CN109655729B - Vibration device applied to test processor - Google Patents
Vibration device applied to test processor Download PDFInfo
- Publication number
- CN109655729B CN109655729B CN201811178277.8A CN201811178277A CN109655729B CN 109655729 B CN109655729 B CN 109655729B CN 201811178277 A CN201811178277 A CN 201811178277A CN 109655729 B CN109655729 B CN 109655729B
- Authority
- CN
- China
- Prior art keywords
- tray
- vibration
- conveyor belt
- belt
- test handler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Environmental & Geological Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention relates to a vibration device applied to a test handler. Specifically, according to an embodiment of the present invention, a vibration device applied to a test handler may include: a conveyor belt for conveying the tray in one direction; the rollers are arranged on two sides of the conveyor belt, are matched with the conveyor belt and rotate; a belt supporting portion disposed between the rollers at both sides of the conveyor belt, and supporting the conveyor belt so that the tray and the conveyor belt are closely attached to each other; a separation preventing portion for preventing the tray from being separated from the conveyor belt; and an excitation unit configured to apply vibration to at least one of the belt support portion and the separation prevention portion.
Description
Technical Field
The invention relates to a vibration device applied to a test handler.
Background
In order to test electronic components (particularly semiconductor elements), a TESTER (TESTER) for testing electrically connected electronic components and a test processor (TEST HANDLER) as a device for electrically connecting electronic components to the TESTER are required.
The TEST handler uses a TEST TRAY (TEST TRAY) capable of being transported at a time in a state where a plurality of semiconductor elements are mounted in a matrix form, in order to increase a processing capacity.
Since the semiconductor devices are electrically connected to TEST SOCKETs (TEST SOCKETs) of the tester in a state of being mounted on a TEST tray (also referred to as a CARRIER tray), the intervals between the semiconductor devices mounted on the TEST tray need to correspond to the intervals between the TEST SOCKETs of the tester.
On the other hand, the semiconductor devices to be tested by the test handler are supplied in a state of being loaded on a CUSTOMER TRAY (CUSTOMER TRAY). Since the main purpose of the customer tray is the loading and storage of semiconductor elements, in order to increase the loading capacity, the loading interval of the semiconductor elements may be formed to be smaller than that of the test tray.
A pick-and-place device (PICK AND PLACE APPARATUS) is provided at the test handler for moving the semiconductor elements loaded on the user tray and in an untested state to the test tray or moving the semiconductor elements loaded on the test tray and in an end-of-test state to the user tray. Further, since the intervals at which the semiconductor devices are loaded on the customer tray and the test tray are different from each other, the test handler needs to have a structure for adjusting the intervals of the semiconductor devices when the semiconductor devices are moved between the customer tray and the test tray.
FIG. 1 is a top view conceptually illustrating an example of a logical processor in a prior art test processor. Referring to fig. 1, the related art test handler TH, which includes a test tray TT, a high temperature atmosphere zone HZ, a low temperature atmosphere zone LZ, a test position TP, a test SHUTTLE (SHUTTLE) S, a first conveyor M1, a second conveyor M2, a third conveyor M3, and the like, is provided with a drawing-in position IP, a retest position RP, a waiting position SP, a storage position AP, and a drawing-out position WP.
The test tray TT is moved from the take-out position to the low temperature atmosphere zone LZ or the high temperature atmosphere zone HZ formed in a plate manner according to a test to be performed by the first conveyor M1, and after being heated or cooled, is moved toward the test position TP by the test shuttle S. The test tray TT is conveyed to the second conveyor M2 after a prescribed test at such a test position TP. The second conveyor M2 conveys the semiconductor elements placed on the test shuttle S and finished being tested to an empty user tray. At this time, the second conveyor M2 sorts the semiconductor elements according to the test results, and the sorted semiconductor elements are divided and conveyed to different customer trays. The customer tray conveys the semiconductor device to one of the introducing position IP, the retesting position RP, the waiting position SP, the storing position AP, and the taking-out position WP based on the test result of the semiconductor device.
At the pickup position WP, all the semiconductor devices loaded on the user trays CT can be picked up, and the empty user trays CT are conveyed to the storage position AP by the third conveyor M3, and then moved to the first storage Stacker (STACK) ST1 to be stored.
Further, when the semiconductor elements are all filled in the user tray CT located at the drawing position IP, the user tray CT located at the drawing position IP is moved to the second storing stacker ST2, and when the semiconductor elements are all filled in the user tray CT located at the remeasurement position RP, the user tray CT located at the remeasurement position RP is moved to the third storing stacker ST 3. Accordingly, if the user tray CT is moved out from the introducing position IP or the remeasuring position RP, the third conveyor M3 can convey the user tray CT located at the waiting position SP to the introducing position IP or the remeasuring position RP. Here, at the standby position SP, an empty user tray CT which has been moved from the standby stacker ST4 in advance is waited for. Of course, depending on the actual implementation, the user trays CT located at the take-out position WP may be transported to the waiting position SP by the third conveyor M3, while the empty user trays CT located at the take-out position WP may also be directly transported to the drop-in position IP or the remeasurement position RP from which the user trays CT are removed.
