CN110518829B - Piezoelectric bimorph charge driving circuit - Google Patents
Piezoelectric bimorph charge driving circuit Download PDFInfo
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- CN110518829B CN110518829B CN201910856104.5A CN201910856104A CN110518829B CN 110518829 B CN110518829 B CN 110518829B CN 201910856104 A CN201910856104 A CN 201910856104A CN 110518829 B CN110518829 B CN 110518829B
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- 239000003990 capacitor Substances 0.000 claims abstract description 48
- 238000002955 isolation Methods 0.000 claims abstract description 25
- 239000004793 Polystyrene Substances 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 3
- 229920002223 polystyrene Polymers 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 16
- 238000005452 bending Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000013256 coordination polymer Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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Abstract
The invention discloses a piezoelectric bimorph charge driving circuit, which relates to the field of piezoelectric precise driving control.A piezoelectric bimorph upper layer and a piezoelectric bimorph lower layer are respectively connected with a sensing capacitor in series between a high-voltage direct current positive power supply and a high-voltage direct current negative power supply, the output end of a high-voltage amplifier is connected with a middle common electrode of the piezoelectric bimorph, the sensing capacitor accurately senses the charges of the piezoelectric bimorph upper layer and the piezoelectric bimorph lower layer, and the charges are compared with a control signal source after being processed by an isolation amplifier and a differential amplifier to feed back and control the charge. The invention simplifies the drive circuit of the piezoelectric bimorph, reduces the cost of a control system, avoids reverse voltage drive, and greatly improves the control precision of the bending displacement of the piezoelectric bimorph by utilizing a charge drive method.
Description
Technical Field
The invention relates to the field of piezoelectric precision drive control, in particular to a piezoelectric bimorph charge drive circuit.
Background
The piezoelectric actuator utilizes the inverse piezoelectric effect of the piezoelectric material, and an electric field applied inside the material causes strain or stress inside the material, so that macroscopic deformation displacement or driving force of the piezoelectric actuator is formed. The piezoelectric actuator has the advantages of high displacement resolution, large driving force, high response speed, no electromagnetic interference and the like, and is widely applied to the application occasions of nano positioning operation in the fields of biological medicine, material chemistry, physical electronics and the like.
The piezoelectric bimorph is the most common piezoelectric driving structure, and the bending deformation displacement of the piezoelectric bimorph is formed by utilizing the unbalanced telescopic strain of the upper piezoelectric sheet and the lower piezoelectric sheet (such as the extension of the upper piezoelectric sheet and the shortening of the lower piezoelectric sheet), so that the piezoelectric bimorph has the characteristics of simple structure, large deformation displacement and the like. Because the piezoelectric bimorph includes at least two piezoelectric patches, and the applied internal electric field intensity is different, the upper and lower piezoelectric patches need two high-voltage amplifiers to drive respectively, and the control difficulty and the system cost are higher. In order to reduce the complexity of the driving circuit, patent number US5233256 proposes to realize common driving of the individual high voltage amplifiers by optimizing the electrode connections, but the effective driving voltage range of this method is limited because the piezoelectric driver needs to avoid an excessive reverse driving voltage. In order to expand the range of the driving voltage, patent No. CN108258931A proposes to change the driving voltage ratio of the upper and lower piezoelectric sheets by a diode and a parallel resistor, but the effective driving frequency range of this method is limited due to the impedance characteristics of the parallel resistor and capacitor.
In addition, a nonlinear relationship such as hysteresis and creep exists between the driving voltage and the strain displacement of the piezoelectric actuator, and the displacement control accuracy of the piezoelectric actuator is restricted by the voltage control method. Because the charge of the piezoelectric driver and the deformation displacement have better linear relation, the displacement control precision of the piezoelectric driver can be greatly improved by using the charge driving circuit to replace a voltage driving circuit. However, the voltage driving circuit and the charge driving circuit have different structures and characteristics, so the voltage driving circuit suitable for the piezoelectric bimorph cannot be simply converted into the charge driving circuit, and the conventional voltage driving circuit has many problems. Therefore, it is necessary to further combine the characteristics of the piezoelectric bimorph and the charge driving circuit to provide a simpler, more precise and more effective piezoelectric bimorph charge driving circuit and control method.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a piezoelectric bimorph charge driving circuit so as to solve the technical problems of complex structure, poor precision and the like of the piezoelectric bimorph charge driving circuit in the prior art.
