CN101672769B - Gas concentration measuring instrument - Google Patents

Gas concentration measuring instrument Download PDF

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CN101672769B
CN101672769B CN2009101535262A CN200910153526A CN101672769B CN 101672769 B CN101672769 B CN 101672769B CN 2009101535262 A CN2009101535262 A CN 2009101535262A CN 200910153526 A CN200910153526 A CN 200910153526A CN 101672769 B CN101672769 B CN 101672769B
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air chamber
gas
incident
outgoing
optical fiber
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CN101672769A (en
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阎春生
瑞小川
王斌浩
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Zhejiang University ZJU
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Abstract

The invention relates to a gas concentration measuring instrument. The existing gas chamber has longer length or high precision of processing requirement, expensive cost and difficult control of optical path. The gas concentration measuring instrument comprises a gas chamber. The inner side wall of the gas chamber is plated with a full reverse membrane, a top cover and a bottom cover of the gas chamber are respectively provided with a gas inlet and a gas outlet, and the gas inlet is sequentially connected with a gas inlet valve, a flow meter and a gas bottle; the gas outlet is sequentially connected with a gas outlet valve, a vacuum pump and a wasted treatment device; the full reverse membrane is provided with an incident light-passing groove along the axial direction of the gas chamber; the outer side wall of the gas chamber corresponding to the incident light-passing groove is provided with a plurality of incident optical fiber collimators equidistantly; the full reverse membrane is provided with an emergent light-passing groove which corresponds to the incident light-passing groove on the periphery; the outer side wall of the gas chamber corresponding to the emergent light-passing groove is provided with a plurality of emergent optical fiber collimators equidistantly; the output end of each emergent optical fiber collimator is optically connected with the input end of a detector; and the output end of the detector is connected with a signal processor. The device has simple processing, low cost and high signal-to-noise radio and detection sensitivity.

Description

Gas concentration measurement instrument
Technical field
The invention belongs to the optical sensing technical field, relate to a kind of gas concentration measurement instrument.
Background technology
No matter be that atmospheric pollution is (as NO, NO 2, SO 2Deng) or health diagnosis (O2, CO2, CO etc.), or mining safety (CO, CH4 etc.) problems of measurement that all relates to gas content and whether exist, the particularly global depletion of the ozone layer that brings of modern industrialization, greenhouse effect, serious consequences such as photo-chemical smog, national development and human health had far-reaching influence, the innovation of the gordian technique of environmental area is one of " country " 11th Five-Year " scientific and technical development program " strategic objective of being proposed, basic controlling environmental pollution, the trend of tentatively containing ecological degeneration are a Eleventh Five-Year Plan period national ardent hope to scientific and technological circle.In addition, by analyzing the gaseous sample in lithosphere, hydrosphere and the air sphere, the gas that notes abnormalities can also reach the purpose that mineral products prospecting and geochemistry are reconnoitred.Above metalliferous deposit, find O, CO as people 2, SO 2, gas anomaly such as HS, Rn and Hg steam.In addition, earthquake also can produce Hg steam.
At present, the method for gas sensing is very many, can roughly be divided into physics and chemistry two big classes.The variation of physical quantitys such as the method for physics can lead by electric current, electricity, ultrasonic, optical index, light intensity comes the composition and the concentration of detected gas; The method of chemistry then is to cause that by chemical reaction, galvanochemistry reflection the variation (as temperature variation) of physical quantity detects.In numerous measuring methods, laser spectrometry has the highest sensitivity, is the focus of studying at present.Because each gas all has its specific absorbing wavelength, by just can accurately determine the kind and the concentration of gas with different wavelength of laser.
No matter the experimental study of which kind of gas or online detection all need to give tested gas certain measurement space, be called air chamber.General general air chamber has air intake and gas outlet, also should comprise logical light window for measuring method.Along with the difference of application scenario, the shape of air chamber also differs widely.
