CN109560720B - Rhombic ceramic driver - Google Patents
Rhombic ceramic driver Download PDFInfo
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- CN109560720B CN109560720B CN201910019424.5A CN201910019424A CN109560720B CN 109560720 B CN109560720 B CN 109560720B CN 201910019424 A CN201910019424 A CN 201910019424A CN 109560720 B CN109560720 B CN 109560720B
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- 239000000919 ceramic Substances 0.000 title claims abstract description 113
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 title description 2
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 14
- 239000010432 diamond Substances 0.000 claims abstract description 14
- 230000003321 amplification Effects 0.000 claims description 24
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 24
- 238000012545 processing Methods 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 claims description 17
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 abstract description 30
- 230000008859 change Effects 0.000 abstract description 10
- 230000000087 stabilizing effect Effects 0.000 description 18
- 238000010586 diagram Methods 0.000 description 9
- 239000003990 capacitor Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- 238000001914 filtration Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 230000005483 Hooke's law Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention provides a diamond ceramic driver, which is characterized in that capacitance width measuring modules are added on two sides of a piezoelectric actuation module, the change of the plate spacing of the piezoelectric ceramics of the piezoelectric actuation module is detected, the elongation of the piezoelectric ceramics is further obtained, and the elongation is fed back to a processor to generate compensation voltage, so that the output of the piezoelectric actuation module is compensated, and the displacement output precision is improved.
Description
Technical Field
The invention relates to the technical field of piezoelectric ceramic driving, in particular to a diamond ceramic driver.
Background
Piezoelectric ceramics, which are information function ceramic materials capable of mutually converting mechanical energy and electric energy-piezoelectric effects, have dielectric properties, elasticity, etc., in addition to piezoelectricity, and have been widely used in medical imaging, acoustic sensors, acoustic transducers, ultrasonic motors, etc.
The piezoelectric ceramics have nanometer positioning precision and are widely applied in the aspect of micro positioning, but can not meet the micro displacement requirement of a slightly large range, so that a displacement amplifying device is required to be added. However, when the displacement amplifying device is used, the displacement amplifying device is of a diamond structure, the deformation of the diamond is irregular, and the driving arm of the diamond structure can generate nonlinear displacement after deformation, so that nonlinear errors exist between the piezoelectric ceramic displacement and the system displacement, and the measurement accuracy is reduced.
Disclosure of Invention
The invention aims to provide a diamond-shaped ceramic driver so as to solve the problem of low measurement precision caused by nonlinear errors generated by output displacement of the diamond-shaped ceramic driver.
In order to achieve the above purpose, the invention provides a diamond ceramic driver, which comprises a micro-processing module, a digital-to-analog conversion module, a driving power supply linear amplification module and a piezoelectric actuation module which are sequentially connected, wherein the micro-processing module inputs a control signal into the driving power supply linear amplification module after passing through the digital-to-analog conversion module, the driving power supply linear amplification module amplifies the control signal to drive the piezoelectric actuation module to extend, the diamond ceramic driver further comprises a capacitance width measurement module, the capacitance width measurement module is arranged at two sides of piezoelectric ceramics of the piezoelectric actuation module to measure the width variation of the piezoelectric ceramics, the width variation is converted into the extension of the piezoelectric ceramics to be fed back to the micro-processing module, and the micro-processing module obtains compensation voltage according to a feedback signal and inputs the compensation voltage into the driving power supply linear amplification module after passing through the digital-to-analog conversion module to compensate the extension of the piezoelectric ceramics.
Optionally, the diamond ceramic driver further includes a voltage stabilizing power module, where the voltage stabilizing power module provides +5v dc voltage for the micro-processing module and the digital-to-analog conversion module, and provides +120v and-15V dc voltage for the driving power linear amplifying module.
Optionally, the driving power supply linear amplifying module amplifies the control signal of 0V-5V to 0V-100V and then drives the piezoelectric actuating module.
