CN109560720A - A kind of diamond shape ceramic driver - Google Patents
A kind of diamond shape ceramic driver Download PDFInfo
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- CN109560720A CN109560720A CN201910019424.5A CN201910019424A CN109560720A CN 109560720 A CN109560720 A CN 109560720A CN 201910019424 A CN201910019424 A CN 201910019424A CN 109560720 A CN109560720 A CN 109560720A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 113
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 26
- 239000010432 diamond Substances 0.000 title claims abstract description 26
- 239000003990 capacitor Substances 0.000 claims abstract description 28
- 230000003321 amplification Effects 0.000 claims description 21
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 21
- 230000008859 change Effects 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 3
- 229910052573 porcelain Inorganic materials 0.000 claims description 2
- 230000000087 stabilizing effect Effects 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 abstract description 30
- 238000010586 diagram Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000001914 filtration Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- NBGBEUITCPENLJ-UHFFFAOYSA-N Bunazosin hydrochloride Chemical compound Cl.C1CN(C(=O)CCC)CCCN1C1=NC(N)=C(C=C(OC)C(OC)=C2)C2=N1 NBGBEUITCPENLJ-UHFFFAOYSA-N 0.000 description 1
- 230000005483 Hooke's law Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention provides a kind of diamond shape ceramic drivers, wide module is surveyed by increasing capacitor in piezoelectric actuated module two sides, detect the variation of the plate spacing of the piezoelectric ceramics of piezoelectric actuated module, and then arrive the elongation of piezoelectric ceramics, feed back processor again to generate offset voltage, the output of the piezoelectric actuated module is compensated, displacement output accuracy is improved.
Description
Technical field
The present invention relates to Piezoelectric Ceramic technical field more particularly to a kind of diamond shape ceramic drivers.
Background technique
Piezoelectric ceramics is a kind of informational function ceramic material-piezoelectric effect that can convert mutually mechanical energy and electric energy,
Piezoelectric ceramics also has dielectricity, elasticity etc., has been widely used in medical imaging, sonic transducer, sound in addition to piezoelectricity
Energy converter, ultrasonic motor etc..
Piezoelectric ceramics has nanoscale positioning accuracy, has in terms of micro- positioning and is widely applied, but is not able to satisfy slightly larger
The micro-displacement requirement of range, so needing to increase displacement amplification device.But after using displacement amplification device, because of displacement equations
Device assumes diamond in shape structure, and the deformation of diamond shape is irregular, and nonlinear displacement can be generated after the actuating arm deformation of diamond structure, causes
There are nonlinearity errons with system displacement for piezoelectric ceramics displacement, reduce measurement accuracy.
Summary of the invention
The purpose of the present invention is to provide a kind of diamond shape ceramic drivers, to solve the production of diamond shape ceramic driver output displacement
The problem that raw nonlinearity erron causes measurement accuracy low.
In order to achieve the above object, the present invention provides a kind of diamond shape ceramic drivers, including sequentially connected micro process
The linear amplification module of module, D/A converter module, driving power and piezoelectric actuated module, the micro treatment module believe a control
Number by inputting the linear amplification module of the driving power, the linear amplification module of driving power after the D/A converter module
The control signal is amplified to drive the piezoelectric actuated module elongation, further includes that capacitor surveys wide module, the capacitor is surveyed wide
Module is set to the piezoelectric ceramics two sides of the piezoelectric actuated module to measure the width variation of the piezoelectric ceramics, and by institute
It states width variation and is converted to the elongation of the piezoelectric ceramics to feed back to the micro treatment module, the micro treatment module root
Offset voltage is obtained according to feedback signal, and by the offset voltage by inputting the driving power after the D/A converter module
Linear Amplifer module, to compensate the elongation of the piezoelectric ceramics.
Optionally, the diamond shape ceramic driver further includes power module of voltage regulation, and the power module of voltage regulation is described micro-
The DC voltage of processing module and the D/A converter module offer+5V, and provide for the linear amplification module of the driving power+
The DC voltage of 120V and -15V.
