CN1699947A - Calibration method and apparatus for silicon piezoresistive transducer in-circuit programmable automatic temperature compensation - Google Patents
Calibration method and apparatus for silicon piezoresistive transducer in-circuit programmable automatic temperature compensation Download PDFInfo
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- CN1699947A CN1699947A CN 200510018685 CN200510018685A CN1699947A CN 1699947 A CN1699947 A CN 1699947A CN 200510018685 CN200510018685 CN 200510018685 CN 200510018685 A CN200510018685 A CN 200510018685A CN 1699947 A CN1699947 A CN 1699947A
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Abstract
The invention provides a silicon piezoresistive transducer's auditing method and apparatus for circuit programming auto temperature compensation, which comprises the following steps: (1) storing the calculator program of the equation: VO=VOS+delta T.alpha VOS+P(S+delta T.alpha S) including the program of silicon piezoresistive transducer unit and flush type control circuit silicon piezoresistive transducer into ROM as compensating parameter register; (2) inputting VOS, alpha VOS, S, alpha S as temperature compensating parameter of the three different temperatures into flush type control circuit E2PROM to form compensating parameter register. Correcting device includes computer programmable pressure signal source and incubator, with computer connected with programmable pressure signal source and programmable incubator controller which controls the temperature inside incubator by interface; make I/O of computer inside incubator as checkout port of silicon piezoresistive transducer; the computer includes system operational controller and command controller.
Description
Technical field
The present invention relates to method of calibration and the equipment of a kind of silicon piezoresistive transducer, particularly the automobile method and apparatus of silicon piezoresistive transducer ICP auto thermal compensation and compensating parameter verification at circuit programmable automatic temperature compensation; Belong to the application of embedded system aspect the silicon piezoresistive transducer signal condition, comprise digitizing compensation that solves the sensor temperature drift and the method for revising, circuit design, online batch commissioning device.
Background technology
Silicon piezoresistive transducer is a kind of based on silicon materials, the pressure sensor component that process ions diffusion technology is made.It is a kind of superior performance, be suitable for large-scale production, cheap, the linearity good, use pressure sensor component very widely in industry and civil area, at room temperature has the higher measuring accuracy and the linearity.Therefore, be widely used in the pressure survey field of general industry environment, as pressure unit etc.Its unique deficiency is that the temperature drift of sensor is bigger, and the temperature characterisitic of each sensor is all different owing to the manufacturing materials of silicon sensor and the restriction of technology.It also has a very special temperature characterisitic to be: along with the increase of temperature, the sensitivity temperature coefficient of sensor descends and the rising of zero temperature coefficient, its actual effect shows as the increase along with temperature, the full scale output of sensor descends, and output at zero point is risen, but with in a collection of product, because the deviation of ion implantation technology, have the output at zero point of many sensors (element) to rise not quite again, even descend, but the decline of the output of the range of decrease and full scale is disproportionate again.This characteristic reflects outstanding especially in the temperature range of automotive grade.The temperature characterisitic of this moving seesaw-type brings very big difficulty for the temperature-compensation circuit design of sensor, and the debugging of circuit and temperature compensation and correction are also brought great difficulty.In the production of the silicon pressure sensor of reality, generally all adopting mimic channel to add the temperature compensating circuit constitutes, temperature-compensation circuit carries out full scale output (FSO) and the temperature compensation of output at zero point and the correction of force value respectively singly according to the different needs of the characteristic of each sensor under the condition of temperature variation, and full scale output involves mutually with output at zero point, adjust repeatedly and revise under the condition that the temperature gamut changes.This work was both time-consuming, took a lot of work again, exchange the examination labor claim also very high.When the debugging of product that carries out short run such as pressure unit, because the serviceability temperature of product is limited in scope, it is not too big to do problem like this.
But when automotive electronicsization makes that silicon pressure sensor obtains large batch of use on automobile, the problem of debug difficulties just appears suddenly out, the temperature range that the pressure transducer of automotive grade uses is from-40～125 degree, require sensor in so wide temperature range, to satisfy certain measuring accuracy, unique method is that each sensor is all done the full scale of total temperature range ability and the temperature compensation at zero point, this desk checking method not only needs a large amount of high-quality workmans, and needs a large amount of instrument and equipments.This sensor is used for this production in enormous quantities of automobile and the very abominable product of environment for use, the signal condition of silicon pressure sensor, temperature compensation and pressure correction become the greatest problem that this product lot quantity is produced.
