CN107070298A - Piezoelectric Ceramic control system - Google Patents
Piezoelectric Ceramic control system Download PDFInfo
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- CN107070298A CN107070298A CN201710144867.8A CN201710144867A CN107070298A CN 107070298 A CN107070298 A CN 107070298A CN 201710144867 A CN201710144867 A CN 201710144867A CN 107070298 A CN107070298 A CN 107070298A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 103
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 110
- 230000003321 amplification Effects 0.000 claims abstract description 109
- 238000006073 displacement reaction Methods 0.000 claims abstract description 53
- 238000005259 measurement Methods 0.000 claims abstract description 52
- 238000006243 chemical reaction Methods 0.000 claims description 57
- 230000001105 regulatory effect Effects 0.000 claims description 40
- 239000003381 stabilizer Substances 0.000 claims description 38
- 230000005611 electricity Effects 0.000 claims description 18
- 230000005284 excitation Effects 0.000 claims description 9
- 238000002955 isolation Methods 0.000 claims description 9
- 239000004575 stone Substances 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 238000002474 experimental method Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000005404 monopole Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention relates to a kind of Piezoelectric Ceramic control system, the control system includes microprocessor, voltage amplification drive circuit and measurement module；Voltage amplification drive circuit is used to carry out power amplification to the drive voltage signal that microprocessor is exported, and the drive voltage signal after power amplification is sent to piezoelectric ceramic actuator；Measurement module is used for the actual displacement signal for gathering piezoelectric ceramic actuator generation, and actual displacement signal is sent to microprocessor；Microprocessor is used for according to actual displacement signal with expecting displacement signal, corrects drive voltage signal.Compared with prior art, a kind of Piezoelectric Ceramic control system that the present invention is provided, tool high-frequency, powerful piezoelectric ceramic actuator driving force.
Description
Technical field
The present invention relates to piezoelectric ceramics control technology field, and in particular to a kind of Piezoelectric Ceramic control system.
Background technology
Piezoelectric ceramic actuator is a kind of accurate executing agency, and it produces micron order or even nanoscale using inverse piezoelectric effect
The displacement of resolution ratio, so as to realize micron order or even nano level high accuracy positioning and servo.Piezoelectric ceramic actuator is mainly
Corresponding displacement is produced according to driving voltage, therefore the accuracy and stability of driving voltage are influence piezoelectric ceramic actuators
The key factor of positioning accuracy.But, current piezoelectric ceramic actuator control device is only applicable to low frequency environments mostly, driving
The power output of voltage is relatively low, it is impossible to carries out high-precision control to voltage ceramic actuator in high frequency environment, and then limits electricity
The scope of application of the ceramic actuator of pressure, is such as carried out high-precision using voltage ceramic actuator to the scanning probe of SEM
During degree control, the high frequency performance of control device outputting drive voltage will directly affect the image quality of SEM.
The content of the invention
It has been the response frequency for solving piezoelectric ceramic actuator control device to solve above mentioned problem of the prior art
Rate is low and the small technical problem of driving voltage power output, the invention provides a kind of Piezoelectric Ceramic control system, to carry
The power output and working frequency of high pressure electroceramics actuator driven voltage.
The technical scheme of Piezoelectric Ceramic control system is in the present invention：
The system includes microprocessor, voltage amplification drive circuit and measurement module；
The input of the voltage amplification drive circuit is connected with the microprocessor, output end and piezoelectric ceramic actuator
Connection；The voltage amplification drive circuit, the drive voltage signal for being exported to the microprocessor carries out power amplification, and
Drive voltage signal after the power amplification is sent to the piezoelectric ceramic actuator；
The input of the measurement module is connected with the piezoelectric ceramic actuator, and output end connects with the microprocessor
Connect；The measurement module, for gathering the actual displacement signal that the piezoelectric ceramic actuator is produced, and by the actual displacement
Signal is sent to microprocessor；
The microprocessor, the driving electricity for exporting the piezoelectric ceramic actuator to the voltage amplification drive circuit
Signal is pressed, and the drive voltage signal is corrected with expecting displacement signal according to the actual displacement signal.
Further, an optimal technical scheme providing of the present invention is：The voltage amplification drive circuit includes error
Amplifying circuit；The error amplifying circuit includes the first operational amplifier and the second operational amplifier；
The positive input terminal of first operational amplifier is connected with the microprocessor, and output end is put with second computing
The positive input terminal connection of big device；The negative input end ground connection of second operational amplifier, a connection terminal of output end and institute
Piezoelectric ceramic actuator connection is stated, a connection terminal is connected with the negative input end of the first operational amplifier；
Wherein, first operational amplifier includes low-noise amplifier, and second operational amplifier includes high power
Amplifier.
Further, an optimal technical scheme providing of the present invention is：The voltage amplification drive circuit also includes phase
Bit compensation circuit；The phase compensating circuit includes the first compensating electric capacity, the second compensating electric capacity and isolation resistance；
Wherein, first compensating electric capacity is connected to the negative defeated of the first operational amplifier in the voltage amplification drive circuit
Enter between end and output end；
Second compensating electric capacity and the positive input for being connected to the second operational amplifier in the voltage amplification drive circuit
End is in parallel with the feedback resistance between output end；
The isolation resistance is connected with the output end of second operational amplifier.
Further, an optimal technical scheme providing of the present invention is：The voltage amplification drive circuit also includes filter
Wave circuit and protection circuit；
The filter circuit includes the electric capacity of an electric capacity or multiple parallel connections respectively, and the filter circuit is put with the voltage
The power supply terminal and/or drive voltage signal input terminal of big drive circuit and/or the connection of drive voltage signal lead-out terminal；
The protection circuit includes voltage-stabiliser tube circuit and diode；
Wherein, the voltage-stabiliser tube circuit is connected to the positive input of the second operational amplifier in the voltage amplification drive circuit
Between end and negative input end；The voltage-stabiliser tube circuit includes two voltage-stabiliser tube branch roads in parallel, and the voltage-stabiliser tube branch road includes one
Individual voltage-stabiliser tube or the voltage-stabiliser tube of multiple series connection, and described two voltage-stabiliser tube branch roads formation current path it is in opposite direction；
The diode is transported with the output end of the first operational amplifier in the voltage amplification drive circuit and second respectively
Calculate the output end connection of amplifier.
Further, an optimal technical scheme providing of the present invention is：The voltage amplification drive circuit also includes connecting
Be connected to the negative input end of the first operational amplifier and the second operational amplifier in the voltage amplification drive circuit output end it
Between feedback compensation circuit；The feedback compensation circuit includes resistance and electric capacity in parallel.