As the number of applying for a patent is the patent of invention of CN200810246800.6, relate to a kind of multiple reflection air chamber, comprise a hollow rectangular parallelepiped optical cell that two ends are penetrating, fixedly connected principal reflection runner plate of difference and one 1/2 reflector plates on the two penetrating ends, with the light-emitting window that offers a light inlet and corresponding setting on the in addition biside plate of optical cell one respectively with it, light inlet and light-emitting window place in the optical cell are provided with an incidence reflection mirror and an output reflector respectively, and incidence reflection mirror and output reflector respectively with enter light, light direction angle at 45.And for example the number of applying for a patent is the patent of invention of CN01808691.8, design be the air chamber that is used for CO2, comprise that it is oval that light source and light beam are admitted unit, air chamber shape, light source and light beam admit the unit to be positioned over respectively on two oval focuses.
The air chamber that the gaseous spectrum detection method is used, principal feature is to have two logical light windows, though laser spectrometry is highly sensitive, but the main absorption peak of tested gas generally in infrared or far infrared band, its light source and detector and window light transmissive material are all very expensive, generally all adopt gas to detect at the general frequency of near infrared or visible waveband, but its absorption coefficient significantly reduces, in order to compensate its defect, air chamber requirement length is long or have repeatedly function of reflecting to increase light path, and therefore application is restricted.
Repeatedly reflect gas cell, generally adopt two planes of reflection with angle of wedge, incident light through reflection repeatedly after be coupled into light beam and admit in the unit, by regulating angle of wedge size adjustment reflection of light number of times.Perhaps adopt method as patent CN200810246800.6.But multiple reflection air chamber involves great expense for processing request precision height, and total light path is wayward.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art, a kind of gas concentration measurement instrument is provided.
The present invention includes air chamber, laser instrument, shunt, detector, optical fiber collimator, exhaust processor, signal processor and flowmeter.
Air chamber is the glass air chamber of cylindrical full-closed structure, the madial wall of air chamber is coated with the film that is all-trans, and the top cover of air chamber is provided with air intake opening, and an end of air intake valve is connected with air intake opening, the other end of air intake valve is connected with the flowmeter outlet, and the flowmeter import is connected with gas cylinder; The bottom of air chamber is provided with the gas outlet, and an end of the valve of giving vent to anger is connected with the gas outlet, and the other end of the valve of giving vent to anger is connected with the import of vacuum pump, and the vacuum delivery side of pump is connected with exhaust processor;
The film that is all-trans on the air chamber madial wall leads to the light groove along the incident that axially has of air chamber, equidistant on the air chamber lateral wall corresponding a plurality of incident optical collimating apparatuss are set with the logical light groove of incident, a plurality of incident optical collimating apparatuss constitute the incident optical collimator array, the input end of each incident optical collimating apparatus is connected with shunt output terminal light, and the shunt input end is connected with laser instrument.
The film that is all-trans on the air chamber madial wall has the logical light groove of outgoing, the logical light groove of outgoing is corresponding on circumference with the logical light groove of incident, the logical light groove of outgoing is to be cut the arc groove that forms by two parallel planes on the cylindrical film that is all-trans, and the two ends corresponding with the logical light groove of incident, the two ends of the logical light groove of outgoing are positioned at the same circumference of the cylindrical film that is all-trans; Equidistant on the air chamber lateral wall corresponding a plurality of outgoing optical fiber collimators are set with the logical light groove of outgoing, a plurality of outgoing optical fiber collimators constitute outgoing optical fiber collimator array, the output terminal of each outgoing optical fiber collimator is connected with detector input end light, and the detector output terminal is connected with signal processor.
Incident optical collimating apparatus in the described incident optical collimator array equates with outgoing optical fiber collimator number in the outgoing optical fiber collimator array, and is highly corresponding.
The advantage that the present invention had is:
(1) owing to generally all use cylindrical structural as various containers or test tube in industry and the chemistry, so the present invention can directly take these containers, only need be added to gas outlet, logical light groove, and carries out corresponding plated film and get final product, processes and simple in structure, and cost is low;
(2) application of the present invention is very simple, on the inwall of industrial circumferential glass breather line, the film that is coated with the film that is all-trans can directly be installed, and need not to carry out specially plated film, installs and debug simple;
(3) the present invention can be less demanding to the circularity of cylinder, because many light outputs are arranged, and the method for utilizing a plurality of outputs to detect simultaneously, the error that circularity can be brought is fully removed.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 cylindrical wall folded light beam is at the perspective view of bottom surface.
Embodiment
As shown in Figure 1, gas concentration measurement instrument comprises air chamber 11, laser instrument 12, shunt 13, detector 6, incident optical collimating apparatus 14, outgoing optical fiber collimator 5, exhaust processor 8, signal processor 7 and flowmeter 2.
Air chamber 11 is the glass air chamber of cylindrical full-closed structure, and the madial wall of air chamber 11 is coated with the film 16 that is all-trans; The top cover of air chamber is provided with air intake opening, and air intake opening is connected with gas cylinder 1 by air inlet pipeline, and air inlet pipeline is provided with flowmeter 2 and air intake valve 3; The bottom of air chamber 11 is provided with the gas outlet, and the gas outlet is connected with waste gas recovering device 8 by outlet pipe, and outlet pipe is provided with give vent to anger valve 10 and vacuum pump 9; Air intake opening and place, gas outlet all are equipped with sealing gasket to increase the impermeability of air chamber.
The film that is all-trans on air chamber 11 madial walls leads to light groove 15 along the incident that axially has of air chamber 11, equidistant on air chamber 11 lateral walls corresponding eight incident optical collimating apparatuss 14 are set with the logical light groove of incident 15, eight incident optical collimating apparatuss 14 constitute the incident optical collimator array, the input end of each incident optical collimating apparatus 14 is connected with shunt 13 output terminal light, and shunt 13 input ends are connected with laser instrument 12.Should logical light groove be actually that to scrape off on the madial wall total reflection film formed, so that laser-transmitting enters air chamber.
The film that is all-trans on air chamber 11 madial walls has the logical light groove 4 of outgoing, the logical light groove 4 of outgoing is corresponding on circumference with the logical light groove 15 of incident, the logical light groove 4 of outgoing is for being cut the arc groove that forms by two parallel planes on the cylindrical film that is all-trans, and the same circumference that light groove 15 corresponding two ends are positioned at the cylindrical film that is all-trans is led in the two ends of the logical light groove 4 of outgoing and incident.Equidistant on air chamber 11 lateral walls corresponding eight outgoing optical fiber collimators 5 are set with the logical light groove of outgoing 4, eight outgoing optical fiber collimators 5 constitute outgoing optical fiber collimator array, the output terminal of each outgoing optical fiber collimator is connected with detector 6 input end light, and detector 6 output terminals are connected with signal processor 7.
First incident optical collimating apparatus 14 in the incident optical collimator array is in sustained height with first outgoing optical fiber collimator 5 in the outgoing optical fiber collimator, because optical fiber collimator all is equidistant arranging, so incident optical collimating apparatus 14 all corresponding one by one with outgoing optical fiber collimator 5, and all be on the sustained height.
When being used for the gas concentration measurement analysis among the present invention, the principle of institute's foundation is:
At first consider the situation that light reflects on circumference, when the angle of first reflection spot of incident beam on circumference is θ 1The time (θ 1Angle polar coordinates for first reflection spot), the angle of the reflection spot that it is follow-up is respectively (π+3 θ 1), (2 π+5 θ 1) or the like, therefore the polar angle position of n reflection spot is:
θ n=(n-1)π+(2n-1)θ 1 (1)
Wherein n is a natural number.By formula (1), the reflexive property of light in circle directly depends on incident angle θ 1, as (π-2 θ 1) in the time of can being divided exactly by 2 π, the reflection of light in circle will form a regular polygon; As (π-2 θ 1) can be eliminated by 2 π, but can not be divided evenly the time, the reflection of light in circle will form a regular polygon; Except that crossing top two kinds of situations, light will be in circle infinite secondary reflection, and do not have some coincidence.If incident beam has certain width, then all reflection positions all are hot spots that a dimensioning is arranged, if ignore the height of hot spot, then all reflection spots are the hot spot of same width all, have certain interval to be separated between the hot spot.