On the temperature compensation of sensor, the thermistor that conventional method all adopts basically and the temperature characterisitic of silicon sensor is more approaching is finished, this method is used under the general temperature environment effect and still can, but this thermistor temperature curve under the high temperature of automotive grade 125 degree is saturated, and compensation effect is not good yet.The automobile pressure transducer also has crucial characteristics to be, requires cost low, the reliability height, and therefore, material cost, production cost and the cost of labor of control product also is the necessary condition that automobile pressure transducer in enormous quantities is produced.At present, the production of the sensitive element of the silicon pressure sensor of China reaches a standard, can supply in enormous quantities, but the automatization level of compensation method, production run that is used for signal Conditioning Circuit Design, the temperature characterisitic of the pressure transducer of automotive grade is all very low, so this huge annual value of production is all monopolized by external product in 1,000,000,000 produce market.
Summary of the invention
One of purpose of the present invention is to adopt a whole set of Department of Automation ICP technology (In-circuitprogramming) of unifying to replace manually carrying out the sensor temperature method of the compensating parameter verification of compensation automatically; Two of purpose of the present invention is to provide the calibration equipment of producing the compensating parameter with auto thermal compensation function silicon piezoresistive transducer, checking procedure is carried out under the control of computer system automatically, and equipment can hold a plurality of sensors simultaneously and carry out on-line automatic self checking.
Technical scheme of the present invention: the method for calibration of silicon piezoresistive transducer ICP auto thermal compensation of the present invention, step comprises:
(1) with formula V
O=V
OS+ Δ T α V
OSThe calculation procedure of+P (S+ Δ T α S) deposits in the program memory ROM of the silicon piezoresistive transducer that comprises silicon piezoresistive transducer element and embedded Control circuit, constitutes the compensating parameter counter, in the formula:
V
O, the bridge circuit output voltage of piezoresistance sensor;
V
OS, under reference temperature, output at the zero point of sensor;
Δ T, the temperature of sensor reality and reference temperature poor;
α V
OS, the zero temperature coefficient;
The pressure that P, sensor bear;
S, the sensitivity coefficient of sensor;
α S, the sensitivity temperature coefficient of sensor;
(2) silicon piezoresistive transducer is placed the different temperature environment between-40 ℃～125 ℃ respectively, measure zero point under three condition of different temperatures and full scale bridge circuit output voltage V at least respectively
O, try to achieve V by (1) described calculation procedure calculating
OS, α V
OS, S, α S be as temperature compensation parameter;
(3) be used in the E that the circuit programmable method writes calculated value in the embedded Control circuit of silicon piezoresistive transducer
2Among the PROM, constitute the compensating parameter storer.
Described method, silicon piezoresistive transducer is placed respectively-40 ℃, 20 ℃ with 125 ℃ of three different temperature environments, measure zero point under three condition of different temperatures and full scale output V respectively by the embedded Control circuit
O, and press the temperature field parameter of the correspondence that output voltage obtains by measuring bridge, calculate and try to achieve V
OS, α V
OS, these 4 parameters of S, α S.
The calibration equipment that a kind of said method is used, comprise computing machine, programmable pressure signal source and constant temperature oven, computing machine is connected with thermostat controller able to programme with the programmable pressure signal source by interface, temperature in the thermostat controller control constant temperature oven able to programme, the programmable pressure signal source is introduced in the constant temperature oven to each and is treated that plate tests silicon piezoresistive transducer pressure signal is provided, the I/O mouth of computing machine is introduced the interior verification control port as silicon piezoresistive transducer of constant temperature oven, comprises in the computing machine: the controller of (1) system interface operation: be used for the control of system's operation, the demonstration of system running state, the man-machine conversation window; (2) instruction control unit: be used for communicating, send temperature, pressure control order and drive the I/O mouth and send the silicon piezoresistive transducer memory command with programmable pressure signal source and thermostat controller able to programme.
