallet T is only abutted with a part of the conveyer belt 200 of 800 side of disengaging-proof portion of exciting,
Position adjustment unit 700 moves pallet T, thus, it is possible to increase pallet T and conveyer belt 200 with 500 side of support portion it
Between contact area.In addition, position adjustment unit 700, which can be such that pallet T is more tightly attached to, is excited the anti-detachment of 600 exciting of unit
Portion 800.
In addition, position adjustment unit 700 can push the apex portion in the edge of pallet T.In this case, position
Adjustment unit 700 can push pallet T towards diagonal.In other words, position adjustment unit 700 can be towards pallet T
Conveying direction and the direction vertical with the conveying direction of pallet T push pallet T.At this point, disengaging-proof portion 800 can prevent from holding in the palm
Disk T crosses prescribed limit and moves towards the side (side that exciting unit 600 applies vibration) in left and right side, and limits
Position device 900 can prevent pallet T from crossing prescribed limit and moving towards the conveying direction of pallet T (front).
In addition, position adjustment unit 700 is excited unit during exciting unit 600 vibrates, by pallet T direction
800 side of disengaging-proof portion of 600 excitings pushes.By position adjustment unit 700, pallet T is more tightly attached to disengaging-proof portion 800, and
The vibration of disengaging-proof portion 800 can more effectively be transferred to pallet T.
Position adjustment unit 700 may include: main part 710, provide the driving force for adjusting position, and can be with
It is fixedly installed on frame 100；And corrective action portion 720, advancing and retreating movement is able to carry out by being driven by main part 710.
Corrective action portion 720 is set to any side in the left and right side of the pallet T conveyed, and can be by pallet T court
It is pushed to the left with the other side in right side.In addition, corrective action portion 720 can be not provided with into pallet T direction and left side side
The direction parallel to, right direction pushes, and also can be set into towards front side and askew with the inclined direction predetermined angular (a1)
Tiltedly push pallet T.Hereby it is possible to minimize the obstruction of movement of the position adjustment unit 700 for pallet T, while can
Adjust the position of the pallet T on conveyer belt 200.
This position adjustment unit 700 can be configured at and be excited the phase with support portion 500 that unit 600 applies vibration
It tosses about.In other words, in the left side and the right side for being excited the pallet T for being set to conveying with support portion 500 that unit 600 vibrates
In the case where any side in side, position adjustment unit 700 can be configured at the other side in left and right side.
Disengaging-proof portion 800 can be configured on the transport path of conveyer belt 200 in the mode opposite with the edge of pallet T
Left and right side in any side.Any side in the left and right side of the pallet T conveyed by position adjustment unit 700
Edge, abutted with disengaging-proof portion 800.Disengaging-proof portion 800 can prevent pallet T to be moved to except prescribed limit as a result,.Change sentence
Talk about, disengaging-proof portion 800 can not only prevent pallet T to be detached from completely from conveyer belt 200, moreover it is possible to prevent with it is above to a certain degree to
The left or right side of conveyer belt 200 jumps out.
This disengaging-proof portion 800 can be set in frame 100, and can be set in the opposite of position adjustment unit 700
Side.In other words, any one in the left and right side for being set to pallet T with support portion 500 for being excited the vibration of unit 600
Side, in the case that position adjustment unit 700 is configured at the other side in left and right side, disengaging-proof portion 800 be can be set in a left side
Any side in side and right side.But, technical idea of the invention is not necessarily limited to this, and disengaging-proof portion 800 can also be set
It is placed in the whole of left and right side.
Limiter 900 can be configured at, and at least one in the front side and rear side on the transport path of conveyer belt 200
Side.The front side of mobile pallet T or the edge of rear side are carried out by position adjustment unit 700, are supported with limiter 900
It connects.Limiter 900 can prevent pallet T to be moved to except prescribed limit as a result,.This limiter 900 can connect in anticreep
Side from portion 800.
The vibration device 10 applied to test processor of the present embodiment only uses cylinder of one or two degree etc.
Power device, so that maintenance management can be made compared with the case where when the existing power device using four to six degree
It becomes easy.In addition, providing vibration by bracket, exciting unit and conveyer belt in the case where not using backhaul plate itself
It is dynamic, therefore have and can make the light-weighted effect of device.
On the other hand, other than this structure, second embodiment according to the present invention passes through 600 pairs of companies of exciting unit
It is connected to each component with support portion 500 to vibrate, to make band support portion 500 that vibration occurs indirectly can also.Hereinafter,
Referring to Fig. 6, illustrate second embodiment.
Referring to Fig. 6, the vibration device 10 applied to test processor can also include being set to the branch with support portion 500
Frame 1000.Bracket 1000 can be configured in the mode opposite with the effect of vibration portion 620 of exciting unit 600.Bracket 1000 can be with
It is configured to have than the band stronger rigidity of support portion 500, and band support portion 500 is connected in replaceable mode.In this reality
It applies in the attached drawing of example, shows the case where bracket 1000 is a component, but be not necessarily limited to this, it can also be by multiple structures
The assembly of part is formed.
Exciting unit 600 can be connected to the bracket 1000 with support portion 500 and vibrate.This exciting unit 600
It is moved by effect of vibration portion 620 towards the different direction (another direction) in conveying direction (direction) from pallet T
It is dynamic, to apply to bracket 1000 and impact, also, shakes with support portion 500 because of the impact transmitted via bracket 1000
It is dynamic.As an example, exciting unit 600 is moved by effect of vibration portion 620 towards left and right directions, is applied to bracket 1000
Shock and vibration.In other words, effect of vibration portion 620 can move forward and backward towards bracket 1000, when being advanced,
Bracket 1000 can be impacted, and effect of vibration portion 620 repeats the movement that moves forward and backward with the fixed cycle, so as to
Bracket 1000 applies vibration.