Further, an optimal technical scheme providing of the present invention is：The measurement module should including favour stone full-bridge
Become circuit and pre-amplification circuit；
Wherein, the favour stone full-bridge strain circuit, for gathering the actual displacement that the piezoelectric ceramic actuator is produced
Signal；
The pre-amplification circuit, for being amplified to the actual displacement signal, and by the reality after the amplification
Displacement signal is sent to the microprocessor.
Further, an optimal technical scheme providing of the present invention is：The system also include D/A converter module and
Analog-to-digital conversion module；The D/A converter module is connected between the microprocessor and voltage amplification drive circuit；The mould
Number modular converter is connected between the microprocessor and measurement module；
The D/A converter module includes D/A conversion unit and the first high precision reference source；The D/A conversion unit,
Drive voltage signal for the microprocessor to be exported is converted to analog signal, and by the analog signal output to voltage
Amplification driving circuit；The first high precision reference source, for the D/A conversion unit output reference voltage；
The analog-to-digital conversion module includes AD conversion unit and the second high precision reference source；The modulus changes unit,
Actual displacement signal for the measurement module to be exported is converted to data signal, and the data signal is exported to micro- place
Manage device；The second high precision reference source, for the AD conversion unit output reference voltage.
Further, an optimal technical scheme providing of the present invention is：The system also includes being used for the system
The power module of power supply；The power module includes voltage conversion unit and the first positive and negative regulated power supply unit；
Wherein, the voltage conversion unit, for external power source to be converted into default first DC voltage and second straight
Voltage is flowed, and by first direct voltage output to the voltage amplification drive circuit, by second direct voltage output
To the described first positive and negative regulated power supply unit；First DC voltage is driving voltage letter in the voltage amplification drive circuit
Number DC power supply, second DC voltage be the microprocessor, voltage amplification drive circuit, measurement module, number
The DC power supply of mould modular converter and analog-to-digital conversion module；
The first positive and negative regulated power supply unit, for carrying out polarity of voltage and voltage magnitude to second DC voltage
Adjustment, obtains desired DC voltage, and microprocessor, the voltage of the desired direct voltage output to the system are put
Big drive circuit, D/A converter module and analog-to-digital conversion module.
Further, an optimal technical scheme providing of the present invention is：The system also includes being used for measurement module
The bridge excitation circuit of power supply；The bridge excitation circuit includes the second positive and negative regulated power supply unit, the 3rd high precision reference source
And connector；
The second positive and negative regulated power supply unit is connected with the connector, for carrying out electricity to second DC voltage
Polarity and voltage magnitude adjustment are pressed, desired DC voltage is obtained, and by the desired direct voltage output to the connection
Device；
The 3rd high precision reference source is connected with the connector, for the connector output reference voltage；
The connector is connected with the measurement module, for the desired DC voltage to be transferred into measurement module.
Further, an optimal technical scheme providing of the present invention is：The system also includes display module；It is described aobvious
Show that module is connected with microprocessor, the real-time displacement information for showing piezoelectric ceramic actuator.
Compared with prior art, above-mentioned technical proposal at least has the advantages that：
The Piezoelectric Ceramic control system that the present invention is provided, its voltage amplification drive circuit can be exported to microprocessor
Piezoelectric ceramic actuator drive signal carry out power amplification so that piezoelectric ceramic actuator can the drive signal driving under
High-frequency drive is realized to piezoelectric ceramics；Meanwhile, the displacement information of piezoelectric ceramic actuator is fed back to microprocessor by measurement module,
Microprocessor constantly corrects drive signal according to the feedback signal of measurement module, realizes and carries out high-frequency high-precision control to piezoelectric ceramics
System.
Brief description of the drawings
Fig. 1 is a kind of structural representation of Piezoelectric Ceramic control system in the embodiment of the present invention；
Fig. 2 is the circuit theory diagrams of the first positive and negative regulated power supply unit in the embodiment of the present invention；
Fig. 3 is the circuit theory diagrams of D/A converter module in the embodiment of the present invention；
Fig. 4 is the circuit theory diagrams of analog-to-digital conversion module in the embodiment of the present invention；
Fig. 5 is the structural representation of voltage amplification drive circuit in the embodiment of the present invention；
Fig. 6 is the schematic diagram of voltage amplification drive circuit in the embodiment of the present invention；
Fig. 7 is the schematic diagram of bridge excitation circuit in the embodiment of the present invention；
Fig. 8 is direct current signal average schematic diagram in the embodiment of the present invention；
Fig. 9 is peak-to-peak value ripple schematic diagram in the embodiment of the present invention；
Figure 10 is mesohigh of embodiment of the present invention sinusoidal signal frequency response schematic diagram；
Figure 11 is mesolow of embodiment of the present invention sinusoidal signal frequency response schematic diagram；
Figure 12 is the displacement output schematic diagram of piezoelectric ceramic actuator in the embodiment of the present invention；
Wherein, 11：Microprocessor；12：Voltage amplification drive circuit；13：Measurement module；14：Piezoelectric ceramic actuator；
15：D/A converter module；16：Analog-to-digital conversion module；17：Power module；18：Display module；21：First operational amplifier；22：
Second operational amplifier；31：The average experiment curv of direct-flow input signal；32：The average experiment curv of direct-flow output signal；
33：The peak-to-peak value ripple experiment curv of direct-flow input signal；34：The peak-to-peak value ripple experiment curv of direct-flow output signal；35：It is high
The frequency response curve of pressure input sinusoidal signal；36：The frequency response curve of High voltage output sinusoidal signal；37：Low pressure is inputted just
The frequency response curve of string signal；38：Low pressure exports the frequency response curve of sinusoidal signal.
Embodiment
The preferred embodiment of the present invention described with reference to the accompanying drawings.It will be apparent to a skilled person that this
A little embodiments are used only for explaining the technical principle of the present invention, it is not intended that limit the scope of the invention.
Piezoelectric ceramics is as capacitive load, when the control device response frequency of piezoelectric ceramic actuator is relatively low, control dress
The driving voltage power for putting output is relatively low, is accurately driven so as to limit piezoelectric ceramic actuator and carry out high frequency to piezoelectric ceramics
It is dynamic.The Piezoelectric Ceramic control system that the present invention is provided is closed-loop feedback control system, first by the drive after power amplification
Then dynamic signal output gathers displacement letter of the piezoelectric ceramic actuator under drive signal effect to piezoelectric ceramic actuator
Breath, is finally modified according to upper displacement information and desired displacement information to drive signal, enabling in height driving electricity
Depress and piezoelectric ceramic actuator is driven with higher frequency.
A kind of Piezoelectric Ceramic control system provided in an embodiment of the present invention is illustrated below in conjunction with the accompanying drawings.
Fig. 1 illustrates the structure of Piezoelectric Ceramic control system in the present embodiment, as illustrated, the present embodiment
Middle Piezoelectric Ceramic control system can include microprocessor 11, voltage amplification drive circuit 12 and measurement module 13.
Wherein, the input of voltage amplification drive circuit 12 is connected with microprocessor 11, and output end is performed with piezoelectric ceramics
Device is connected.Voltage amplification drive circuit 12 can be used for carrying out the drive voltage signal that microprocessor 11 is exported in the present embodiment
Power amplification, and the drive voltage signal after power amplification is sent to piezoelectric ceramic actuator.
The input of measurement module 13 is connected with piezoelectric ceramic actuator, and output end is connected with microprocessor 11.This implementation
Measurement module 13 can be used for gathering the actual displacement signal that piezoelectric ceramic actuator is produced in example, and actual displacement signal is sent out
Deliver to microprocessor 11.
Microprocessor 11 can be used for the driving voltage letter that piezoelectric ceramic actuator is exported to voltage amplification drive circuit 12
Number, and correct drive voltage signal with expecting displacement signal according to actual displacement signal.
Voltage amplification drive circuit 12 can drive to the piezoelectric ceramic actuator that microprocessor 11 is exported in the present embodiment
Signal carries out power amplification so that piezoelectric ceramic actuator can realize that high frequency drives to piezoelectric ceramics under drive signal driving
It is dynamic；Meanwhile, the displacement information of piezoelectric ceramic actuator is fed back to microprocessor 11 by measurement module 13, and microprocessor 11 is according to survey
The feedback signal of amount module 13 constantly corrects drive signal, realizes and carries out high-frequency high-precision control to piezoelectric ceramics.
Further, voltage amplification drive circuit 12 can include error amplifying circuit in the present embodiment, be specially：
Fig. 5 illustrates the structure of error amplifying circuit in the present embodiment, as illustrated, error is put in the present embodiment
Big circuit can include the first operational amplifier 21 and the second operational amplifier 22.Wherein, the first operational amplifier 21 is just defeated
Enter end to be connected with microprocessor 11, output end is connected with the positive input terminal of the second operational amplifier 22；Second operational amplifier 22
Negative input end ground connection, a connection terminal of output end is connected with piezoelectric ceramic actuator, and a connection terminal and first is transported
Calculate the negative input end connection of amplifier 21.Further, the company according to the first operational amplifier 21 and the second operational amplifier 22
Relation is connect, shown in the multiplication factor such as following formula (1) that error amplifying circuit shown in Fig. 5 can be obtained：
Vout/Vin=(1+R2/R1) (1)
Wherein, VoutFor the input voltage signal of the first operational amplifier 21, VinBelieve for the output of the second operational amplifier 22
Number, R1 is the equivalent resistance between the negative input end and ground potential of the first operational amplifier 21, and R2 is the first operational amplifier 21
The second operational amplifier of negative input end 22 output end between equivalent resistance.
The composite construction of the first operational amplifier 21 and the second operational amplifier 22 is error amplifying type electricity in the present embodiment
Road, wherein, the first operational amplifier 21 can use high-precision low-noise amplifier to reduce the first operational amplifier 21
Input offset voltage, the second operational amplifier 22 can use high pressure, such as powerful operational amplifier, high power amplifier,
To reduce the ripple of drive voltage signal and improve the frequency response range of drive voltage signal.
Further, voltage amplification drive circuit 12 can also include phase compensating circuit in the present embodiment, be specially：This
Phase compensating circuit can include the first compensating electric capacity, the second compensating electric capacity and isolation resistance in embodiment.
Wherein, the first compensating electric capacity is connected to the negative input end of the first operational amplifier 21 in voltage amplification drive circuit 12
Between the output end of the first operational amplifier 21；Second compensating electric capacity is with being connected to the second fortune in voltage amplification drive circuit 12
The positive input terminal for calculating amplifier 22 is in parallel with the feedback resistance between the output end of the second operational amplifier 22；Isolation resistance and
The output end connection of two operational amplifiers 22.
, can be in voltage amplification drive circuit 12 by setting the first compensating electric capacity and the second compensating electric capacity in the present embodiment
Inductive element capacitive compensation is carried out when causing phase deviation, improve circuit voltage characteristic；By setting isolation resistance right
The output voltage of second operational amplifier 22 is degraded, it is to avoid occur short trouble.
Further, voltage amplification drive circuit 12 can also include filter circuit and protection circuit, tool in the present embodiment
Body is：
Filter circuit can include the electric capacity of an electric capacity or multiple parallel connections respectively, filter circuit and voltage in the present embodiment
The power supply terminal and/or drive voltage signal input terminal and/or drive voltage signal lead-out terminal of amplification driving circuit 12 connect
Connect；
Protection circuit can include voltage-stabiliser tube circuit and diode in the present embodiment.
Wherein, voltage-stabiliser tube circuit be connected in voltage amplification drive circuit 12 positive input terminal of second operational amplifier 22 with
Between the negative input end of second operational amplifier 22.Voltage-stabiliser tube circuit can include two voltage-stabiliser tube branch in parallel in the present embodiment
Road, each voltage-stabiliser tube branch road can include a voltage-stabiliser tube, can also include the voltage-stabiliser tube of multiple series connection.Meanwhile, two parallel connections
The formation of voltage-stabiliser tube branch road current path it is in opposite direction, for example, when each voltage-stabiliser tube branch road includes a voltage-stabiliser tube respectively,
Two voltage-stabiliser tube reverse parallel connections.By setting voltage-stabiliser tube circuit between the input of the second operational amplifier 22 in the present embodiment,
It can prevent its positive input terminal and negative input end from causing damage when bearing big voltge surge.
Diode is put with the output end of the first operational amplifier 21 and the second computing in voltage amplification drive circuit 12 respectively
Set diode voltage can be prevented anti-by the output end in operational amplifier in the output end connection of big device 21, the present embodiment
To or voltage it is excessive the problems such as cause operational amplifier to damage.
Further, voltage amplification drive circuit 12 can also include feedback compensation circuit in the present embodiment, be specially：This
Feedback compensation circuit is connected to the negative input end of the first operational amplifier 21 and in voltage amplification drive circuit 12 in embodiment
Between the output end of two operational amplifiers 22, while resistance and electric capacity in parallel can be included, resistive feedback circuit all the way is formed
Capacitive feedback circuit all the way, to carry out duplex path feedback compensation to the first operational amplifier 21.