Advantage of the present invention:
1, it is very difficult to The present invention be directed to the design of temperature drift characteristic compensating circuit and the debugging that are run into when silicon piezoresistive transducer is applied to the automobile pressure transducer, a whole set of method of demarcating that proposes from circuit design to the sensor on-line parameter, this method is from being to have solved the compensation problem that silicon piezoresistive transducer is applied to subject matter one temperature drift of automobile at all, industry at automobile sensor industry and pressure transducer all is an innovation, and it provides the technical feasibility of producing in batches for the production domesticization of automobile pressure transducer;
2, provide verification of robotization temperature compensation parameter and the calibration facility that is suitable for carrying out the automotive grade production in enormous quantities.Thereby fundamentally solved in the debugging and the temperature compensation of the temperature conditions lower sensor circuit of automotive grade very difficult, inefficiency, the problem that is difficult to produce in batches.
Description of drawings
Fig. 1 is an automatic temperature compensation silicon pressure sensor structure synoptic diagram;
Fig. 2 is an embedded Control circuit software flow pattern;
Fig. 3 is an automated calibration equipment hardware design block diagram;
Fig. 4 is the software flow block diagram of automatic effect device systems.
Embodiment
1, calculate principle: the temperature compensation of the silicon piezoresistive transducer that obtains by further investigation and pressure output are revised can digitalization operation equation: want to utilize computing machine to carry out the data processing of the temperature compensation of sensor, the problem of most critical be seek one can the comprehensive output equation of expressed intact sensor under its pertinency factor influence, by more than 3 years to the application and development and the research of piezoresistance sensor, and consult a large amount of documents and materials, piezoresistance sensor is output as the function of its pressure and temperature that bears, i.e. V
O=f (P, T).Its output equation can be expressed as: V
O=V
OS+ Δ T α V
OS(sensor accuracy according to automotive grade requires not too high actual conditions to+P (S+ Δ T α S), this equation has omitted the quadratic term of some effects sensor output, so that calculate fast, and actual test shows, this equation enough satisfies the accuracy requirement of automobile sensor), in the formula:
V
O, the bridge circuit output voltage of piezoresistance sensor;
V
OS, under reference temperature, the zero point of sensor, output, was made as 20 ℃ with reference temperature here;
Δ T, the temperature of sensor reality and reference temperature poor, its symbol can just can be born;
α V
OS, the zero temperature coefficient can just can be born;
The pressure that P, sensor bear;
S, the sensitivity coefficient of sensor;
α S, the sensitivity temperature coefficient of sensor;
2, embedded Control circuit hardware part is by having the interior band E of ICP function at circuit programmable
2The microprocessor of the multi-channel A of PROM and degree of precision/D conversion is a core, adds necessary mimic channel and interface circuit composition.
Fig. 1 is an automatic temperature compensation silicon pressure sensor structure synoptic diagram: comprise silicon piezoresistive transducer element and embedded Control circuit.The silicon piezoresistive transducer element is the sensor bridge circuit 1 of constant voltage power supply, and the output of bridge circuit is connected with the road A/D pin of CPU by the bridge circuit output amplifier, and total bridge circuit voltage presses big circuit by bridge and is connected with another road A/D pin of CPU; Three I/O pin of CPU are as the SPI interface, and one as PWM output and mimic channel translation interface, and one as online programming control mouth, silicon piezoresistive transducer compensating parameter counter, RAM storer are arranged and by nonvolatile memory E among the CPU
2The compensating parameter storer that PROM constitutes.
This circuit design bridge press the circuit of big measurement.Because, by measuring the variation that bridge is pressed, can measure the variation of sensor temperature field actual and exactly, what it was accepted when carrying out automatic verification is the signal of known temperature correspondence, is used for calculating using; And when practical application, press the value in the actual residing temperature field of survey sensor by measuring bridge, and in this circuit, be to measure by the A/D conversion of pressing signal to send into microprocessor on the bridge of sensor, the signal in temperature field is used during as temperature compensation.
In this circuit, adopt another road simulation bridge circuit output amplifier to finish to the value of sensor output voltage with pressure, temperature variation, the output valve of this dynamic change enters another road A/D conversion through amplifying, when carrying out sensor calibration, be the corresponding output valve of the setting pressure under the given temperature conditions, compensate one of foundation of calculating as digitizing; And this value is the function of ambient pressure variation and temperature variation when practical application, also is the anti-master data that calculating relied on that pushes away in standard conditions downforce value.