Optionally, the control signal of 0V-5V is amplified to 0V-100V rear-guard by the linear amplification module of the driving power
Move the piezoelectric actuated module.
Optionally, the capacitor surveys wide module and obtains the pressure by the capacitance change of the two sides of the piezoelectric ceramics
The width variation of electroceramics, and the capacitance change is converted into width variation using following formula:
Wherein, Δ C is the capacitance change of the piezoelectric ceramics two sides, and Δ d is that the plate spacing of the piezoelectric ceramics changes
Amount, C0For the initial capacitance of the piezoelectric ceramics two sides, C ' is the measurement capacitor of the piezoelectric ceramics two sides.
Optionally, the width variation is converted to the elongation of piezoelectric actuated module by following formula:
Wherein, l3For the elongation of the piezoelectric ceramics, l1For the width variation of the piezoelectric ceramics, S33For the pressure
The coefficient of elasticity of electroceramics in the height direction, S31For coefficient of elasticity of the piezoelectric ceramics on width or length direction.
Optionally, if the elongation that the piezoelectric ceramics needs is L, then the offset voltage is calculated by following formula
U:
L-l3=S33U。
The invention has the following beneficial effects: survey wide module, detection pressure by increasing capacitor in piezoelectric actuated module two sides
The variation of the plate spacing of the piezoelectric ceramics of electric actuation module, and then the elongation of piezoelectric ceramics is arrived, then feed back processor to produce
Raw offset voltage, compensates the output of the piezoelectric actuated module, improves displacement output accuracy.
Detailed description of the invention
Fig. 1 is the structural block diagram of diamond shape ceramic driver provided in an embodiment of the present invention；
Fig. 2 is that 4 road 30V direct current regulation circuit provided in an embodiment of the present invention connects to obtain the circuit of 120V voltage regulator circuit
Figure；
Fig. 3 is that ± 15V voltage regulator circuit in 1 tunnel provided in an embodiment of the present invention obtains the circuit diagram of -15V voltage regulator circuit；
Fig. 4 obtains the circuit diagram of+5V regulated power supply using 7805 to be provided in an embodiment of the present invention；
Fig. 5 is the circuit diagram of the linear amplification module of driving power provided in an embodiment of the present invention；
Fig. 6 is the structural schematic diagram of piezoelectric actuator provided in an embodiment of the present invention；
Fig. 7 is the structural schematic diagram of piezoelectric ceramics box provided in an embodiment of the present invention；
Fig. 8 is the structural schematic diagram of enlarger provided in an embodiment of the present invention；
Fig. 9 is the structural schematic diagram of piezoelectric ceramics inversion effect provided in an embodiment of the present invention.
Specific embodiment
A specific embodiment of the invention is described in more detail below in conjunction with schematic diagram.According to following description and
Claims, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and
Using non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
As shown in Figure 1, present embodiments providing a kind of diamond shape ceramic driver, including sequentially connected micro treatment module
10, the linear amplification module 30 of D/A converter module 20, driving power and piezoelectric actuated module 40, the micro treatment module 10 is by one
Signal is controlled by inputting the linear amplification module 30 of the driving power, the driving power supply line after the D/A converter module 20
Property amplification module 30 the control signal is amplified to drive the piezoelectric actuated module 40 to extend, further include that capacitor surveys wide module
50, the capacitor surveys wide module 50 and is set to the piezoelectric ceramics two sides of the piezoelectric actuated module 40 to measure the piezoelectric ceramics
Width variation, and the width variation is converted into the elongation of the piezoelectric ceramics to feed back to the micro process mould
Block 10, the micro treatment module 10 obtains offset voltage based on the feedback signal, and the offset voltage is turned by the digital-to-analogue
The linear amplification module 30 of the driving power is inputted after mold changing block 20, to compensate the elongation of the piezoelectric ceramics.
