CN206416158U - The rigidity of view-based access control model and flexible double five bar closed chain mechanism devices - Google Patents
The rigidity of view-based access control model and flexible double five bar closed chain mechanism devices Download PDFInfo
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- CN206416158U CN206416158U CN201621398160.7U CN201621398160U CN206416158U CN 206416158 U CN206416158 U CN 206416158U CN 201621398160 U CN201621398160 U CN 201621398160U CN 206416158 U CN206416158 U CN 206416158U
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Abstract
The utility model discloses a kind of rigidity of view-based access control model and flexible double five bar closed chain mechanism devices, servomotor is used including rigid five-rod, flexible five-rod, silent flatform, industrial camera, acceleration transducer, motion control card, voltage amplifier, computer, terminal board and piezoelectric ceramic piece driver, in the utility model while driving rigid five-rod and flexible five-rod to be moved and non-interference with symmetrical posture, symmetrical track;The vibration information produced in rigid five-rod and flexible five-rod motion process is measured using acceleration transducer and industrial camera, and is analyzed;Algorithm of Active Control is finally combined, active control is carried out to the vibration produced in rigid five-rod and flexible five-rod motion process by piezoelectric ceramic piece driver respectively.
Description
Technical field
The utility model is related to vibration measurement field, and in particular to a kind of rigidity of view-based access control model and flexible double five bar closed chains
Mechanism arrangement.
Background technology
In traditional sense, mechanism is generally configured to rigid mechanism;Rigid structure is larger due to its own ratio of rigidity, stability
Relatively good, it is when being interfered, not susceptible.
As economic develops rapidly, structure also constantly tends to maximization, flexibility and Low rigidity.It is firm relative to traditional
Property mechanism, compliant mechanism has many advantages, such as:(1) seamless between each component and friction, the kinematic accuracy of mechanism is higher;
(2) due to no fretting wear, noise can be reduced in its work, and device longevity can also extend;(3) compliant mechanism can be carried out
Monolithic is manufactured, it is easy to miniaturization and batch production.But flexible structure has the small, light weight of damping, the low feature of modal frequency,
It evokes the vibration based on low frequency when being interfered, easily and the duration is long.If do not suppressed to this vibration,
It must make structure produce fatigue damage.Therefore, it is necessary to measure, analyze and suppress the vibration of flexible structure.
In the prior art, the vibration measurement of compliant mechanism generally using piezoceramic transducer, acceleration transducer and
Gyro sensor, but these sensors are all touch sensor, the vibration of testee can be produced and had a strong impact on, reduced
Measurement accuracy, introduces load effect.Piezoelectric due to factors such as self-strength, fatigue life and heat resistances, using by
Certain limitation;Acceierometer sensor there are problems that sluggish and influence its precision to noise-sensitive.
There is its unique advantage using vision non-cpntact measurement, and can quick obtaining measurement data.Vision is not contacting quilt
In the case of surveying body surface, do not change the characteristics such as frequency, the amplitude of vibrating object, can be very good to avoid load effect.With
Laser displacement sensor is compared, and laser displacement sensor can only enter every trade spot measurement, and machine vision sensor has the overall situation
Property measuring characteristic, can carry out multimetering, and the advantages of be not limited solely to the vibration information of a bit.
Utility model content
In order to overcome the shortcoming and deficiency that prior art is present, the utility model provide a kind of rigidity of view-based access control model with it is soft
Property double five bar closed chain mechanism devices.