The invention is realized by the following technical scheme:
the invention provides a piezoelectric bimorph charge driving circuit, which comprises a piezoelectric bimorph, a sensing capacitor A, a sensing capacitor B, a high-voltage direct-current positive power supply, a high-voltage direct-current negative power supply, a high-voltage amplifier, an isolation amplifier A, an isolation amplifier B, a differential amplifier and a control signal source, wherein the piezoelectric bimorph is connected with the sensing capacitor A;
the upper piezoelectric sheet of the piezoelectric bimorph is connected with a high-voltage direct-current positive power supply after being connected with the sensing capacitor A in series through the upper electrode of the upper piezoelectric sheet, the lower piezoelectric sheet of the piezoelectric bimorph is connected with a high-voltage direct-current negative power supply after being connected with the sensing capacitor B in series through the lower electrode of the lower piezoelectric sheet, and the middle common electrode of the upper piezoelectric sheet and the lower piezoelectric sheet is connected with the output end of the high-voltage amplifier;
the input end of the isolation amplifier A is connected with the sensing capacitor A, and the input end of the isolation amplifier B is connected with the sensing capacitor B;
the input end of the differential amplifier is respectively connected with the output ends of the isolation amplifier A and the isolation amplifier B;
and the input end of the high-voltage amplifier is respectively connected with the control signal source and the output end of the differential amplifier.
Further: the piezoelectric bimorph adopts the polarization direction from top to bottom.
Further: the sensing capacitor A and the sensing capacitor B respectively adopt high-precision and high-linearity polystyrene capacitors, and the capacitance of the sensing capacitor A and the capacitance of the sensing capacitor B are 10-100 times that of the piezoelectric bimorph.
Compared with the prior art, the invention has the following advantages:
(1) the upper and lower piezoelectric sheets of the piezoelectric bimorph are respectively connected with the sensing capacitor in series and are arranged between a high-voltage direct current positive power supply and a high-voltage direct current negative power supply, only one high-voltage amplifier is needed to be connected with the middle common electrode of the piezoelectric bimorph, the charge difference value of the upper and lower piezoelectric sheets is adjusted through the voltage of the middle common electrode, the driving circuit is simplified, the cost of a control system is reduced, and meanwhile, the influence of reverse driving voltage is avoided.
(2) The high-precision high-linearity sensing capacitor is adopted, a proper capacitance ratio is set between the sensing capacitor and the piezoelectric sheets, the charges of the upper piezoelectric sheets and the lower piezoelectric sheets are accurately sensed under the condition of small voltage division loss, and then the charges are compared with a control signal source after being processed by the isolation amplifier and the differential amplifier, and the charge difference value of the piezoelectric bimorph is subjected to feedback control, so that the bending displacement control precision is improved. Meanwhile, the charge of the sensing capacitor is prevented from being influenced by a subsequent processing circuit by adopting the isolation amplifier.
Drawings
FIG. 1 is a schematic diagram of a piezoelectric bimorph charge-driving circuit according to the present invention;
FIG. 2 is a schematic structural diagram of a piezoelectric bimorph according to the present invention;
FIG. 3 is a graph of charge versus voltage for a piezoelectric bimorph in accordance with the present invention;
FIG. 4 is a graph of charge versus displacement for a piezoelectric bimorph in accordance with the present invention;
FIG. 5 is a waveform diagram of the present invention controlling signal source voltage and piezoelectric bimorph charge;
fig. 6 is a graph of the hysteresis characteristics of the piezoelectric bimorph according to the present invention under charge and voltage driving.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-2, a piezoelectric bimorph charge driving circuit includes a piezoelectric bimorph 1, a sensing capacitor a2-1, a sensing capacitor B2-2, a high-voltage direct-current positive power supply 3, a high-voltage direct-current negative power supply 4, a high-voltage amplifier 5, an isolation amplifier a6-1, an isolation amplifier B6-2, a differential amplifier 7 and a control signal source 8;
the upper piezoelectric sheet 1-1 of the piezoelectric bimorph 1 is connected with a high-voltage direct-current positive power supply 3 after being connected with a sensing capacitor A2-1 in series through an upper electrode a, the lower piezoelectric sheet 1-2 of the piezoelectric bimorph 1 is connected with a sensing capacitor B2-2 in series through a lower electrode B and then connected with a high-voltage direct-current negative power supply 4, and the middle common electrode c of the upper piezoelectric sheet 1-1 and the lower piezoelectric sheet 1-2 is connected with the output end of a high-voltage amplifier 5;
the input end of the isolation amplifier A6-1 is connected with the sensing capacitor A2-1 to amplify and output the charge signal of the upper piezoelectric sheet 1-1, and the input end of the isolation amplifier B6-2 is connected with the sensing capacitor B2-2 to amplify and output the charge signal of the lower piezoelectric sheet 1-2;
the input end of the differential amplifier 7 is respectively connected with the output ends of the isolation amplifier A6-1 and the isolation amplifier B6-2, and the differential amplifier amplifies and outputs the charge difference signals of the upper piezoelectric sheet 1-1 and the lower piezoelectric sheet 1-2;
the input end of the high-voltage amplifier 5 is respectively connected with the control signal source 8 and the output end of the differential amplifier 7 to form a negative feedback control loop, and the error signals of the control signal source 8 and the differential amplifier 7 are amplified and output;
the piezoelectric bimorph 1 adopts the polarization direction from top to bottom;
the sensing capacitor A2-1 and the sensing capacitor B2-2 are high-precision and high-linearity polystyrene capacitors respectively, and the capacitance of the sensing capacitor A2-1 and the capacitance of the sensing capacitor B2-2 are 10-100 times that of the piezoelectric bimorph 1.
