CN109604251A - 一种清洗装置及清洗方法 - Google Patents
一种清洗装置及清洗方法 Download PDFInfo
- Publication number
- CN109604251A CN109604251A CN201811634866.2A CN201811634866A CN109604251A CN 109604251 A CN109604251 A CN 109604251A CN 201811634866 A CN201811634866 A CN 201811634866A CN 109604251 A CN109604251 A CN 109604251A
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- Prior art keywords
- hold assembly
- cleaning
- swing arm
- driving
- cleaning device
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Abstract
Description
Claims (11)
Priority Applications (1)
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CN201811634866.2A CN109604251B (zh) | 2018-12-29 | 2018-12-29 | 一种清洗装置及清洗方法 |
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CN201811634866.2A CN109604251B (zh) | 2018-12-29 | 2018-12-29 | 一种清洗装置及清洗方法 |
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CN109604251A true CN109604251A (zh) | 2019-04-12 |
CN109604251B CN109604251B (zh) | 2022-04-05 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110252727A (zh) * | 2019-06-26 | 2019-09-20 | 西安奕斯伟硅片技术有限公司 | 一种晶棒清洗装置 |
CN110773505A (zh) * | 2019-10-31 | 2020-02-11 | 西安奕斯伟硅片技术有限公司 | 一种硅片清洗装置及方法 |
CN110788066A (zh) * | 2019-07-30 | 2020-02-14 | 华南农业大学 | 一种二自由度便携式洗根机 |
CN111906076A (zh) * | 2020-08-19 | 2020-11-10 | 邵阳宝兴化工设备有限公司 | 一种多功能水泵配件清洗装置 |
CN112452993A (zh) * | 2020-10-30 | 2021-03-09 | 上海先予工业自动化设备有限公司 | 一种用于大型齿轮箱体的全自动上下料清洗装置 |
CN113787049A (zh) * | 2021-09-15 | 2021-12-14 | 新阳硅密(上海)半导体技术有限公司 | 一种用于单片湿处理制程的槽式工艺方法 |
CN114260248A (zh) * | 2021-12-13 | 2022-04-01 | 无锡子索生化科技有限公司 | 一种半导体器件清洗装置 |
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JPH0458686B2 (zh) * | 1984-04-19 | 1992-09-18 | Shaapu Kk | |
US5427622A (en) * | 1993-02-12 | 1995-06-27 | International Business Machines Corporation | Method for uniform cleaning of wafers using megasonic energy |
CN1191385A (zh) * | 1997-02-21 | 1998-08-26 | 佳能株式会社 | 晶片处理装置、晶片处理方法和半导体衬底制备方法 |
JP2005026596A (ja) * | 2003-06-30 | 2005-01-27 | Oriental Kogyo Kk | シリコンウェハー用洗浄装置 |
JP2005046687A (ja) * | 2003-07-31 | 2005-02-24 | Pentel Corp | ガラス基板洗浄装置 |
CN103861838A (zh) * | 2012-12-18 | 2014-06-18 | 黄兴来 | 摆杆吊架轴承散件清洗机 |
CN103878138A (zh) * | 2014-03-25 | 2014-06-25 | 福建浔兴拉链科技股份有限公司 | 一种拉链头清洗机 |
CN203875062U (zh) * | 2014-04-22 | 2014-10-15 | 苏州金牛精密机械有限公司 | 硅片清洗用移动装置 |
CN105414101A (zh) * | 2015-12-12 | 2016-03-23 | 重庆旭鹏生态农业开发有限公司 | 玉米清洗装置 |
CN206104448U (zh) * | 2016-08-19 | 2017-04-19 | 郑州博奥医学检验所有限公司 | 一种生物芯片自动清洗装置 |
CN206179833U (zh) * | 2016-10-28 | 2017-05-17 | 北京南轩兴达电子科技有限公司 | 自动硅片清洗机 |
CN107526247A (zh) * | 2017-08-31 | 2017-12-29 | 京东方科技集团股份有限公司 | 一种掩膜板的夹具、掩膜板清洗系统及清洗掩膜板的方法 |
CN108262303A (zh) * | 2016-12-30 | 2018-07-10 | 中核建中核燃料元件有限公司 | 一种投料容器超声波自动清洗装置 |
CN108356023A (zh) * | 2017-07-10 | 2018-08-03 | 信丰县弘业电子有限公司 | 一种贴片电感超声波清洗机 |
CN108405453A (zh) * | 2018-04-04 | 2018-08-17 | 玉环震浪超声有限公司 | 一种清洗装置 |
-
2018
