CN109632715A - A kind of gas sensing probe based on triangle microcavity two-way F-P interference compensation - Google Patents
A kind of gas sensing probe based on triangle microcavity two-way F-P interference compensation Download PDFInfo
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- CN109632715A CN109632715A CN201910072881.0A CN201910072881A CN109632715A CN 109632715 A CN109632715 A CN 109632715A CN 201910072881 A CN201910072881 A CN 201910072881A CN 109632715 A CN109632715 A CN 109632715A
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- 239000000523 sample Substances 0.000 title claims abstract description 26
- 238000001514 detection method Methods 0.000 claims abstract description 30
- 239000013307 optical fiber Substances 0.000 claims abstract description 30
- 230000003287 optical effect Effects 0.000 claims abstract description 28
- 230000004888 barrier function Effects 0.000 claims abstract description 7
- 238000007789 sealing Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 6
- 238000012360 testing method Methods 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 3
- 238000005253 cladding Methods 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- 241000209094 Oryza Species 0.000 claims 2
- 235000007164 Oryza sativa Nutrition 0.000 claims 2
- 235000009566 rice Nutrition 0.000 claims 2
- 238000012544 monitoring process Methods 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 4
- 238000009434 installation Methods 0.000 abstract description 2
- 238000002310 reflectometry Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 50
- 239000000835 fiber Substances 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 4
- 231100001261 hazardous Toxicity 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005670 electromagnetic radiation Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 206010070834 Sensitisation Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003471 anti-radiation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
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- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Abstract
The invention discloses a kind of gas sensing probes based on triangle microcavity two-way F-P interference compensation, the probe includes optical path chamber and detection chambers, two chambers are kept apart by sealing plate, wherein optical path chamber includes light source, the light issued by it is after Amici prism, using convex lens focussed collimated, the optical signals optical detector returned from detection chambers is received.Detection chambers are made of optical fiber structure, barrier bracket, air inlet and air outlet, and one end of optical fiber structure constructs gas detection cell, are coated with golden film reflecting layer to improve reflectivity in the end of optical fiber structure.The present invention can realize the self compensation of temperature by the difference processing of two-way F-P interference signal, make not influenced by environment temperature when probe work, and the sonde configuration is compact, small in size, and the real-time monitoring of the installation and gas leakage in small space may be implemented.
Description
Technical field
The invention belongs to technical field of optical fiber, are related to a kind of gas sensing based on triangle microcavity two-way F-P interference compensation
Probe is, it can be achieved that the accurate monitoring of the hazardous gases concentration such as poisonous and harmful to industrial environment and the leakage of micro hazardous gas are pre-
It is alert.
Background technique
There are many kinds of gas detection methods, can be divided into generally according to monitoring principle: electrochemical process, gas chromatography, optics
Formula method, high molecular material gas sensor etc..But the above-mentioned detection technique for hazardous gas is long, required there are the response time
Equipment is expensive, is difficult to meet the needs of electromagnetic radiation and biochemical corrosive environment.Optical fiber sensing technology be the eighties of last century middle and later periods with
The development of optic communication and gradually grow up, it is one-kind using light wave as carrier, and optical fiber is transmission medium, perception and is passed
The sensing technology of defeated measured signal.Since fibre optical sensor is using optical fiber as signal transmission medium, so with other sensors
Compare, it has the advantages that incomparable: including anti-radiation, corrosion-resistant, high sensitivity, can far-end remote control detection, easy networking, again
It measures light, small in size, cheap etc..
Fiber gas sensor mainly detects gas using the physics of gas, chemistry and relevant optical phenomena or characteristic
Bulk concentration, corresponding technology include absorption-type optical fiber gas sensing, that is, utilize lambert's Bill absorption law, and detection is inhaled due to gas
Light intensity attenuation caused by receipts；Film transmission-type optical fiber gas sensing technology, then be the material of gas sensitization is fabricated to it is transparent
Film can also change when gas concentration changes through the light intensity of film therewith；Interference-type optical fiber gas sensing is
Using the relationship of under test gas concentration and gas refracting index, using the variation of interferometry gas refracting index, to ask indirectly
Obtain the concentration of gas.
The detection to gas concentration can be achieved in above method, but in many industrial production living environments, it is inflammable easy
The detection of the hazardous gases such as quick-fried is extremely complex, so that the micromation of optical fiber gas sensing probe, high sensitivity and resistance are extraneous multiple
The Capability Requirement in heterocycle border is day by day harsh, also needs the appearance of new structure optical fiber gas sensing structure, solves correlation and actually answers
The problem of with process.
Summary of the invention
The present invention provides a kind of gas sensing probes based on triangle microcavity two-way F-P interference compensation, solve at present
Fiber gas sensor volume is big, sensitivity is low, the response time is long, is difficult to the problem of meeting complex environment application demand.
In order to achieve the above object, The technical solution adopted by the invention is as follows:
A kind of gas sensing probe based on triangle microcavity two-way F-P interference compensation, which includes optical path chamber and inspection
Chamber is surveyed, two chambers are kept apart by sealing plate；Optical path chamber includes light source, detection chambers by optical fiber structure, barrier bracket, into
Port and gas outlet are constituted, and one end of optical fiber structure is built with gas detection cell；In order to improve reflectivity, the end of optical fiber structure
It is coated with golden film reflecting layer.
The light that light source issues is after Amici prism, and using convex lens focussed collimated, the light returned from detection chambers is believed
It number is received by optical detector.
The shape of above-mentioned gas sensing probe be cylinder, length 50mm, diameter 20mm, above-mentioned light source it is defeated
Wavelength is 1520-1580nm out, and the operation wavelength of above-mentioned optical detector is 350-2000nm, and the focal length of above-mentioned convex lens is
5mm, the shape of above-mentioned optical fiber structure are cylinder, and core diameter is 20 microns, and material is silica, and cladding diameter is
300 microns, material is polyimides, and the shape of the gas detection cell is isoceles triangle prism, is using femtosecond laser
The cavity that lithographic technique is processed on optical fiber, the side length of right-angle side are 150 microns, and the design of the structure can be in fiber axis
Two F-P cavity structures are constructed respectively to radial, and sensing is tied so as to eliminate environment temperature by signal differential processing technique
The influence of fruit, the golden film reflecting layer with a thickness of 10 microns, the barrier bracket be the Asia with porous lattice structure
Gram force plate, so that gas is in the indoor free-flowing of test chamber.
When the variation of under test gas concentration, the multichannel light in gas detection cell bevel edge and light structure fibre core intersection position is believed
Number interference condition change, the interference spectrum received so as to cause optical detector is mobile, and it is dense may finally to obtain gas
The numerical value of degree.
Compared with prior art, a kind of gas sensing based on triangle microcavity two-way F-P interference compensation proposed by the present invention
Probe, can by the difference processing of two-way F-P interference signal realize temperature self compensation, make pop one's head in work when not by environment temperature
The influence of degree；Structure of the invention is compact, small in size, and the real-time prison of the installation and gas leakage in small space may be implemented
It surveys.
Detailed description of the invention
Attached drawing 1 is a kind of schematic diagram of gas sensing probe based on triangle microcavity two-way F-P interference compensation.
In figure: 1 optical path chamber；2 detection chambers；3 sealing plates；4 light sources；5 Amici prisms；6 optical detectors；7 convex lenses；8
Optical fiber structure；9 gas detection cells；10 golden film reflecting layer；11 barrier brackets；12 air inlets；13 gas outlets.
Specific embodiment
The embodiment of the present invention is described in detail below with reference to technical solution and attached drawing.
The present invention proposes a kind of gas sensing probe based on triangle microcavity two-way F-P interference compensation, the basic principle is that
By the interference effect of two reflecting surface light of F-P cavity, realizes and reflection distance between the surface is accurately measured.The shape of the probe is circle
Cylindricality, length 50mm, diameter 20mm, including optical path chamber 1 and detection chambers 2, two chambers are kept apart by sealing plate 3,
It prevents device heating in optical path chamber 1 from changing the property of under test gas in monitoring chamber 2, and can effectively block the string of electromagnetic radiation
It disturbs.Optical path chamber 1 includes the light source 4 that output wavelength is 1520-1580nm, and the light issued by it is after Amici prism 5, then passes through
Crossing 7 focussed collimated of convex lens that focal length is 5mm to enter core diameter is 20 microns, the cylindrical fiber knot that outer diameter is 300 microns
In structure 8.Short focal length lens and big core diameter fiber, it is ensured that the efficient coupling of space optical signal and optical fiber optical signal, and
And keep the structure entirely popped one's head in more compact, small and exquisite.Into optical fiber structure 8 optical signal reach gas detection cell 9 bevel edge
When reflecting surface, a part of light, which can be reflected into, returns fibre core with a thickness of 10 microns of golden film reflecting layer 10, and another part light then can
It is reflected into gas detection cell 9 and in golden film reflecting layer 10, gas concentration information in carrying, two ways of optical signals is respectively passing through one
It after a F-P cavity, can interfere with original optical signal when arriving again at the bevel edge reflecting surface of gas detection cell 9, form two kinds of interference
Signal, is reflected back optical path chamber 1 by fibre core, and planoconvex lens 7 are focused with after the reflection of Amici prism 5, connect by optical detector 6
It receives.The gas concentration information not being affected by temperature can be obtained by Difference Calculation.
In the description of above-mentioned gas sensing probe implementation process, the shape of the gas detection cell 9 is isoceles triangle prism,
It is the cavity processed on optical fiber using femtosecond laser lithographic technique, and the side length of right-angle side is 150 microns, the structure
Design can construct two F-P cavity structures in optical fiber axial direction and radial direction respectively, so as to by signal differential processing technique
Influence of the environment temperature to sensing outcome is eliminated, the barrier bracket 11 is the acrylic board with porous lattice structure, with
Conducive to free-flowing of the gas in detection chambers 2.
Claims (10)
1. a kind of gas sensing probe based on triangle microcavity two-way F-P interference compensation, which is characterized in that the probe includes optical path
Chamber (1) and detection chambers (2), two chambers are kept apart by sealing plate (3)；Optical path chamber (1) includes light source (4), test chamber
Room (2) is made of optical fiber structure (8), barrier bracket (11), air inlet (12) and gas outlet (13), one end of optical fiber structure (8)
It is built with gas detection cell (9)；The end of optical fiber structure (8) is coated with golden film reflecting layer (10)；The light that light source (4) issues passes through
After Amici prism (5), using convex lens (7) focussed collimated, from the optical signals optical detector (6) of detection chambers (2) return
It receives.
2. gas sensing probe according to claim 1, it is characterised in that: the output wavelength of the light source (4) is
1520-1580nm；The operation wavelength of the optical detector (6) is 350-2000nm.
3. gas sensing probe according to claim 1 or 2, it is characterised in that: the focal length of the convex lens 7 is 5mm.
4. gas sensing probe according to claim 1 or 2, it is characterised in that: the shape of the optical fiber structure 8 is circle
Cylindricality, core diameter are 20 microns, and material is silica, and cladding diameter is 300 microns, and material is polyimides.
5. gas sensing probe according to claim 3, it is characterised in that: the shape of the optical fiber structure 8 is cylinder
Shape, core diameter are 20 microns, and material is silica, and cladding diameter is 300 microns, and material is polyimides.
6. according to claim 1, gas sensing probe described in 2 or 5, it is characterised in that: the shape of the gas detection cell 9
For isoceles triangle prism, the cavity for using femtosecond laser lithographic technique to process on optical fiber, the side length of right-angle side is 150
Micron, the structure construct two F-P cavity structures in transverse and longitudinal direction.
7. gas sensing probe according to claim 3, it is characterised in that: the shape of the gas detection cell 9 be etc.
Lumbar triangle prism, the cavity for using femtosecond laser lithographic technique to process on optical fiber, the side length of right-angle side are 150 micro-
Rice, the structure construct two F-P cavity structures in transverse and longitudinal direction.
8. gas sensing probe according to claim 4, it is characterised in that: the shape of the gas detection cell 9 be etc.
Lumbar triangle prism, the cavity for using femtosecond laser lithographic technique to process on optical fiber, the side length of right-angle side are 150 micro-
Rice, the structure construct two F-P cavity structures in transverse and longitudinal direction.
9. according to claim 1, gas sensing probe described in 2,5,7 or 8, it is characterised in that: the golden film reflecting layer 10
With a thickness of 10 microns.
10. gas sensing probe according to claim 9, it is characterised in that: the barrier bracket 11 is with porous
The acrylic board of lattice structure, in favor of free-flowing of the gas in detection chambers 2.
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| CN201910072881.0A CN109632715B (en) | 2019-01-25 | 2019-01-25 | Gas sensing probe based on triangular microcavity double-path F-P interference compensation |
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| CN201910072881.0A CN109632715B (en) | 2019-01-25 | 2019-01-25 | Gas sensing probe based on triangular microcavity double-path F-P interference compensation |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1673926A1 (en) * | 1989-05-30 | 1991-08-30 | Предприятие П/Я В-8584 | Refractometer |
| US6480325B1 (en) * | 2000-05-25 | 2002-11-12 | The Board Of Trustees Of The Leland Stanford Junior University | Laser light source and image display based on quasi-phasematched nonlinear optical devices |
| CN101000305A (en) * | 2006-12-26 | 2007-07-18 | 重庆工学院 | Micromai's interference biomolecule action sensing method and probe |
| CN101354350A (en) * | 2008-09-01 | 2009-01-28 | 陈书乾 | Optical interference type methane detector |
| US20180024127A1 (en) * | 2016-07-20 | 2018-01-25 | City University Of Hong Kong | Optochemical detector and a method for fabricating an optochemical detector |
| CN207051192U (en) * | 2017-04-21 | 2018-02-27 | 中国计量大学 | A kind of self-calibration device based on the double F P verniers amplification hydrogen gas sensors of optical fiber microcavity |
-
2019
- 2019-01-25 CN CN201910072881.0A patent/CN109632715B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1673926A1 (en) * | 1989-05-30 | 1991-08-30 | Предприятие П/Я В-8584 | Refractometer |
| US6480325B1 (en) * | 2000-05-25 | 2002-11-12 | The Board Of Trustees Of The Leland Stanford Junior University | Laser light source and image display based on quasi-phasematched nonlinear optical devices |
| CN101000305A (en) * | 2006-12-26 | 2007-07-18 | 重庆工学院 | Micromai's interference biomolecule action sensing method and probe |
| CN101354350A (en) * | 2008-09-01 | 2009-01-28 | 陈书乾 | Optical interference type methane detector |
| US20180024127A1 (en) * | 2016-07-20 | 2018-01-25 | City University Of Hong Kong | Optochemical detector and a method for fabricating an optochemical detector |
| CN207051192U (en) * | 2017-04-21 | 2018-02-27 | 中国计量大学 | A kind of self-calibration device based on the double F P verniers amplification hydrogen gas sensors of optical fiber microcavity |
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| Title |
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| MINGRAN QUAN 等: "Ultra-high sensitivity Fabry–Perot interferometer gas refractive index fiber sensor based on photonic crystal fiber and Vernier effect", 《OPTICS LETTERS》 * |
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