When a new test for one lot (lot) is finished while passing through this process, the user trays CT loaded in the third storage stacker ST3 are moved one by one to the remeasurement position RP, and the third conveyor M3 conveys the user trays CT located at the remeasurement position RP to the take-out position WP. Also, the first conveyor M1 removes the semiconductor element to be retested from the customer tray CT located at the take-out position WP and loads it on the loading plate, and thereafter performs the same process as the new test to conduct retesting. Of course, according to the actual implementation, all the user trays CT conveyed to the pickup position WP by the third conveyor M3 are first moved to the Test Lot (Test Lot) stacker ST5 and stored, and then the user trays CT stored in the Test Lot stacker ST5 are moved to the pickup position WP one by one, and the retest is enabled.
However, the prior art as described above has the following problems.
In general, a plurality of pockets (pockets) are arranged and formed in the customer tray CT2 for individually loading or arranging a plurality of semiconductor elements. When semiconductor elements are loaded on such a customer tray CT2, a pocket leave phenomenon may occur. Specifically, the off-pocket phenomenon is a phenomenon in which, in the process of placing the semiconductor device subjected to the test in the pocket of the customer tray CT2 on the set plate (set plate), a part of the semiconductor device is not completely placed in a predetermined pocket of the customer tray, and a part of the semiconductor device is located outside the partition plate of the pocket.
The user tray CT2 in which the loading of the semiconductor devices is completed is moved to a stacker (a place where the user tray CT2 of the test handler is stored) and stacked for storage, and if a new user tray is placed on the user tray in which the pouch is removed, cracks (cracks) may occur in the semiconductor devices removed from the pouches, or terminals (balls in BGA type) located at the lower part of the semiconductor devices may be damaged.
Further, since there is a possibility that the customer trays are not continuously horizontally stacked on the upper portion, when the stacked customer trays are carried out from the unloading stacker to the outside, the customer trays cannot be correctly carried, and there is a problem that a possibility that the semiconductor elements in the customer trays are lost will increase.
The present applicant has also tried to return the semiconductor element in the separated state to the bag by mounting four or six vibration motors and using the exciting force of the vibration motors, but as a large number (for example, six) of the vibration motors are used, the management of the vibration motors becomes complicated and the weight of the semiconductor element is excessively increased by the plurality of vibration motors.
Disclosure of Invention
The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a vibration device applied to a test handler, which is light in weight and capable of accurately placing a semiconductor device placed improperly in a bag by transmitting vibration generated by vibration of an excitation unit to a user tray by attaching a minimum number of excitation units.
According to an embodiment of the present invention, there is provided a vibration device applied to a test handler, which is a vibration device for providing vibration to a tray, including: a conveyor belt for conveying the tray toward one direction; rollers (rollers) provided on both sides of the conveyor belt, cooperating with the conveyor belt and rotating; a belt supporting portion provided between the rollers on both sides of the conveyor belt, and supporting the conveyor belt so that the tray and the conveyor belt are closely attached to each other; a detachment prevention portion for preventing the tray from being detached from the conveyor belt; and an excitation unit that applies vibration to at least one of the belt support portion and the detachment prevention portion.
The vibration device applied to the test handler may further include: and a position adjusting unit for moving the tray so that the tray is in contact with the separation preventing part excited by the exciting unit.
Further, a vibration device applied to a test handler may be provided, which further includes a bracket attached to the belt supporting portion, the excitation unit being configured to apply vibration to the bracket.
In addition, a vibration device applied to a test handler may be provided, wherein the excitation unit includes a vibration acting portion provided to be capable of advancing and retreating toward the rack, and when advancing, impacts the rack to apply vibration.
Further, a vibration device applied to a test handler may be provided, wherein the stand includes: a support attached to the band support; and a vibration transmission portion formed to extend from the support portion in a direction different from the one direction, wherein the excitation unit includes a vibration action portion provided to be capable of advancing and retreating toward the vibration transmission portion, and when advancing, the vibration action portion is impacted to apply vibration.
In addition, there may be provided a vibration device applied to a test handler, further comprising: and a stopper disposed on a side surface of the separation prevention portion that is directly or indirectly excited by the excitation unit, for preventing the tray from moving in the one direction.