Specifically, due to the inverse piezoelectric effect of the piezoelectric ceramics, the elongation of the piezoelectric ceramics and its input voltage
Between there are proportional relations, and because the present embodiment drive the piezoelectric ceramics input voltage be the driving power linearly amplify
Module 30, so the output voltage of the micro treatment module 10=piezoelectric ceramics input voltage/driving power is linearly put
The linear magnification of big module 30.In real work, if piezoelectric ceramics elongation actually required is L, need described
Micro treatment module 10 issues control signal, and by being converted into analog signal after D/A converter module 20, the analog signal is through institute
After the Linear Amplifer for stating the linear amplification module 30 of driving power, the piezoelectric actuated module 40 is driven, the piezoelectric ceramics is in institute
State output displacement under the action of piezoelectric actuated module 40.While the piezoelectric ceramics extends, width can also change,
There is fixed proportional relation between length and change width, it is possible to the piezoelectric ceramics is obtained by width variation
Practical elongation.Further, the pressure is measured in real time by being installed at the wide module 50 of capacitor survey of the piezoelectric ceramics two sides
Electroceramics width variation, and the width variation is converted into the practical elongation of the piezoelectric ceramics and is fed back, it feeds back
Signal feeds back to micro treatment module 10 after analog-to-digital conversion.Micro treatment module 10 by the practical elongation of the piezoelectric ceramics with
The elongation feedback that the piezoelectric ceramics needs subtracts each other to obtain offset, and obtains offset voltage by compensation value calculation, described micro-
Processing module 10 exports the offset voltage, and the linear amplification module 30 of driving power will be after the offset voltage Linear Amplifer
The piezoelectric ceramics output compensation displacement is driven again.
Further, the diamond shape ceramic driver further includes power module of voltage regulation 60, and the power module of voltage regulation 60 is institute
The DC voltage of 20 offer+5V of micro treatment module 10 and the D/A converter module is provided, and is linearly amplified for the driving power
The DC voltage of module 30 offer+120V and -15V.As shown in Fig. 2, connecting to obtain 120V using 4 road 30V direct current regulation circuits
Direct current regulation circuit, specifically, power frequency 220V alternating current is converted to 36V DC voltage by transformer, it is steady using three ends after filtering
Press chip LM338 by the pressure stabilizing of 36V DC voltage in 30V, 4 direct current regulation circuits of connecting obtain 120V direct current regulation circuit.Such as
Shown in Fig. 3, -15V voltage regulator circuit is obtained using 1 tunnel ± 15V voltage regulator circuit, specifically, transformer is by power frequency 220V AC voltage
Two 18V alternating voltages for being converted to common tap are combined after filtering using three-terminal regulator chip LM7815 and LM7915
Circuit obtain the direct current regulation circuit of ± 15V.As shown in figure 4 ,+5V direct current regulation circuit is obtained using 7805, specifically, becoming
Power frequency 220V alternating current is converted to 9V DC voltage by depressor, obtains+5V DC voltage-stabilizing electricity through three-terminal voltage-stabilizing pipe 7805 after filtering
Road.
Next, the control signal is generated by the micro treatment module, analog-to-digital conversion module and filter circuit, wherein
The analog-to-digital conversion module uses 16 analog-digital converters, in the resolution ratio of 5V full scale are as follows: (5V)/65536=7.6*10-5
The offset voltage of=0.076mV, PA85 be 0.5mV, when preposition voltage offsets amount be much smaller than 0.5mV, high-precision put can be obtained
Big voltage.As shown in figure 5, the linear amplification module of driving power using precision amplifier PA85 as power amplifier, when
When inputting the control voltage of 0-5V, available 0-120V output voltage, as shown in figure 5, the piezoelectric ceramics can be considered capacitive
Load, is indicated with C6, using two amplifier in parallel driving circuits, can increase the input current of piezoelectric ceramics, reach high-power
The requirement of output.
Further, the piezoelectric actuator structure as shown in fig. 6, piezoelectric ceramics 1 to be set to both ends open, middle part hollow
Cylindricality tubular shell 2 in, cylindricality tubular shell 2 has end cap, and the end cap includes upper cover 3 and lower cover 4, can be tamping entire shell, institute
Upper cover 3 is stated there are opening, the displacement of piezoelectric ceramics can be made to export end casing 5 and stretch out shell, there are holes 7 in the upper cover 3, reserve
The placement of output displacement bar, is mounted with limited block 6 between upper cover 3 and cover board 5；There are insulated paint 8 in 1 two sides of piezoelectric ceramics, insulation
It is separation layer 9 outside paint 8, while the part being connected with shell is also separation layer 9, is capacitor board 10 between two separation layers 9.It is described
1 low side of piezoelectric ceramics is lower cover 4, and lower cover 4 is reserved with hole 11, is passed in and out for piezoelectric ceramics power supply line and capacitor board power supply line.When
When the linear amplification module of driving power drives piezoelectric ceramics 1, piezoelectric ceramics 1 extends, while width narrows.The piezoelectric ceramics 1
Elongation displacement pushes cover board 5 to move upwards, and through hole 7 is communicated with the outside output displacement.Limited block 6 limits the displacement of cover board 5,
Prevent its elongation excessive.While piezoelectric ceramics 1 extends, width narrows, and the spacing between capacitor board 10 can change,
Because capacitor is very sensitive to the variation of displacement, minute movement can be measured, therefore capacitance change can sufficiently reflect piezoelectric ceramics
Width variation.
Further, as shown in fig. 7, piezoelectric ceramics box is disposed within by piezoelectric actuator, the work of displacement equations is provided for it
With.A piezoelectric ceramics box generally hollow cylinder, there is lid up and down.Upper cover aperture is exported for the displacement of piezoelectric ceramics, bottom cover
Power supply source line of boxing out output.The cantilever 13 that one enlarger is fixed on two wall of piezoelectric ceramics box is separately connected two flexible links, and two
Root flexible link is respectively bottom bar 14 and mandril 15, and the lower part of bottom bar 14 is connected by connecting rod 16 with hole 7, and top passes through connecting rod
17 are connected with mandril 15；Mandril 15 is exported displacement by being displaced output rod 18 when piezoelectric ceramics generates displacement.Piezoelectricity promotees
Dynamic device is connected output displacement by the hole 7 of cover board 5 with connecting rod 16, when piezoelectric actuator output displacement, the promotion of connecting rod 16 bottom
Bar 14 moves up, and bottom bar 14, which moves up, pushes connecting rod 17 that mandril 15 is driven to move up, and mandril 15 moves up drive displacement output rod 18 and moves up,
Obtain displacement output.
As shown in figure 8, enlarger is a generally diamond structure, piezoelectric ceramics box 12 and upper junction plate 19 and lower connection
Plate 20 connects；Upper junction plate 19 and 20 two sides of lower connecting plate be diamond shape connecting rod 21, diamond shape connecting rod 21 and left link block 22 and
Right link block 23 is connected；Wherein left link block 22 is fixed, and right link block 23 is displacement output block.When piezoelectric ceramics is made pottery by piezoelectricity
When porcelain box output displacement, displacement output rod 18 pushes upper junction plate 19 to shift up, and lower connecting plate 20 makes diamond shape to bottom offset
Deformation occurs for structure.When upper junction plate 19 and 20 relative position of lower connecting plate become larger, diamond shape connecting rod 21 will drive two positions
Block is moved to draw close to centre.Because left link block 22 is fixed, then right link block 23 occurs to obtain displacement output to left dislocation.
The piezoelectric ceramics is an elastomer, obeys Hooke's law " in elastic limit, stress and strain is directly proportional " inverse
In piezoelectric effect, strain directly proportional to electric field strength.That is:
Δ L=SU；
Wherein Δ L is the elongation of piezoelectric ceramics, and S is coefficient of elasticity, and U is the input voltage of piezoelectric ceramics.
