JPH01168038A - Magnetic levitation type guiding device - Google Patents

Abstract

PURPOSE:To correct the displacement of a movable body without using an electromagnet by providing elastic units provided oppositely to a guide at both sides of the movable body and a rotor for elastically deforming the elastic units in contact with the guide. CONSTITUTION:When an external force is applied to a movable body 24 levitated by the repelling force of a stationary side permanent magnet 24 and a movable side permanent magnet 25, the body 24 might is displaced laterally to cross its moving direction. When the body 24 is displaced, for example, rightward at a distance of (x) or longer, the outer periphery of a rotor 28 provided at the right side of the body 24 is abutted against the inner face of a wall 22 of right side while rotating, thereby elastically deforming an elastic unit 26 provided at the rotor 28. Then, since a repelling force is generated at the body 26 in response to the elastically deformed amount, the body 26 is moved by the repelling force in a reverse direction to the direction of the displacement, i.e., leftward and returned to a predetermined position.

Description

DETAILED DESCRIPTION OF THE INVENTION [Objective of the Invention (Industrial Application Field) This invention relates to a magnetic levitation type guide device that levitates a movable body relative to a guide body using a permanent magnet.

(Conventional Technique #1) For example, in a semiconductor manufacturing process, generation of dust is avoided and a clean environment is maintained. Therefore, a magnetic levitation guide device is employed as a device for transporting the semiconductor wafers for delivery or the like.

Conventionally, as the magnetic levitation type guide device, one having a structure as shown in FIG. 3 has been used. □In other words, 1 in the figure is the guide body. This guide body 1 has wall portions 2 erected on both sides, and a pair of fixed permanent magnets 3 are provided on the inner bottom with a support member 4 interposed therebetween.

A movable body 5 is supported by the guide body 1 in a non-contact manner. That is, a pair of movable permanent magnets 6 are provided on the lower surface of the movable body 5, facing the fixed permanent magnets 3. The fixed permanent magnet 3 and the moving permanent magnet 6 have the same polarity. Therefore, the movable body 5 is supported in a floating state by the repulsive force generated between the permanent magnets 3 and 6.

Further, electromagnets 7 are provided on both sides perpendicular to the moving direction of the moving body 5, and a positioning permanent magnet 8 is provided at the upper end of the wall portion 2 of the guide body 1 facing the electromagnets 7. Further, mounting members 9 are vertically provided on both sides of the movable body 5, and a displacement detector 11 is provided at the lower end thereof facing the side surface of the supporting member 4. This displacement detector 1
1 detects the gap between the support member 4 and the displacement in the direction intersecting the moving direction of the movable body 5, and inputs the detection signal to the control device 12 via the lead wire 13. . Then, this control 1112 controls the input current to the electromagnet 7 via the lead wire 13 according to the signal from the displacement detector 11. therefore,
The attractive force between the pair of electromagnets 7 and the positioning permanent magnets 8 is controlled, thereby eliminating the displacement of the movable body 5 in the left-right direction. Although not shown, the movable body 5 is driven in a direction along the guide body 1 by magnetic attraction, a rope, or the like.

According to such a conventional structure, the displacement of the moving body 5 is corrected by controlling the current supplied to the electromagnet 7. Therefore, since a control device @12 is required, the configuration becomes complicated and the cost increases.Furthermore, the electromagnet 7 and the displacement detector 11 provided on the moving body 5 have lead wires 13 connected to them. Because of the connection, the moving distance of the moving object 5 may be limited.

(Problems to be Solved by the Invention) As described above, conventional magnetic levitation guide devices use electromagnets to correct the displacement of the moving object, resulting in higher costs due to the complexity of the configuration and the connection to the moving object. In some cases, the movement of the mobile object was restricted by the lead wire that was connected to the vehicle.

This invention was made based on the above circumstances, and its purpose is to provide a magnetically levitated guide device that can correct the displacement of a moving object without using electromagnets. be.

[Structure of the Invention] (Means and Effects for Solving the Problems) In order to solve the above problems, the present invention provides a guide body having a fixed permanent magnet on the horizontal surface side and having vertical surfaces on both sides as guide surfaces. A movable body levitated by the repulsion or attraction force of a permanent magnet on this guide body, an elastic body provided on both sides of this movable body facing the guide part, and this elastic body. A rotating body which is rotatably installed and comes into contact with the guide portion of the guide body to elastically deform the elastic body when the movable body is displaced in a direction intersecting the direction of movement of the movable body is placed at the end. The displacement of the movable body is corrected by the repulsive force of the elastic body generated when the movable body shifts and the rotating body hits the guide body.

(Example) An example of the present invention will be described below with reference to FIG. The magnetic levitation type guide device shown in FIG. The guide body 21 has walls 22 erected on both sides, and a pair of fixed permanent magnets 23 are disposed facing each other at a predetermined interval on the inner bottom surface 21a.

A movable body 24 is supported by the guide body 21 . That is, the movable body 24 has a flat plate shape, and a pair of movable permanent magnets 25 are provided on the lower surface of the movable body 24 at a slightly narrower interval than the fixed permanent magnets 23 . The movable permanent magnets 2 and 5 have a polarity different from that of the fixed permanent magnet 23. Therefore, the moving body 24 is supported in a floating state by the magnetic repulsion generated between the permanent magnets 23 and 25.

Upper ends of band-shaped elastic bodies 26 made of, for example, springs U are attached to both sides of the movable body 24, respectively.

Support members 27 are provided at the lower ends of these elastic bodies 26, respectively. A rotary body 28 made of, for example, a radial bearing is attached to this support member 27 by a support shaft 29 . The outer peripheral surface of the rotating body 28 faces the inner surface of the wall portion 22 of the guide body 21 with a predetermined distance X therebetween.

Therefore, when the movable body 24 deviates to the side of the guide body 21 by a distance X or more, the outer circumferential surface of the rotating body 28
It comes into contact with the inner surface of 2.

Note that the movable body 24 is driven along the guide body 21 by a magnetic attraction force, an opening, a valve, etc. (not shown).

According to the magnetic levitation guide device configured in this way, when an external force is applied to the movable body 24 levitated by the repulsive force between the fixed permanent magnet 23 and the movable permanent magnet 25, the movable body 24 crosses the direction of movement. It may shift in the width direction.

When the movable body 24 shifts in the width direction, for example, in the right direction in FIG. The rotating body 28 comes into contact with the rotating body 28 and elastically deforms the elastic body 26 provided thereon. Then, this elastic body 2
Since a repulsive force is generated in the movable member 6 according to the amount of elastic deformation, the repulsive force causes the movable body 26 to move in a direction opposite to the direction of displacement, that is, to the left, and return to a predetermined position.

Further, the distance between the pair of movable permanent magnets 25 is smaller than the distance between the pair of fixed permanent magnets 23. Therefore, when the movable body 24 shifts to the right, for example, the opposing area of the movable permanent magnet 25 with respect to the fixed permanent magnet 23 located on the right side increases, and thereby the fixed permanent magnet 23 and the movable permanent magnet 25 The repulsive force increases. Therefore, the increase in the repulsive force prevents the moving body 24 from moving to the right. That is, by making the interval between the pair of movable permanent magnets 25 smaller than the interval between the fixed permanent magnets 23, stability in the direction intersecting the moving direction of the movable body 24 can be improved.

FIG. 3 shows another embodiment of the present invention, in which the guide body 21 has a T-shaped cross section, and the movable body 24 is connected to the guide body 21.
It has a channel-like cross-section that covers the horizontal portion 41 of. Fixed permanent magnets 23a are provided at both ends of the lower surface of the horizontal portion 41 of the guide body 21, and movable permanent magnets 25 are provided at the portion of the movable body 24 facing the fixed permanent magnets 23a.
A is provided. The movable permanent magnet 25a and the fixed permanent magnet 23a have the same polarity. Therefore, the movable body 24 is supported in a floating state with respect to the guide body 21 by the magnetic attraction force.

Incidentally, a support shaft 42 as an elastic body that can be elastically deformed is hung from both ends of the upper inner surface of the moving body 24, and a rotary body 28 is rotatably provided on the support shaft 42. are opposed to both end faces in the width direction of the horizontal portion 41 of the guide body 21 at a predetermined interval. Although not shown, a similar configuration is also provided to increase the distance in the vertical direction.

Even in such a configuration, if the movable body 24 shifts in the direction intersecting the moving direction and the rotating body 28 comes into contact with the end surface of the horizontal portion 41 of the guide body 21, the support shaft 42 will be elastically deformed, as in the above embodiment. Since this generates a repulsive force, the movable body 24 can be returned to its original position.

[Effects of the Invention] As described above, in the present invention, when a movable body levitated by the repulsion or attraction force of a permanent magnet with respect to a guide body shifts in a direction crossing the direction of movement, the elastic body becomes rotatable. A rotating body provided on the guide body contacts the guide body and elastically deforms the elastic body. Therefore, since the displacement of the moving body can be corrected by the repulsive force generated by the elastic deformation of the elastic body, the configuration can be simplified compared to the conventional method which required the use of iM magnets. has advantages.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of the overall configuration of an embodiment of the present invention;
FIG. 2 is a schematic diagram of the overall configuration showing another embodiment of the present invention, and FIG. 3 is a schematic diagram of the conventional configuration. 21... Guide body, 23... Fixed side permanent magnet, 24...
... Moving body, 25... Movable side permanent magnet, 26... Elastic body, 28... Rotating body. Applicant's agent Patent attorney Takehiko Suzue

Claims (1)

[Claims] A guide body with a fixed permanent magnet on the horizontal surface side and vertical surfaces on both sides as guide parts, a movable body levitated by the repulsion or attraction force of the permanent magnets on this guide body, and a movable body on both sides of the movable body. an elastic body provided opposite to the guide section;
The rotating body is rotatably provided on the elastic body and comes into contact with the guide portion of the guide body when the movable body shifts in a direction intersecting the moving direction, thereby elastically deforming the elastic body. Magnetic levitation guide device.