Optionally, the capacitance width measuring module obtains the width variation of the piezoelectric ceramic through the capacitance variation of two sides of the piezoelectric ceramic, and converts the capacitance variation into the width variation by using the following formula:
wherein ΔC is the capacitance variation of the two sides of the piezoelectric ceramic, Δd is the plate spacing variation of the piezoelectric ceramic, and C 0 And C' is the measured capacitance of the two sides of the piezoelectric ceramic.
Optionally, the width variation is converted into the elongation of the piezoelectric actuation module by the following formula:
wherein l 3 For the elongation of the piezoelectric ceramic, l 1 S is the width variation of the piezoelectric ceramic 33 S is the elastic coefficient of the piezoelectric ceramic in the height direction 31 The elastic coefficient of the piezoelectric ceramic in the width or length direction.
Optionally, assuming that the elongation required by the piezoelectric ceramic is L, the compensation voltage U is calculated by the following formula:
L-l 3 ＝S 33 U。
the invention has the following beneficial effects: the capacitance width measuring modules are added to the two sides of the piezoelectric actuation module, the change of the plate spacing of the piezoelectric ceramics of the piezoelectric actuation module is detected, the elongation of the piezoelectric ceramics is further obtained, and the elongation is fed back to the processor to generate compensation voltage, so that the output of the piezoelectric actuation module is compensated, and the displacement output precision is improved.
Drawings
FIG. 1 is a block diagram of a diamond-shaped ceramic driver according to an embodiment of the present invention;
FIG. 2 is a circuit diagram of a 120V voltage stabilizing circuit obtained by connecting 4 paths of 30V direct current voltage stabilizing circuits in series according to the embodiment of the invention;
FIG. 3 is a circuit diagram of a 1-way + -15V voltage stabilizing circuit provided by an embodiment of the invention to obtain a-15V voltage stabilizing circuit;
FIG. 4 is a circuit diagram of a +5V regulated power supply using 7805 according to an embodiment of the present invention;
fig. 5 is a circuit diagram of a linear amplifying module of a driving power supply according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a piezoelectric actuator according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a piezoelectric ceramic case according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of an amplifying mechanism according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of a piezoelectric ceramic inversion effect according to an embodiment of the present invention.
Detailed Description
Specific embodiments of the present invention will be described in more detail below with reference to the drawings. Advantages and features of the invention will become more apparent from the following description and claims. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the invention.
As shown in fig. 1, the present embodiment provides a diamond ceramic driver, which includes a micro-processing module 10, a digital-to-analog conversion module 20, a driving power supply linear amplification module 30 and a piezoelectric actuation module 40 that are sequentially connected, where the micro-processing module 10 inputs a control signal into the driving power supply linear amplification module 30 after passing through the digital-to-analog conversion module 20, the driving power supply linear amplification module 30 amplifies the control signal to drive the piezoelectric actuation module 40 to extend, and further includes a capacitance width measurement module 50, where the capacitance width measurement module 50 is disposed on two sides of the piezoelectric ceramic of the piezoelectric actuation module 40 to measure the width variation of the piezoelectric ceramic, and converts the width variation into the extension of the piezoelectric ceramic to feed back to the micro-processing module 10, and the micro-processing module 10 obtains a compensation voltage according to the feedback signal, and inputs the compensation voltage into the driving power supply linear amplification module 30 after passing through the digital-to-analog conversion module 20, so as to compensate the extension of the piezoelectric ceramic.
Specifically, because of the inverse piezoelectric effect of the piezoelectric ceramic, there is a proportional relationship between the elongation of the piezoelectric ceramic and the input voltage thereof, and because the input voltage driving the piezoelectric ceramic in this embodiment is the linear amplification module 30 of the driving power supply, the output voltage of the micro-processing module 10=the input voltage of the piezoelectric ceramic/the linear amplification factor of the linear amplification module 30 of the driving power supply. In actual operation, assuming that the elongation actually required by the piezoelectric ceramic is L, the micro-processing module 10 is required to send out a control signal, the control signal is converted into an analog signal after passing through the digital-to-analog conversion module 20, the analog signal is amplified by the driving power supply linear amplification module 30, and then the piezoelectric actuation module 40 is driven, and the piezoelectric ceramic outputs displacement under the action of the piezoelectric actuation module 40. The piezoelectric ceramic is elongated and the width of the piezoelectric ceramic is also changed, and a fixed proportional relation exists between the length and the width change, so that the actual elongation of the piezoelectric ceramic can be obtained through the width change amount. Further, the width variation of the piezoelectric ceramic is measured in real time by the capacitance width measuring modules 50 additionally arranged at two sides of the piezoelectric ceramic, and the width variation is converted into the actual elongation of the piezoelectric ceramic and fed back, and the feedback signal is fed back to the micro-processing module 10 after analog-digital conversion. The micro-processing module 10 subtracts the actual elongation of the piezoelectric ceramic from the elongation feedback required by the piezoelectric ceramic to obtain a compensation value, and calculates the compensation value to obtain a compensation voltage, the micro-processing module 10 outputs the compensation voltage, and the driving power supply linear amplification module 30 linearly amplifies the compensation voltage and then drives the piezoelectric ceramic to output compensation displacement.
Further, the diamond-shaped ceramic driver further includes a regulated power supply module 60, where the regulated power supply module 60 provides a dc voltage of +5v for the microprocessor module 10 and the digital-to-analog conversion module 20, and provides dc voltages of +120v and-15V for the driving power supply linear amplification module 30. As shown in fig. 2, 4 paths of 30V dc voltage stabilizing circuits are connected in series to obtain a 120V dc voltage stabilizing circuit, specifically, a transformer converts power frequency 220V ac to 36V dc voltage, after filtering, the three-terminal voltage stabilizing chip LM338 is used to stabilize the 36V dc voltage at 30V, and 4 dc voltage stabilizing circuits are connected in series to obtain the 120V dc voltage stabilizing circuit. As shown in fig. 3, a 1-way ± 15V voltage stabilizing circuit is adopted to obtain a-15V voltage stabilizing circuit, specifically, a transformer converts a power frequency 220V alternating voltage into two 18V alternating voltages with common taps, and a circuit combining a three-terminal voltage stabilizing chip LM7815 and LM7915 is adopted after filtering to obtain a ± 15V direct current voltage stabilizing circuit. As shown in fig. 4, 7805 is used to obtain a +5v dc voltage stabilizing circuit, specifically, the transformer converts the power frequency 220V ac to 9V dc voltage, and the +5v dc voltage stabilizing circuit is obtained through the three-terminal voltage stabilizing tube 7805 after filtering.
Next, the control signal is generated by the micro-processing module, the analog-to-digital conversion module and the filter circuit, wherein the analog-to-digital conversion module adopts a 16-bit analog-to-digital converter, and the resolution of the full scale range of 5V is: (5V)/65536=7.6x10 -5 The offset voltage of pa85 is 0.5mV, and the offset amount of the preset voltage is far less than 0.5mV, so that high-precision amplified voltage can be obtained. As shown in FIG. 5, the driving power supply linear amplification module adopts a precision amplifier PA85 as a power amplifier, when a control voltage of 0-5V is input, an output voltage of 0-120V can be obtained, as shown in FIG. 5, the piezoelectric ceramic can be regarded as a capacitive load, and as shown in FIG. 5, the input current of the piezoelectric ceramic can be increased by adopting two parallel driving circuits of the amplifiers, so that the requirement of high-power output is met.