This circuit also has an important control input port-online programming control interface, issues the embedded Control circuit by automated calibration equipment, and it uses when carrying out sensor temperature compensation verification.When automated calibration equipment controlled pressure generator constant after some temperature at a normal pressure and constant temperature oven able to programme, system just issues the order of a specific tracer signal of microprocessor of embedded Control circuit, it just measures at that time temperature field signal and corresponding with it pressure transducer output signal, and with these two signal records in its RAM, after these a series of data with pressure variation and temperature variation deposit RAM in regularly, by in it with the ICP program calculate 4 unknown parameters trying to achieve sensor, deposit E in by mode at circuit programming ICP
2In the PROM, finish whole verification makeover process.When practical application, this control mouth is in blockage.
This circuit has two kinds of output modes, and a kind of is the SPI interface modes, according to user's requirement, if can adopt the mode of SPI interface to get in touch with when sensor and other microprocessor or computer system interface; And when sensor needed directly to export simulating signal, then the embedded Control circuit sent pwm signal and is changed to simulating signal output by change-over circuit.
Fig. 2 is the explanation of embedded Control circuit software flow principle: the function that embedded Control circuit software design is finished has: the A/D converted measurement, the temperature compensation correction calculation, accept the series order that calibration equipment sends and carry out the storage and the calculating of measurement data, finish ICP in the circuit programmable function, and the function of when actual motion, the pressure output value of sensor being carried out that the temperature drift self compensation is calculated and revising: detect the control command that has or not calibration equipment to send after the initialization, have: record series pressure and temperature measured value then; Then, call calculation procedure and calculate V
OS, α V
OS, four parameters of S and α S deposit four parameters in E
2PROM; If the order of modification is arranged, then carry out data recording and calculating again, and deposit the parameter value of revising in E
2PROM; If there is not control command, enter actual operation procedure: the output valve V of actual measurement sensor
OWith temperature field signal delta T, according to depositing E in
2The V of PROM
OS, α V
OS, the pressure value P under four calculation of parameter reference temperatures of S and α S is calculated the duty ratio corresponding signal try to achieve PWM according to pressure value P then and is sent pwm signal to change-over circuit, or communicates by letter with host computer by the SPI interface pressure value P signal is issued host computer.
3, Fig. 3 is an automated calibration equipment hardware design block diagram: automatically effect equipment is by computing machine, programmable constant temperature control box, and the programmable pressure signal source is formed.Its theory of constitution block scheme is as follows: computing machine is connected with thermostat controller able to programme with the programmable pressure signal source by interface RS485, temperature in the thermostat controller control constant temperature oven able to programme, the programmable pressure signal source is introduced constant temperature oven and pressure signal is provided for each silicon piezoresistive transducer to be verified, and the I/O mouth on the computer PCI multifunctional access oralia is introduced the verification control port of constant temperature oven as silicon piezoresistive transducer.Comprise in the computing machine: the control program of (1) system interface operation: the control, the demonstration of system running state, the man-machine conversation window that are used for system's operation; (2) command control program: be used for communicating, send temperature, pressure control order and drive the I/O mouth and send the silicon piezoresistive transducer memory command with programmable pressure signal source and thermostat controller able to programme.The computing machine that this equipment adopted is general general calculation machine or industrial control computer.
As can be seen from the figure, simultaneously a plurality of sensors to be calibrated (comprising checking circuit) are placed in the constant temperature oven, give each cell pressure signal by the programmable pressure signal source, heat up and cooling according to certain rules by the temperature in the thermostat controller control box able to programme, these two controllers all are subjected to the programmed control of computing machine, the correcting circuit of sensor is controlled by the I/O mouth on the computer PCI interface board, computing machine is according to the current temperature and pressure value of controlling, checking circuit to sensor sends control signal corresponding, write down corresponding measured value, sensor parameters calculates and the basis of compensation as carrying out.In whole effect process, the measured value of each sensor all may be different, and each sensor calculates respectively under the computing machine unified command, parameter is separately deposited in the E of oneself
2PROM finishes the calculating of temperature compensation equation and the overall process that the pressure correction parameter is stored.