- 2018-12-29 CN CN201811634866.2A patent/CN109604251B/zh active Active
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0458686B2 (zh) * | 1984-04-19 | 1992-09-18 | Shaapu Kk | |
US5427622A (en) * | 1993-02-12 | 1995-06-27 | International Business Machines Corporation | Method for uniform cleaning of wafers using megasonic energy |
CN1191385A (zh) * | 1997-02-21 | 1998-08-26 | 佳能株式会社 | 晶片处理装置、晶片处理方法和半导体衬底制备方法 |
JP2005026596A (ja) * | 2003-06-30 | 2005-01-27 | Oriental Kogyo Kk | シリコンウェハー用洗浄装置 |
JP2005046687A (ja) * | 2003-07-31 | 2005-02-24 | Pentel Corp | ガラス基板洗浄装置 |
CN103861838A (zh) * | 2012-12-18 | 2014-06-18 | 黄兴来 | 摆杆吊架轴承散件清洗机 |
CN103878138A (zh) * | 2014-03-25 | 2014-06-25 | 福建浔兴拉链科技股份有限公司 | 一种拉链头清洗机 |
CN203875062U (zh) * | 2014-04-22 | 2014-10-15 | 苏州金牛精密机械有限公司 | 硅片清洗用移动装置 |
CN105414101A (zh) * | 2015-12-12 | 2016-03-23 | 重庆旭鹏生态农业开发有限公司 | 玉米清洗装置 |
CN206104448U (zh) * | 2016-08-19 | 2017-04-19 | 郑州博奥医学检验所有限公司 | 一种生物芯片自动清洗装置 |
CN206179833U (zh) * | 2016-10-28 | 2017-05-17 | 北京南轩兴达电子科技有限公司 | 自动硅片清洗机 |
CN108262303A (zh) * | 2016-12-30 | 2018-07-10 | 中核建中核燃料元件有限公司 | 一种投料容器超声波自动清洗装置 |
CN108356023A (zh) * | 2017-07-10 | 2018-08-03 | 信丰县弘业电子有限公司 | 一种贴片电感超声波清洗机 |
CN107526247A (zh) * | 2017-08-31 | 2017-12-29 | 京东方科技集团股份有限公司 | 一种掩膜板的夹具、掩膜板清洗系统及清洗掩膜板的方法 |
CN108405453A (zh) * | 2018-04-04 | 2018-08-17 | 玉环震浪超声有限公司 | 一种清洗装置 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110252727A (zh) * | 2019-06-26 | 2019-09-20 | 西安奕斯伟硅片技术有限公司 | 一种晶棒清洗装置 |
CN110788066A (zh) * | 2019-07-30 | 2020-02-14 | 华南农业大学 | 一种二自由度便携式洗根机 |
CN110788066B (zh) * | 2019-07-30 | 2021-10-19 | 华南农业大学 | 一种二自由度便携式洗根机 |
CN110773505A (zh) * | 2019-10-31 | 2020-02-11 | 西安奕斯伟硅片技术有限公司 | 一种硅片清洗装置及方法 |
CN111906076A (zh) * | 2020-08-19 | 2020-11-10 | 邵阳宝兴化工设备有限公司 | 一种多功能水泵配件清洗装置 |
CN111906076B (zh) * | 2020-08-19 | 2021-07-16 | 邵阳宝兴化工设备有限公司 | 一种多功能水泵配件清洗装置 |
CN112452993A (zh) * | 2020-10-30 | 2021-03-09 | 上海先予工业自动化设备有限公司 | 一种用于大型齿轮箱体的全自动上下料清洗装置 |
CN113787049A (zh) * | 2021-09-15 | 2021-12-14 | 新阳硅密(上海)半导体技术有限公司 | 一种用于单片湿处理制程的槽式工艺方法 |
CN114260248A (zh) * | 2021-12-13 | 2022-04-01 | 无锡子索生化科技有限公司 | 一种半导体器件清洗装置 |
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CN109604251B (zh) | 2022-04-05 |
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Effective date of registration: 20211011 Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Applicant after: Xi'an yisiwei Material Technology Co.,Ltd. Applicant after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: 710065 room 1323, block a, city gate, No. 1, Jinye Road, high tech Zone, Xi'an, Shaanxi Province Applicant before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |
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Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee after: Xi'an Yisiwei Material Technology Co.,Ltd. Patentee after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. Patentee before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |