CN109643680A - The method of magnetic suspension system, the carrier for magnetic suspension system and operation magnetic suspension system - Google Patents

The method of magnetic suspension system, the carrier for magnetic suspension system and operation magnetic suspension system Download PDF

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Publication number
CN109643680A
CN109643680A CN201780043005.4A CN201780043005A CN109643680A CN 109643680 A CN109643680 A CN 109643680A CN 201780043005 A CN201780043005 A CN 201780043005A CN 109643680 A CN109643680 A CN 109643680A
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China
Prior art keywords
carrier
support part
magnetic suspension
suspension system
vector
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Granted
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CN201780043005.4A
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CN109643680B (en
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克里斯蒂安·沃尔夫冈·埃曼
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Applied Materials Inc
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Applied Materials Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/02—Permanent magnets [PM]
    • H01F7/0231—Magnetic circuits with PM for power or force generation
    • H01F7/0236—Magnetic suspension or levitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/20—Electromagnets; Actuators including electromagnets without armatures
    • H01F7/206—Electromagnets for lifting, handling or transporting of magnetic pieces or material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

A kind of magnetic suspension system is provided.The magnetic suspension system includes: base structure (110)；Carrier (120), can be mobile relative to the base structure (110)；With at least one active magnetic bearings (112), it is configured to for the carrier (120) being non-contactly maintained at the base structure (110).The carrier (120) includes first vector part (121) and Second support part (122), the first vector part is configured to magnetically interact with the base structure (110), the Second support part is configured to carrying object (10), wherein the first vector part (121) and the Second support part (122) are connected to each other via flexible connecting member (125).In addition, describing a kind of carrier for magnetic suspension system and a kind of method for operating magnetic suspension system.

Description

Magnetic suspension system, the carrier for magnetic suspension system and operation magnetic suspension system Method
Technical field
The embodiment of present disclosure is related to a kind of being configured to non-contactly to keep, positioning and/or transport agent Magnetic suspension system.Other embodiment is related to the method for a kind of carrier for magnetic suspension system and operation magnetic suspension system.More Particularly, describe it is a kind of be configured to non-contactly that transport agent is by the magnetic suspension system of vacuum system, wherein carrier can To carry object (such as substrate), especially in substantially vertical orientation.
Background technique
Magnetic suspension system can be used for relative to base structure non-contactly transport agent, such as in sub-atmospheric pressure (sub- Atmospheric pressure) under.It can be from the first position (example in vacuum system by the object (such as substrate) that carrier carries Such as " loaded " position) second position (such as deposition position) of the transport into vacuum system.Magnetic suspension system can provide the non-of carrier It contacts transport and resultant without friction transport, and can reduce and generate little particle in vacuum flush system.
Magnetic suspension system generally comprises one or more active control magnetic bearings, is configured to by magnetic force in pre- spacing Carrier is maintained at base structure from place.When carrier vibrates under one of natural frequency of carrier, carrier positions There may be problems for active control.Particularly, under given conditions, by the active control of the active magnetic bearings of magnetic suspension system The natural vibration of (amplify) carrier can be amplified, and may cause the resonant excitation of carrier.
The complicated control algolithm of active magnetic bearings can be used for reducing carrier vibration.However, magnetic suspension is reduced or avoided The oscillation of the carrier of system may be challenging, especially because the oscillation behavior of carrier may be determined in carrier and carrier Size, shape and the material of the object carried.The oscillation of carrier may negatively affect the transportation stability and positioning of carrier Precision.
Therefore, the transport and positioning accuracy for improving the carrier of magnetic suspension system can be advantageous.Further it is provided that being used for magnetcisuspension The carrier of floating system can be advantageous, base portion of the carrier suitable for accurately and accurately transporting and being maintained at magnetic suspension system At structure.
Summary of the invention
In view of above-mentioned, a kind of magnetic suspension system, a kind of carrier and a kind of operation magnetcisuspension for magnetic suspension system are provided The method of floating system.
According to one aspect of the present disclosure, a kind of magnetic suspension system is provided.Magnetic suspension system includes: base portion knot Structure；Carrier, can be mobile relative to base structure；With at least one active magnetic bearings, it is configured to non-contactly in base portion knot Carrier is kept at structure, wherein carrier includes first vector part and Second support part, and first vector part is configured to and base It interacts to portion's structure magnetic, Second support part is configured to carrying object, wherein first vector part and Second support Part is connected to each other via flexible connecting member.
According to the other aspects of present disclosure, a kind of carrier for magnetic suspension system is provided.Carrier includes first Carrier part and Second support part, first vector part are configured to interact with the base structure of magnetic suspension system, magnetic Suspension system is configured to non-contactly to keep, positions and/or transport agent；Second support part is configured to carrying object, Wherein first vector part and Second support part are connected to each other via flexible connecting member.
According to the other aspects of present disclosure, a kind of vacuum system is proposed.Vacuum system includes vacuum chamber；Deposition Source is arranged in vacuum chamber；With the magnetic suspension system according to any embodiment described herein.Magnetic suspension system is configured to Non-contactly transport agent, carrier carry object, and the object will be coated in the deposition region of vacuum chamber.
According to other aspects as described herein, a kind of method for operating magnetic suspension system is provided.Method includes providing load Body, carrier include first vector part and Second support part, and first vector part and Second support part are via flexible connection Part is connected to each other；Arrangement will be carried on the object on Second support part；With at least one active magnetic bearings by carrier It is non-contactly maintained at base structure, wherein first vector part magnetically interacts with base structure.
Other aspects, the advantages and features of present disclosure are apparent by description and attached drawing.
Detailed description of the invention
In order to which the features described above of present disclosure can be understood in detail, can be obtained in a manner of reference implementation be briefly summarized in The more particular description of present disclosure above.Attached drawing is related to the embodiment of present disclosure and is described below.It is typical Embodiment is shown to be set forth in the accompanying drawings and in the following description.
Fig. 1 shows the schematic cross sectional view of the magnetic suspension system according to embodiment described herein；
Fig. 2 shows the schematic cross sectional views according to the magnetic suspension system of embodiment described herein；
Fig. 3 shows the schematic cross sectional view of the magnetic suspension system according to embodiment described herein；
Fig. 4 shows the schematic cross sectional view of the magnetic suspension system according to embodiment described herein；
Fig. 5 A shows the front schematic view of the carrier for magnetic suspension system according to embodiment described herein；
Fig. 5 B shows the perspective schematic view of the upper part of the carrier of Fig. 5 A；
Fig. 6 shows the schematic cross section of the upper part of the carrier for magnetic suspension system according to embodiment described herein Figure；With
Fig. 7 shows the flow chart of the method for the operation magnetic suspension system according to embodiment described herein.
Specific embodiment
With detailed reference to various embodiments, one or more examples of embodiment are shown in the accompanying drawings.Each example mentions For explanation mode and be provided, and it is not intended that for limitation.For example, as embodiment a part and illustrate or describe Feature can be used for any other embodiment or in conjunction with any other embodiment, to obtain further embodiment.This Disclosure is intended to include these adjustment and variation
In the following explanation of attached drawing, same reference numerals indicate same or similar element.In general, only description relates to And the deviation of individual embodiments.Unless otherwise indicated, the explanation of a part in an embodiment or aspect can also answer For the corresponding part or aspect in another embodiment
Fig. 1 shows the sectional view of the magnetic suspension system 100 according to embodiment described herein.Magnetic suspension system 100 includes Base structure 110 and carrier 12 0.Carrier 12 0 is non-contactly maintained at base structure 110, and relative to base structure 110 It is moveable.Base structure 110 may include one or more static rail (tracks) or track (rails), wherein magnetcisuspension The active control magnet unit of floating system is settable in-orbit or track at.
In embodiment shown in Fig. 1, base structure 110 includes top rail, and the top rail is arranged in load The top of body 120, wherein carrier 12 0 is maintained at the lower section of top rail.Alternately or in addition, base structure 110 may include Base track, the base track are arranged in the lower section of carrier, and wherein carrier is maintained at the top of base track.Alternatively or separately Other places, base structure 110 may include at least one siding track, at least one described siding track be arranged in carrier 12 0 side or Two opposite sides.
Magnetic suspension system 100 includes at least one active magnetic bearings 112, is configured to non-contactly in base structure Carrier 12 0 is kept at 110.Settable several active magnetic bearings.At least one active magnetic bearings 112 can be configured to produce The raw magnetic force acted between base structure 110 and carrier 12 0, so that carrier is non-contactly maintained at a distance of the pre- of base structure At set a distance.In some embodiments, which, which is configured to generate, acts on first direction Magnetic force in V (generally substantially vertical direction), so that the distance between top rail and carrier in a first direction It can remain substantial constant.
In some embodiments, which includes actuator 113.Actuator 113 is arranged At base structure 110, it is disposed particularly at the top rail of base structure 110.Actuator 113 may include controllable magnetic Body, e.g. electromagnet.Actuator 113 can be to be actively controllable, for keeping between base structure 110 and carrier 12 0 Preset distance.Magnetic mating member 118 may be arranged at carrier 12 0, be disposed particularly in the head of carrier.The magnetic pairing of carrier Part 118 can be with 113 magnetic interaction of actuator of base structure.
For example, output parameter (such as the electric current for being applied to actuator 113) can according to input state modulator (such as carrier and The distance between base structure) and controlled.Particularly, the distance between the top rail of base structure 110 and carrier 12 0 can It is measured by range sensor, and the magnetic field strength of actuator 113 can be set according to the distance measured.Particularly, magnetic Field intensity can increase in the case where distance is greater than reservation threshold, and magnetic field strength can subtract in the case where distance is less than threshold values It is few.Actuator 113 can be controlled in closed loop or feedback control.
According to the size, shape and material of carrier 12 0, so-called " the intrinsic mode (eigenmodes) " of carrier or natural Vibration may be by active magnetic bearings come the stabilization and robust control of holdback carrier position.In the eigenfrequency of carrier (eigenfrequencies) the very small excitation amplitudes at may cause the big resonance of carrier.According to eigenfrequency Frequency range, vibration can more be amplified by active magnetic bearings.The complicated control algolithm of active magnetic bearings and/ Or the carrier of special shape can be used for reducing the natural vibration of carrier during magnetic suspension.
However, above-mentioned measure (measures) may be not enough to or be unsuitable for allowing the accurately non-contact positioning of carrier It is transported with stablizing.Embodiment as described herein is intended to improve the transportation stability and positioning accuracy of the carrier of magnetic suspension system.
According to embodiment as described herein, carrier 12 0 includes first vector part 121 and Second support part 122, the One carrier part 121 and Second support part 122 are mechanically connected to each other via flexible connecting member 125.Therefore, the oscillation of carrier Characteristic can be flexibly connected by using obtaining with suitable flexibility, elasticity, restoring force, quality, material property and other characteristics Part and be suitably adapted.
First vector part 121 can be configured to and 110 magnetic interaction of base structure.For example, at least one is actively Magnetic bearing 112 may act between first vector part 121 and base structure 110.Particularly, at least one active magnetic The magnetic mating member 118 that the actuator 113 of bearing 112 magnetically interacts may be provided at first vector part 121.Alternatively Or additionally, the active magnetic unit of magnetic suspension system can be incorporated into first vector part.
Second support part 122 is configured to carrying object 10.Particularly, Second support part 122 may include maintaining part Divide 11, the object 10 to keep by carrier is maintained at holding part 11.Second support part 122 may include mounting device, The mounting device is configured to for object 10 being maintained at holding part 11.