4, making step comprises:
(1) with formula V
O=V
OS+ Δ T α V
OSThe calculation procedure of+P (S+ Δ T α S) deposits the program storage of the embedded Control circuit of silicon piezoresistive transducer in;
(2) silicon piezoresistive transducer is placed the different temperature environment between-40 ℃～125 ℃ respectively, measure zero point under three condition of different temperatures and full scale bridge pressure output V at least respectively
O, and, try to achieve V by (1) described calculation procedure calculating by the sensor temperature field signal that the sensor bridge pressure is characterized
OS, α V
OS, these 4 parameters of S, α S;
(3) be used in the E that circuit programmable method ICP writes calculated value in the embedded Control circuit
2Among the PROM,, finish whole temperature compensation parameter storing processs so that it carries out the calculating of self-temperature compensating when using.
Because the silicon piezoresistive transducer manufacturing process, even with a collection of sensor element of producing, its performance also has fine distinction, this difference, and under the temperature conditions of automotive grade, its error has surpassed the accuracy rating requirement.This difference is embodied on 4 parameters in this equation, i.e. V
OS, α V
OS, S and α S, pressure P and temperature difference T are controlled by system.So-called mimic channel temperature compensation and pressure correction, the difference at these 4 parameters all compensates each sensor exactly; The method that digitizing compensates automatically is actual to be that automatic checkout system at first automatically creates several known pressure and temperature environment, be actually and sensor placed-40 ℃ respectively, 20 ℃, in 125 ℃ of these three different temperature environments, export by zero point and full scale that the A/D that embeds circuit measures respectively under these three temperature conditions, and press the sensor temperature field signal characterized by sensor bridge, with V
O=V
OS+ Δ T α V
OSThe calculation procedure of+P (S+ Δ T α S) deposits in to calculate tries to achieve this 4 parameters, with the ICP program calculated value is write E then
2PROM finishes whole temperature compensation parameter storing processs.
When certain sensor was worked under applied environment, the two-way A/D of embedded Control circuit can measure sensor output V respectively
OWith temperature field signal delta T, parameter according to 4 these sensors storing when the verification, utilize the anti-normal pressure P that asks of above-mentioned formula equally, again according to the standard signal pressure P that calculates under reference temperature, and according to different application need output and pressure P value corresponding, thereby the self compensation process of realization temperature drift.
For the sensor accuracy requirement of automotive grade, temperature value is selected-40 ℃, and 20 ℃, 125 ℃ of three temperature get final product, and in each temperature range, pressure selects one, two spot pressure as meticulous adjustment between from the zero point to the full scale again.Measured result shows, after the correction work of every batch of 50 sensors is finished, 90% sensor can reach the precision of gamut 1% when using in the total temperature scope, 8% sensor can satisfy automotive grade 1% precision at normal temperatures, the precision of ultimate temperature is 3% requirement, has only other sensor circuit to need to proofread and correct again.If further improve the accuracy of detection of sensor, temperature range can increase-10 ℃, 80 ℃ etc., the compensation precision of sensor is further improved, each coefficient that is calculated, for the coefficient of certain temperature range but not the coefficient in the gamut scope, can further improve the measuring accuracy of sensor like this.
Fig. 4 is the software flow block diagram of automatic effect device systems: whole procedure is divided into the two large divisions in the computing machine: the controller of (1) system interface operation: the control, the demonstration of system running state, the man-machine conversation window that are used for system's operation; (2) instruction control unit: be used for communicating, send temperature, pressure control order and drive pci card and send the sensor memory command with two controllers.
The upper layer software (applications) of computing machine is an executable file that is embedded on the WINDOWS platform, and this program can be used VB, VC++, Dephi etc. are senior, and software is write, this example adopts Dephi6.0 to write, be installed on the user's computer after, double-click this program icon when needing and can move.
Interface program is fairly simple, mainly be with the control of system's operation, the demonstration of system running state, man-machine conversation window etc., the needed pressure of calculation of parameter, temperature value are shown on screen, and wherein temperature control point, scope and pressure control point and scope can be increased and be reduced by the user as required.