Further, a vibration device applied to a test handler may be provided, wherein the excitation unit indirectly vibrates the tray toward a direction different from the one direction.
According to the vibration device applied to the test handler according to the embodiment of the present invention as described above, maintenance management can be simplified by using the minimum number of excitation units.
Through the above, the present embodiment can correctly place the semiconductor elements in the pockets of the customer tray, and can maximize the economy of the manufacturing apparatus, and can prevent the semiconductor elements from being damaged when the customer tray is stacked in the unloading stacker.
Further, when the stacked customer trays are carried out from the unloading stacker, the customer trays can be correctly carried, so that the present embodiment can eliminate the possibility that the semiconductor elements in the customer trays are lost.
Drawings
FIG. 1 is a conceptual top view of a test handler for the prior art.
Fig. 2 is a perspective view of a vibration device applied to a test handler in accordance with a first embodiment of the present invention.
Fig. 3 is a rear side perspective view of the vibration device of fig. 2 applied to a test handler.
Fig. 4 is a top view of the vibration apparatus of fig. 2 applied to a test handler.
Fig. 5 is a cross-sectional view taken along line X-X' of fig. 2.
Fig. 6 is a perspective view showing a part of a vibration device applied to a test handler in accordance with a second embodiment of the present invention.
Fig. 7 is a perspective view showing a part of a vibration device applied to a test handler in accordance with a third embodiment of the present invention.
Detailed Description
Hereinafter, specific embodiments for realizing the technical idea of the present invention will be described in detail with reference to the drawings.
In describing the embodiments of the present invention, detailed descriptions thereof will be omitted when it is judged that the detailed descriptions of related known structures and functions obscure the gist of the embodiments of the present invention.
In addition, when a certain component is referred to as being "connected", "supplied", "transferred", or "in contact with" another component, it is to be understood that the certain component is directly connected, supplied, transferred, or in contact with the other component, and that another component is also present therebetween.
The terminology used in the description is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Unless the context clearly dictates otherwise, singular expressions include the plural.
In addition, in the present specification, expressions of upper, lower, left, right, and the like are described based on the drawings in the drawings, and when the direction of the object is changed, the expressions may be differently described.
Hereinafter, a specific structure of the vibration device 10 applied to a test handler according to an embodiment of the present invention will be described with reference to fig. 2 to 5.
Referring to fig. 2 to 5, the vibration device 10 applied to the test handler may be a device for mounting the tray T for semiconductor elements. Here, the tray T may be a user tray, but the technical idea of the present invention is not necessarily limited thereto. On the other hand, the vibration device 10 applied to the test handler can be used by being attached to a test tray conveyor in which a user tray is set in a conveyor system. Further, the set position of the vibration device 10 applied to the test handler may be one of the lead-in position IP, the retest position RP, and the waiting position SP. However, the technical idea of the present invention is not necessarily limited thereto. Therefore, the vibration device 10 applied to the test handler can be used as a structure of a transfer module provided in a general test handler, and can be used in combination with a lifting device of the transfer module. Further, it is also possible to use the vibration device 10 applied to the test handler by being mounted on the storage position AP, the pickup position WP, or other different transport paths of the test trays.
The vibration device 10 applied to the test handler may include: a frame 100; a conveyor belt 200 for conveying the tray T toward one direction; a roller 300 which is engaged with the inner surface of the conveyor belt 200 and rotates; a driving part 400 for driving the roller 300; a belt supporting part 500 supporting the conveyor belt 200 such that the conveyor belt 200 is closely attached to the tray; an excitation unit 600 for applying vibration to the belt supporting portion 500; a position adjusting unit 700 for adjusting the position of the tray T on the conveyor belt 200; a detachment prevention unit 800 for preventing the tray T from being detached from the conveyor 200 outside a predetermined range; and a stopper (stopper)900 for preventing the tray T from moving in one direction beyond a prescribed range.
The frame 100 may support one or more of the roller 300, the driving part 400, the belt supporting part 500, the exciting unit 600, and the position adjusting unit 700. Such a frame 100 does not necessarily have to be formed of one member, and may be an assembly formed by joining a plurality of elements.
The conveyor belt 200 can convey the tray T along a prescribed conveying path in a conveyor manner. The tray T is moved from the front side to the rear side by the conveyor belt 200. Such a conveyor belt 200 may be supported by rollers 300 provided at the front and rear sides. Here, the "front side" may be defined as a direction in which the tray T is transferred by the conveyor belt 200, and the "rear side" may be defined as an opposite side to the front side. The conveyor belt 200 is formed in contact with the roller 300 and the belt supporting portion 500, and surrounds a closed curve of these. Further, the conveyor belt 200 may be provided in plural, and in the drawing, it is illustrated that two conveyor belts 200 are provided to be able to support the tray T at both sides. It can be set that: one of the plurality of conveyor belts 200 supports a left side edge of the tray T, and the other of the plurality of conveyor belts 200 supports a right side edge of the tray T.