Particularly, first vector part 121 may include the magnetic element of magnetic suspension system, such as actively and/or passively magnetic The component of property unit, and Second support part 122 can be configured to the holder for keeping object 10.For example, second carries Body portion 122 may include with the panel element for keeping surface.The holding surface is for keeping the substrate of coating.Therefore, lead to Setting first vector part 121 and Second support part 122 are crossed, element for interacting with base structure and for keeping Object can functionally and be spatially separated from each other in the element of carrier.
First vector part 121 and Second support part 122 are connected to each other by flexible connecting member 125.Flexible connecting member The oscillation behavior of 125 adjustment carrier 12s 0, and provide and be related to the damping effect of the natural vibration of carrier.121 He of first vector part Second support part 122 can vibrate relative to each other via flexible connecting member 125.The vibration peak of carrier under resonant frequency It is attenuated, because Second support part 122 can be mobile relative to first vector part 121 via flexible connecting member 125.
Can in some embodiments in conjunction with other embodiment described herein, flexible connecting member 125 include flexibility Material especially includes elastic material 126.The elasticity of elastic material can be according to the natural frequency and eigen mode for the carrier that will inhibit State selects.
In some embodiments, elastic material 126 includes rubber, fluorubber (Viton) and/or another elastic packing material Material.In some embodiments, elastic material 126 is insulating materials.Elastic material 126 including fluorubber is particularly suitable for vacuum Using.The material is elasticity and provides excellent damping characteristic.Therefore, the vibration of carrier can be effectively suppressed.
In the embodiment of figure 1, elastic material 126 be arranged in first vector part 121 and Second support part 122 it Between, so that first vector part 121 and Second support part 122 can be moved relative to each other or be vibrated in V in a first direction.Its In, between elastic material 126 can be partly or wholly filled between first vector part 121 and Second support part 122 Gap.First direction V can correspond to such a direction, at least one 112 control vector 120 of active magnetic bearings in the direction The distance between base structure 110.Particularly, first direction V can be substantially vertical direction.
Particularly, in some embodiments, flexible connecting member 125 is in a first direction elastically deformable in V, wherein First direction corresponds essentially to such a direction, at least one active magnetic bearings 112 controls base portion knot in the direction The distance between structure 110 and carrier 12 0.Accordingly, it is possible to which the vibration of the carrier excited by least one active magnetic bearings 112 passes through It is suppressed in a particularly efficient manner by flexible connecting member 125.
In some embodiments, first vector part 121 and Second support part 122 can be mainly hardware, and And elastic material 126 can be nonmetallic materials, especially insulating materials.Therefore, by connecting first vector via elastic material Part 121 and Second support part 122, first vector part 121 and Second support part 122 can thermally and/or electrically insulate each other.
Flexible connecting member 125 can thermally and/or electrically insulate first vector part 121 and Second support part 122.Especially Ground, flexible connecting member can form electrical isolation and/or thermodynamic barrier between first vector part 121 and Second support part 122.Cause This, the heat of the object 10 kept towards Second support part 122 from the element being incorporated into first vector part 121 passes Passing can be reduced or avoid.Thus, for example first vector part can be incorporated into during on object 10 in depositing coating material 121 precision electronic element and/or permanent magnet can be from the influence of issuable heat.
Can be in some embodiments in conjunction with other embodiment described herein, when carrier 12 0 is non-contactly kept In base structure 110, first vector part 121 is the top for being partly or wholly arranged in Second support part 122 Carrier header.Particularly, first vector part 121 can non-contactly be maintained at the lower section of the top rail of base structure, and Second support part 122 may be arranged at the lower section of first vector part 121, and is mechanically connected to by flexible connecting member 125 First vector part.
Carrier 12 0 can extend in substantially vertical direction, and wherein first vector part 121 is arranged in Second support portion Divide 122 top.Second support part 122 may include the holding part 11 of substantially vertical orientation, for substantially perpendicular Object 10 is kept in straight orientation.Object 10 such as substrate or mask.
As shown in fig. 1, carrier 12 0 can be substrate carrier, be configured in substantially vertical orientation carry second Substrate is kept at the holding part 11 of body portion 122.Alternatively, carrier 12 0 can be configured to for carrying different objects, such as Mask or mask.
" substrate carrier " used herein is related to being configured in vacuum chamber carrying base along substrate transport path The carrier of plate.Substrate carrier can keep substrate during on substrate in depositing coating material.In some embodiments, such as During transport and/or deposition, substrate can be maintained at substrate carrier in non-horizontal orientation.
During being transported by vacuum chamber, in vacuum chamber (such as relative to mask) position substrate during, and/or During depositing coating material is on substrate, substrate is positively retained at the holding surface of Second support part.Particularly, substrate can lead to It crosses mounting device and is maintained at Second support part, mounting device is for example including electrostatic chuck or magnetic chuck.
" mask carrier " used herein, which is related to being configured in vacuum chamber carrying along mask transportation route, to be covered Mould transports the carrier of mask.During transportation, relative to during base plate alignment and/or during being deposited on substrate, Mask carrier can carry mask.In some embodiments, during transport and/or deposition, mask can be in non-horizontal orientation It is maintained at mask carrier, is especially maintained in substantially vertical orientation at mask carrier.Mask can be filled by installation It sets (for example, mechanical erection part, electrostatic chuck or magnetic chuck of such as clamping piece) and is maintained at the Second support portion of mask carrier Point.The mounting device of other forms can be used, these mounting devices are attached to carrier or integration in the carrier.
The Second support part of mask carrier may include with the plate main body of opening, and wherein mask is positively retained at the week of opening Peripheral edge, so that mask covering opening.Therefore, coating material is directed through mask and towards substrate.Mask can be edge Exclude mask (edge exclusion mask) or shadow mask (shadow mask).Edge exclusion mask is to be configured to use In the mask of one or more fringe regions of masking substrate, so that there is no material to be deposited on one or more during coated substrate On a fringe region.Shadow mask is to be configured to for sheltering to be deposited on the mask of several features on substrate.For example, negative Shadow mask may include several small openings, such as small grid of openings.