The vibration device 10 applied to test processor of the present embodiment, have can anti-stop-band support portion 500 because of exciting
The impact of unit 600 and impaired effect.Furthermore, comprising: even if exciting unit 600 applies impact, do not replacing band support
The advantages of only replacing the bracket 1000 as intermediary's component in the case where portion 500, being also able to achieve maintenance activity.
On the other hand, other than this structure, third embodiment according to the present invention, exciting unit 600 applies vibration
Direction can change.Hereinafter, illustrating second embodiment referring to Fig. 7.
Referring to Fig. 7, the effect of vibration portion 620 of exciting unit 600 is configured to, towards the movement substantially with pallet T
It is moved in the identical direction in direction.In addition, bracket 1000 may include: support portion 1010, it is connected with band support portion 500
It connects；And vibration transfer part 1020, it is opposite with the effect of vibration portion 620 of exciting unit 600.Vibrating transfer part 1020 can court
Extend to the direction different from the conveying direction of pallet T and is formed.For example, effect of vibration portion 620 is configured in the longitudinal direction
It moves back and forth, vibration transfer part 1020 can extend towards left and right directions and be formed.
Exciting unit 600 is impacted by applying to the vibration transfer part 1020 of bracket 1000, can be connected to bracket
1000 band support portion 500 vibrates.The effect of vibration portion 620 of exciting unit 600 is towards substantially identical as a direction
Direction moved, to apply impact to the vibration transfer part 1020 of the bracket extended towards another direction.As a result, originally
The vibration applied to test processor in the vibration device 10 and above-described embodiment applied to test processor of embodiment fills
It sets 10 to compare, pallet T can be made more to vibrate in the longitudinal direction.
More than, it is said with the specific embodiment of the vibration device applied to test processor of the embodiment of the present invention
Bright, this is only example, and the present invention is not limited thereto, be should be interpreted that with the most wide of basic thought disclosed in this specification
Range.Those skilled in the art can be combined/replace to disclosed embodiment, so as to implement the implementation that do not enumerate
Form, but this does not still depart from the scope of the present invention.Other than first, those skilled in the art are based on this specification, are easy pair
Disclosed embodiment is changed or is deformed, and it is also reason that these changes or deformation, which will be fallen within the scope of the present invention,
It is certain.
Claims (7)
1. a kind of vibration device applied to test processor, to provide the vibration device of vibration to pallet, which is characterized in that
Include:
Conveyer belt, for conveying the pallet facing one direction；
Idler wheel is set to the two sides of the conveyer belt, matches with the conveyer belt and is merged into capable rotation；
Band support portion, is arranged between the idler wheel of the two sides of the conveyer belt, is supported, makes to the conveyer belt
It obtains the pallet and the conveyer belt is close to mutually；
Disengaging-proof portion, for preventing the pallet to be detached from from the conveyer belt；And
Exciting unit applies vibration at least any one party in support portion and the disengaging-proof portion.
2. the vibration device according to claim 1 applied to test processor, wherein further include:
Position adjustment unit, for moving the pallet, so that the pallet is prevented with by the exciting unit exciting
Disengaging portion is in contact.
3. the vibration device according to claim 1 or 2 applied to test processor, wherein further include:
Bracket is attached to the band support portion,
The exciting unit, which is configured to apply to the bracket, to be vibrated.
4. the vibration device according to claim 3 applied to test processor, wherein
The exciting unit includes effect of vibration portion, and the effect of vibration portion is able to carry out towards the bracket to move forward and backward,
When being advanced, impacts the bracket and apply vibration.
5. the vibration device according to claim 3 applied to test processor, wherein
The bracket includes:
Support portion is attached to the band support portion；And
Transfer part is vibrated, extends from the support portion towards the direction different from the conveying direction of the pallet and is formed,
The exciting unit includes effect of vibration portion, the effect of vibration portion towards the vibration transfer part be able to carry out advance and
It retreats, when being advanced, impacts the vibration transfer part and apply vibration.
6. the vibration device according to claim 1 or 2 applied to test processor, wherein further include:
Limiter, is configured at by the side of the disengaging-proof portion of the exciting unit exciting, for prevent the pallet along
It is moved in one direction.
7. the vibration device according to claim 1 or 2 applied to test processor, wherein
The exciting unit, vibrates the pallet indirectly.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2017-0130112 | 2017-10-11 | ||
| KR1020170130112A KR102438196B1 (en) | 2017-10-11 | 2017-10-11 | Vibration apparatus for test handler |
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| Publication Number | Publication Date |
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| CN109655729A true CN109655729A (en) | 2019-04-19 |
| CN109655729B CN109655729B (en) | 2021-06-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811178277.8A Active CN109655729B (en) | 2017-10-11 | 2018-10-10 | Vibration device applied to test processor |
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| CN (1) | CN109655729B (en) |
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| KR102409152B1 (en) | 2020-03-04 | 2022-06-14 | 백두산 | An apparatus for monitoring and controlling vibrator of test handler |
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| Publication number | Publication date |
|---|---|
| CN109655729B (en) | 2021-06-22 |
| KR102438196B1 (en) | 2022-08-31 |
| KR20190040684A (en) | 2019-04-19 |
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