The roller 300 may transmit the driving force of the driving part 400 to the conveyor belt 200. The rollers 300 may be engaged with the conveyor belt 200 at the inner side of the conveyor belt 200, and may be disposed at both sides of the conveyor belt 200. For example, the wheel 300 may include: a front roller 310 for supporting the belt 200 at the front; and a rear roller 320 supporting the belt 200 at the rear side. The front side roller 310 and the rear side roller 320 may be provided in a pair. Further, in the case where the conveyor belt 200 is provided in plurality, the roller 300 may be provided to each conveyor belt 200.
The driving unit 400 may rotate at least one of the front roller 310 and the rear roller 320. Such a driving part 400 may include: a driving shaft (draft) 410 rotatably connected to the frame 100 for supporting the roller 300; a pulley 420 connected to the transmission shaft 410; a power unit 430 for generating a driving force; and a driving force transmission belt 440 connected to the power unit 430 and the sliding roller 420 such that the sliding roller 420 can be rotated by the rotational force of the power unit 430.
The belt supporting portion 500 is provided between the rollers 310 and 320 provided on both sides of the conveyor belt 200, and can support the conveyor belt 200 so that the conveyor belt 200 can be conveyed. The belt support part 500 prevents the conveyor belt 200 from sagging, thereby allowing the conveyor belt 200 to be more closely attached to the tray T and allowing the tray to move more efficiently. For this, the belt supporting part 500 may be provided at the opposite side of the portion of the conveyor belt 200 abutting the tray T. For example, when the tray T is conveyed while being in contact with the outer surface of the upper conveyor 200, the belt support portion 500 may support the upper conveyor 200 on the inner surface of the upper conveyor 200. At this time, the upper conveyor belt 200 is supported by the belt support portion 500, so that sagging can be prevented.
The belt supporting portion 500 may support the conveyor belt 200 at a position higher than the roller 300 by a predetermined distance. In other words, the portion of the conveyor belt 200 supported by the belt supporting portion 500 can be closer to the tray T than the portion supported by the roller 300. Therefore, the belt supporting part 500 can more effectively prevent the conveyor belt 200 from sagging.
A portion of the belt supporting part 500 contacting the conveyor belt 200 may be defined as a belt contacting part; at least one of the front and rear sides of such a belt contact portion may be formed with an inclined portion 510. Since the inclined portions 510 are formed at both side end portions of the belt supporting portion 500, the edge of the belt supporting portion 500 does not contact the edge of the tray T when the tray T is conveyed.
Such a tape support part 500 may be provided on the inner side surface of the detachment prevention part 800, but the technical idea of the present invention is not necessarily limited thereto. Therefore, the band supporting part 500 may be provided to the frame 100, and in this case, the band supporting part 500 may be indirectly connected to the detachment prevention part 800 via the frame 100.
In addition, in the drawings of the present embodiment, the case where the upper surface of the belt supporting portion 500 is formed of a rigid body is shown, and the technical idea of the present invention is not necessarily limited thereto, and a rotating portion such as a roller may be provided on the upper surface of the belt supporting portion 500 in order to more effectively realize the conveyance of the conveyor belt 200.
The exciting unit 600 can vibrate the belt supporting portion 500 on either the left or right side of the conveying path and the separation preventing portion 800 on either the left or right side of the conveying path. For example, the excitation unit 600 may directly apply an impact to the belt supporting portion 500, and not only the supporting portion 500 but also the detachment prevention portion 800 at the side connected to the belt supporting portion 500 may indirectly vibrate due to the impact. The exciting unit 600 can indirectly vibrate the tray T by directly or indirectly vibrating the belt supporting portion 500 on one side and the detachment prevention portion 800 on one side.
In other words, the excitation unit 600 indirectly vibrates the tray T. The first vibration component applied to the tray T by the excitation section 600 is a vibration in the left-right direction passing through the belt support portion 500. In other words, the vibration unit 600 vibrates the belt supporting portion 500, vibrates the conveyor belt 200 on the belt supporting portion 500 by the vibration of the belt supporting portion 500 (indirect vibration toward the conveyor belt 200), and vibrates the tray T placed on the conveyor belt 200 by the vibration of the conveyor belt 200 (indirect vibration toward the tray T). The second vibration component applied to the tray T by the excitation section 600 is a vibration in the left-right direction passing through the separation preventing section 800. In other words, the vibration unit 600 vibrates the belt supporting portion 500, vibrates the detachment prevention portion 800 by the vibration of the belt supporting portion 500 (indirect vibration toward the detachment prevention portion 800), and vibrates the tray T in contact with the inner side surface of the detachment prevention portion 800 by the vibration of the detachment prevention portion 800 (indirect vibration toward the tray T).
Further, the excitation unit 600 may apply impact and vibration to the tray T in a direction (another direction) different from the conveying direction (one direction) of the tray T. For example, the excitation unit 600 may apply impact and vibration in the left-right direction. The vibration generated by the vibration unit 600 is transmitted to the conveyor 200 and then to the tray T, and as a result, a part of the semiconductor element detached in a state of being caught by the pocket of the tray T can be placed at the correct position of the pocket by the vibration.
The excitation unit 600 may include: a driving part 610 providing a driving force for generating vibration; and a vibration acting portion 620 for applying vibration to the belt supporting portion 500. The driving part 610 may be formed of a cylinder or in a piston manner, and may be fixed to the frame 100. The vibration application part 620 is linearly reciprocated by the driving part 610, so that the belt supporting part 500 can be vibrated. The vibration application part 620 may include an elastic member to prevent other parts such as the belt supporting part 500 from being damaged by an impact.
The direction of the vibration applied to the tray T by the excitation unit 600 is mainly the vibration in the horizontal direction. For example, when the vibration applying portion 620 of the exciting unit 600 moves in the left-right direction to indirectly excite the tray T, the belt supporting portion 500 and the detachment prevention portion 800 vibrate mainly in the left-right direction due to the impact of the exciting unit 600. Accordingly, the tray T also indirectly vibrates mainly in the left-right direction.
The control unit may control the excitation unit 600 so that the impact cycle thereof can be changed. Such a control section may be realized by an arithmetic device including a microprocessor.
On the other hand, in the drawings of the present embodiment, a case where the exciting unit 600 applies an impact to one belt supporting portion 500 is shown, and the technical idea of the present invention is not necessarily limited thereto. Thus, as another example, the excitation unit 600 may directly apply an impact to one detachment prevention portion 800. In this case, not only the detachment prevention portion 800 but also the belt supporting portion 500 connected to the detachment prevention portion 800 indirectly vibrates, and thus the tray T may indirectly vibrate. Further, the excitation unit 600 may apply an impact to both the belt supporting portion 500 and the detachment prevention portion 800.
The position adjusting unit 700 can move the tray T being conveyed along the conveyor belt 200 in a direction opposite to the conveying direction of the tray T. For example, the position adjusting unit 700 may adjust the position of the tray T on the conveyor belt 200 by moving the tray T placed on the conveyor belt 200 in the left or right direction. For example, the position adjusting unit 700 may press the edge of the tray T such that the center of the tray T moves toward the separation preventing portion 800 side excited by the exciting unit 600. When the tray T abuts only a part of the conveyor belt 200 on the excited detachment prevention portion 800 side, the position adjustment means 700 moves the tray T, thereby increasing the contact area between the tray T and the conveyor belt 200 on the belt support portion 500 side. Further, the position adjustment unit 700 can bring the tray T into close contact with the detachment prevention portion 800 excited by the excitation unit 600.
In addition, the position adjustment unit 700 may push a vertex portion in the edge of the tray T. In this case, the position adjustment unit 700 may push the tray T toward a diagonal direction. In other words, the position adjustment unit 700 may press the tray T toward the conveying direction of the tray T and a direction perpendicular to the conveying direction of the tray T. At this time, the detachment prevention portion 800 can prevent the tray T from moving to one of the left and right sides (the side to which the vibration unit 600 applies the vibration) beyond a predetermined range, and the stopper 900 can prevent the tray T from moving to the conveying direction (front) of the tray T beyond the predetermined range.
Further, while the excitation unit 600 vibrates, the position adjustment unit 700 presses the tray T toward the detachment prevention portion 800 excited by the excitation unit 600. The tray T is more closely attached to the separation preventing part 800 by the position adjusting unit 700, and the vibration of the separation preventing part 800 can be more effectively transmitted to the tray T.
The position adjustment unit 700 may include: a main body part 710 which provides a driving force for adjusting a position and may be fixedly provided to the frame 100; and an adjustment action part 720 which is driven by the main body part 710 to be capable of moving forward and backward. The adjustment operation portion 720 is provided on either one of the left and right sides of the tray T to be conveyed, and can press the tray T toward the other of the left and right sides. The adjustment operation portion 720 may be provided not to press the tray T in a direction parallel to the left and right directions, or may be provided to press the tray T obliquely at a predetermined angle (a1) toward the front side. Accordingly, the position of the tray T on the conveyor belt 200 can be adjusted while minimizing the interference of the position adjusting unit 700 with the movement of the tray T.