Utilize formula (1), the equation that can calculate the interior string of circle of consecutive point formation is:
ρ cos ( θ i + θ o 2 - θ ) = a - - - ( 2 )
Wherein, ρ is a radius of a circle, θ iAnd θ oTherefore be respectively the polar angle position of two end points of string, a is the distance of string from round dot, and the equation of the string between n reflection spot and n+1 the reflection spot is:
ρ cos [ ( 2 n - 1 ) π 2 + 2 n θ 1 - θ ] = a - - - ( 3 )
Each bar string all is isometric, and its length is:
d = 2 ρ 2 - a 2 - - - ( 4 )
Therefore n the light path that reflection spot is walked in cylinder is:
d n = d ( n + 1 ) = 2 ( n + 1 ) ρ 2 - a 2 - - - ( 5 )
By formula (4) and (5) as can be known, under the situation that radius of circle is determined, can be by regulating the position of incident light, i.e. the string that on circumference, forms of the incident light length of regulating string, and the light path of eye point from the distance of initial point.If the absorption cross section of tested gas is σ, concentration is C, if incident intensity is I 0, when optical losss such as the absorption of not considering the light transmission loss first time, glass wall and refraction, the light intensity at n reflection spot place is:
Figure G2009101535262D00051
Utilize formula (6), if measure m and n reflection spot (the light intensity I of m<n) locate mAnd I nThen concentration C can be calculated according to colourimetry:
I n / I m = [ I 0 exp ( - σ Cd n ) ] / [ I 0 exp ( - σ Cd m ) ] (7)
= exp [ - 2 ( n - m ) σC ρ 2 - a 2 ]
C = ln [ I m / I n ] 2 ( n - m ) σ ρ 2 - a 2 - - - ( 8 )
By top discussion, because 2 π i.e. 360 ° the factor have only finite population, they are 360,180,120,90,72,60,45,40,36,30,24,20,18,15,12,10,9,8,6,5,4,3,2,1, and 360, the 180th, nonsensical, and eliminated by 2 π but aliquant number also is limited, so, the above two situations can only obtain limited light path, if divide exactly a certain that (as 30 °) depart from a bit a little on the angle (as departing from π/100), when not having deviation originally, light is the equilateral triangle of a closure in the circle internal reflection, and when deviation, light will be on these three standard reflection points, reflect all same angles of deviation (as π/50) at every turn, like this, form the reflection spot of a series of equal angles difference around each standard reflection point, the optical path difference of each reflection spot process has definite relation, utilize this characteristics, the output that can measure a plurality of points compares, and can remove ground unrest, factors such as light source fluctuation improve signal to noise ratio (S/N ratio) and sensitivity.
If light when same annulus internal reflection, will inevitably influence measurement to n reflection spot to the measurement of m reflection spot.We will adopt the simultaneously-measured method of a plurality of planar light beams at this, the light of different order of reflection is reflected on the different cross section parallel with the cylinder bottom surface, the light signal that each photo-detector receives the light path difference of process, but certain relation of determining is arranged each other, just can calculate the concentration of gas in the air chamber by these photosignals.
Suppose that the spacing that incident is led between light groove (corresponding to the logical light groove of outgoing) the adjacent fiber collimating apparatus is L, the angle between logical light groove of incident and the logical light groove of outgoing is
Figure G2009101535262D00055
, if the angle polar coordinates of first reflection spot are θ 1, θ 1=π/6+ Δ, wherein, Δ is a very little deviation (for example π/100), then in each layer, reflection of light has three echo areas for as shown in Figure 2, and the optical path difference of the adjacent reflection spot of each echo area is 3d, wherein d is the length of string between n reflection spot and n+1 the reflection spot, is defined by formula (4).Arc length between the adjacent reflection spot of each echo area is the ρ Δ, establish light signal that first photo-detector receives in air chamber the light path of process be Z 1, then in the received light signal place air chamber of m photo-detector the light path of process be:
The received optical path difference Z of signal in air chamber of adjacent light detector is:
Figure G2009101535262D00062
(10)
Suppose that air chamber wall is γ to the reflection of light coefficient, by formula (6), m the light intensity I that photo-detector receives mFor, I wherein M0Be the light intensity of sending in the incident optical collimating apparatus:
Figure G2009101535262D00063
Wherein, f (m) is the function of m, τ for the cylindrical wall that do not plate the total reflection mould to the optical transmission coefficient, then the ratio of adjacent light detector light intensity can be eliminated Z 1,
Figure G2009101535262D00064
By formula (4) and (11), the difference of light signal order of reflection in air chamber that the adjacent light detector is received is:
Figure G2009101535262D00065
Then formula (12) can be rewritten as:
Figure G2009101535262D00066
Take the logarithm in the following formula both sides, the concentration that then can obtain gas is:
Figure G2009101535262D00067
Because light reflects on circumference, its incident angle and reflection angle equate, the transmission coefficient τ of the light signal that therefore different detectors receive during by cylinder should equate that therefore, following formula can be reduced to:
Figure G2009101535262D00068

Claims (1)

1. gas concentration measurement instrument, comprise air chamber, laser instrument, shunt, detector, optical fiber collimator, exhaust processor, signal processor and flowmeter, it is characterized in that: air chamber is the glass air chamber of cylindrical full-closed structure, the madial wall of air chamber is coated with the film that is all-trans, the top cover of air chamber is provided with air intake opening, one end of air intake valve is connected with air intake opening, and the other end of air intake valve is connected with the flowmeter outlet, and the flowmeter import is connected with gas cylinder; The bottom of air chamber is provided with the gas outlet, and an end of the valve of giving vent to anger is connected with the gas outlet, and the other end of the valve of giving vent to anger is connected with the import of vacuum pump, and the vacuum delivery side of pump is connected with exhaust processor;
The film that is all-trans on the air chamber madial wall leads to the light groove along the incident that axially has of air chamber, equidistant on the air chamber lateral wall corresponding a plurality of incident optical collimating apparatuss are set with the logical light groove of incident, a plurality of incident optical collimating apparatuss constitute the incident optical collimator array, the input end of each incident optical collimating apparatus is connected with shunt output terminal light, and the shunt input end is connected with laser instrument;
The film that is all-trans on the air chamber madial wall has the logical light groove of outgoing, the logical light groove of outgoing is corresponding on circumference with the logical light groove of incident, the logical light groove of outgoing is to be cut the arc groove that forms by two parallel planes on the cylindrical film that is all-trans, and the two ends corresponding with the logical light groove of incident, the two ends of the logical light groove of outgoing are positioned at the same circumference of the cylindrical film that is all-trans; Equidistant on the air chamber lateral wall corresponding a plurality of outgoing optical fiber collimators are set with the logical light groove of outgoing, a plurality of outgoing optical fiber collimators constitute outgoing optical fiber collimator array, the output terminal of each outgoing optical fiber collimator is connected with detector input end light, and the detector output terminal is connected with signal processor;
Incident optical collimating apparatus in the described incident optical collimator array equates with outgoing optical fiber collimator number in the outgoing optical fiber collimator array, and is highly corresponding.
CN2009101535262A 2009-09-30 2009-09-30 Gas concentration measuring instrument Expired - Fee Related CN101672769B (en)

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