It is preferred that, a kind of optimal technical scheme of pressure amplification driving circuit 12 is present embodiments provided, below in conjunction with the accompanying drawings
It is specifically described.
Fig. 6 illustrates voltage amplification driving circuit structure in the present embodiment, as illustrated, first in the present embodiment
Operational amplifier is using high accuracy, the operational amplifier OPA2227 of low noise, and the second operational amplifier is using high pressure, high-power
Operational amplifier PA96.
Operational amplifier OPA2227 positive input terminal InA+ is the drive signal receiving terminal that microprocessor is exported, and computing is put
A big device OPA2227 negative input end InB- connection terminal is grounded by resistance R1, and another connection terminal is put with computing
Big device PA96 output end Out D connections.Operational amplifier OPA2227 output end Out B and operational amplifier PA96 is just
Input IN+ connections.
Wherein, between feedback compensation circuit connection and negative input end InB- and output end Out D, including resistance R8 in parallel
With electric capacity C14.First compensating electric capacity C3 be connected to operational amplifier OPA2227 negative input end InB- and output end Out B it
Between；Second compensating electric capacity C8 is in parallel with resistance R3, resistance R3 connections and operational amplifier PA96 negative input end IN- and output end
Between Out C；Isolation resistance R4 is connected between operational amplifier PA96 output end Out C and Out D, isolation resistance R5 with
Output end Out D connections.
Wherein, the present embodiment includes multiple filter circuits, is specifically：The filter circuit of electric capacity C1 and C2 parallel connection composition,
The filter circuit of electric capacity C4 and C5 parallel connection composition, the filter circuit of electric capacity C6 and C7 parallel connection composition, electric capacity C9 and C10 parallel connection are constituted
Filter circuit, electric capacity C11 and C12 parallel connection constitute filter circuit, and electric capacity C15 and C16 parallel connection constitute filter circuit.
Wherein, voltage-stabiliser tube circuit includes the voltage-stabiliser tube circuit being made up of voltage-stabiliser tube D3, D4, D5 and D6 in the present embodiment.Two
Pole pipe includes diode D1, D2, D7 and D8.
The DC power supply of drive voltage signal is 150V in voltage amplification drive circuit 12 in the present embodiment, using fortune
Amplifier OPA2227 and operational amplifier PA96 is calculated, 0V~10V voltage signal can be enlarged into 0V~110V power electricity
Pressure, is used as the driving voltage of piezoelectric ceramic actuator.
Further, measurement module 13 can include following structures in the present embodiment, be specially：
Measurement module 13 can include favour stone full-bridge strain circuit and pre-amplification circuit in the present embodiment.Wherein, favour
Stone full-bridge strain circuit can be used for gathering the displacement information that piezoelectric ceramic actuator is produced, and the displacement information standard is changed into electricity
Signal, i.e. actual displacement signal are pressed, and the voltage signal is sent to pre-amplification circuit.Pre-amplification circuit can be used for pair
Actual displacement signal is amplified, and the actual displacement signal after amplification is sent to microprocessor 11.It is preposition in the present embodiment
Amplifier can use amplifier AMP002, and the displacement signal that favour stone full-bridge strain circuit is gathered is amplified.
Further, Piezoelectric Ceramic control system can also include D/A converter module 15 and modulus in the present embodiment
Modular converter 16, be specially：
1st, digital-to-analogue conversion mould
As shown in figure 1, D/A converter module 15 is connected to microprocessor 11 and voltage amplification drive circuit in the present embodiment
Between 12, it is possible to including D/A conversion unit and the first high precision reference source.Wherein, can be used for will be micro- for D/A conversion unit
The drive voltage signal that processor 11 is exported is converted to analog signal, and by analog signal output to voltage amplification drive circuit
12；First high precision reference source can be used for exporting high-precision reference voltage to D/A conversion unit so that digital-to-analogue conversion list
Member can produce accurate analog voltage.
It is preferred that, a kind of optimal technical scheme of digital-to-analogue conversion mould 15 is present embodiments provided, below in conjunction with the accompanying drawings to it
It is specifically described.
Fig. 3 illustrates the circuit theory of D/A converter module in the present embodiment, as illustrated, number in the present embodiment
Mould converting unit uses digital analog converter AD669, and it is 16 digit weighted-voltage D/A converters, can input parallel and with flexible monopole
Property and double-polarity control function.First high precision reference source uses benchmark source chip AD688, and it can be to digital analog converter
AD669 outputs ± 10V reference voltage, and have the advantages that error is small, it is low to drift about.
As shown in figure 3, also including multiple filter circuits in the present embodiment, it is specifically：What electric capacity C18 and C19 parallel connection were constituted
Filter circuit, electric capacity C23 and the C24 filter circuit in parallel constituted, electric capacity that filter circuit, electric capacity C20 and C21 parallel connection are constituted
The filter circuit that C25 and C26 parallel connections are constituted, and the filter circuit that electric capacity C27 and C28 parallel connection are constituted.Wherein, in each filter circuit
One electric capacity uses 0.1uF polarity free capacitor, and another electric capacity uses 10uF polarity free capacitor.In the present embodiment by
Digital analog converter AD669 and benchmark source chip AD688 energization pins set filter circuit, it is ensured that D/A converter module 15
Accurate acquisition data signal, improves the accuracy of signal conversion.
, can by setting digital analog converter 15 between microprocessor 11 and voltage amplification drive circuit 12 in the present embodiment
Analog signal is converted to the data signal for exporting microprocessor 11 exactly, so as to 12 pairs of moulds of voltage amplification drive circuit
Intend signal and carry out power amplification.
2nd, analog-to-digital conversion module
As shown in figure 1, analog-to-digital conversion module 16 is connected between microprocessor 11 and measurement module 13 in the present embodiment, and
AD conversion unit and the second high precision reference source can be included.Wherein, modulus changes unit and can be used for measurement module 13
The actual displacement signal of output is converted to data signal, and data signal is exported to microprocessor 11；Second high precision reference
Source can be used for exporting high-precision reference voltage to AD conversion unit so that AD conversion unit can be actual with accurate acquisition
The analog signal of displacement signal.
It is preferred that, a kind of optimal technical scheme of analog-to-digital conversion mould 16 is present embodiments provided, below in conjunction with the accompanying drawings to it
It is specifically described.
Fig. 4 illustrates the circuit of analog-to-digital conversion module in the present embodiment, as illustrated, modulus turns in the present embodiment
Analog-digital converter AD7693 can be used by changing unit, and it is 16, gradual approaching A/D converter, and throughput rate can reach
500kSPS.Second high precision reference source can use benchmark source chip ADR421, and it can be provided to analog-digital converter AD7693
High accuracy, the 2.50V of low noise reference voltage.
As shown in figure 4, also including multiple filter circuits in the present embodiment, it is specifically：The filter that electric capacity C1 and C2 parallel connection are constituted
Wave circuit, electric capacity C14 and C15 parallel connection constitute filter circuit, electric capacity C16 and C17 parallel connection constitute filter circuit, electric capacity C4 and
The filter circuit that C5 parallel connections are constituted, and the filter circuit that electric capacity C7 and C8 parallel connection are constituted.Wherein, an electric capacity in each filter circuit
Using 0.1uF polarity free capacitor, another electric capacity uses 10uF polarity free capacitor.By in analog-to-digital conversion in the present embodiment
Device AD7693 and benchmark source chip ADR421 energization pins set filter circuit, it is ensured that analog-to-digital conversion module 16 is accurately adopted
Collect analog signal, improve the accuracy of signal conversion.
By setting D/A converter module 16 between microprocessor 11 and measurement module 13 in the present embodiment, it will can survey
The analog signal that amount module 13 is exported is converted to data signal exactly, is held so that microprocessor 11 calculates piezoelectric ceramics exactly
The displacement error of row device, and then correct the driving voltage of electroceramics actuator.
Further, Piezoelectric Ceramic control system can also include power module 17 in the present embodiment, be specially：
Power module 17 can include voltage conversion unit and the first positive and negative regulated power supply unit, such as Fig. 1 in the present embodiment
Shown, power module 17 can be used for powering to Piezoelectric Ceramic control system.
1st, voltage conversion unit
Voltage conversion unit can be used for external power source being converted to default first DC voltage and in the present embodiment
Two DC voltages, and by the first direct voltage output to voltage amplification drive circuit, by the second direct voltage output to first just
Negative regulated power supply unit.
Wherein, the first DC voltage is the DC power supply of drive voltage signal in voltage amplification drive circuit 12, the
Two DC voltages are microprocessor 11, voltage amplification drive circuit 12, measurement module 13, D/A converter module 15 and analog-to-digital conversion
The DC power supply of module 16.The first DC voltage can be set as ± 24V in the present embodiment, and the second DC voltage can be set
It is set to 150V, 0~10V voltage signal can be enlarged into 0~110V power voltage by voltage amplification drive circuit 11, as
The driving voltage of piezoelectric ceramic actuator.
2nd, the first positive and negative regulated power supply unit
The first positive and negative regulated power supply unit can be used for carrying out polarity of voltage and electricity to the second DC voltage in the present embodiment
Range-adjusting is pressed, desired DC voltage is obtained, and desired direct voltage output to microprocessor 11, voltage amplification are driven
Circuit 12, D/A converter module 15 and analog-to-digital conversion module 16, turn to microprocessor 11, voltage amplification drive circuit 12, digital-to-analogue
Each element is powered in mold changing block 15 and analog-to-digital conversion module 16.
Fig. 2 illustrates the circuit theory of the first positive and negative regulated power supply unit in the present embodiment, as illustrated, this reality
Three end direct current stabilizer LM317, three end direct current stabilizer LM337, electricity can be included by applying the first positive and negative regulated power supply unit in example
Position device R2, potentiometer R3 and filter circuit.Wherein, three end direct current stabilizer LM337 output voltage can be 1.2V~3.7V,
Three end direct current stabilizer LM337 output voltages can be -1.2V~-3.7V.Can be by adjusting potentiometer R2 in the present embodiment
With potentiometer R3 so that the first positive and negative regulated power supply unit by direct-current input power supplying be converted to opposed polarity, different amplitude it is straight
Flow voltage-stabilized power supply.
As shown in Fig. 3,4 and 6, when the second DC voltage is ± 24V, potentiometer R2 and potentiometer R3 can be adjusted, will
± 24V direct-current input power supplyings are converted to five D.C. regulated power supplies of+3.3V ,+5V, -5V ,+15V, -15V.Wherein ,+5V ,+
15V, -15V can be exported to D/A converter module 15, and its each element is powered；+ 3.3V ,+5V, -5V ,+15V can be with defeated
Go out to analog-to-digital conversion module 16, its each element is powered；+ 15V, -15V can be exported to voltage amplification drive circuit 12,
Its each element is powered；+ 5V ,+3.3V can be exported to microprocessor, and microprocessor 11 is powered.
As shown in Fig. 2 the filter circuit of the first positive and negative regulated power supply unit input can include electric capacity in the present embodiment
The filter circuit that C1 and C3 parallel connections are constituted, and the filter circuit that electric capacity C7 and C9 parallel connection are constituted.An electric capacity in each filter circuit
Using 0.1uF polarity free capacitor, another electric capacity uses 470uF polarity free capacitor.In the present embodiment by first just
Negative regulated power supply unit input sets filter circuit, it is ensured that what the acquisition of the first positive and negative regulated power supply unit was more stablized
DC voltage.
As shown in Fig. 2 the filter circuit of the first positive and negative regulated power supply unit output end can include electric capacity in the present embodiment
The filter circuit that C4 and C2 parallel connections are constituted, and the filter circuit that electric capacity C10 and C8 parallel connection are constituted.An electric capacity in each filter circuit
Using 0.1uF polarity free capacitor, another electric capacity uses 220uF polarity free capacitor.In the present embodiment by first just
Negative regulated power supply unit output end sets filter circuit, it is ensured that what the output of the first positive and negative regulated power supply unit was more stablized
DC voltage.
It is preferred that, the present embodiment additionally provides a kind of bridge excitation circuit for being used to power to measurement module 13, the electric bridge
Exciting circuit can be into measurement module favour stone full-bridge strain circuit driving voltage is provided, and supplied to pre-amplification circuit
Electricity.A kind of bridge excitation circuit in the present embodiment is specifically described below in conjunction with the accompanying drawings.
Fig. 7 illustrates the principle of bridge excitation circuit in the present embodiment, as illustrated, electric bridge swashs in the present embodiment
The second positive and negative regulated power supply unit, the 3rd high precision reference source and connector can be included by encouraging circuit.
Wherein, the second positive and negative regulated power supply unit is connected with connector, can be used for carrying out voltage to the second DC voltage
Polarity and voltage magnitude adjustment, obtain desired DC voltage, and desired direct voltage output to connector and the 3rd is high
Precision reference source.As shown in fig. 7, the second positive and negative regulated power supply unit can include three end direct current stabilizers in the present embodiment
LM317, three end direct current stabilizer LM337, potentiometer R3, potentiometer R5 and filter circuit.Wherein, three end direct current stabilizer
LM337 output voltage can be 1.2V~3.7V, three end direct current stabilizer LM337 output voltages can for -1.2V~-
3.7V.Can be by adjusting potentiometer R3 and potentiometer R5 in the present embodiment so that the second positive and negative regulated power supply unit is by direct current
Input power is converted to opposed polarity, the D.C. regulated power supply of different amplitudes.
As shown in fig. 7, the filter circuit of the second positive and negative regulated power supply unit input can include electric capacity in the present embodiment
The filter circuit that C3 and C5 parallel connections are constituted, and the filter circuit that electric capacity C10 and C12 parallel connection are constituted.An electricity in each filter circuit
Hold the polarity free capacitor using 0.1uF, another electric capacity uses 470uF polarity free capacitor.By second in the present embodiment
Positive and negative regulated power supply unit input sets filter circuit, it is ensured that the acquisition of the second positive and negative regulated power supply unit is more stablized
DC voltage.
As shown in fig. 7, the filter circuit of the second positive and negative regulated power supply unit output end can include electric capacity in the present embodiment
The filter circuit that C6 and C4 parallel connections are constituted, and the filter circuit that electric capacity C13 and C11 parallel connection are constituted.An electricity in each filter circuit
Hold the polarity free capacitor using 0.1uF, another electric capacity uses 220uF polarity free capacitor.By second in the present embodiment
Positive and negative regulated power supply unit output end sets filter circuit, it is ensured that the output of the second positive and negative regulated power supply unit is more stablized
DC voltage.
3rd high precision reference source is connected with connector, can be used for connector output reference voltage.When the second direct current
When voltage is ± 24V, potentiometer R3 can be adjusted and potentiometer R5, general ± 24V direct-current input power supplying is converted to+15V, -15V two
Individual D.C. regulated power supply.Wherein ,+15V can be exported to the 3rd high precision reference source, its each element is powered, the 3rd is high
Precision reference source exports+2.5V reference voltage to connector.Wherein, the 3rd high precision reference source uses benchmark in the present embodiment
Source chip ADR421.
Connector is connected with measurement module, can be used for desired DC voltage being transferred to measurement module.Wherein, expect
DC voltage can be obtained by adjusting potentiometer R3 and potentiometer R5.For example, as shown in fig. 7, by adjusting potentiometer R3
With potentiometer R5, ± 24V direct-current input power supplyings can be converted to two D.C. regulated power supplies of+15V, -15V, and output it
To the pin 2 and pin 3 of connector.
Measurement module 13 is individually powered by bridge excitation circuit in the present embodiment, it is possible to reduce measurement module 13
Influenced each other with other modules in Piezoelectric Ceramic control system, improve the power supply reliability of measurement module 13, Jin Erti
The accuracy of high measurement result.
Further, Piezoelectric Ceramic control system can also include display module 18 in the present embodiment, be specially：Such as
Shown in Fig. 1, display module 18 is connected with microprocessor 11, is displayed for the real-time displacement information of piezoelectric ceramic actuator.
Display module 18 uses PC in the present embodiment.
Below by taking the preferred embodiment that the present invention is provided as an example, and with reference to accompanying drawing, to Piezoelectric Ceramic control
System carries out compliance test result.
As shown in figure 1, Piezoelectric Ceramic control system includes microprocessor 11, voltage amplification driving electricity in the present embodiment
Road 12, measurement module 13, piezoelectric ceramic actuator 14, D/A converter module 15, analog-to-digital conversion module 16, power module 17 and aobvious
Show module 18.
Wherein, microprocessor 11 includes digital signal controller STM32F407, and passes through the digital signal controller
STM32F407 has 32 ARM to analog-to-digital conversion module outputting drive voltage signal, digital signal controller STM32F407
Cortex-M4 kernels, working frequency highest can reach 168MHz.Piezoelectric ceramic actuator 14 is what Thorlabs companies produced
Piezoelectric ceramic actuator PZS001, the piezoelectric ceramic actuator PZS001 highest driving voltage are 150V, and maximum displacement is
17.4um。
Voltage amplification drive circuit 12 includes the voltage amplification driving circuit structure shown in Fig. 6；Measurement module 13 can be adopted
With the sensor that piezoelectric ceramic actuator PZS001 is integrated, it would however also be possible to employ the measurement module that above-mentioned technical proposal is proposed；Digital-to-analogue
Modular converter 15 includes the D/A converter module structure shown in Fig. 3；Analog-to-digital conversion module 16 includes the digital-to-analogue conversion mould shown in Fig. 4
Block structure；Power module 17 includes the first positive and negative regulated power supply unit shown in Fig. 2, while can also include the electricity shown in Fig. 7
Bridge exciting circuit；Display module 18 includes LCDs.
External power source includes two integrated linear power supplies in the present embodiment：One integrated linear power supply is used for voltage
Amplification driving circuit provides the first DC voltage, i.e., as the DC power supply of drive voltage signal；Another Integral wire
Property power supply be used to provide the second DC voltage to the first positive and negative regulated power supply unit, i.e., as microprocessor 11, voltage amplification drive
Move the DC power supply of circuit 12, measurement module 13, D/A converter module 15 and analog-to-digital conversion module 16.
The course of work of Piezoelectric Ceramic control system is in the present embodiment：
1st, control power module 17 carries out Power convert to external power source, to system power supply.
2nd, control microprocessor 11 is to the output voltage drive signal of D/A converter module 15, and D/A converter module 15 is by the electricity
Pressure drive signal is converted to analog signal by data signal, and by the analog signal output to voltage amplification drive circuit 12.
3rd, the voltage drive signals that pressure amplification driving circuit 12 logarithmic mode modular converter 15 is exported carry out power amplification, and will
Drive voltage signal after power amplification is exported to piezoelectric ceramic actuator 14.Piezoelectric ceramic actuator 14 is after the power amplification
Drive voltage signal in the presence of act, produce corresponding displacement.
4th, the displacement information that the collection of measurement module 13 piezoelectric ceramic actuator 14 is produced, and the displacement information is converted into electricity
Press signal, i.e. actual displacement signal, output to analog-to-digital conversion module 16.
5th, the actual displacement signal that analog-to-digital conversion module 16 exports measurement module 13 is converted to digital letter by analog signal
Number, and the data signal is exported to microprocessor 11.
6th, microprocessor 11 calculates the signal of the output of analog-to-digital conversion module 16 and the deviation of its desired value, is repaiied according to the deviation
The positive output voltage drive signal of D/A converter module 15, so that the execution for further adjusting piezoelectric ceramic actuator 14 is moved
Make.
DC test and alternating-current measurement are carried out to Piezoelectric Ceramic control system respectively in the present embodiment, specifically included：
1st, DC test
Control microprocessor to export 0V~10V DC driven signal, electricity is driven through voltage amplification using oscilloscope measurement
The drive voltage signal of the reality output of road 12.
Fig. 8 illustrates the average of drive voltage signal in the present embodiment, and Fig. 9 is illustrated in the present embodiment
The peak-to-peak value ripple of drive voltage signal.Wherein, curve 31 is that the average experiment curv of direct-flow input signal, curve 32 are direct current
The average experiment curv of output signal, the peak-to-peak value ripple experiment curv that curve 33 is direct-flow input signal, curve 34 is direct current
The peak-to-peak value ripple experiment curv of output signal.As shown in figure 8, the average of direct-flow input signal is 10V, direct-flow output signal
Average is 113V.As shown in figure 9, the peak-to-peak value ripple of drive voltage signal is respectively less than 10mV, Piezoelectric Ceramic control system
System is with stabilization, accurately driving force.
2nd, alternating-current measurement
(1) it is the sine wave signal that 110V, bias voltage are 55V to control microprocessor to export peak-to-peak value, utilizes oscillograph
Measure the drive voltage signal through the reality output of voltage amplification drive circuit 12.
Figure 10 illustrates the present embodiment mesohigh sinusoidal signal frequency response curve, wherein, curve 35 is high pressure
Input the frequency response curve of sinusoidal signal, each time interval 10us of its abscissa, each time interval 4V of ordinate；
Curve 36 be High voltage output sinusoidal signal frequency response curve, each time interval 10us of its abscissa, ordinate it is every
Individual time interval 1V.As shown in Figure 10, drive voltage signal frequency can reach 1.2kKz in the present embodiment.
(2) it is the sine wave signal that 10V, bias voltage are 5V to control microprocessor to export peak-to-peak value, is surveyed using oscillograph
Measure the drive voltage signal through the reality output of voltage amplification drive circuit 12.
Figure 11 illustrates the present embodiment mesolow sinusoidal signal frequency response curve, wherein, curve 37 is low pressure
Input the frequency response curve of sinusoidal signal, each time interval 4us of its abscissa, each time interval of ordinate
0.4V；Curve 38 is the frequency response curve that low pressure exports sinusoidal signal, each time interval 4us of its abscissa, ordinate
Each time interval 0.1V.As shown in Figure 10, drive voltage signal frequency can reach 3kKz in the present embodiment.
Figure 12 illustrates the displacement curve of piezoelectric ceramic actuator in the present embodiment, wherein, abscissa is driving
Voltage, ordinate is displacement.As illustrated, piezoelectric ceramic actuator is exported in Piezoelectric Ceramic control system in the present embodiment
Drive voltage signal effect, its produce displacement there is hysteresis.In summary, Piezoelectric Ceramic control system tool is high
Frequency, powerful driving force.
It will be understood by those skilled in the art that can adaptively be changed to the module in the equipment in embodiment
And they are arranged in one or more equipment different from the embodiment.Can the module or unit in embodiment or
Component is combined into a module or unit or component, and can be divided into multiple submodule or subelement or subgroup in addition
Part.In addition at least some in such feature and/or process or unit exclude each other, any combinations can be used
To all features disclosed in this specification (including adjoint claim, summary and accompanying drawing) and such disclosed any side
All processes or unit of method or equipment are combined.Unless expressly stated otherwise, this specification (including adjoint right will
Ask, make a summary and accompanying drawing) disclosed in each feature can be by offer is identical, equivalent or the alternative features of similar purpose are replaced.
Although in addition, it will be appreciated by those of skill in the art that some embodiments described herein include other embodiments
In included some features rather than further feature, but the combination of the feature of be the same as Example does not mean in of the invention
Within the scope of and form different embodiments.For example, in the following claims, times of embodiment claimed
One of meaning mode can be used in any combination.
It should be noted that the present invention will be described rather than limits the invention for above-described embodiment, and ability
Field technique personnel can design alternative embodiment without departing from the scope of the appended claims.In the claims,
Any reference symbol between bracket should not be configured to limitations on claims.Word "comprising" is not excluded the presence of not
Element or step listed in the claims.Word "a" or "an" before element does not exclude the presence of multiple such
Element.The present invention can be by means of including the hardware of some different elements and being realized by means of properly programmed PC.
If in the unit claim for listing equipment for drying, several in these devices can be come specific by same hardware branch
Embody.The use of word first, second, and third does not indicate that any order.These words can be construed to title.
So far, combined preferred embodiment shown in the drawings describes technical scheme, still, this area
Technical staff is it is easily understood that protection scope of the present invention is expressly not limited to these embodiments.Without departing from this
On the premise of the principle of invention, those skilled in the art can make equivalent change or replacement to correlation technique feature, these
Technical scheme after changing or replacing it is fallen within protection scope of the present invention.
Claims (10)
1. a kind of Piezoelectric Ceramic control system, it is characterised in that the system includes microprocessor, voltage amplification driving electricity
Road and measurement module；
The input of the voltage amplification drive circuit is connected with the microprocessor, and output end connects with piezoelectric ceramic actuator
Connect；The voltage amplification drive circuit, the drive voltage signal for being exported to the microprocessor carries out power amplification, and will
Drive voltage signal after the power amplification is sent to the piezoelectric ceramic actuator；
The input of the measurement module is connected with the piezoelectric ceramic actuator, and output end is connected with the microprocessor；Institute
Measurement module is stated, for gathering the actual displacement signal that the piezoelectric ceramic actuator is produced, and by the actual displacement signal
Send to microprocessor；
The microprocessor, the driving voltage for exporting the piezoelectric ceramic actuator to the voltage amplification drive circuit is believed
Number, and correct the drive voltage signal with expecting displacement signal according to the actual displacement signal.
2. Piezoelectric Ceramic control system according to claim 1, it is characterised in that the voltage amplification drive circuit
Including error amplifying circuit；The error amplifying circuit includes the first operational amplifier and the second operational amplifier；
The positive input terminal of first operational amplifier is connected with the microprocessor, output end and second operational amplifier
Positive input terminal connection；The negative input end ground connection of second operational amplifier, a connection terminal and the pressure of output end
Electroceramics actuator is connected, and a connection terminal is connected with the negative input end of the first operational amplifier；
Wherein, first operational amplifier includes low-noise amplifier, and second operational amplifier amplifies including high power
Device.