Such a position adjusting means 700 may be disposed on the opposite side of the belt supporting portion 500 to which the vibration is applied by the exciting means 600. In other words, in the case where the belt supporting part 500 vibrated by the exciting unit 600 is provided on either one of the left and right sides of the tray T being conveyed, the position adjusting unit 700 may be disposed on the other of the left and right sides.
The separation preventing portion 800 may be disposed on either the left side or the right side of the conveying path of the conveyor 200 so as to face the edge of the tray T. The edge of either the left or right side of the tray T conveyed by the position adjusting unit 700 abuts against the detachment prevention portion 800. Thus, the detachment prevention unit 800 can prevent the tray T from moving out of the predetermined range. In other words, the escape prevention part 800 can prevent not only the tray T from escaping completely from the conveyor belt 200 but also from jumping out to the left or right of the conveyor belt 200 to some extent or more.
Such a detachment prevention part 800 may be provided to the frame 100 and may be provided to an opposite side of the position adjustment unit 700. In other words, in the case where the belt supporting portion 500 vibrated by the exciting unit 600 is provided on any one of the left and right sides of the tray T and the position adjusting unit 700 is disposed on the other of the left and right sides, the separation preventing portion 800 may be provided on any one of the left and right sides. However, the technical idea of the present invention is not necessarily limited thereto, and the detachment prevention portion 800 may be provided on all of the left and right sides.
The stopper 900 may be disposed on at least one of the front side and the rear side on the conveyance path of the conveyor belt 200. The front or rear edge of the tray T moved by the position adjusting means 700 abuts against the stopper 900. Thus, the stopper 900 can prevent the tray T from moving out of the predetermined range. Such a stopper 900 may be attached to a side of the detachment prevention part 800.
The vibration device 10 applied to the test handler of the present embodiment uses only one or two-degree cylinders or the like, so that maintenance management can be facilitated as compared with the case of using four to six-degree power devices in the related art. Further, since the vibration is provided by the bracket, the exciting unit, and the conveyor belt without using the return plate itself, the weight of the apparatus can be reduced.
On the other hand, in addition to such a configuration, according to the second embodiment of the present invention, the vibration unit 600 may vibrate each member connected to the belt supporting portion 500, thereby indirectly vibrating the belt supporting portion 500. Hereinafter, a second embodiment will be described with reference to fig. 6.
Referring to fig. 6, the vibration device 10 applied to the test handler may further include a bracket 1000 provided to the belt support 500. The bracket 1000 may be disposed to face the vibration applying portion 620 of the excitation unit 600. The bracket 1000 may be configured to have a stronger rigidity than the belt supporting part 500 and be connected to the belt supporting part 500 in an exchangeable manner. In the drawings of the present embodiment, the bracket 1000 is shown as one member, but the present invention is not necessarily limited thereto, and may be formed by an assembly of a plurality of members.
The excitation unit 600 may vibrate the bracket 1000 coupled to the belt support portion 500. In the excitation unit 600, the vibration application portion 620 moves in a direction (another direction) different from the conveying direction (one direction) of the tray T, so that an impact can be applied to the rack 1000, and the belt support portion 500 vibrates due to the impact transmitted through the rack 1000. For example, the vibration section 600 applies an impact and vibration to the bracket 1000 by moving the vibration applying section 620 in the left-right direction. In other words, the vibration acting portion 620 may advance and retreat toward the cradle 1000, and when advancing, it may impact the cradle 1000, and the vibration acting portion 620 repeats advancing and retreating motions at a fixed cycle, so that vibration may be applied to the cradle 1000.
The vibration device 10 applied to the test handler of the present embodiment has an effect of preventing the belt supporting part 500 from being damaged by the impact of the excitation unit 600. Further, the method comprises: even if the shock is applied to the exciting unit 600, the advantage of the maintenance work can be achieved by replacing only the bracket 1000 as the intermediary member without replacing the belt supporting portion 500.
On the other hand, in addition to such a structure, according to the third embodiment of the present invention, the direction in which the excitation unit 600 applies vibration may be changed. Hereinafter, a second embodiment will be described with reference to fig. 7.
Referring to fig. 7, the vibration applying portion 620 of the exciting unit 600 may be configured to move in substantially the same direction as the moving direction of the tray T. Further, the stent 1000 may comprise: a support portion 1010 connected to the belt support portion 500; and a vibration transmission unit 1020 facing the vibration application unit 620 of the excitation unit 600. The vibration transmission part 1020 may be formed to extend in a direction different from the conveying direction of the tray T. For example, the vibration acting portion 620 is configured to reciprocate in the front-rear direction, and the vibration transmitting portion 1020 may be formed to extend in the left-right direction.