As shown in figure 9, in piezoelectric ceramics inversion effect, because piezoelectric ceramics storehouse polarizes in short transverse, and electricity
Field intensity is parallel with short transverse, if three physical lengths " length, width and height " of piezoelectric ceramics respectively correspond direction 1,2,3.S33For pressure
Coefficient of elasticity of the electroceramics in short transverse；S31=S32For coefficient of elasticity of the piezoelectric ceramics on width and length direction.(pressure
It is equal with the coefficient of elasticity in width direction in length after electroceramics production, it is negative, short transverse is piezoelectric ceramics elongation
Direction).
When applying voltage in the piezoelectric ceramics short transverse, piezoelectric ceramics can generate elongation in the height direction
Amount:
Δ L=S33U；
And in the width variation of width direction are as follows:
Δ B=S31U。
For parallel plate capacitor, when not considering edge effect, capacitance are as follows:
Wherein C0For initial capacitance, ε0For permittivity of vacuum, εrThe medium relative dielectric constant between pole plate, d0It is flat for two
Initial distance between andante, S are pole plate area coverage.
When capacitor plate spacing is by d0When reducing Δ d, the variable quantity of capacitor:
Wherein, Δ C is capacitor board capacitance change, and Δ d is the plate spacing variable quantity of capacitor board, C0For the capacitor board
Initial capacitance, C ' are the measurement capacitor of capacitor board.
From the above equation, we can see that being hyperbolic relation between Δ C and Δ d, to make to need between Δ C and Δ d in linear approximate relationship
It wantsIt is worth very little, because the half that piezoelectric ceramics width variation is its elongation is also few (by S33And S31Known to), and piezoelectric ceramics
Total elongation in ten microns between tens microns, so its width variation is several microns to more than ten micron,
If capacitor plate spacing is millimeter pole, that is, it can reach preferable linear relationship.
Next, because of S33And S31The respectively coefficient of elasticity of piezoelectric ceramics height and the width, so being readily available width
Relationship between variable quantity and elongation:
Wherein, l3For the elongation of the piezoelectric ceramics, l1For the width variation of the piezoelectric ceramics.
When the elongation of piezoelectric ceramics needs is L, microprocessor output control signal, through digital-to-analogue conversion and linearly
Amplify rear-guard dynamic pressure electroceramics deformation, when capacitor board causes plate spacing changes delta d because of piezoelectric ceramics change width, capacitance change, Δ
C；The change width l of piezoelectric ceramics can be obtained in the variation delta d that plate spacing d can be found out by Δ C1；By l1Obtain piezoelectric ceramics
Elongation l3, by l3Micro treatment module is fed back to, elongation L-l will be needed3Compensation rate Δ L is obtained, compensation is calculated by Δ L
Voltage (L-l3=S33U), the micro treatment module output offset voltage is through digital-to-analogue conversion and Linear Amplifer post-compensation piezoelectric ceramics
Elongation.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (6)
1. a kind of diamond shape ceramic driver, including sequentially connected micro treatment module, D/A converter module, driving power are linearly put
Big module and piezoelectric actuated module, the micro treatment module pass through a control signal described in input after the D/A converter module
The linear amplification module of driving power, the linear amplification module of driving power amplify the control signal to drive the piezoelectricity
Actuation module elongation, which is characterized in that further include that capacitor surveys wide module, the wide module of capacitor survey is set to described piezoelectric actuated
The piezoelectric ceramics two sides of module are converted to the width variation described with measuring the width variation of the piezoelectric ceramics
For the elongation of piezoelectric ceramics to feed back to the micro treatment module, the micro treatment module obtains compensation electricity based on the feedback signal
Pressure, and by the offset voltage by inputting the linear amplification module of the driving power after the D/A converter module, with compensation
The elongation of the piezoelectric ceramics.
2. diamond shape ceramic driver as described in claim 1, which is characterized in that the diamond shape ceramic driver further includes pressure stabilizing
Power module, the power module of voltage regulation provide the DC voltage of+5V for the micro treatment module and the D/A converter module,
And the DC voltage of+120V Yu -15V are provided for the linear amplification module of the driving power.