3. Piezoelectric Ceramic control system according to claim 1 or 2, it is characterised in that further, the voltage
Amplification driving circuit also includes phase compensating circuit；The phase compensating circuit includes the first compensating electric capacity, the second compensating electric capacity
And isolation resistance；
Wherein, first compensating electric capacity is connected to the negative input end of the first operational amplifier in the voltage amplification drive circuit
Between output end；
Second compensating electric capacity and be connected in the voltage amplification drive circuit positive input terminal of the second operational amplifier with
Feedback resistance between output end is in parallel；
The isolation resistance is connected with the output end of second operational amplifier.
4. Piezoelectric Ceramic control system according to claim 1 or 2, it is characterised in that further, the voltage
Amplification driving circuit also includes filter circuit and protection circuit；
The filter circuit includes the electric capacity of an electric capacity or multiple parallel connections respectively, and the filter circuit drives with the voltage amplification
The power supply terminal and/or drive voltage signal input terminal of dynamic circuit and/or the connection of drive voltage signal lead-out terminal；
The protection circuit includes voltage-stabiliser tube circuit and diode；
Wherein, the voltage-stabiliser tube circuit be connected in the voltage amplification drive circuit positive input terminal of the second operational amplifier with
Between negative input end；The voltage-stabiliser tube circuit includes two voltage-stabiliser tube branch roads in parallel, and the voltage-stabiliser tube branch road includes one surely
Pressure pipe or the voltage-stabiliser tube of multiple series connection, and described two voltage-stabiliser tube branch roads formation current path it is in opposite direction；
The diode is put with the output end of the first operational amplifier and the second computing in the voltage amplification drive circuit respectively
The output end connection of big device.
5. Piezoelectric Ceramic control system according to claim 1 or 2, it is characterised in that further, the voltage
Amplification driving circuit also includes the negative input end and second for being connected to the first operational amplifier in the voltage amplification drive circuit
Feedback compensation circuit between the output end of operational amplifier；The feedback compensation circuit includes resistance and electric capacity in parallel.
6. Piezoelectric Ceramic control system according to claim 1, it is characterised in that the measurement module include favour this
Logical full-bridge strain circuit and pre-amplification circuit；
Wherein, the favour stone full-bridge strain circuit, for gathering the actual displacement signal that the piezoelectric ceramic actuator is produced；
The pre-amplification circuit, for being amplified to the actual displacement signal, and by the actual displacement after the amplification
Signal is sent to the microprocessor.
7. Piezoelectric Ceramic control system according to claim 1, it is characterised in that further, the system is also
Including D/A converter module and analog-to-digital conversion module；The D/A converter module is connected to the microprocessor and driven with voltage amplification
Between dynamic circuit；The analog-to-digital conversion module is connected between the microprocessor and measurement module；
The D/A converter module includes D/A conversion unit and the first high precision reference source；The D/A conversion unit, is used for
The drive voltage signal that the microprocessor is exported is converted to analog signal, and by the analog signal output to voltage amplification
Drive circuit；The first high precision reference source, for the D/A conversion unit output reference voltage；
The analog-to-digital conversion module includes AD conversion unit and the second high precision reference source；The modulus changes unit, is used for
The actual displacement signal that the measurement module is exported is converted to data signal, and the data signal is exported to microprocessor
Device；The second high precision reference source, for the AD conversion unit output reference voltage.
8. the Piezoelectric Ceramic control system according to claim 1,2,5,6 or 7, it is characterised in that further, institute
Stating system also includes being used for the power module to the system power supply；The power module is including voltage conversion unit and first just
Negative regulated power supply unit；
Wherein, the voltage conversion unit, for external power source to be converted into default first DC voltage and the second direct current
Pressure, and by first direct voltage output to the voltage amplification drive circuit, by second direct voltage output to institute
State the first positive and negative regulated power supply unit；First DC voltage is drive voltage signal in the voltage amplification drive circuit
DC power supply, second DC voltage is the microprocessor, voltage amplification drive circuit, measurement module, digital-to-analogue turn
Change the mold the DC power supply of block and analog-to-digital conversion module；
The first positive and negative regulated power supply unit, for carrying out polarity of voltage and voltage magnitude tune to second DC voltage
It is whole, obtain desired DC voltage, and microprocessor by the desired direct voltage output to the system, voltage amplification
Drive circuit, D/A converter module and analog-to-digital conversion module.
9. Piezoelectric Ceramic control system according to claim 8, it is characterised in that further, the system is also
Including the bridge excitation circuit for being powered to measurement module；The bridge excitation circuit includes the second positive and negative regulated power supply list
Member, the 3rd high precision reference source and connector；
The second positive and negative regulated power supply unit is connected with the connector, for carrying out voltage pole to second DC voltage
Property and voltage magnitude adjustment, obtain desired DC voltage, and by the desired direct voltage output to the connector；
The 3rd high precision reference source is connected with the connector, for the connector output reference voltage；
The connector is connected with the measurement module, for the desired DC voltage to be transferred into measurement module.
10. the Piezoelectric Ceramic control system according to claim 1,2,5,6 or 7, it is characterised in that further,
The system also includes display module；The display module is connected with microprocessor, the reality for showing piezoelectric ceramic actuator
When displacement information.
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| CN110032116A (en) * | 2019-04-25 | 2019-07-19 | 中国科学技术大学 | A kind of closed-loop control Piezoelectric Driving on-Line Monitor Device |
| CN110247579A (en) * | 2019-06-10 | 2019-09-17 | 哈尔滨工业大学（深圳） | A kind of drive power supply for piezoelectric ceramics |
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| CN110460314A (en) * | 2019-08-19 | 2019-11-15 | 北京机械设备研究所 | A kind of digital power amplifier and amplification method |
| CN112422127A (en) * | 2020-11-02 | 2021-02-26 | 武汉华中天经通视科技有限公司 | Piezoelectric ceramic drive circuit |
| CN112928945A (en) * | 2021-01-29 | 2021-06-08 | 重庆两江卫星移动通信有限公司 | Combined type piezoceramics drive circuit |
| CN113556055A (en) * | 2021-07-27 | 2021-10-26 | 盐城工学院 | Bipolar piezoelectric ceramic driving power supply |
| CN113556055B (en) * | 2021-07-27 | 2024-01-26 | 盐城工学院 | Bipolar piezoelectric ceramic driving power supply |
| CN113676027A (en) * | 2021-08-09 | 2021-11-19 | 武汉佰力博科技有限公司 | High-voltage driving circuit for piezoelectric ceramic material |
| CN114356007A (en) * | 2021-12-06 | 2022-04-15 | 武汉华中天经通视科技有限公司 | High-voltage high-power piezoelectric ceramic driving circuit |
| CN114356007B (en) * | 2021-12-06 | 2024-03-05 | 武汉华中天经通视科技有限公司 | High-voltage high-power piezoelectric ceramic driving circuit |
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