JPH04121936U - AC magnetic levitation conveyance device - Google Patents

Abstract

(57) [Summary] [Purpose] Eliminate relative slippage between a floating body and an object carried on the floating body. [Structure] An AC magnetic levitation conveyance device in which a floating body 2 made of a non-magnetic metal material having conductivity is levitated above an AC electromagnet array 1, and an object 3 to be conveyed is conveyed via the floating body 2. A feature is that a vibration damping member 4 is provided on the upper surface of the floating body 2.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is an AC magnetic levitation transport system for transporting wafers, etc. in semiconductor manufacturing equipment. Regarding the location.

0002

[Conventional technology]

In a conventional device of this kind, as shown in FIGS. 3 and 4, the transferred object 3 such as a wafer is an electromagnet. It was placed directly on the floating body 2 floated by the row 1.

0003

[Problem that the idea aims to solve]

By the way, in this type of device, the repulsive force that causes the floating object 2 to levitate is an alternating magnetic field and A magnetic field is formed by the eddy current induced in the floating body 2 thereby. Therefore, the repulsive force fluctuates with a component (2fo) that is twice the frequency (fo) of the alternating magnetic field. Ru. That is, the floating body 2 slightly vibrates with the 2fo component.

0004 Therefore, if the transferred object 3 such as a wafer is placed directly on the floating body 2, the floating object 3 When the body 2 vibrates, the transported object 3 also vibrates, and the relative acceleration between the floating object 2 and the transported object 3 increases. If it exceeds 1 g (g: gravitational acceleration), the transported object 3 cannot move together with the floating body 2. This results in relative slippage. When this relative slip occurs, the transported object 3 and the floating object 2 friction and generate dust, and the original meaning of trying to eliminate dust by non-contact conveyance is The disadvantage was that it was lost.

[0005] The present invention was developed in order to deal with such problems, and the object to be transported and floating The purpose is to eliminate relative slippage with the body.

[0006]

[Means to solve the problem]

The configuration of the present invention for achieving the above purpose will be explained using FIG. 1 corresponding to an embodiment. To be clear, the present invention uses an alternating current electromagnet to replace the floating body 2 made of a non-magnetic metal material with conductivity. An alternating current that levitates above the row 1 and conveys the conveyed object 3 via the floating body 2 In the magnetic levitation conveyance device, a vibration damping member 4 is provided on the upper surface of the floating body 2. be a sign.

[0007]

[Effect]

The present invention utilizes the above-mentioned means to transport objects that are placed on a floating body via a vibration damping member. Even if the floating object vibrates with the 2fo component, the vibration damping member has an appropriate vibration damping function. If so, the relative acceleration between the vibration damping member and the transported object will be 1 g or less, and the vibration damping member and the transported object will be No relative slippage occurs with the delivered object.

[0008]

【Example】

An embodiment of the present invention will be described below based on FIG. 1. 1 is an electromagnet array, 2 is a floating body. , 3 is an object to be transported such as a wafer, 4 is a vibration damping member, and the vibration damping member 4 is made of rubber, resin, The lower end of the vibration damping member 4 is made of a material with suitable spring and tamping functions such as metal. is fixed to the upper surface of the floating body 2, and the transported object 3 is attached to the upper surface of the floating body 2 via the vibration damping member 4. Place it on.

[0009] The damping member 4 may be formed into a plurality of divided pieces as shown in the figure, or may be connected all around. A ring-shaped one may also be used. Another embodiment of the damping member 4 is shown in FIG. In Fig. 2, the damping member 4 is shaped like a bellows. , the object to be transported is supported by a plurality of them. Other shapes of vibration damping member 4 The shape can be any shape, such as a coil shape, as long as it has an appropriate spring and tamping function. But it's okay.

0010

[Effect of the idea]

In this way, according to the present invention, is a vibration damping member provided on the upper surface of the floating body? There is no relative slip between the vibration damping member and the object being transported on the floating body. Therefore, there are no areas where slipping can occur between components such as the floating body, vibration damping members, and transported objects. This has the effect of eliminating the generation of dust.

[Brief explanation of drawings]

FIG. 1 shows an embodiment of the present invention, in which a is a plan view and b is a plan view.
is a sectional view.

FIG. 2 is a sectional view showing another example of a vibration damping member.

FIG. 3 is a plan view showing a conventional example.

FIG. 4 is a sectional view showing a conventional example.

[Explanation of symbols]

1 Electromagnet row 2 Floating object 3 Object to be transported 4 Vibration damping member

──────────────────────────────────────────────── ─── Continuation of front page (72) Creator Motomi Nakajima 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture Mitsubishi Heavy Industries, Ltd. Hiroshima Research Center

Claims (1)

[Scope of utility model registration request] 1. An AC magnetic levitation conveyance device in which a floating body made of a conductive non-magnetic metal material is floated on an array of AC electromagnets, and an object to be transported is conveyed via the floating body. 1. An AC magnetic levitation conveyance device, characterized in that a vibration damping member is provided on the upper surface of the device.