Further, as shown in fig. 6, the piezoelectric actuator is configured in a cylindrical tubular shell 2 with two open ends and a hollow middle part, the cylindrical tubular shell 2 is provided with an end cover, the end cover comprises an upper cover 3 and a lower cover 4, the whole shell can be tightly sealed, the upper cover 3 is provided with an opening, a displacement output end cover plate 5 of the piezoelectric ceramic can extend out of the shell, a hole 7 is reserved on the upper cover 3, an output displacement rod is reserved and arranged, and a limiting block 6 is arranged between the upper cover 3 and the cover plate 5; the piezoelectric ceramic 1 is characterized in that insulating paint 8 is arranged on two sides of the piezoelectric ceramic 1, an isolation layer 9 is arranged outside the insulating paint 8, meanwhile, the part connected with the shell is also the isolation layer 9, and a capacitor plate 10 is arranged between the two isolation layers 9. The lower end of the piezoelectric ceramic 1 is provided with a lower cover 4, and a hole 11 is reserved on the lower cover 4 for the piezoelectric ceramic power line and the capacitor plate power line to go in and out. When the driving power supply linear amplification module drives the piezoelectric ceramic 1, the piezoelectric ceramic 1 is elongated while the width is narrowed. The piezoelectric ceramic 1 stretches to displace to push the cover plate 5 to move upwards, and is connected with the outside through the hole 7 to output displacement. The limiting block 6 limits the displacement of the cover plate 5 and prevents the cover plate from being excessively stretched. When the piezoelectric ceramic 1 is elongated, the width thereof is narrowed, and the interval between the capacitor plates 10 is changed, and since the capacitance is sensitive to the change of the displacement amount, a minute movement can be measured, and the change of the capacitance can sufficiently reflect the change of the width of the piezoelectric ceramic.
Further, as shown in fig. 7, the piezoelectric ceramic cartridge has a piezoelectric actuator disposed therein, providing an effect of displacement amplification thereto. The piezoelectric ceramic box is a hollow cylinder, and covers are arranged on the upper and lower parts of the piezoelectric ceramic box. The upper cover is provided with a hole for the displacement output of the piezoelectric ceramics, and the bottom cover is provided with a hole for the power line output. The cantilever 13 of the amplifying mechanism fixed on the two walls of the piezoelectric ceramic box is respectively connected with two flexible rods, the two flexible rods are respectively a bottom rod 14 and a top rod 15, the lower part of the bottom rod 14 is connected with the hole 7 through a connecting rod 16, and the upper part of the bottom rod 14 is connected with the top rod 15 through a connecting rod 17; when the piezoelectric ceramic is displaced, the jack 15 outputs the displacement amount through the displacement output rod 18. The piezoelectric actuator is connected with the connecting rod 16 through the hole 7 of the cover plate 5 to output displacement, when the piezoelectric actuator outputs displacement, the connecting rod 16 pushes the bottom rod 14 to move upwards, the bottom rod 14 moves upwards to push the connecting rod 17 to drive the ejector rod 15 to move upwards, and the ejector rod 15 moves upwards to drive the displacement output rod 18 to move upwards, so that displacement output is obtained.
As shown in fig. 8, the amplifying mechanism is generally in a diamond structure, and the piezoelectric ceramic box 12 is connected with the upper connecting plate 19 and the lower connecting plate 20; two sides of the upper connecting plate 19 and the lower connecting plate 20 are provided with diamond connecting rods 21, and the diamond connecting rods 21 are connected with a left connecting block 22 and a right connecting block 23; wherein the left connecting block 22 is fixed, and the right connecting block 23 is a displacement output block. When the piezoelectric ceramic outputs displacement through the piezoelectric ceramic box, the displacement output rod 18 pushes the upper connecting plate 19 to displace upwards, and the lower connecting plate 20 displaces downwards, so that the diamond-shaped structure is deformed. When the relative positions of the upper connecting plate 19 and the lower connecting plate 20 become larger, the diamond-shaped connecting rod 21 drives the two displacement blocks to approach towards the middle. Since the left connection block 22 is fixed, the right connection block 23 is displaced leftward, and a displacement output is obtained.