The excitation unit 600 can vibrate the belt supporting portion 500 connected to the bracket 1000 by applying an impact to the vibration transmission portion 1020 of the bracket 1000. The vibration applying portion 620 of the excitation unit 600 moves in substantially the same direction as one direction, and applies an impact to the vibration transmitting portion 1020 of the bracket extending in the other direction. Thus, the vibration device 10 applied to the test handler of the present embodiment can vibrate the tray T more in the front-rear direction than the vibration device 10 applied to the test handler of the above-described embodiment.
The above description is made of a specific embodiment of the vibration device applied to the test handler according to the embodiment of the present invention, which is merely an example, and the present invention is not limited thereto, and should be interpreted as having the widest scope of the basic idea disclosed in the present specification. Those skilled in the art will be able to combine/substitute the disclosed embodiments so that embodiments not illustrated may be implemented, without departing from the scope of the invention. First, it is obvious that those skilled in the art can easily change or modify the embodiments disclosed based on the present description, and that such changes or modifications will fall within the scope of the present invention.
Claims (6)
1. A vibration device for a test handler, which is a vibration device for providing vibration to a tray, comprising:
a conveyor belt for conveying the tray in one direction;
the rollers are arranged on two sides of the conveyor belt, are matched with the conveyor belt and rotate;
a belt supporting portion disposed between the rollers at both sides of the conveyor belt, and supporting the conveyor belt so that the tray and the conveyor belt are closely attached to each other;
a separation preventing portion for preventing the tray from being separated from the conveyor belt;
an excitation unit that indirectly applies vibration to the tray by applying vibration to one of the belt supporting portion and the detachment prevention portion; and
and a position adjusting unit for moving the tray so that the tray is in contact with the separation preventing part excited by the exciting unit.
2. The vibration apparatus applied to a test handler of claim 1, further comprising:
a bracket attached to the band support part,
the excitation unit is configured to apply vibration to the bracket.
3. The vibration apparatus applied to a test handler of claim 2,
the vibration excitation unit includes a vibration application portion capable of advancing and retreating toward the bracket and applying vibration by impacting the bracket when advancing.
4. The vibration apparatus applied to a test handler of claim 2,
the bracket includes:
a support attached to the band support; and
a vibration transmission part formed to extend from the support part in a direction different from the conveying direction of the tray,
the vibration excitation unit includes a vibration application portion capable of advancing and retreating toward the vibration transmission portion, and when advancing, impacts the vibration transmission portion to apply vibration.
5. The vibration apparatus applied to a test handler of claim 1, further comprising:
and a stopper disposed at a side surface of the separation preventing portion excited by the excitation unit, for preventing the tray from moving in the one direction.
6. The vibration apparatus applied to a test handler of claim 1,
the vibration excitation unit indirectly vibrates the tray in a direction different from the conveying direction of the tray.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2017-0130112 | 2017-10-11 | ||
| KR1020170130112A KR102438196B1 (en) | 2017-10-11 | 2017-10-11 | Vibration apparatus for test handler |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109655729A CN109655729A (en) | 2019-04-19 |
| CN109655729B true CN109655729B (en) | 2021-06-22 |
Family
ID=66110297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811178277.8A Active CN109655729B (en) | 2017-10-11 | 2018-10-10 | Vibration device applied to test processor |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR102438196B1 (en) |
| CN (1) | CN109655729B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102409152B1 (en) | 2020-03-04 | 2022-06-14 | 백두산 | An apparatus for monitoring and controlling vibrator of test handler |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05149761A (en) * | 1991-11-27 | 1993-06-15 | Sony Corp | Automatic adjusting and inspecting device |
| JP2001223254A (en) * | 2000-02-10 | 2001-08-17 | Hitachi Ltd | Wafer transportation device and semiconductor production device |
| JP2006179690A (en) * | 2004-12-22 | 2006-07-06 | Murata Mach Ltd | Tray for sheet transfer |