" substantially vertical orientation " used herein can be regarded as such a orientation of Second support part 122, In this orientation, the angle between the holding surface of gravity vector and Second support part is few for 20 degree or less, especially 10 Or it is less, more particularly 5 more or less.Therefore, substrate or another object can be maintained at holding in substantially vertical orientation Surface.
It is worth noting that, first direction V is not necessarily substantially vertical direction.For example, in some embodiments, the One direction can be non-vertical direction, such as substantially horizontal direction.Particularly, when carrier is in substantially horizontal orientation When, base structure can be configured to holding, positioning and/or transport agent.Second support part may include substantially horizontally protecting Surface is held, so that object can be maintained at Second support part in substantially horizontal orientation.When carrier is substantially horizontal When being maintained at base structure in orientation, flexible connecting member can be elastically deformable in a horizontal direction, and at least one is led Dynamic magnetic bearing can control the distance between base structure and carrier in the horizontal direction.
Fig. 2 shows the sectional views according to the magnetic suspension system 200 of embodiment described herein.Magnetic suspension system 200 can wrap The feature of magnetic suspension system 100 shown in Fig. 1 is included, so that can refer to above description, without repeating herein.
Magnetic suspension system 200 includes base structure 110.Base structure 110 includes static top rail, the top rail Road is configured to non-contactly keep carrier 12 0 in the lower section of top rail.With at least one of controllable actuator 113 Active magnetic bearings 112 provide the attraction magnetic force between carrier 12 0 and base structure 110.
Carrier 12 0 includes first vector part 121 and Second support part 122.First vector part 121 can carry magnetcisuspension The magnetic element of floating system.Second support part 122 can be configured to holding meanss, for carrying object 10.First vector portion 121 are divided to can be configured to the carrier header for being arranged in the top of Second support part 122.First vector part 121 and second carries Body portion 122 is connected via flexible connecting member.
Second support part 122 may include holding part 11 and mounting device 15.Mounting device 15 is configured to keeping Part keeps object 10.Mounting device 15 may include mechanical erection part (such as clamping piece) and/or electrostatic chuck or magnetic suction Disk.For example, electrostatic chuck can be incorporated into the main body of Second support part 122.Electrostatic chuck can be by electrostatic force in maintaining part Divide and keep object 10 at 11, the electrostatic force can induct in the surface of object and/or in the surface of holding part 11.For supplying The voltage source (such as battery) of electric electrostatic chuck may be arranged at Second support part 122.For example, voltage source may be housed in atmosphere In shell, atmosphere shell is arranged at Second support part 122 or is located in Second support part 122.
In some embodiments, the magnetic mating member 118 of at least one active magnetic bearings 112 can be fixed to the first load Body portion 121.Magnetic mating member 118 can magnetically interact with actuator 113.Actuator 113 is arranged in base structure 110 And it is located at the top of carrier 12 0.
Can be in some embodiments in conjunction with other embodiment described herein, at least one other magnetic devices 220 can be set and the carrier that is used in the second direction S transverse to first direction V (in particular perpendicular to first direction V) Side stablize.Second direction S can correspond to substantially horizontal direction, the especially thickness direction of carrier 12 0.At least one is another Outer magnetic devices 220 may include at least one magnetic element for being fixed to first vector part 121.
At least one other magnetic devices 220 can be passive magnetic stability device.Particularly, at least one other magnetic Property device 220 may include a permanent magnet 219 of a permanent magnet more than 218 and second more than first.A permanent magnet 218 more than first is solid Determine to carrier.A permanent magnet 219 is fixed to base structure more than second.A permanent magnet more than 218 and second is permanent more than first Magnetic force between magnet 219 can force carrier to predetermined position in second direction S, for example, carrier is forced to guide to apart from side At the position of track preset distance, or force carrier to the center position between two side guide rails.
In embodiment shown in Fig. 2, magnetic devices 220 in addition are on the two sides of first vector part 121 It is provided between two side guide rails and the permanent magnet for being fixed to first vector part 121 and repels magnetic force.Therefore, first vector Part 121 can non-contactly be maintained at the center between the guide rails of side.Alternatively, as shown in Figure 3, lower stabilising arrangement And/or upper stabilising arrangement may be provided at the side of carrier.
Second support part 122 can be maintained at the lower section of first vector part 121 via flexible connecting member 125.Especially Ground can provide gap 124 between first vector part 121 and Second support part 122, and wherein flexible connecting member can pass through bridge Carry the gap 124 between body portion and mechanically connected first vector part 121 and Second support part 122.Gap 124 can Extend in V in a first direction, that is, extend in the control direction of at least one active magnetic bearings 112.The vibration peak of carrier It can be attenuated, because first vector part and Second support part are resiliently displaceable relative to each other.
Can in some embodiments in conjunction with other embodiment described herein, flexible connecting member 125 include bridge joint Element 130.Bridging element 130 bridges the gap 124 between first vector part 121 and Second support part 122.Bridging element 130 may include rigid material, especially non-elastic material, e.g. metal.Particularly, bridging element 130 can the company of being configured to It is connected to the panel element of both first vector part 121 and Second support part 122, such as adapter (adapter) plate.
First elastic element 131 may act between bridging element 130 and first vector part 121 and/or the second elasticity Element 132 may act between bridging element 130 and Second support part 122.First elastic element 131 and the second elastic element 132 can be made of the material of elastically deformable, such as fluorubber.
Flexible connecting member 125 allows the flexible deformation of the carrier in V in a first direction.Particularly, in a first direction in V The vibration of carrier 12 0 can lead to shearing force on the first elastic element 131 and/or on the second elastic element 132.Elasticity The elasticity of element allows bridging element 130 slightly to move relative to first vector part 121 and Second support part 122. Vibration peak can be attenuated in a particularly efficient manner.
