JPS63202204A - Magnetic levitation type conveyor apparatus - Google Patents

Abstract

PURPOSE:To prevent the generation of fine dust, by levitating, in a supporting structure, a conveyor table member supporting a conveyed article through a magnetic force of magnetic levitation means. CONSTITUTION:If a power is applied to electromagnets 40-43 provided on the inside of supporting structures 32, 33 in the manner of opposing the peripheral face of a conveyor table member 35, said conveyor table member 35 levitates on the inside of said supporting structures 32, 33 so that the tip faces of said electromagnets form preset equal spaces from the peripheral face of the conveyor table member 35. Also, if a power is applied to electromagnets 44, 45, tip faces of said electromagnets form preset equal spaces from a leg plate 37 to control the conveyor table member 35 in such manner that said member does not rotate on its axis on the inside of the supporting structures 32, 33. Then, in a state where the conveyor table member 35 is levitated magnetically, a linear motor 38 is operated and the conveyor table member 35 is caused to move in its axial direction.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetically levitated transport device suitable for use in a clean environment such as a semiconductor manufacturing factory.

(Conventional technology) Two-layer $41 no-shelf
Some work is performed under controlled environments. For this reason,
Even for equipment that transports semiconductor wafers and other objects, there is a need for equipment that does not generate fine dust during transport.

As a conventional conveying device used in such a vacuum environment, there is, for example, one shown in FIG. 6.7.

In the conventional conveying device shown in FIG. 6, a conveying platform member 6 having a support platform 5 provided at one end thereof is housed in a vacuum container 1 via a sliding bearing 2.3 so as to be slidable in the axial direction of the conveying platform member 6. Then, by operating the handle 8 through the attraction force between the magnet 10.11 provided at the other end of the transfer table member 6 and the magnet 12.13 provided on the external handle 8, the transfer table member 6 is moved. is moved in the axial direction to transport the object on the support stand 5 to a predetermined position.

Further, the conventional conveyance device shown in FIG.
The bellows 2 provided at the other end of the conveyor member 18
By operating the handle 22 through the handle 22, the conveyance table member 18 is moved in its axial direction or in the vertical and horizontal directions, and the object to be conveyed on the support table 16 is conveyed to a predetermined position. There is.

(Problems to be Solved by the Invention) However, in the conventional conveying device as shown in FIG.
Since it moves in the axial direction without making contact with the object, there is a risk that fine dust may come out from the contact area and adhere to the object to be transported.

Furthermore, in the conventional conveyance device as shown in FIG. Or, it may undergo bending deformation and fatigue deterioration due to long-term use, and when it gets old, each time such deformation occurs, fine dust may come out from the fatigue deteriorated part or it may break, causing dust to adhere to the transported object. There is (
Means for Solving the Problems) Therefore, in order to solve the above-mentioned problems, the present invention includes a transport table member that supports an object to be transported and has a predetermined length; The carrier member is moved by magnetic force so as to form a predetermined gap between a supporting structure movably supported by the carrier member and a circumferential surface of the carrier member provided on the support structure so as to face the circumferential surface of the carrier member. The apparatus is configured to include a magnetic levitation means for levitation, and a drive means for moving the carrier member in the axial direction.

(Function) According to the magnetically levitated conveyance device having such a configuration, the conveyance table member supporting the object to be conveyed levitates within the support structure by the magnetic force of the magnetic levitation means, and the conveyance table member is placed in a non-contact manner with the support structure. By moving the conveyed object in the axial direction using the drive means to convey the conveyed object, it prevents the generation of fine dust, maintains the clean room or vacuum chamber clean, and prevents dust from adhering to the conveyed object. can do.

(Example) Hereinafter, an example of the present invention will be described based on the drawings. Figure 1.2 shows the first magnetic levitation type conveyance device according to the present invention.
It is a figure showing an example.

First, the configuration will be described. In FIG. 1, 25 is a vacuum container, and a magnetically levitated transfer device 30 is housed within this vacuum container 25.

The magnetically levitated transport device 30 has a support structure 32.33 fixed within the vacuum vessel 25.
A conveyance table member 35 having a predetermined length is inserted into the inside of the conveyor table member 33, and supports the conveyance table member 35 so as to be movable in its axial direction. A support table 36 is provided at one end of the conveyance table member 35 to support an object (object to be conveyed) that does not like dust, such as a semiconductor wafer or some other sample.
A leg plate 37 is provided below the entire length.