| CN103121012A (en) * | 2011-11-17 | 2013-05-29 | 三星电子株式会社 | Semiconductor test apparatus |
| CN103226154A (en) * | 2011-12-28 | 2013-07-31 | 株式会社爱德万测试 | Pitch alteration apparatus, electronic component handling apparatus and electronic component test apparatus |
| CN203638639U (en) * | 2013-12-28 | 2014-06-11 | 河南东大矿业股份有限公司 | 360-degree rotary slope conveyor belt device |
| CN104001661A (en) * | 2013-02-25 | 2014-08-27 | 泰克元有限公司 | Vibration apparatus for testing processor |
| CN104425314A (en) * | 2013-08-21 | 2015-03-18 | 宰体有限公司 | Element processor |
| CN105501841A (en) * | 2015-12-31 | 2016-04-20 | 盐城市嘉和机械有限公司 | Transportation device of sandblasting system |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101136983B1 (en) * | 2006-08-09 | 2012-04-19 | 삼성테크윈 주식회사 | Substrate fixing apparatus of conveyer system |
| KR101353587B1 (en) * | 2011-10-25 | 2014-01-23 | 김창남 | Apparatus for Conveying Wafer |
| KR101890900B1 (en) * | 2013-05-22 | 2018-10-01 | (주)테크윙 | Vibration apparatus for test handler |
| US9769970B2 (en) * | 2015-12-16 | 2017-09-19 | Panasonic Factory Solutions Asia Pacific | Apparatus and method for feeding electronic components for insertion onto circuit boards |
-
2017
- 2017-10-11 KR KR1020170130112A patent/KR102438196B1/en active IP Right Grant
-
2018
- 2018-10-10 CN CN201811178277.8A patent/CN109655729B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05149761A (en) * | 1991-11-27 | 1993-06-15 | Sony Corp | Automatic adjusting and inspecting device |
| JP2001223254A (en) * | 2000-02-10 | 2001-08-17 | Hitachi Ltd | Wafer transportation device and semiconductor production device |
| JP2006179690A (en) * | 2004-12-22 | 2006-07-06 | Murata Mach Ltd | Tray for sheet transfer |
| CN103121012A (en) * | 2011-11-17 | 2013-05-29 | 三星电子株式会社 | Semiconductor test apparatus |
| CN103226154A (en) * | 2011-12-28 | 2013-07-31 | 株式会社爱德万测试 | Pitch alteration apparatus, electronic component handling apparatus and electronic component test apparatus |
| CN104001661A (en) * | 2013-02-25 | 2014-08-27 | 泰克元有限公司 | Vibration apparatus for testing processor |
| CN107042197A (en) * | 2013-02-25 | 2017-08-15 | 泰克元有限公司 | Vibrating device for test handler |
| CN104425314A (en) * | 2013-08-21 | 2015-03-18 | 宰体有限公司 | Element processor |
| CN203638639U (en) * | 2013-12-28 | 2014-06-11 | 河南东大矿业股份有限公司 | 360-degree rotary slope conveyor belt device |
| CN105501841A (en) * | 2015-12-31 | 2016-04-20 | 盐城市嘉和机械有限公司 | Transportation device of sandblasting system |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102438196B1 (en) | 2022-08-31 |
| CN109655729A (en) | 2019-04-19 |
| KR20190040684A (en) | 2019-04-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100541712C (en) | The processor that is used for sorting packaged chips | |
| KR100638311B1 (en) | Apparatus for inspecting semiconductor device and method for a classification semiconductor device using the same | |
| TWI425588B (en) | Sorting apparatus for semiconductor device and sorting method for the same | |
| CA2826762C (en) | Packaging bag feeder in packaging machine | |
| US7541828B2 (en) | Burn-in sorter and sorting method using the same | |
| KR102658975B1 (en) | Lens Unit Inspection System | |
| CN109655729B (en) | Vibration device applied to test processor | |
| KR20010047063A (en) | Equipment for assembling heatsink to semiconductor module and method for assembling thereof | |
| KR20080045027A (en) | Unloading handler for semiconductor package | |
| KR101910354B1 (en) | Tray automatic replacement device for semiconductor packages | |
| KR101287526B1 (en) | A die bonder and a method for die bonding using the same | |
| CN106936277B (en) | Full-automatic laminating machine of motor frame | |
| KR101452964B1 (en) | Unit for aligning chip for electronic components and apparatus for aligning chip for electronic components having the same | |
| TWI616963B (en) | Vibration apparatus for test handler | |
| JP2004257980A (en) | Handler for semiconductor element test | |
| US8684168B2 (en) | Handler for electronic components, in particular IC'S, comprising a pneumatic cylinder displacement unit for moving plungers | |
| KR100795964B1 (en) | Boat collecting apparatus for unloading handler for semiconductor package | |
| KR100376772B1 (en) | Handler of horizontal type for testing device and method for operating the same | |
| CN108996179A (en) | The flattening mechanism of electronic component carrier and its job class equipment of application | |
| KR100566821B1 (en) | Tray Transferring Apparatus | |
| KR101642659B1 (en) | Die Bonding Apparatus for Semiconductor Chip | |
| KR20090053303A (en) | Tray supplying and collecting apparatus for test handler and tray transferring method using the same | |
| KR200304725Y1 (en) | Tray feeder for semiconductor package | |
| JPH11226822A (en) | Product supplying device | |
| KR100528706B1 (en) | Tray Transfer for Semi-conductor Test Handler |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |