CN109632715B - Gas sensing probe based on triangular microcavity double-path F-P interference compensation - Google Patents
Gas sensing probe based on triangular microcavity double-path F-P interference compensation Download PDFInfo
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- CN109632715B CN109632715B CN201910072881.0A CN201910072881A CN109632715B CN 109632715 B CN109632715 B CN 109632715B CN 201910072881 A CN201910072881 A CN 201910072881A CN 109632715 B CN109632715 B CN 109632715B
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- 239000000523 sample Substances 0.000 title claims abstract description 22
- 239000013307 optical fiber Substances 0.000 claims abstract description 35
- 238000001514 detection method Methods 0.000 claims abstract description 31
- 230000003287 optical effect Effects 0.000 claims abstract description 17
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000010931 gold Substances 0.000 claims abstract description 10
- 229910052737 gold Inorganic materials 0.000 claims abstract description 10
- 238000007789 sealing Methods 0.000 claims abstract description 4
- 238000005516 engineering process Methods 0.000 claims description 10
- 239000000835 fiber Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- 238000010329 laser etching Methods 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 2
- 238000005253 cladding Methods 0.000 claims description 2
- 229920001721 polyimide Polymers 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 4
- 238000009434 installation Methods 0.000 abstract description 2
- 238000002310 reflectometry Methods 0.000 abstract description 2
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- 238000000034 method Methods 0.000 description 7
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Abstract
The invention discloses a gas sensing probe based on triangular microcavity double-path F-P interference compensation, which comprises a light path cavity and a detection cavity, wherein the two cavities are separated by a sealing plate, the light path cavity comprises a light source, light emitted by the light path cavity passes through a light splitting prism, then is focused and collimated by a convex lens, and an optical signal returned from the detection cavity is received by a light detector. The detection chamber is composed of an optical fiber structure, a grid support, an air inlet and an air outlet, a gas detection chamber is constructed at one end of the optical fiber structure, and a gold film reflecting layer is coated at the end of the optical fiber structure for improving the reflectivity. The invention can realize the self-compensation of the temperature through the differential processing of the two-way F-P interference signal, so that the probe is not influenced by the ambient temperature when working, has compact structure and small volume, and can realize the installation in a narrow space and the real-time monitoring of the gas leakage.
Description
Technical Field
The invention belongs to the technical field of optical fibers, and relates to a gas sensing probe based on triangular microcavity double-path F-P interference compensation, which can realize accurate monitoring of concentrations of hazardous gases such as toxic and harmful gases in an industrial environment and leakage early warning of trace hazardous gases.
Background
There are many methods for gas detection, and the methods can be generally classified into: electrochemical methods, gas chromatography, optical methods, polymeric gas sensors, and the like. However, the detection technology for hazardous gases has the defects of long response time, expensive required equipment and difficulty in meeting the requirements of electromagnetic radiation and biochemical corrosive environments. The optical fiber sensing technology is developed gradually with the development of optical communication in the middle and later period of the last century, and is a sensing technology which takes light waves as a carrier and optical fibers as a transmission medium to sense and transmit detected signals. Since the optical fiber sensor uses the optical fiber as a signal transmission medium, compared with other sensors, the optical fiber sensor has incomparable advantages: the system has the advantages of radiation resistance, corrosion resistance, high sensitivity, remote control detection, easy networking, light weight, small volume, low price and the like.
The optical fiber gas sensor mainly utilizes physical, chemical and related optical phenomena or characteristics of gas to detect the concentration of the gas, and the corresponding technology comprises absorption type optical fiber gas sensing, namely, the light intensity attenuation caused by gas absorption is detected by utilizing the beer Lambert absorption law; in the film transmission type optical fiber gas sensing technology, a gas sensitive material is made into a transparent film, and when the concentration of gas changes, the light intensity of the light penetrating through the film changes; the interference optical fiber gas sensor detects the change of the refractive index of the gas by using an interference method by utilizing the relation between the concentration of the gas to be detected and the refractive index of the gas, thereby indirectly obtaining the concentration of the gas.
The method can detect the gas concentration, but in many industrial production and living environments, the detection of flammable and explosive hazardous gases is very complex, so that the requirements on miniaturization, high sensitivity and capability of resisting the external complex environment of the optical fiber gas sensing probe are strict day by day, and the appearance of a novel structure optical fiber gas sensing structure is urgently needed, so that the problems existing in the related practical application process are solved.
Disclosure of Invention
The invention provides a gas sensing probe based on triangular microcavity double-path F-P interference compensation, which solves the problems that the conventional optical fiber gas sensor is large in size, low in sensitivity, long in response time and difficult to meet the application requirements of complex environments.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a gas sensing probe based on triangular microcavity double-path F-P interference compensation comprises a light path cavity and a detection cavity, wherein the two cavities are isolated by a sealing plate; the light path chamber comprises a light source, the detection chamber comprises an optical fiber structure, a grid support, a gas inlet and a gas outlet, and a gas detection chamber is constructed at one end of the optical fiber structure; to increase the reflectivity, the ends of the fiber structure are coated with a gold film reflective layer.
Light emitted by the light source passes through the light splitting prism, then is focused and collimated by the convex lens, and a light signal returned from the detection chamber is received by the light detector.
The gas sensing probe is cylindrical, the length is 50mm, the diameter is 20mm, the output wavelength of the light source is 1520 + 1580nm, the working wavelength of the optical detector is 350 + 2000nm, the focal length of the convex lens is 5mm, the optical fiber structure is cylindrical, the diameter of a fiber core is 20 microns, the material is silicon dioxide, the diameter of a cladding is 300 microns, the material is polyimide, the shape of the gas detection chamber is an isosceles triangular prism which is a cavity processed on an optical fiber by adopting a femtosecond laser etching technology, the side length of a right-angle side is 150 microns, two F-P cavity structures can be respectively constructed in the axial direction and the radial direction of the optical fiber by the structure design, so that the influence of the environmental temperature on a sensing result can be eliminated by means of a signal differential processing technology, the thickness of the gold film reflecting layer is 10 microns, the grid support is an acrylic plate with a porous grid structure, so that free flow of gas in the detection chamber is facilitated.
When the concentration of the gas to be detected changes, the interference condition of the multipath optical signals at the intersection point of the oblique edge of the gas detection chamber and the fiber core of the light structure changes, so that the interference spectrum received by the optical detector moves, and the value of the gas concentration can be finally obtained.
Compared with the prior art, the gas sensing probe based on the triangular microcavity two-way F-P interference compensation can realize temperature self-compensation through differential processing of two-way F-P interference signals, so that the probe is not influenced by the ambient temperature when working; the invention has compact structure and small volume, and can realize the installation in a narrow space and the real-time monitoring of gas leakage.
Drawings
FIG. 1 is a schematic diagram of a gas sensing probe based on triangular microcavity dual-path F-P interference compensation.
In the figure: 1 an optical path chamber; 2 a detection chamber; 3, sealing a plate; 4, a light source; 5, a beam splitting prism; 6, a light detector; 7 convex lens; 8, an optical fiber structure; 9 a gas detection chamber; 10 a gold film reflective layer; 11 grid support; 12 an air inlet; 13 air outlet.
Detailed Description
The embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The invention provides a gas sensing probe based on triangular microcavity double-path F-P interference compensation, which has the basic principle that the accurate measurement of the distance between reflecting surfaces is realized by means of the interference effect of light of two reflecting surfaces of an F-P cavity. The appearance of this probe is cylindrical, and length is 50mm, and the diameter is 20mm, including light path cavity 1 and detection cavity 2, two cavities are kept apart by closing plate 3, prevent that the device generates heat in the light path cavity 1 and changes the nature of the gas that awaits measuring in the monitoring cavity 2 to can effectively block electromagnetic radiation's crosstalk. The optical path chamber 1 comprises a light source 4 with the output wavelength of 1520-1580nm, and light emitted by the light source passes through a light splitting prism 5 and then is focused and collimated by a convex lens 7 with the focal length of 5mm to enter a cylindrical optical fiber structure 8 with the fiber core diameter of 20 microns and the outer diameter of 300 microns. The short-focus lens and the large-fiber-core-diameter optical fiber can ensure the efficient coupling of space optical signals and optical signals of the optical fiber, and the structure of the whole probe is more compact and small. When an optical signal entering the optical fiber structure 8 reaches the inclined-edge reflecting surface of the gas detection chamber 9, a part of light can be reflected to the gold film reflecting layer 10 with the thickness of 10 microns and then returns to the fiber core, the other part of light can enter the gas detection chamber 9 and is reflected on the gold film reflecting layer 10 to carry gas concentration information, two paths of optical signals respectively pass through an F-P cavity and then interfere with the original optical signal when reaching the inclined-edge reflecting surface of the gas detection chamber 9 again to form two interference signals, the two interference signals are reflected to the optical path cavity 1 through the fiber core, are focused by the convex lens 7 and reflected by the beam splitter prism 5 and then are received by the optical detector 6. And obtaining the gas concentration information which is not influenced by the temperature through difference calculation.