As shown in FIG. 2, inside each of the support structures 32 and 33, there are groove stones An facing the circumferential surface of the carrier member 35.
JI A') A* (Yongagaen to 1,000 lead) is provided. Furthermore, electromagnets 44 and 45 are provided on the support structure 32 near the leg plate 37 so as to face the leg plate 37.

The energization of each of these electromagnets 40, 41, 42, 43, 44, 45 is controlled by a controller (control circuit) housed inside the structure 47 between the support structures 32 and 33. ing.

The support structure 32.33 near each of the electromagnets 40.41.42.43.44.45 has a
Gap sensors 50.51.52.53.5 detect the gap between the tip surfaces of these electromagnets and the peripheral surface of the carrier member 35 or the leg plate 37 and output a signal to the controller.
4.55 is provided.

As shown in FIG. 1, between the structure 47 and the leg plate 37,
A linear motor 38 (driving means) is provided for reciprocating the conveyance table member 35 in its axial direction.

Next, the effect will be explained. When the electromagnets 40, 41, 42, and 43 are energized from the controller, the magnetic force causes the carrier member 35 to be moved into a supporting structure so that an equal predetermined gap is formed between the tip surfaces and the circumferential surface of the carrier member 35. 32. Float inside 33. Furthermore, when the electromagnets 44, 45 are energized from the controller, their magnetic forces cause the end surfaces of these to form an equal predetermined gap with the leg plate 37, so that the carrier member 35 moves inside the support structure 32, 33. to prevent rotation around the axis. While each electromagnet is controlled by the controller in this way, the gap sensor 50.51.52.53.54
．． Each of the controllers 55 constantly outputs signals to the controller to enable and smoothly carry out the control described above.

Then, by operating the linear motor 38 while magnetically levitating the carrier member 35 as described above, semiconductor wafers and other objects to be transported that are not suitable for vehicles are placed thereon (
The supported transport table member 35 is moved in its axial direction.

In this way, the conveyance table member 35 is supported by the support structures 32 and 33 so as to be movable in the axial direction in a non-contact state, thereby preventing fine dust from coming out. The vacuum chamber in the vacuum container 25 in which the transport device 30 is placed can be maintained clean and dust can be prevented from adhering to the transported object.

Moreover, since the conveyance table member 35 is movable in the axial direction without contacting the support structures 32 and 33, the conveyance table member 35 can be moved very smoothly.

Further, unlike the conventional conveying device shown in FIG. 6, there is no need to operate the magnet through the handle 8, and the electromagnet can be securely fixed to the support structure 32, 33.

Furthermore, unlike the conventional transfer device shown in FIG. 6.7, there is no need to operate the vacuum container from outside via a handle, so the entire magnetically levitated transfer device W 30 can be housed inside the vacuum container 25. can.

FIG. 3.4 shows a second embodiment of the invention. In the first embodiment, the carrier member 35 was formed of a cylindrical member, whereas in this second embodiment, the carrier member 57 was formed of a cylindrical member having an oval cross section. Both sides of the conveyor table member 57 have a semicircular cross section as shown in FIG. Electromagnets 61 and 62 are opposed to the circumferential surfaces of both sides of the semicircular cross section of the conveyor table member 57.
．． 63.64 (magnetic levitation means) is the support structure 59.60
are provided inside each. Magnet 61.62.
As shown in FIG. 4, the support structures 59 and 60 in the vicinity of each of the electromagnets 63 and 64 are provided with gaps between the end surfaces of these electromagnets and the circumferential surfaces of both sides of the semicircular cross section of the carrier member 57. A gap sensor 70.71.72.73 is provided which detects and outputs a signal to an external controller.

As shown in FIG. 3, one end of the transport table member 57 is equipped with an object (such as a semiconductor wafer or some other sample) that dislikes dust.
A support stand 58 is provided to support the object to be transported. Further, a linear motor 68 (driving means) for reciprocating the conveyance table member 57 in the axial direction is provided between the structure 67 between the support structures 59 and 60 and the conveyance table member 57.

According to the second embodiment, the carrier member 57 is formed of a cylindrical member having an elliptical cross section, and the electromagnets 61 and 62 are arranged opposite to each other on the peripheral surface of both sides of the semicircular cross section.
．． 63 and 64, so that no rotational force is generated around the axis of the carrier member 57. Therefore, the rotation of the carrier member 35 as in the first embodiment is restricted. No electromagnets 44,45 are required for this purpose, and their omission can therefore reduce the overall cost accordingly.

Although the conveyance table member 57 is formed of a cylindrical member, it may be formed of a solid member like the conveyance table members 75 and 76 of the third embodiment described later.

FIG. 5 shows a third embodiment of the invention. Whereas in the embodiment described above, there was one conveyor member 35 or 57, in this third embodiment, there are two conveyor members 35 or 57 formed of a member having an oval cross section as in the second embodiment. An XY table is constructed by intersecting transport table members 75 and 76 at right angles to each other.

In other words, the two conveyance table members 75 and 76 are supported by placing the conveyed object 78, which is sensitive to dust, on top of the two conveyance table members 75 and 76, and the two conveyance table members 75 are .76 are driven separately to move the transported object 78 in the XY direction.
It is designed to send direction. Transport platform member 75.7
The magnetic levitation of No. 6 is performed by an electromagnet (not particularly shown) as in the previous embodiment.

According to the third embodiment, even in a vacuum chamber, it is possible to easily position objects that do not like dust by feeding them in the X and Y directions.

In the first embodiment, the leg plate 37 is provided below the conveyance table member 35, but the leg plate 37 may be provided above the conveyance table member 35.

Further, in the first embodiment, the support stand 36 for supporting the object to be conveyed was provided at one end of the conveyance table member 35, but support stands may be provided at the other ends as well.

Further, in the above embodiment, the magnetic levitation type transfer device was placed in a vacuum container, but the magnetic levitation type transfer device may be placed in a clean room.

In addition, in the above embodiment, a linear motor was used as a driving means for being placed in a vacuum container, but when being placed in a clean room, driving means other than these,
For example, you can use a traction cable, etc. Inside a clean room, there is a flow of air from top to bottom, and if you use a traction cable etc. downstream of this air flow, fine dust will not come out from the contact part of the traction cable etc. This is because the dust can be prevented from being swept further downstream and adhering to the transported object.

(Effects of the Invention) As explained above, according to the present invention, fine dust is removed by moving the conveyance table member in the axial direction by the driving means without contacting the support structure and conveying the conveyed object. By preventing dust from coming out, the vacuum chamber or clean room can be kept clean, and dust can be prevented from adhering to objects to be transported.

Further, since the conveyance table member 35 is movable in the axial direction without contacting the support structures 32 and 33, the conveyance table member 35 can be moved very smoothly.

Further, unlike the conventional conveying device shown in FIG. 6, there is no need to operate the magnet through the handle 8, and the electromagnet can be securely fixed to the support structure 32, 33.

Further, unlike the conventional transfer device shown in FIG.
It can be stored inside.

Further, according to the second embodiment, there is no need for an electromagnet for regulating the rotation of the conveyance table member as in the first embodiment.
Therefore, by omitting them, the overall cost can be reduced accordingly.

Furthermore, according to the third embodiment, even in a vacuum chamber or a clean room, it is possible to easily position objects that do not like dust by feeding them in the X and Y directions.

[Brief explanation of the drawing]

1.2 are diagrams showing a first embodiment of the magnetically levitated conveyance device according to the present invention, in which FIG. 1 is a side view thereof, FIG. Figure 4 shows the second embodiment of the present invention.
3 is a side view of the magnetically levitated conveyance device, FIG. 4 is a front view as viewed from the IV arrow in FIG. 3, and FIG.
The figure is a perspective view of a magnetically levitated conveyance device according to a third embodiment of the present invention, and FIG. 6.7 is a side view of a conventional conveyance device. 25...Vacuum container 30...Magnetic levitation type transfer device 32.33.59.60...Support structure 35.57.7
5.76...Transportation table member 36.58...Support stand 37...Leg plate 38.68...Linear motor 40-45.61-64...Electromagnet (magnetic levitation means) 47.67.・Sugi bodies 50, 51, 52, 53, 54, 55 ・Gap sensor 78 ・Transferred object 80 ・XY direction drive device (drive means) Patent applicant
Seiko Seiki Co., Ltd. Figure 4; 2nd column of 4 x 45 x 1q
■2 pieces Figure 6 #: Kumerei 1 Meiji 1 flight 1 view Figure 7

Claims (1)

[Claims] a carrier member that supports an object to be transported and has a predetermined length; a support structure through which the carrier member is inserted and supports the carrier member movably in the axial direction; a magnetic levitation means provided on the support structure to levitate the conveyance table member by magnetic force so as to form a predetermined gap between the conveyance table member and a peripheral surface of the conveyance table member; and a drive means for moving the conveyance table member in an axial direction; A magnetic levitation type conveyance device characterized by being equipped with.