The utility model is adopted the following technical scheme that:
A kind of rigidity of view-based access control model and flexible double five bar closed chain mechanism devices, including basic machine part, detection part
And drive control part;
The basic machine part:Including silent flatform, two flexible driving levers, two flexible follower levers, two rigidity are main
Two servomotors are provided below in lever and two rigid driven bars, the silent flatform, and two servomotors subtract with planet respectively
Fast device connection, the planetary reduction gear is arranged on silent flatform, one end of two flexible driving levers respectively with two planetary reduction gears
Device is connected, and the other end of two flexible driving levers is connected with two flexible follower levers respectively, and described two flexible follower levers are mutual
Connection;
One end of two rigid driving levers is connected with two planetary reduction gears respectively, the other end point of two rigid driving levers
It is not connected with two rigid driven bars, described two rigid driven bars are connected with each other;
The detection part:Including industrial camera and acceleration transducer, the acceleration transducer be arranged on it is flexible from
The centre position of lever and rigid driven bar, the industrial camera is specially two, be separately mounted to two rigid driven bars and
Above the junction of two flexible follower levers;
The vibration information of the acceleration transducer detection rigidity and flexible follower lever is defeated after modification amplifier is handled
Go out to after terminal board and to be input to by motion control card in computer;
The industrial camera detects that the vibration signal of two follower lever junctions is input in computer;
The drive control part:Including piezoelectric ceramic piece driver, the piezoelectric ceramic piece driver is pasted onto flexibility
On follower lever, the computer, which obtains calculating controlled quentity controlled variable after vibration signal, passes through motion control card, then is output at terminal board
Analog input is obtained after reason to the vibration of piezoelectric amplifier, further driving piezoelectric ceramic piece driver suppression closed chain mechanism.
Also include circular indicia, the circular indicia has 2, be separately positioned on two rigid driven bars and two flexibilities from
The junction of lever, circular indicia in industrial camera within sweep of the eye.
Piezoelectric ceramic piece driver is specifically made up of four piezoelectric ceramic pieces, and two sides is symmetrically pasted, per face two panels, attitude angle
For 0 degree.
Also include camera support, the camera support is specially rectangular body support frame, and silent flatform is placed in rectangular body support frame.
Rigid driven bar is longer than rigid driving lever, and the flexible follower lever is longer than flexible driving lever.
Two flexible driving levers, two flexible follower levers, two rigid driving levers and two rigid driven bars are on quiet flat
Platform Central Symmetry.
The camera support also includes the sliding block for being used to adjust industrial camera position.
Described two servomotors are symmetrically mounted in the transversal centerline of silent flatform.
A kind of rigidity and the investigating method of flexible double five bar closed chain mechanism devices, comprise the following steps:
First step acceleration transducer detects the vibration information of follower lever, two follower lever junctions of industrial camera detection
Vibration information;
The vibration signal that second step acceleration transducer is detected is output in terminal board after modification amplifier is handled
After A/D modules are handled, then digital quantity is exported into motion control card, then carry out subsequent treatment through computer;Industrial camera
The signal detected is input to computer and carries out subsequent treatment, according to control law, obtains controlling feedback signal accordingly;
3rd step by the feedback signal obtained in step 2 after D/A resume modules in terminal board, then through voltage amplifier
After enhanced processing, piezoelectric ceramic piece driver is input to, so as to suppress rigidity and the vibration of flexible double five bar closed chain mechanisms.
The signal that the industrial camera is detected is input to computer and carries out subsequent treatment, concretely comprises the following steps:
In the non-setting in motion of rigid and flexible double five connecting rod closed chain mechanisms, the figure that 10-15 width includes circular indicia is shot
Picture, calculates the central coordinate of circle of circular indicia in each image, and calculates average value, as the coordinate under original state, if
For (x0, y0);
When simultaneously servomotor drives rigid five-rod to be transported with flexible five-rod with symmetrical posture, symmetrical track
During fortune, if the coordinate in the center of circle of circular indicia is (x1(t), y1(t) displacement that), then can obtain x-axis direction is Sx=x1-x0, y
The displacement of direction of principal axis is Sy=y1-y0;Further according to the result of camera calibration, rigid five-rod and flexible five-rod are just obtained
Vibration displacement information.
The beneficial effects of the utility model:
(1) device in the utility model is a kind of rigidity and flexible double five bar closed chain mechanism devices, and it includes rigidity five
Linkage and flexible five-rod two types mechanism, and they are symmetric;Servomotor drives five bar machines of rigidity simultaneously
Structure and flexible five-rod are moved with symmetrical posture, symmetrical track, and non-interference;
(2) the same industrial camera of two models is mounted with the utility model to detect rigid five-rod and flexibility five
Vibration information in vibration information in linkage motion process, the rigid five-rod motion process of a camera calibration, another
Vibration information in camera calibration flexibility five-rod motion process;Under the same conditions, distinguished using vision sensor
The vibration information in rigid five-rod and flexible five-rod motion process is extracted, and vibration information is carried out to score
Analysis, draws the vibration otherness in rigid five-rod and flexible five-rod motion process;
(3) in the utility model using machine vision come the vibration information of testing agency, compared to other sensors, machine
Vision has non-contact measurement, does not increase structure additional mass, does not change the advantages of architectural feature, multimetering.Machine is regarded
What feel measurement was obtained is the image for including vibration information, and abundant information in image, can reflect the global property of mechanism vibrations.
Suitable image processing algorithm is taken, a lot of other significant parameters can be obtained;
(4) system in the utility model is multi-sensor fusion system, and existing machine vision sensor has acceleration again
Sensor, can more accurately be measured, the rigid five-rod of comparative analysis and flexibility five by multi-sensor information fusion
Vibration information in linkage motion process.
Brief description of the drawings
Fig. 1 is general structure schematic diagram of the present utility model;
Fig. 2 is rigidity and the floor map of flexible double five bar closed chain mechanisms in Fig. 1;
Fig. 3 is the close-up schematic view of follower lever in Fig. 2;
Fig. 4 is the structural representation of camera support in Fig. 1.
Embodiment
With reference to embodiment and accompanying drawing, the utility model is described in further detail, but reality of the present utility model
Apply mode not limited to this.
Embodiment
As Figure 1-Figure 4, a kind of rigidity of view-based access control model and flexible double five bar closed linkage devices, including basic machine
Partly, detection part and drive control part;
The basic machine part:It is main including silent flatform 1, two flexible driving levers, two flexible follower levers, two rigidity
Two servomotors 10 are provided below in lever 3 and two rigid driven bars 2, silent flatform, and described two servomotors are respectively mounted
One planetary reduction gear 17, the planetary reduction gear is arranged on silent flatform by its flange, and two servomotors are arranged on quiet
On the center of one direction of platform, isolated edge nearby, is symmetrical arranged.
The output shaft input planetary reduction gear of servomotor, each planetary reduction gear installs an output by ring flange
Axle, the first layer of the output shaft of two servomotors be connected with two rigid driving lever one end respectively, two rigidity driving levers
The other end is connected with two rigid driven bars respectively, and two rigid driven bars are longer than rigid driving lever, meet the bar of mechanism kinematic
Part, two rigid driven bars are connected through the hinge, and constitute rigid five-rod.
The second layer of the output shaft of two servomotors is connected with two flexible one end of driving lever 9 respectively, two Flexible Mains
The other end of lever 9 is connected with two flexible follower levers 8 respectively, and two flexible follower levers are connected through the hinge, it is described it is flexible from
Lever is longer than flexible driving lever, constitutes flexible five-rod.
Two servomotors drive the fortune of rigid five-rod and flexible five-rod by the output shaft of planetary reduction gear
Dynamic, both are in respective plane motion, and non-interference, center of the rigid five-rod with flexible five-rod on silent flatform
Line is symmetrical, and the output shaft of connecting rod and planetary reduction gear is connected by key, is rotated with the rotation of output shaft.
Also include two circular indicias 4, the circular indicia two altogether is respectively provided at two rigid driven bars and two
The hinge connection of flexible follower lever, one at one, circular indicia is the vibration information that industrial camera extracts follower lever junction
Offer condition.
The detection part, including acceleration transducer 6 and industrial camera 7, the industrial camera 7 are specially two, point
An Zhuan not be on the section bar of the crown center of camera support 11, an industrial camera correspond to the junction of two rigid driven bars,
Two rigid driven bars in this industrial camera within sweep of the eye, and with a certain distance from having from rigid five-rod plane so that
In the motion process that rigid five-rod can be ensured, circular indicia all the time in industrial camera within sweep of the eye;Another work
The junction of the flexible follower lever of industry camera correspondence two, and the flexible five-rod plane of the second layer has certain distance, so as to
To ensure in the motion process of flexible five-rod, the circular indicia for being laid in the junction of two flexible follower levers exists all the time
In the coverage of industrial camera.
Camera support is a rectangular body support frame being made up of section bar, and it is grown and wide all long and wide bigger than silent flatform 1,
So as to so that silent flatform 1 is put into the space of camera support 11, and from each face all around of camera support 11 with a distance from
Equally;Put well in camera support 11 after silent flatform 1, the sliding block of regulation connection industrial camera 7 slides industrial camera 7 to properly
Position;
The acceleration transducer is arranged on the centre position of flexible follower lever and rigid driven bar.