The bottom working procedure is write with VC, and it is the driver of equipment, mainly is the liaison of finishing with two controllers, the driving of pci card etc.It can show at computer screen from the data that two controllers read, and also control commands corresponding is given simultaneously, makes total system carry out work according to preset program.
Idiographic flow: at first send the liaison signal after the initialization to the pressure and temperature controller; Get in touch with successfully, whether screen prompt user makes amendment to system's original start program, no matter revises not, confirms at last to operate and finishes, and system enters automatic running status; Constant temperature oven reaches first reference mark and stable, and corresponding output pressure signal is sent in the control pressure signal source, sends storage signal at every, the embedding circuitry stores acquired signal separately of all sensors in the control box.Collection is finished, and the intensification signal is sent out by system; Constant temperature oven reaches second reference mark and stable, and corresponding output pressure signal is sent in the control pressure signal source, sends storage signal at every, second group of signal of the embedding circuitry stores collection separately of all sensors in the control box; In like manner, the intensification signal is sent out by system, the 3rd group of signal of the embedding circuitry stores collection separately of all sensors in the control box; The collection equipment that finishes sends calculation command, according to three groups of data computation of gathering, is drawn V separately by all the sensors in school
OS, α V
OS, four parameters of S and α S; Utilize the ICP technology to deposit separately E in
2PROM finishes the overall process that the temperature compensation corrected parameter calculates and stores; Control system release, cooling, screen prompt sensor temperature compensating parameter are demarcated and are finished.
In sum, core of the present invention is the accounting equation that has proposed to comprise the digitizing compensation that is suitable for carrying out the sensor temperature drift, circuit design, the method of temperature compensation parameter verification, and in batch process, satisfy a whole set of complete design and embodiments such as the self-compensating computer controlled automatic equipment of sensor IC P (at circuit programmable) temperature drift.
Claims (3)
1. a silicon piezoresistive transducer is characterized in that in the method for calibration of circuit programmable automatic temperature compensation its step comprises:
(1) with formula V
O=V
OS+ Δ T α V
OSThe calculation procedure of+P (S ten Δ T α S) deposits in the program memory ROM of the silicon piezoresistive transducer that comprises silicon piezoresistive transducer element and embedded Control circuit, constitutes the compensating parameter counter, in the formula:
V
O, the bridge circuit output voltage of piezoresistance sensor;
V
OS, under reference temperature, output at the zero point of sensor;
Δ T, the temperature of sensor reality and reference temperature poor;
α V
OS, the zero temperature coefficient;
The pressure that P, sensor bear;
S, the sensitivity coefficient of sensor;
α S, the sensitivity temperature coefficient of sensor;
(2) silicon piezoresistive transducer is placed the different temperature environment between-40 ℃～125 ℃ respectively, measure zero point under three condition of different temperatures and full scale bridge circuit output voltage V at least respectively
O, try to achieve V by (1) described calculation procedure calculating
OS, α V
OS, S, α S be as temperature compensation parameter;
(3) be used in the E that the circuit programmable method writes calculated value in the embedded Control circuit of silicon piezoresistive transducer
2Among the PROM, constitute the compensating parameter storer.
2. method according to claim 1, it is characterized in that: silicon piezoresistive transducer is placed respectively-40 ℃, 20 ℃ with 125 ℃ of three different temperature environments, measure zero point under three condition of different temperatures and full scale output V respectively by the embedded Control circuit
O, and press the temperature field parameter of the correspondence that output voltage obtains by measuring bridge, calculate and try to achieve V
OS, α V
OS, these 4 parameters of S, α S.
3. the calibration equipment of the used temperature compensation parameter of claim 1 or 2 method, comprise computing machine, programmable pressure signal source and constant temperature oven, it is characterized in that: computing machine is connected with thermostat controller able to programme with the programmable pressure signal source by interface, temperature in the thermostat controller control constant temperature oven able to programme, the programmable pressure signal source is introduced and pressure signal is provided in the constant temperature oven each silicon piezoresistive transducer to be verified, the I/O mouth of computing machine is introduced the interior verification control port as silicon piezoresistive transducer of constant temperature oven, comprises in the computing machine: the controller of (1) system interface operation: be used for the control of system's operation, the demonstration of system running state, the man-machine conversation window; (2) instruction control unit: be used for communicating, send temperature, pressure control order and drive the I/O mouth and send the silicon piezoresistive transducer memory command with programmable pressure signal source and thermostat controller able to programme.