The piezoelectric ceramic is an elastomer, and is in direct proportion to stress and strain within the elastic limit of Hooke's law, and in the inverse piezoelectric effect, the strain is in direct proportion to the strength of an electric field. Namely:
ΔL＝SU；
wherein DeltaL is the elongation of the piezoelectric ceramic, S is the elastic coefficient, and U is the input voltage of the piezoelectric ceramic.
As shown in fig. 9, in the piezoelectric ceramic inversion effect, since the piezoelectric ceramic stack is polarized in the height direction and the electric field strength is parallel to the height direction, three physical lengths "length, width and height" of the piezoelectric ceramic are set"corresponds to directions 1, 2, 3, respectively. S is S 33 The elastic coefficient of the piezoelectric ceramic in the height direction; s is S 31 ＝S 32 The elastic coefficient of the piezoelectric ceramic in the width and length directions. (after the piezoelectric ceramic is produced, the elastic coefficients in the length and width directions are equal, the negative number is obtained, and the height direction is the extension direction of the piezoelectric ceramic).
When a voltage is applied to the piezoelectric ceramic in the height direction, the piezoelectric ceramic generates an elongation in the height direction:
ΔL＝S 33 U；
and the width variation in the width direction is:
ΔB＝S 31 U。
for a parallel plate capacitance, the capacitance is, without considering the edge effect:
wherein C is 0 Epsilon is the initial capacitance 0 For vacuum dielectric constant, ε r D is the relative dielectric constant of the medium between the polar plates 0 The initial distance between two parallel plates is S, and the coverage area of the polar plate is S.
When the distance between the capacitor plates is d 0 When Δd is reduced, the amount of change in capacitance:
wherein ΔC is the capacitance variation of the capacitor plate, Δd is the plate spacing variation of the capacitor plate, and C 0 For the initial capacitance of the capacitive plate, C' is the measured capacitance of the capacitive plate.
From the above equation, it is necessary to have a hyperbolic relationship between ΔC and Δd so that ΔC and Δd have an approximately linear relationshipThe value is small, because the width change of the piezoelectric ceramic is less than half of the elongation (fromS 33 And S is 31 It can be seen that the total elongation of the piezoelectric ceramic is between ten micrometers and tens of micrometers, so that the width variation of the piezoelectric ceramic is between several micrometers and tens of micrometers, and a better linear relation can be achieved by setting the spacing between the capacitor plates to be millimeter.
Next, due to S 33 And S is 31 The elastic coefficients of the height and the width of the piezoelectric ceramic are respectively, so that the relation between the width variation and the elongation is easy to obtain:
wherein l 3 For the elongation of the piezoelectric ceramic, l 1 Is the width variation of the piezoelectric ceramic.
When the required elongation of the piezoelectric ceramic is L, the microprocessor outputs a control signal, the piezoelectric ceramic is driven to deform after digital-to-analog conversion and linear amplification, and when the plate spacing of the capacitor plate changes delta d due to the change of the width of the piezoelectric ceramic, the capacitance changes delta C; the variation delta d of the plate spacing d can be obtained from delta C, and the width variation l of the piezoelectric ceramic can be obtained 1 The method comprises the steps of carrying out a first treatment on the surface of the From l 1 Obtaining the elongation l of the piezoelectric ceramic 3 Will l 3 Feedback to the micro-processing module, the required elongation L-L 3 To obtain the compensation quantity DeltaL, and calculating the compensation voltage (L-L) from DeltaL 3 ＝S 33 And U), the micro-processing module outputs compensation voltage to compensate the elongation of the piezoelectric ceramic after digital-to-analog conversion and linear amplification.
The foregoing is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Any person skilled in the art will make any equivalent substitution or modification to the technical solution and technical content disclosed in the invention without departing from the scope of the technical solution of the invention, and the technical solution of the invention is not departing from the scope of the invention.