The acceleration transducer detects the vibration information of follower lever, and its signal detected is handled by modification amplifier
Afterwards, it is output to after terminal board handled, output digital quantity inputs computer into motion control card, then after A/D is changed
12 carry out subsequent treatment.
The industrial camera detects the vibration information of two follower lever junctions, and its signal detected is directly inputted to calculating
Subsequent treatment is carried out in machine.
The drive control part, including piezoelectric ceramic piece driver 5, the piezoelectric ceramic piece driver 5 are pasted onto soft
Property follower lever 8 on, close to the two ends of flexibility follower lever, every flexible follower lever has four piezoelectric ceramic pieces, per face two panels, appearance
State angle is 0 ° of symmetrical stickup.
Computer is obtained after above-mentioned vibration signal, and controlled quentity controlled variable is calculated according to control law, and controlled quentity controlled variable passes through motion control
The processing output of card 14, then output analog quantity is amplified to voltage amplifier 16 after the processing of terminal board 15, then it is input to piezoelectricity pottery
Ceramics driver 5, so as to suppress rigidity and the vibration of flexible double five bar closed chain mechanisms.
In the present embodiment, silent flatform 1 is made up of section bar, and its physical dimension size is 900mm × 800mm × 600mm.
Rigid driven bar 2 uses aluminum alloy materials, and its physical dimension size is 250mm × 25mm × 10mm.Rigidity
Driving lever 3 uses aluminum alloy materials, and its physical dimension size is 180mm × 25mm × 10mm.
Piezoelectric ceramic piece driver 5 is piezoelectric ceramic piece, and physical dimension is 50mm × 20mm × 1mm, piezoceramic material
Modulus of elasticity be Epe=63GPa, d31=-166pm/v.Piezoelectric ceramic piece driver 5 is used for suppressing in follower lever motion process
The vibration of generation.Acceleration transducer 6 is from the 8312B10 type acceleration sensings in the acceleration transducer of K-Beam companies
Device, it is a kind of low-frequency acceleration sensor, and its measurement frequency scope is 0-180Hz.
Industrial camera selects the COMS cameras of the Basler companies of Germany, and its model Basler acA1600-60gc are adopted
The image size integrated is 1600*1200 pixel, about 200 mega pixels, and frame per second is 60 frames/second, and its lens interface is C interface,
The interface of camera and computer is GigE, and its transmission speed is better than USB interface.
The camera lens of industrial camera is from the industrial lens of Computar companies of Japan, its model computar M1214-
MP2, focal length is 12mm, and size is Φ 33.5mm × 28.2mm, and image full-size is 8.8mm × 6.6mm, and interface is C interface.
Flexible follower lever 8 uses aluminum alloy materials, and its physical dimension size is 250mm × 25mm × 3mm.Flexible Main
Lever 9 uses aluminum alloy materials, and its physical dimension size is 180mm × 25mm × 3mm.
Servomotor 10 is from the Mitsubishi Electric of MIT, and its model HC-KF43 types, and electric drilling match are used
Decelerator from Germany NEUGRAT companies PLN series decelerator, its model, the decelerator have motor install letter
Just the features such as, output torque is high.
Camera support 11 is made up of section bar, its physical dimension size 1200mm × 1200mm × 900mm, to two industrial phases
Machine is demarcated using Zhang Zhengyou plane references method, using MATLAB calibration tool casees.
A kind of rigidity of view-based access control model and the investigating method of flexible double five bar closed chain mechanism devices, comprise the following steps:
First step acceleration transducer detects the vibration information of follower lever;
Industrial camera detects the vibration information of follower lever junction, and specific detection method is:Do not opened also in mechanism arrangement
When beginning to move, the image that 10-15 width includes circular indicia is shot, the central coordinate of circle of circular indicia in each image is calculated, and
Its average value is calculated, as the coordinate under original state, (x is set to0, y0);
When simultaneously servomotor 10 drives rigid five-rod with flexible five-rod with symmetrical posture, symmetrical track
During fortune fortune, if the coordinate in the center of circle of circular indicia 4 is (x1(t), y1(t)).The displacement that x-axis direction can then be obtained is Sx=x1-
x0, the displacement in y-axis direction is Sy=y1-y0;Further according to the result of camera calibration, it is possible to obtain rigid five-rod and flexibility
The real vibration displacement information of five-rod.
The central coordinate of circle of circular indicia is obtained using image processing method, specific method is as follows:First with Canny edges
Detective operators split circular indicia 4 and background, and obtain the edge of circular indicia 4, so as to obtain the two-value of circular indicia 4
Figure;Contours extract is carried out to binary map again, the profile diagram of circular indicia 4 is obtained;Its image moment is calculated profile diagram again, so that
To the central coordinate of circle of circular indicia 4.
The vibration signal that second step acceleration transducer is detected is output to terminal board after the processing of modification amplifier 13
After middle A/D modules are handled, then digital quantity is exported into motion control card, then carry out subsequent treatment through computer;Industrial phase
The signal that machine examination is measured is input to computer and carries out subsequent treatment, according to control law, obtains controlling feedback signal accordingly;
3rd step is electric after D/A resume modules in terminal board, then through voltage amplification by the feedback signal obtained in step 2
After device enhanced processing, piezoelectric ceramic piece driver is input to, so as to suppress rigidity and the vibration of flexible double five bar closed chain mechanisms.
Arrow connection in Fig. 1 represents electric signal and the connection of detection drive dynamic control device.
CPU models Intel (R) Core (TM) i5-4590CPU 3.30GHz that computer 12 is selected, inside save as 4G, main
There are multiple PCI slots on plate, motion control card can be very easily installed.Modification amplifier 13 is from Bruel&Kjaer companies
The serial modification amplifiers of NEXUS, it has low noise, HDR, high-precision feature, and model is from 4 passages
2692-C modification amplifiers.
Motion control card 14 selects the GTS-400-PV-PCI movement sequence controllers of Gu Gao companies, and its core is mainly
There is provided the pci bus interface of standard by DSP and FPGA.The model GT2-400-ACC2-V- of the terminal board 15 supporting with it
AD16, it contains A/D and D/A modules.
Voltage amplifier 16 can select the parts such as model APEX-PA241DW or APEX-PA240CX voltage amplifier
Composition, its research institute is South China Science & Engineering University, entitled " space sailboard bend and the torsion mode vibration applied in applicant
It is discussed in detail in simulation active control device and method ", the patent of Application No. 200810027186.4.Multiplication factor is reachable
To 52 times, will -5V~+5V be amplified to -260~+260V.
Rigidity is main by rigid five-rod and the big type of mechanism of flexible five-rod two with flexible double five bar closed chain mechanisms
Constitute.When motor drives rigid five-rod and flexible five-rod is run with symmetrical posture, symmetrical track simultaneously, adopt
Detect the vibration information in rigid five-rod and flexible five-rod motion process respectively with machine vision sensor, and
Vibration information is analyzed, the otherness in rigid five-rod and flexible five-rod motion process is drawn.Finally
Suppress rigid five-rod and the vibration in flexible five-rod motion process using piezoelectric ceramic piece driver, and it is right
Control result is analyzed.
Above-described embodiment is the utility model preferably embodiment, but embodiment of the present utility model is not by described
The limitation of embodiment, it is other it is any without departing from Spirit Essence of the present utility model with made under principle change, modify, replace
Generation, combination, simplification, should be equivalent substitute mode, are included within protection domain of the present utility model.