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| CN102353481A (en) * | 2011-06-30 | 2012-02-15 | 华南理工大学 | Method and device for complementing temperature and pressure of pressure sensor based on two-dimensional orthogonal function |
| CN103048085A (en) * | 2011-10-13 | 2013-04-17 | 江苏恩泰传感器有限公司 | Temperature compensation system of pressure sensor and temperature compensation method thereof |
| CN103257017A (en) * | 2011-12-29 | 2013-08-21 | 中国燃气涡轮研究院 | Compensation method for temperature drift of sensor |
| CN104535257A (en) * | 2014-11-20 | 2015-04-22 | 武汉中航传感技术有限责任公司 | Silicon-piezoresistive temperature compensation assessment method |
| CN107192938A (en) * | 2017-06-07 | 2017-09-22 | 太原市太航压力测试科技有限公司 | A kind of hardware signal processing method of silicon piezoresistive transducer |
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| CN114509190A (en) * | 2022-02-28 | 2022-05-17 | 西安思微传感科技有限公司 | Temperature compensation method of silicon pressure sensor |
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| DE3427743A1 (en) * | 1984-07-27 | 1986-02-06 | Keller AG für Druckmeßtechnik, Winterthur | METHOD FOR TEMPERATURE COMPENSATION AND MEASURING CIRCUIT THEREFOR |
| DE59409796D1 (en) * | 1994-11-11 | 2001-08-09 | Endress Hauser Gmbh Co | Arrangement for linearization and temperature compensation of sensor signals |
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| CN103048085B (en) * | 2011-10-13 | 2015-08-19 | 贾庆锋 | Temperature compensation system for pressure sensors and temperature compensation thereof |
| CN103257017A (en) * | 2011-12-29 | 2013-08-21 | 中国燃气涡轮研究院 | Compensation method for temperature drift of sensor |
| CN103257017B (en) * | 2011-12-29 | 2015-04-29 | 中国燃气涡轮研究院 | Compensation method for temperature drift of sensor |
| CN104535257A (en) * | 2014-11-20 | 2015-04-22 | 武汉中航传感技术有限责任公司 | Silicon-piezoresistive temperature compensation assessment method |
| CN107192938A (en) * | 2017-06-07 | 2017-09-22 | 太原市太航压力测试科技有限公司 | A kind of hardware signal processing method of silicon piezoresistive transducer |
| CN109342984A (en) * | 2018-11-16 | 2019-02-15 | 南方电网科学研究院有限责任公司 | A kind of magnetoresistive chip temperature and humidity influences rectification building-out system and method |
| CN112097632A (en) * | 2020-09-18 | 2020-12-18 | 江苏东华测试技术股份有限公司 | Nonlinear correction method for constant-voltage bridge for large strain measurement of three-wire system quarter bridge |
| CN112097632B (en) * | 2020-09-18 | 2021-11-02 | 江苏东华测试技术股份有限公司 | Nonlinear correction method for constant-voltage bridge for large strain measurement of three-wire system quarter bridge |
| CN112414594A (en) * | 2020-11-09 | 2021-02-26 | 中国电子科技集团公司第四十九研究所 | Temperature error correction method for silicon piezoresistive pressure sensor |
| CN114136525A (en) * | 2021-12-02 | 2022-03-04 | 北京十坤传感科技有限公司 | Temperature drift compensation method and device for six-dimensional force sensor, electronic equipment and medium |
| CN114509190A (en) * | 2022-02-28 | 2022-05-17 | 西安思微传感科技有限公司 | Temperature compensation method of silicon pressure sensor |
| CN116007824A (en) * | 2022-12-29 | 2023-04-25 | 北京自动化控制设备研究所 | Error correction method and module of silicon piezoresistance type air pressure sensing module |
| CN116007824B (en) * | 2022-12-29 | 2024-03-15 | 北京自动化控制设备研究所 | Error correction method and module of silicon piezoresistance type air pressure sensing module |
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