3. diamond shape ceramic driver as described in claim 1, which is characterized in that the linear amplification module of driving power will
The control signal of 0V-5V drives the piezoelectric actuated module after being amplified to 0V-100V.
4. diamond shape ceramic driver as described in claim 1, which is characterized in that the capacitor surveys wide module and passes through the piezoelectricity
The capacitance change of the two sides of ceramics utilizes following formula by the capacitor to obtain the width variation of the piezoelectric ceramics
Variable quantity is converted to width variation:
Wherein, Δ C is the capacitance change of the piezoelectric ceramics two sides, and Δ d is the plate spacing variable quantity of the piezoelectric ceramics, C0
For the initial capacitance of the piezoelectric ceramics two sides, C ' is the measurement capacitor of the piezoelectric ceramics two sides.
5. diamond shape ceramic driver as claimed in claim 4, which is characterized in that by following formula by the width variation
Be converted to the elongation of piezoelectric actuated module:
Wherein, l3For the elongation of the piezoelectric ceramics, l1For the width variation of the piezoelectric ceramics, S33For piezoelectricity pottery
The coefficient of elasticity of porcelain in the height direction, S31For coefficient of elasticity of the piezoelectric ceramics on width or length direction.
6. diamond shape ceramic driver as claimed in claim 5, which is characterized in that set the elongation that the piezoelectric ceramics needs as
L then calculates the offset voltage U by following formula:
L-l3=S33U。
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1711313A1 (en) * | 1989-12-19 | 1992-02-07 | Государственный Институт Прикладной Оптики | Piezoelectric drive of small movements |
| US20050219302A1 (en) * | 2004-04-02 | 2005-10-06 | Par Technologies, Llc | Piezoelectric devices and methods and circuits for driving same |
| CN101599715A (en) * | 2009-06-25 | 2009-12-09 | 天津大学 | Dynamic bipolar drive power supply for piezoelectric ceramics and implementation method |
| KR101319038B1 (en) * | 2012-10-30 | 2013-10-17 | (주)위더스비젼 | Device for compensating displacement of piezoelectric element |
| CN107005178A (en) * | 2014-11-27 | 2017-08-01 | 卡尔蔡司Smt有限责任公司 | Piezoelectric positioning device and the localization method using such piezoelectric positioning device |
| CN107070298A (en) * | 2017-03-13 | 2017-08-18 | 中国科学院自动化研究所 | Piezoelectric Ceramic control system |
| CN207283436U (en) * | 2017-08-23 | 2018-04-27 | 苏州大学 | The drive circuit system of piezo ceramic motion platform |
-
2019
- 2019-01-09 CN CN201910019424.5A patent/CN109560720B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1711313A1 (en) * | 1989-12-19 | 1992-02-07 | Государственный Институт Прикладной Оптики | Piezoelectric drive of small movements |
| US20050219302A1 (en) * | 2004-04-02 | 2005-10-06 | Par Technologies, Llc | Piezoelectric devices and methods and circuits for driving same |
| CN101599715A (en) * | 2009-06-25 | 2009-12-09 | 天津大学 | Dynamic bipolar drive power supply for piezoelectric ceramics and implementation method |
| KR101319038B1 (en) * | 2012-10-30 | 2013-10-17 | (주)위더스비젼 | Device for compensating displacement of piezoelectric element |
| CN107005178A (en) * | 2014-11-27 | 2017-08-01 | 卡尔蔡司Smt有限责任公司 | Piezoelectric positioning device and the localization method using such piezoelectric positioning device |
| CN107070298A (en) * | 2017-03-13 | 2017-08-18 | 中国科学院自动化研究所 | Piezoelectric Ceramic control system |
| CN207283436U (en) * | 2017-08-23 | 2018-04-27 | 苏州大学 | The drive circuit system of piezo ceramic motion platform |
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