CN207283436U - The drive circuit system of piezo ceramic motion platform - Google Patents
The drive circuit system of piezo ceramic motion platform Download PDFInfo
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- CN207283436U CN207283436U CN201721058048.3U CN201721058048U CN207283436U CN 207283436 U CN207283436 U CN 207283436U CN 201721058048 U CN201721058048 U CN 201721058048U CN 207283436 U CN207283436 U CN 207283436U
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- motion platform
- piezo ceramic
- piezoelectric ceramics
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- platform
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Abstract
A kind of drive circuit system of piezo ceramic motion platform is the utility model is related to, is designed to provide raising driving precision.The drive circuit system of the utility model piezo ceramic motion platform, including：Piezo ceramic motion platform, cpu controller, sensor measuring circuit, the sensing measurement circuit include the platform sensor of measurement piezo ceramic motion platform displacement and the piezoceramic transducer of measurement piezoelectric ceramics deformation；Wherein, the piezoceramic transducer includes four groups of resistance strain gages being attached on piezoelectric ceramics, the full-bridge circuit of the resistance strain gage composition measurement piezoelectric ceramics deformation, each bridge arm of the full-bridge circuit are respectively equipped with one group of resistance strain gage, and the platform sensor is a capacitance sensor.The utility model make it that the closed-loop control of piezo ceramic motion platform is relatively reliable.
Description
Technical field
It the utility model is related to a kind of drive circuit system of piezo ceramic motion platform.
Background technology
Displacement bimorph device is the new device to grow up in recent years, and piezoelectric ceramics has as one kind therein
The advantages of many prominent, its frequency response is high, and movement response is fast, has good static pressure, small by External force interference.In addition
It can obtain higher displacement resolution under voltage control.Therefore, existed using micro-displacement sensor made of piezoelectric ceramics
Precision optical machinery processing, automatically control etc. and to have been widely used.It is but complete not enough in terms of the driving of displacement bimorph device
It is kind, when piezoelectric ceramics shifter reaction speed it is slow, antijamming capability cannot play to the limit.
In view of the defects of above-mentioned, the designer is actively subject to research and innovation, and genetic algorithm optimization is based on to found one kind
The piezoelectric ceramics closed loop control method of pid parameter, makes it with more the utility value in industry.
Utility model content
In order to solve the above technical problems, the purpose of this utility model is to provide a kind of piezo ceramic motion for driving effect good
The drive circuit system of platform.
The drive circuit system of the utility model piezo ceramic motion platform, including：Piezo ceramic motion platform, for defeated
Go out the cpu controller of piezo ceramic motion platform drive signal, the cpu controller is electrically connected high voltage operational by DAC circuit
The analog signal of input is carried out power amplification by amplifying circuit, the high voltage operational amplifying circuit, produces driving piezoelectric ceramics fortune
The driving voltage of moving platform；Further include the sensor measuring circuit being electrically connected with the cpu controller, the sensing measurement circuit
Including measuring the platform sensor of piezo ceramic motion platform displacement and the piezoceramic transducer of measurement piezoelectric ceramics deformation, institute
The platform sensor and piezoceramic transducer stated are connected by adc circuit with cpu controller respectively；Wherein, the piezoelectricity pottery
Porcelain sensor includes four groups of resistance strain gages being attached on piezoelectric ceramics, the resistance strain gage composition measurement piezoelectric ceramics deformation
Full-bridge circuit, each bridge arm of the full-bridge circuit is respectively equipped with one group of resistance strain gage, and the platform sensor is an electricity
Hold sensor.
Further, the piezo ceramic motion platform includes frame, and the appearance of accommodating piezoelectric ceramics is equipped with the frame
Portion is put, the piezoelectric ceramics is arranged in the piezoelectric ceramics holding part, and the piezoelectric ceramics prolonging direction is equipped with double parallel
The flexible hinge of harden structure, described flexible hinge at least four, is divided into two groups, two-by-two relatively, is arranged symmetrically, and is set on the frame
Have and adjust installation place to the pretension of one pretightning force of piezoelectric ceramics, adjusting installation place in the pretension is provided with pretension bolt.