Claims (8)
1. a kind of rigidity of view-based access control model and flexible double five bar closed chain mechanism devices, it is characterised in that including basic machine part,
Detection part and drive control part;
The basic machine part:Including silent flatform, two flexible driving levers, two flexible follower levers, two rigid driving levers
And two rigid driven bars, the silent flatform is provided below two servomotors, two servomotors respectively with planetary reduction gear
Connection, the planetary reduction gear is arranged on silent flatform, and one end of two flexible driving levers connects with two planetary reduction gears respectively
Connect, the other end of two flexible driving levers is connected with two flexible follower levers respectively, and described two flexible follower levers are connected with each other;
One end of two rigid driving levers be connected with two planetary reduction gears respectively, the other ends of two rigidity driving levers respectively with
Two rigid driven bar connections, described two rigid driven bars are connected with each other;
The detection part:Including industrial camera and acceleration transducer, the acceleration transducer is arranged on flexible follower lever
And the centre position of rigid driven bar, the industrial camera is specially two, is separately mounted to two rigid driven bars and two
Above the junction of flexible follower lever;
The vibration information of the acceleration transducer detection rigidity and flexible follower lever is output to after modification amplifier is handled
It is input to after terminal board by motion control card in computer;
The industrial camera detects that the vibration signal of two follower lever junctions is input in computer;
The drive control part:Including piezoelectric ceramic piece driver, the piezoelectric ceramic piece driver is pasted onto flexible driven
On bar, the computer obtains calculating controlled quentity controlled variable after vibration signal and passes through motion control card, then is output to after terminal board processing
Analog input is obtained to the vibration of piezoelectric amplifier, further driving piezoelectric ceramic piece driver suppression closed chain mechanism.
2. rigidity according to claim 1 and flexible double five bar closed chain mechanism devices, it is characterised in that also including circle mark
Know, the circular indicia there are 2, be separately positioned on the junction of two rigid driven bars and two flexible follower levers, circle mark
Know in industrial camera within sweep of the eye.
3. rigidity according to claim 1 and flexible double five bar closed chain mechanism devices, it is characterised in that piezoelectric ceramic piece drives
Dynamic implement body is made up of four piezoelectric ceramic pieces, and two sides is symmetrically pasted, per face two panels, and attitude angle is 0 degree.
4. rigidity according to claim 1 and flexible double five bar closed chain mechanism devices, it is characterised in that also including camera branch
Frame, the camera support is specially rectangular body support frame, and silent flatform is placed in rectangular body support frame.
5. rigidity according to claim 1 and flexible double five bar closed chain mechanism devices, it is characterised in that rigid driven bar ratio
Rigid driving lever is long, and the flexible follower lever is longer than flexible driving lever.
6. rigidity according to claim 1 and flexible double five bar closed chain mechanism devices, it is characterised in that two flexible actives
Bar, two flexible follower levers, two rigid driving levers and two rigid driven bars are on silent flatform Central Symmetry.
7. rigidity according to claim 4 and flexible double five bar closed chain mechanism devices, it is characterised in that the camera support
Also include the sliding block for being used to adjust industrial camera position.
8. rigidity according to claim 1 and flexible double five bar closed chain mechanism devices, it is characterised in that described two servos
Motor is symmetrically mounted in the transversal centerline of silent flatform.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106737580A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | The rigidity of view-based access control model and flexible double five bar closed chain mechanism devices and investigating method |
CN108871764A (en) * | 2018-07-09 | 2018-11-23 | 吉林大学 | A kind of reliability test of industrial robot retarder |
CN109190282A (en) * | 2018-09-19 | 2019-01-11 | 西安交通大学 | A kind of the equipment adjustment method and its control device, mechanical device of closed chain mechanism |
CN114625185A (en) * | 2022-03-04 | 2022-06-14 | 上海百琪迈科技(集团)有限公司 | Control device and control system for cutting special-shaped flexible material based on capacitance displacement detection vibration suppression |
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2016
- 2016-12-20 CN CN201621398160.7U patent/CN206416158U/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106737580A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | The rigidity of view-based access control model and flexible double five bar closed chain mechanism devices and investigating method |
CN108871764A (en) * | 2018-07-09 | 2018-11-23 | 吉林大学 | A kind of reliability test of industrial robot retarder |
CN109190282A (en) * | 2018-09-19 | 2019-01-11 | 西安交通大学 | A kind of the equipment adjustment method and its control device, mechanical device of closed chain mechanism |
CN109190282B (en) * | 2018-09-19 | 2020-05-22 | 西安交通大学 | Assembly adjusting method of closed chain mechanism, control device and mechanical device thereof |
CN114625185A (en) * | 2022-03-04 | 2022-06-14 | 上海百琪迈科技(集团)有限公司 | Control device and control system for cutting special-shaped flexible material based on capacitance displacement detection vibration suppression |
CN114625185B (en) * | 2022-03-04 | 2024-01-26 | 上海百琪迈科技(集团)有限公司 | Control device for cutting special-shaped flexible material based on capacitance displacement detection vibration suppression |
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