Fig. 3 shows the sectional view of the magnetic suspension system 300 according to embodiment described herein.Magnetic suspension system 300 can wrap The feature of magnetic suspension system 100 and/or magnetic suspension system shown in Fig. 2 200 shown in Fig. 1 is included, so that can refer to can be with Above description, without repeating herein.
Magnetic suspension system 300 includes base structure 110.Base structure 110 includes top rail, and the top rail is through structure It makes non-contactly to keep carrier 12 0 in the lower section of top rail.At least one active magnetic bearings 112 is in carrier 12 0 and base There is provided between portion's structure 110 attracts magnetic force especially to act on base wherein the attraction magnetic force can act in V in a first direction In sheet in vertical direction.
Carrier 12 0 includes first vector part 121 and Second support part 122.First vector part 121 can carry magnetcisuspension The magnetic element of floating system.Second support part 122 is configured for the holding meanss of carrying object 10.First vector part 121 can be configured to the carrier header for being arranged in the top of Second support part 122.First vector part 121 and Second support Part 122 is connected via flexible connecting member.
Can be in some embodiments in conjunction with other embodiment described herein, settable third carrier part 123, Third carrier part 123 can be connected to Second support part via other flexible connecting member 128.In some embodiments, Third carrier part 123 is arranged in the lower section of Second support part 122.Other flexible connecting member 128 can by with herein Any flexible connecting member is similar or consistent mode and is constructed.In addition, being connected via a other flexible connecting member Further carrier part to Second support part can be set in other embodiments.
Third carrier part 123 can carry the magnetic element of magnetic suspension system.For example, at least the one of side stabilising arrangement 320 A actively or passively magnetic element can be fixed to third carrier part 123.
Alternately or in addition, it is configured to the driving unit 330 along carrier transportation route non-contactly transport agent At least one magnetic element can be fixed to third carrier part 123.Driving unit 330 may include linear motor.
Can in some embodiments in conjunction with other embodiment described herein, flexible connecting member 125 include first Bridging element 133 and the second bridging element 134.First bridging element 133 can connect the first load on the first side of carrier part Body portion and Second support part, and the second bridging element 134 can connect first vector portion in second side of carrier part Point and Second support part, second side is in contrast to the first side.Particularly, the first bridging element 133 and the second bridging element 134 can It is arranged on the opposite side in gap 124, gap 124 is provided between first vector part 121 and Second support part 122.
First elastic element 131 may act between first vector part 121 and the first bridging element and/or first carries Between body portion 121 and the second bridging element.Second elastic element may act on Second support part 122 and the first bridging element Between and/or Second support part 122 and the second bridging element between.First elastic element 131 and the second elastic element 132 It can be made of the material of elastically deformable, such as fluorubber.
First elastic element and the second elastic element can be configured to be attached to first vector part and Second support part Elastic material band.
First bridging element and the second bridging element may include rigid material, especially non-elastic material, e.g. metal. Particularly, the first bridging element and the second bridging element can be configured to be respectively connected to first vector part 121 and the second load The non-resilient adaptor plate of both body portions 122.When the first bridging element 133 and the second bridging element 134 are arranged in load When on the two sides of body and in a first direction Chong Die with both first vector part and Second support part respectively in V, around level The bending for bending the carrier 12 0 of axis can be prevented from or avoid.Therefore, it is possible to provide resistant to bending but flexible in V in a first direction simultaneously Stable carrier.
The vibration of the carrier 12 0 in V may cause on the first elastic element 131 in a first direction and/or the second elasticity is first Shear strain on part 132.Because elastic element flexible deformation caused by first vector part and Second support part between Relative movement the vibration peak of carrier can be made to decay, and can provide stable carrier resistant to bending.
Fig. 4 shows the sectional view of the magnetic suspension system 400 according to embodiment described herein.Magnetic suspension system 400 can wrap The feature of any aforementioned magnetic suspension system is included, so that can refer to above description, without repeating herein.
Magnetic suspension system 400 includes carrier 12 0.Carrier 12 0 has first vector part 121 and Second support part 122. First vector part 121 and Second support part 122 are connected to each other via flexible connecting member 125, flexible connecting member 125 it is similar The flexible connecting member of magnetic suspension system 300 shown in Fig. 3.
Particularly, gap 124 provide in V in a first direction first vector part 121 and Second support part 122 it Between.Several bridging elements that first vector part 121 and Second support part 122 are connected to each other are arranged in the two of gap 124 On a opposite side.These bridging elements may respectively be with adaptor plate made of rigid material.Elastic element may be provided at bridge joint Between element and carrier part, to provide the flexibility of connector in V in a first direction.
As shown in Figure 4, the first bridging element 133 may be provided on the first side of carrier part, and the second bridge joint member Part 134 may be provided in second side of carrier part, and second side is in contrast to the first side.First elastic element 131 may be arranged at Between one carrier part 121 and the first bridging element 133 and/or between first vector part 121 and the second bridging element 134. Second elastic element 132 may be arranged between Second support part 122 and the first bridging element 133 and/or Second support part 122 and second between bridging element 134.Therefore, when elastic element is resiliently deformed because of shearing force, bridging element can be It is slightly moved in one direction V relative to first vector part 121 and/or relative to Second support part 122.
Can in some embodiments in conjunction with other embodiment described herein, flexible connecting member 125 can for clamping Connector.Particularly, first vector part 121 and Second support part 122 can be clamped in the first bridging element 133 and the second bridge It connects between element 134.First bridging element 133 and the second bridging element 134 are arranged in first vector part and Second support portion On the opposite side divided.By oppressing 133 He of the first bridging element from opposite side towards first vector part and Second support part Second bridging element 134, Second support part 122 can pass through the chucking power by the first bridging element and the offer of the second bridging element And it is maintained at the lower section of first vector part 121.
In some embodiments, it is possible to provide connecting element and be used for from opposite side towards first vector part 121 and Two carrier parts 122 oppress the first bridging element 133 and the second bridging element 134.For example, connecting element may include screw, spiral shell At least one of bolt, pin, bar or similar component.
In the illustrative embodiments shown in Fig. 4, connecting element is from the first bridging element 133 by being arranged first In carrier part 121 and 122 split shed of Second support part and extend to the second bridging element 134.Substitution or additionally, such as Shown in dotted line in Fig. 4, between at least one connecting element can extend through between first vector part and Second support part Gap 124.
First elastic element 131 and/or the second elastic element 132 can be configured to by the perforative elastic ring of connecting element. First elastic element 131 can stay on the opposite flank of first vector part 121, provide to be aligned in first vector portion Opening in point.Second elastic element 132 can stay on the opposite flank of Second support part 122, provide to be aligned Opening in Second support part.Exist alternatively, the first elastic element 131 and the second elastic element 132 can be configured to setting The band of elastic material on the side surface of first vector part and Second support part.
On the two sides that first bridging element and the second bridging element are arranged in carrier part and in a first direction in V When Chong Die with both first vector part and Second support part respectively, the bending around the carrier 12 0 of horizontal buckling axis can be kept away Exempt from.Therefore, it is possible to provide resistant to bending but stable carrier flexible in V in a first direction simultaneously.
Can be in some embodiments in conjunction with other embodiment described herein, it is possible to provide be configured to along carrier The driving unit 330 of transportation route non-contactly mobile vehicle 120.Driving unit 330 can be configured to (such as perpendicular to figure In the third direction of 4 paper) non-contactly transport agent.Driving unit 330 can be by acting on the transport of the magnetic force on carrier Carrier.For example, driving unit 330 may include linear motor.Driving unit 330 can be magnetic with magnetic mating member that carrier is arranged in Ground interaction.Magnetic mating member may include one or more arrays of permanent magnet.
In some embodiments, driving unit 330 may be provided at the base track of base structure 110, the bottom rail Road is arranged in the lower section of carrier.In the embodiment illustrated in fig. 4, the top rail of base structure 110 includes active magnetic bearings, institute Stating active magnetic bearings provides at least part of retentivity non-contactly to keep carrier at base structure 110, and base The base track of portion's structure 110 includes being configured to transport agent driving unit 330.In other embodiments, driving unit 330 position and/or the position of active magnetic bearings are replaceable or change in other ways.
Fig. 5 A shows the front view of the carrier 520 according to the magnetic suspension system of embodiment described herein.Fig. 5 B shows figure The perspective view of the upper part of the carrier 520 of 5A, and the partial cutaway view of carrier 520 is also shown.Carrier 520 may include aforementioned The feature of embodiment without repeating herein.
Carrier 520 can non-contactly be maintained at the base structure of any embodiment described herein.For example, carrier 520 wraps Magnetic mating member 118 is included, is configured to magnetically interact with the controllable actuator of active magnetic bearings, so that carrier 520 can be kept and transport at the preset distance apart from base structure.
Carrier 520 includes first vector part 121 and Second support part 122, first vector part 121 and Second support Part 122 is connected to each other via flexible connecting member 125.Flexible connecting member 125 may include by elastic material 126 (such as fluorubber) Manufactured elastic element.Second support part 122 includes holding part 11, is configured to carrying object.Object is, for example, substrate.
As shown in figs. 5 a and 5b, the gap 124 extended in V in a first direction may be provided in first vector part 121 Between Second support part 122.Flexible connecting member 125 provides first vector part 121 and Second support in V in a first direction Flexibility between part 122.
Can be in some embodiments in conjunction with other embodiment described herein, Second support part can be configured to Object is carried, object has 1m2Or bigger, especially 5m2Or bigger, more particularly 10m2Or bigger size.For example, second Carrier part 122 can be configured to the large-area substrates that carrying is used for display manufacturing.Therefore, Second support part can provide guarantor Surface is held, keeps surface that there is 1m2Or bigger, especially 5m2Or bigger, more particularly 10m2Or bigger size.Larger vector is past Toward the intrinsic mode with many keys.Carrier is separated into via the mutual two or bigger parts of flexible connecting member connection Oscillation of the carrier at the natural frequency of carrier can greatly be inhibited.
Flexible connecting member 125 may include several bridging elements 130, is respectively connected to first vector part 121 and second and carries Body portion 122, elastomeric material 126 are arranged between bridging element 130 and first vector part and Second support part.Bridge Connecing element 130 can be configured to be arranged essentially parallel to first vector on the two sides of first vector part and Second support part The plate that part and Second support part extend.Each plate can be Chong Die with both first vector part 121 and Second support part 122. Therefore, it can avoid the bending of the carrier around flexible connecting member 125, while the first vector part in V and the in a first direction When relative movement between two carrier parts can be feasible.In some embodiments, flexible connecting member 125 includes being arranged in the Three, five or bigger bridging elements on the two sides of one carrier part and Second support part.For example, flexible connecting member can Including three or more bridging elements adjacent to each other in the width direction of carrier.
Elastic material is separately positioned between bridging element 130 and first vector part and Second support part.It illustrates, Several elastic rings or other elastic elements may be provided between each bridging element 130 and first vector part 121, and several bullets Property ring or other elastic elements may be provided between each bridging element and Second support part 122.One of bridging element exists It is omitted in Fig. 5 A, to illustrate these elasticity members that may act between bridging element and first vector part and Second support part Part.The elastic element for being configured to elastic ring is shown in section in figure 5B.
Fig. 6 shows the sectional view of the upper part of the carrier 620 according to embodiment described herein.Before carrier 620 may include The feature for stating embodiment, without repeating herein.
Carrier 620 includes first vector part 121 and Second support part 122, first vector part 121 and Second support Part 122 is connected to each other via flexible connecting member 125.Gap 124 can be provided in V in a first direction in first vector part and the Between two carrier parts.
Flexible connecting member 125 may include bridging element 130, and bridging element 130 connects first vector part 121 and second and carries Body portion 122, and allow the relative movement between first vector part 121 and Second support part 122 in V in a first direction. Particularly, the first elastic element 131 may act between first vector part 121 and bridging element 130, and the second elasticity member Part 132 may act between Second support part 122 and bridging element 130.First elastic element 131 and/or the second elasticity member Part 132 can be configured to elastic ring 622, for example including elastic material (such as fluorubber).
Can be in some embodiments in conjunction with other embodiment described herein, flexible connecting member 125, which can be positive, matches It closes connector (positive fit connection).Particularly, bridging element 130 can be with the first of first vector part 121 Opening engagement, and engaged with the second opening of Second support part 122.In some embodiments, bridging element can be with first Several openings of carrier part 121 engage, these openings can (side by side) be arranged side by side in a horizontal direction, and/or The mode being located above another in vertical direction with one is arranged.In addition, bridging element 130 can be with Second support part 122 several openings engagement, these openings can be arranged side by side in a horizontal direction, and/or be located in vertical direction with one Mode above another is arranged.
Particularly, bridging element 130 may include the plate part substantially perpendicularly extended and extend partially past from plate Several engaging pins of one opening and the second opening.Second support part 122 can not be fallen from first vector part 121, because of bridge Connect the engaging pin of element certainly the first opening and Second support part of (positively) and first vector part second Opening engagement.
In some embodiments, the first elastic element 131 (especially elastic ring) is arranged in the first opening, and the Two elastic elements 132 are arranged in the second opening.The engaging pin of bridging element 130 can pass through the first elasticity member in the first opening Part 131, and the other engaging pin of bridging element 130 can pass through the second elastic element 132 in the second opening.When the second load When body portion 122 is vibrated relative to first vector part 121, elastic ring 622 is subjected to the compression and drawing acted in vertical direction Stretch, so that high amplitude of oscillation restoring force caused by elastic ring of the carrier in vertical direction inhibits.
Second can be included in some embodiments in conjunction with other embodiment described herein, flexible connecting member 125 Carrier part and first vector part are subjected to shearing force (for example, with reference to showing when being moved relative to each other in V in a first direction Fig. 2,3,4, the carrier in 5A, 5B) elastic element.These carriers can be resistant to bending in the extreme.In some embodiments, flexible Connector 125 is included in when Second support part and first vector part are moved relative to each other in V in a first direction through being pressurized The elastic element of contracting and drawing force (for example, with reference to carrier shown in Fig. 1 and Fig. 6).These carriers can be especially durable.? In some embodiments, flexible connecting member may include the relative movement phase between first vector part and Second support part Between, it faces the elastic element of shearing force and faces the combination of the elastic element of compression and drawing force.
Carrier according to embodiment as described herein includes first vector part 121 and Second support part 122.First Carrier part 121 is configured to the static base structure with magnetic suspension system and magnetically interacts, and magnetic suspension system is through structure It makes non-contactly to keep, position and/or transport agent 120.Second support part 122 is configured to carrying object 10.First Carrier part 121 and Second support part 122 are connected to each other via flexible connecting member 125.
It can be used in vacuum system according to the magnetic suspension system of any embodiment described herein.Vacuum system includes true Plenum chamber, the sedimentary origin and magnetic suspension system being arranged in vacuum chamber.Magnetic suspension system can be configured to non-contactly transport The carrier of object is carried into the deposition region of vacuum chamber.Coating material can be deposited by the sedimentary origin in deposition region On object.
Fig. 7 shows the flow chart of the method for the operation magnetic suspension system according to embodiment described herein.
In block 710, the carrier according to any embodiment described herein is provided.Carrier includes first vector part 121 With Second support part 122, first vector part 121 and Second support part 122 are connected to each other via flexible connecting member.
In frame 720, the object 10 to be carried by carrier is disposed on Second support part 122.
Object 10 is loaded when can be arranged in oriented non-vertically (such as being disposed within a substantially horizontal in orientation) in carrier On Second support part 122.Carrier can then move to the second orientation, such as be moved to substantially vertical orientation.In base In sheet in vertical orientation, carrier can keep and transport along the base structure 110 of magnetic suspension system.For example, carrier can pass through Vacuum swings mould group, and basically horizontal load position is rotated into substantially vertical transport orientation.
Alternatively, object can be loaded in when carrier is located in (such as in substantially vertical orientation) non-horizontal orientation On Second support part 122.For example, carrier can be maintained at base structure during object is loaded on Second support part At 110.
In some embodiments, object can be substrate to be coated, especially be used for the large area base of display manufacturing Plate.Other objects can be carried by carrier, such as mask or mask.
In frame 730, carrier is non-contactly maintained at the base of magnetic suspension system using at least one active magnetic bearings 112 Portion's structure 110, wherein first vector part 121 magnetically interacts with base structure 110.For example, at least one active magnetic Property bearing 112 can provide attraction between the top rail and first vector part 121 of base structure.
Can be in some embodiments in conjunction with other embodiment described herein, flexible connecting member 125 be in first party It is flexible into V, is especially flexible in substantially vertical direction.Particularly, Second support part 122 is first Via flexible connecting member (such as the flexible deformation for passing through the elastic element of flexible connecting member) relative to first vector portion in the V of direction Divide 121 can be moveable.Therefore, the oscillation behavior of carrier can be adjusted by flexible connecting member, and carrier (such as altogether At vibration frequency) vibration peak can be attenuated.
At least one active magnetic bearings 112 can control the distance between base structure and carrier in V in a first direction.Cause This, can be reduced or be avoided by the amplitude of the natural frequency of the carrier acted in active magnetic bearings in a first direction V.
In optional frame 740, carrier can be transported by vacuum chamber while being maintained at base structure.