Claims (3)
1. The diamond ceramic driver comprises a micro-processing module, a digital-to-analog conversion module, a driving power supply linear amplification module and a piezoelectric actuation module which are sequentially connected, wherein the micro-processing module inputs a control signal into the driving power supply linear amplification module after passing through the digital-to-analog conversion module, and the driving power supply linear amplification module amplifies the control signal to drive the piezoelectric actuation module to extend.
The capacitance width measuring module obtains the width variation of the piezoelectric ceramic through the capacitance variation of the two sides of the piezoelectric ceramic, and converts the capacitance variation into the width variation by using the following formula:
wherein ΔC is the capacitance variation of the two sides of the piezoelectric ceramic, Δd is the plate spacing variation of the piezoelectric ceramic, and C 0 C' is the measured capacitance of the two sides of the piezoelectric ceramic, d 0 Is the initial distance between the two parallel plates;
the width variation is converted into the elongation of the piezoelectric actuation module by the following formula:
wherein l 3 For the elongation of the piezoelectric ceramic, l 1 S is the width variation of the piezoelectric ceramic 33 Elastic system of the piezoelectric ceramic in height directionNumber S 31 An elastic coefficient of the piezoelectric ceramic in a width or length direction;
assuming that the elongation required by the piezoelectric ceramic is L, the compensation voltage U is calculated by the following formula:
L-l 3 ＝S 33 U。
2. the diamond-shaped ceramic driver of claim 1, further comprising a regulated power supply module providing +5v dc voltage to the microprocessor module and the digital-to-analog conversion module, and providing +120v and-15V dc voltage to the driving power supply linear amplification module.
3. The diamond ceramic driver of claim 1, wherein the driving power supply linear amplification module amplifies the control signal of 0V-5V to 0V-100V and drives the piezoelectric actuation module.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1711313A1 (en) * | 1989-12-19 | 1992-02-07 | Государственный Институт Прикладной Оптики | Piezoelectric drive of small movements |
| CN101599715A (en) * | 2009-06-25 | 2009-12-09 | 天津大学 | Dynamic bipolar drive power supply for piezoelectric ceramics and implementation method |
| KR101319038B1 (en) * | 2012-10-30 | 2013-10-17 | (주)위더스비젼 | Device for compensating displacement of piezoelectric element |
| CN107005178A (en) * | 2014-11-27 | 2017-08-01 | 卡尔蔡司Smt有限责任公司 | Piezoelectric positioning device and the localization method using such piezoelectric positioning device |
| CN107070298A (en) * | 2017-03-13 | 2017-08-18 | 中国科学院自动化研究所 | Piezoelectric Ceramic control system |
| CN207283436U (en) * | 2017-08-23 | 2018-04-27 | 苏州大学 | The drive circuit system of piezo ceramic motion platform |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7312554B2 (en) * | 2004-04-02 | 2007-12-25 | Adaptivenergy, Llc | Piezoelectric devices and methods and circuits for driving same |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1711313A1 (en) * | 1989-12-19 | 1992-02-07 | Государственный Институт Прикладной Оптики | Piezoelectric drive of small movements |
| CN101599715A (en) * | 2009-06-25 | 2009-12-09 | 天津大学 | Dynamic bipolar drive power supply for piezoelectric ceramics and implementation method |
| KR101319038B1 (en) * | 2012-10-30 | 2013-10-17 | (주)위더스비젼 | Device for compensating displacement of piezoelectric element |
| CN107005178A (en) * | 2014-11-27 | 2017-08-01 | 卡尔蔡司Smt有限责任公司 | Piezoelectric positioning device and the localization method using such piezoelectric positioning device |
| CN107070298A (en) * | 2017-03-13 | 2017-08-18 | 中国科学院自动化研究所 | Piezoelectric Ceramic control system |
| CN207283436U (en) * | 2017-08-23 | 2018-04-27 | 苏州大学 | The drive circuit system of piezo ceramic motion platform |
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