In the implementation process description of the gas sensing probe, the gas detection chamber 9 is an isosceles triangular prism, and is a cavity processed on an optical fiber by adopting a femtosecond laser etching technology, the side length of a right-angle side is 150 micrometers, two F-P cavity structures can be respectively constructed in the axial direction and the radial direction of the optical fiber by the design of the structure, so that the influence of the ambient temperature on a sensing result can be eliminated by means of a signal differential processing technology, and the grid support 11 is an acrylic plate with a porous grid structure, so that the free flow of gas in the detection chamber 2 is facilitated.
Claims (6)
1. A gas sensing probe based on triangular microcavity double-path F-P interference compensation is characterized by comprising a light path chamber (1) and a detection chamber (2), wherein the two chambers are separated by a sealing plate (3); the light path cavity (1) comprises a light source (4), the detection cavity (2) is composed of an optical fiber structure (8), a grid support (11), a gas inlet (12) and a gas outlet (13), a gas detection chamber (9) is constructed at one end of the optical fiber structure (8), the shape of the gas detection chamber (9) is an isosceles triangular prism which is a cavity processed on an optical fiber by adopting a femtosecond laser etching technology, the side length of a right-angle side is 150 micrometers, and the structure constructs two F-P cavity structures in the transverse and longitudinal directions; the end of the optical fiber structure (8) is coated with a gold film reflecting layer (10); light emitted by the light source (4) passes through the beam splitter prism (5), is focused and collimated by the convex lens (7), enters the optical fiber structure (8), when light signals entering the optical fiber structure (8) reach the bevel edge reflecting surface of the gas detection chamber (9), a part of light is reflected to the gold film reflecting layer (10) and then returns to the fiber core, the other part of light enters the gas detection chamber (9) and is reflected by the gold film reflecting layer (10), two paths of light signals respectively pass through an F-P cavity and then reach the bevel edge reflecting surface of the gas detection chamber (9) again and are interfered with the original light signals to form two interference signals, the two interference signals are reflected to the light path chamber (1) through the fiber core, and after being focused by the convex lens (7) and reflected by the beam splitter prism (5), the two interference signals are received by the light detector (6).
2. The gas sensing probe of claim 1, wherein: the output wavelength of the light source (4) is 1520-0 nm; the working wavelength of the optical detector (6) is 350-2000 nm.
3. The gas sensing probe of claim 1 or 2, wherein: the focal length of the convex lens (7) is 5 mm.
4. The gas sensing probe of claim 1 or 2, wherein: the optical fiber structure (8) is cylindrical, the diameter of a fiber core is 20 microns, the material is silicon dioxide, the diameter of a cladding is 300 microns, and the material is polyimide.
5. The gas sensing probe of claim 1 or 2, wherein: the thickness of the gold film reflecting layer (10) is 10 microns.
6. The gas sensing probe of claim 5, wherein: the grid-isolated support (11) is an acrylic plate with a porous grid structure, so that free flow of gas in the detection chamber (2) is facilitated.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1673926A1 (en) * | 1989-05-30 | 1991-08-30 | Предприятие П/Я В-8584 | Refractometer |
| US6480325B1 (en) * | 2000-05-25 | 2002-11-12 | The Board Of Trustees Of The Leland Stanford Junior University | Laser light source and image display based on quasi-phasematched nonlinear optical devices |
| CN101000305A (en) * | 2006-12-26 | 2007-07-18 | 重庆工学院 | Micromai's interference biomolecule action sensing method and probe |
| CN101354350A (en) * | 2008-09-01 | 2009-01-28 | 陈书乾 | Light interference type methane analyzer |
| CN207051192U (en) * | 2017-04-21 | 2018-02-27 | 中国计量大学 | A kind of self-calibration device based on the double F P verniers amplification hydrogen gas sensors of optical fiber microcavity |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10677790B2 (en) * | 2016-07-20 | 2020-06-09 | City University Of Hong Kong | Optochemical detector and a method for fabricating an optochemical detector |
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2019
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1673926A1 (en) * | 1989-05-30 | 1991-08-30 | Предприятие П/Я В-8584 | Refractometer |
| US6480325B1 (en) * | 2000-05-25 | 2002-11-12 | The Board Of Trustees Of The Leland Stanford Junior University | Laser light source and image display based on quasi-phasematched nonlinear optical devices |
| CN101000305A (en) * | 2006-12-26 | 2007-07-18 | 重庆工学院 | Micromai's interference biomolecule action sensing method and probe |
| CN101354350A (en) * | 2008-09-01 | 2009-01-28 | 陈书乾 | Light interference type methane analyzer |
| CN207051192U (en) * | 2017-04-21 | 2018-02-27 | 中国计量大学 | A kind of self-calibration device based on the double F P verniers amplification hydrogen gas sensors of optical fiber microcavity |
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