In the optional frame 750, carrier can be positioned in (such as front of sedimentary origin) deposition region.Coating material It can be deposited on the object 10 that carrier is carried.During deposition, carrier can be non-contactly maintained at base structure.Alternatively, Carrier can be installed during deposition to installation part, and wherein carrier can be with installation part Mechanical Contact.
Object can be substrate, especially have 0.5m plate or bigger, and more particularly 1m is not or bigger, or even 5m to or 10m is or the large-area substrates of bigger size.For example, substrate can be the large-area substrates for display manufacturing.
Organic material can be deposited on substrate.For example, organic light emitting diode (OLED) device can be by depositing organic material Material manufactures on substrate.
It is worth noting that, first vector part is not necessarily arranged in the Second support part for being configured to carrying object Top.For example, in some embodiments, first vector part may be arranged at lower section or the Second support of Second support part Partial side.Particularly, first vector part can magnetically interact with the base track of base structure, wherein several masters The actuator of dynamic magnetic bearing may be arranged at base track.In the case where aftermentioned, active magnetic bearings can produce magnetic rise and lift Power, for non-contactly keeping carrier in the top of base track.In further embodiment, Second support part can be It is arranged in horizontal direction adjacent to first vector part.The amplitude of the vibration excited by horizontal force side stabilising arrangement can quilt It reduces, and can avoid the amplitude at natural frequency.
Although in conclusion not departing from the basic of present disclosure above with respect to the embodiment for being disclosed content In the case where protection scope, the other and further embodiment of present disclosure, and the protection of present disclosure are designed Range is determined by appended claims.

Claims (15)

1. a kind of magnetic suspension system, comprising:
Base structure (110)；
Carrier (120), can be mobile relative to the base structure (110)；With
At least one active magnetic bearings (112) is configured to the carrier (120) being non-contactly maintained at the base portion knot At structure (110)；
Wherein the carrier (120) includes first vector part (121) and Second support part (122), the first vector portion Divide and be configured to interact with the base structure (110), the Second support part is configured to carrying object (10), institute First vector part (121) and the Second support part (122) is stated to be connected to each other via flexible connecting member (125).
2. magnetic suspension system as described in claim 1, wherein the flexible connecting member (125) includes flexible material, especially Elastic material (126).
3. magnetic suspension system as claimed in claim 1 or 2, wherein the first vector part (121) is carrier header, it is described Carrier header is partly or wholly arranged in the top of the Second support part (122).
4. magnetic suspension system as described in any one of claims 1-3, wherein at least one active magnetic bearings (112) packet Actuator (113) and magnetic mating member (118) are included, the actuator arrangement at the base structure (110), match by the magnetism Part is arranged at the first vector part (121), wherein the actuator (113) is controllable for keeping the base portion Preset distance between structure (110) and the carrier (120).
5. magnetic suspension system according to any one of claims 1-4, wherein the flexible connecting member (125) is in a first direction It (V) is elastically deformable in, the first direction corresponds at least one described active magnetic bearings (112) and controls the base The direction of the distance between portion's structure (110) and the carrier (120).
6. magnetic suspension system as described in any one in claim 1-5, wherein the flexible connecting member (125) is carried described second Body portion (122) is maintained at the lower section of the first vector part (121), carries so that gap (124) are provided at described first Between body portion and the Second support part.
7. magnetic suspension system as claimed in any one of claims 1 to 6, wherein the flexible connecting member includes bridging element (130), the first elastic element (131) and the second elastic element (132), first elastic element act on the bridging element Between the first vector part (121), second elastic element acts on the bridging element and the Second support Partially between (122).
8. such as the described in any item magnetic suspension systems of claim 1-7, wherein the flexible connecting member (125) includes the first bridge joint Element (133) and the second bridging element (134), wherein the first vector part and the Second support part are clamped in institute It states between the first bridging element (133) and second bridging element (134).
9. magnetic suspension system as claimed in claim 7, wherein the bridging element (130) and the first vector part (121) the first opening engagement, and engaged with the second opening of the Second support part (122), wherein first elasticity Element (131) is arranged in first opening, and wherein second elastic element (132) is arranged in second opening In, particularly, wherein first elastic element (131) and second elastic element (132) they are elastic rings.
10. such as the described in any item magnetic suspension systems of claim 1-9, wherein the Second support part (122) includes installation Device (15) is configured at the holding part (11) that the object (10) is maintained to the Second support part (122), special Not, wherein the mounting device (15) includes electrostatic chuck or magnetic chuck.
11. such as the described in any item magnetic suspension systems of claim 1-10, wherein the carrier (120) is substrate carrier or mask Carrier is configured to keep substrate or mask in substantially vertical orientation.
12. a kind of carrier (120) for magnetic suspension system, the carrier include:
First vector part (121) is configured to interact with the base structure of the magnetic suspension system (110), the magnetic Suspension system is configured to non-contactly keep, position and/or transport the carrier (120)；With
Second support part (122) is configured to carrying object (10), wherein the first vector part (121) and described the Two carrier parts (122) are connected to each other via flexible connecting member (125).
13. a kind of method for operating magnetic suspension system, comprising the following steps:
Carrier is provided, the carrier includes first vector part (121) and Second support part (122), the first vector portion Divide and the Second support part is connected to each other via flexible connecting member (125)；
Object (10) is arranged on the Second support part (122)；With
The carrier is non-contactly maintained at base structure (110) at least one active magnetic bearings (112), wherein institute First vector part (121) and the base structure (110) are stated to interact.
14. method as claimed in claim 13, wherein the flexible connecting member (125) is flexible in (V) in a first direction, Especially be flexible in substantially vertical direction, and wherein at least one described active magnetic bearings (112) in institute It states and controls the distance between the base structure and the carrier in first direction (V).
15. method according to claim 13 or 14, further includes steps of
When the carrier to be non-contactly maintained at the base structure, transports the carrier and pass through vacuum chamber；
The carrier is located in deposition region；With
The depositing coating material on the object (10) carried by the carrier.
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