Further, the platform sensor uses capaNCDT6300 single channel Series of High Accuracy displacement sensors, its
Middle probe model uses CS05, and the maximum range of the platform sensor is 0.5mm, resolution ratio 5nm, 50nm, and output voltage 0~
10V。
Further, the parameter of the parallel-plate is long 6mm, wide 8mm, thick 0.7mm, its material is superduralumin.
Further, cpu controller is connected by serial ports and host computer communication；Cpu controller is electrically connected with liquid crystal display
Screen and keyboard.
Further, the sensor measuring circuit, high voltage operational amplifying circuit are electrically connected ADC moulds by bus respectively
Block, DAC module, the ADC module, DAC module are connected with cpu controller.
According to the above aspect of the present invention, the drive circuit system of the utility model piezo ceramic motion platform is at least with following excellent
Point：The deformation simple, of low cost, that piezoelectric ceramics is gathered by the resistor disc being attached on piezoelectric ceramics of hardware circuit, and then
Determine the displacement of piezo ceramic motion platform, displacement acquisition precision is high, therefore improves piezo ceramic motion platform close-loop driven
The precision of control.
Described above is only the general introduction of technical solutions of the utility model, in order to better understand the skill of the utility model
Art means, and being practiced according to the content of specification, with the preferred embodiment of the utility model and coordinate attached drawing detailed below
Describe in detail bright as after.
Brief description of the drawings
Fig. 1 is piezoelectric ceramics platform drive system hardware circuit；
Fig. 2 is piezo ceramic motion platform structure schematic diagram, in figure, 1-platform location hole 2-flexible hinge, 3-frame
4-piezoelectric ceramics houses 5-pretension of place and adjusts installation place；
Fig. 3 is piezo ceramic motion schematic diagram.
Embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below
Embodiment is used to illustrate the utility model, but is not intended to limit the scope of the present invention.
Embodiment 1
As shown in Figure 1, the drive circuit system of the present embodiment piezo ceramic motion platform, including：Piezo ceramic motion is put down
Platform, the cpu controller for exporting piezo ceramic motion platform drive signal, the cpu controller are electrically connected by DAC circuit
The analog signal of input is carried out power amplification by high voltage operational amplifying circuit, the high voltage operational amplifying circuit, produces driving pressure
The driving voltage of electroceramics motion platform；Further include the sensor measuring circuit being electrically connected with the cpu controller, the sensing
Measuring circuit includes the platform sensor of measurement piezo ceramic motion platform displacement and the piezoelectric ceramics of measurement piezoelectric ceramics deformation
Sensor, the platform sensor and piezoceramic transducer are connected by adc circuit with cpu controller respectively；Wherein, institute
State four groups of resistance strain gages that piezoceramic transducer includes being attached on piezoelectric ceramics, the resistance strain gage composition measurement piezoelectricity
The full-bridge circuit of ceramic deformation, each bridge arm of the full-bridge circuit are respectively equipped with one group of resistance strain gage, the platform sensing
Device is a capacitance sensor.The cpu controller obtains the displacement of piezo ceramic motion platform as feedback signal, makes pottery to piezoelectricity
Porcelain motion platform carries out PID closed loop controllers.
The utility model, cpu controller obtain the displacement signal of sensing measurement electronic feedback to the piezoelectricity piezoelectric ceramics
Motion platform realizes the PID closed loop control process of closed loop PID control, is the prior art, the utility model protection is closed loop control
The hardware circuit of system.
In the present embodiment, resistor disc is sticked inside piezoelectric ceramics, composition electric bridge is used for the deformation for measuring piezoelectric ceramics, warp
Overvoltage computing obtains the shift value of piezo ceramic motion platform.The each arm resistance value of full-bridge is about 1000 Europe；PZT ceramics should
Variability is about 1/1000；The maximum change of each bridge arm resistance value in ceramic sports is about 1 Europe, due to stickup, strain transfer etc.
During loss, often increased resistance value be between 0.5 to 1 Europe, the direct feedback signal of resistor disc signal in order to control is straight
The precision for affecting control is connect, capacitance sensor examines closed loop control algorithm whether effective for detection device.
Further, in the present embodiment, cpu controller is connected by serial ports and host computer communication；Cpu controller is electrically connected
There are liquid crystal display and keyboard.The sensor measuring circuit, high voltage operational amplifying circuit are electrically connected ADC by bus respectively
Module, DAC module, the ADC module, DAC module are connected with cpu controller.
Embodiment 2
As shown in Fig. 2, the drive circuit system of the present embodiment piezo ceramic motion platform, on the basis of embodiment 1, institute
Stating piezo ceramic motion platform includes frame 3, and the frame is equipped with platform location hole 1, accommodating piezoelectricity is equipped with the frame
The holding part 4 of ceramics, the piezoelectric ceramics are arranged in the piezoelectric ceramics holding part, are set on the piezoelectric ceramics prolonging direction
There is the flexible hinge 2 of double parallel harden structure, described flexible hinge at least four, is divided into two groups, two-by-two relatively, is arranged symmetrically, the frame
Frame is equipped with adjusts installation place 5 to the pretension of one pretightning force of piezoelectric ceramics, and adjusting installation place in the pretension is provided with pretension
Bolt.In the present embodiment, the parameter of the parallel-plate is long 6mm, wide 8mm, thick 0.7mm, its material is superduralumin.
The movement mechanism of the piezo ceramic motion platform is：Piezoelectric ceramics is positioned over piezoelectric ceramics and houses place 4, by
Pre-loading screw is installed at the pretension adjusting of piezoelectric ceramics, gives piezoelectric ceramics certain pretightning force so that piezoelectric ceramics is defeated with bigger
Go out displacement.When signal source carries out control source, for piezoelectric ceramics since the piezoelectric effect of itself starts to extend, displacement passes through front end
Flexible hinge exports.
In piezo ceramic motion platform, micro-displacement executing agency using being flexible hinge, is processed on basis material
Weaker part out, transmits movement and power, straight beam type flexible hinge has using the flexural deformation of the portion of material
The features such as output displacement is big, and corner accuracy is low, so being applied in the piezo ceramic motion Platform Designing of the utility model.
Since this structure output displacement will ensure the displacement output of x-axis, cross-couplings displacement in the y-axis direction is excluded for fine motion
The influence of the positioning accuracy of platform, so using double-flexibility parallel four-bar linkage, as shown in Figure 3.In simplified schematic diagram 3 is moved,
Right end is piezoelectric ceramics output displacement, and left end is flexible hinge output displacement, in actual closed-loop control, again by right
The collection of left end data completes feedback regulation with processing.
In the various embodiments described above, platform sensor uses capaNCDT6300 single channel Series of High Accuracy displacement sensors,
Wherein probe model uses CS05, and the maximum range of the platform sensor is 0.5mm, resolution ratio 5nm (2HZ), 50nm
(8kHZ), 0~10V of output voltage.CapaNCDT (capacitance-type no touch displacement sensor) is to be based on flat plate capacitance principle
Design research and development, testee is with sensor respectively as a plate electrode.Give sensor one continual and steady alternating current,
The amplitude variations of alternating voltage are directly proportional to the distance between capacitance to testee.Alternating current is demodulated, can export and is
Analog signals.
The above is only the preferred embodiment of the utility model, is not intended to limit the present invention, it is noted that
For those skilled in the art, on the premise of the utility model technical principle is not departed from, can also do
Go out some improvement and modification, these improvements and modifications also should be regarded as the scope of protection of the utility model.
Claims (6)
- A kind of 1. drive circuit system of piezo ceramic motion platform, it is characterised in that including：Piezo ceramic motion platform, use In the cpu controller of output piezo ceramic motion platform drive signal, the cpu controller is electrically connected high pressure by DAC circuit The analog signal of input is carried out power amplification by operational amplification circuit, the high voltage operational amplifying circuit, produces driving piezoelectricity pottery The driving voltage of porcelain motion platform；The sensor measuring circuit being electrically connected with the cpu controller is further included, the sensor is surveyed The piezoelectric ceramics for measuring platform sensor and measurement piezoelectric ceramics deformation of the circuit including measurement piezo ceramic motion platform displacement passes Sensor, the platform sensor and piezoceramic transducer are connected by adc circuit with cpu controller respectively；Wherein, it is described Piezoceramic transducer includes four groups of resistance strain gages being attached on piezoelectric ceramics, the resistance strain gage composition measurement piezoelectricity pottery The full-bridge circuit of porcelain deformation, each bridge arm of the full-bridge circuit are respectively equipped with one group of resistance strain gage, the platform sensor For a capacitance sensor.
- 2. the drive circuit system of piezo ceramic motion platform according to claim 1, it is characterised in that the piezoelectricity pottery Porcelain motion platform includes frame, the holding part of accommodating piezoelectric ceramics is equipped with the frame, the piezoelectric ceramics is arranged on described In piezoelectric ceramics holding part, the piezoelectric ceramics prolonging direction is equipped with the flexible hinge of double parallel harden structure, the flexible hinge Chain at least four, is divided into two groups, two-by-two relatively, is arranged symmetrically, and the frame is equipped with the pretension to one pretightning force of piezoelectric ceramics Installation place is adjusted, adjusting installation place in the pretension is provided with pretension bolt.
- 3. the drive circuit system of piezo ceramic motion platform according to claim 2, it is characterised in that the platform passes Sensor uses capaNCDT6300 single channel Series of High Accuracy displacement sensors, wherein probe model uses CS05, the platform The maximum range of sensor is 0.5mm, resolution ratio 5nm, 50nm, 0~10V of output voltage.
- 4. the drive circuit system of piezo ceramic motion platform according to claim 2, it is characterised in that described is parallel The parameter of plate is long 6mm, wide 8mm, thick 0.7mm, its material is superduralumin.
- 5. the drive circuit system of piezo ceramic motion platform according to claim 1, it is characterised in that cpu controller Connected by serial ports and host computer communication；Cpu controller is electrically connected with liquid crystal display and keyboard.
- 6. the drive circuit system of piezo ceramic motion platform according to claim 1, it is characterised in that the sensing Device measuring circuit, high voltage operational amplifying circuit respectively by bus be electrically connected ADC module, DAC module, the ADC module, DAC module is connected with cpu controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721058048.3U CN207283436U (en) | 2017-08-23 | 2017-08-23 | The drive circuit system of piezo ceramic motion platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721058048.3U CN207283436U (en) | 2017-08-23 | 2017-08-23 | The drive circuit system of piezo ceramic motion platform |
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| CN207283436U true CN207283436U (en) | 2018-04-27 |
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| CN201721058048.3U Expired - Fee Related CN207283436U (en) | 2017-08-23 | 2017-08-23 | The drive circuit system of piezo ceramic motion platform |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109560720A (en) * | 2019-01-09 | 2019-04-02 | 桂林电子科技大学 | A kind of diamond shape ceramic driver |
| CN110161838A (en) * | 2019-05-06 | 2019-08-23 | 浙江大学 | The cutting force master & slave control system compensated automatically with piezoelectric force transducer static drift |
| WO2020119686A1 (en) * | 2018-12-14 | 2020-06-18 | 深圳先进技术研究院 | Control system for piezoelectric displacement actuator |
-
2017
- 2017-08-23 CN CN201721058048.3U patent/CN207283436U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020119686A1 (en) * | 2018-12-14 | 2020-06-18 | 深圳先进技术研究院 | Control system for piezoelectric displacement actuator |
| CN109560720A (en) * | 2019-01-09 | 2019-04-02 | 桂林电子科技大学 | A kind of diamond shape ceramic driver |
| CN109560720B (en) * | 2019-01-09 | 2023-08-29 | 桂林电子科技大学 | Rhombic ceramic driver |
| CN110161838A (en) * | 2019-05-06 | 2019-08-23 | 浙江大学 | The cutting force master & slave control system compensated automatically with piezoelectric force transducer static drift |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180427 Termination date: 20200823 |
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| CF01 | Termination of patent right due to non-payment of annual fee |