In the embodiment, the specifications of the upper piezoelectric sheet 1-1 and the lower piezoelectric sheet 1-2 are the same, the specifications of the sensing capacitor A2-1 and the sensing capacitor B2-2 are the same, and the specifications of the isolation amplifier A6-1 and the isolation amplifier B6-2 are the same.
The specific working process and principle are as follows:
as shown in fig. 3, in the practical application process of the piezoelectric bimorph, the actual capacitance of each piezoelectric sheet in the piezoelectric bimorph 1 changes with the driving voltage due to the nonlinear characteristic of the voltage driving, and the voltage U of each piezoelectric sheetPReference capacitor CPAnd electric charge QPThe relationship between can be expressed as:
QP＝UP(1+δ)CP (1)
where δ is a variable describing the hysteresis characteristics of the piezoelectric patch.
As shown in FIG. 4, there is a good linear relationship between the charge and the deformation displacement of the piezoelectric actuator, the bending deformation displacement x of the piezoelectric bimorph 1PAnd the charge amount Q of the upper laminated sheet 1-11Electric charge quantity Q of lower piezoelectric sheet 1-22Difference Q of2-Q1The relationship between them is:
xP＝α(Q2-Q1) (2)
where α is a constant.
As shown in FIG. 1-2, the capacitances of the sensing capacitor A2-1 and the sensing capacitor B2-2 are both constant CSThe voltage of the upper laminated piezoelectric sheet 1-1 is UP1The voltage of the upper sensing capacitor A2-1 is US1The voltage of the lower piezoelectric sheet 1-2 is UP2The voltage of the lower sensing capacitor B2-2 is US2Then add the charge Q of the laminate sheet 1-11And charge Q of lower piezoelectric sheet 1-22Respectively expressed as:
wherein delta1And delta2Respectively, are variables describing the hysteresis characteristics of the upper-layer piezoelectric sheet 1-1 and the lower-layer piezoelectric sheet 1-2.
The voltage of the high-voltage direct current positive power supply 3 and the voltage of the high-voltage direct current negative power supply 4 are respectively VCCAnd VSSThe output voltage of the high voltage amplifier 5 is UoVoltage V ofCC、VSSAnd UoSatisfy the relation:
from equation 4, the output voltage U of the high voltage amplifier 5oExpressed as:
let the gains of the isolation amplifier A6-1 and the isolation amplifier B6-2 be 1, and the gain of the differential amplifier 7 be constant KSThen the output voltage DeltaU of the differential amplifier 7SExpressed as:
the open loop gain of the high-voltage amplifier 5 is K, and the voltage of the control signal source 8 is UiThen high pressureOutput voltage U of amplifier 5oCan also be expressed as:
Uo＝K(Ui-△US) (7)
from equations 5 and 7, the charge difference of the piezoelectric bimorph 1 can be expressed as:
when the parameters satisfy:
the charge difference of the piezoelectric bimorph 1 is about:
from equations 2 and 10, the bending deformation displacement x of the piezoelectric bimorph 1 can be obtainedPCan be expressed as:
wherein alpha, CSAnd KSIs constant, i.e. the bending deformation displacement x of the piezoelectric bimorph 1PAnd voltage U of control signal source 8iSatisfying a linear relationship.
As shown in FIG. 5, the voltage U of the signal source 8 is controlled in the initial situationiWhen zero, the charge Q of the upper laminate sheet 1-11And charge Q of lower piezoelectric sheet 1-22The upper layer piezoelectric sheet 1-1 and the lower layer bimorph piezoelectric bimorph 1-2 generate balanced strain, and the piezoelectric bimorph 1 is not bent; with voltage UiIncrease of the upper laminated piezoelectric sheet 1-1 due to the electric charge Q1Increased and shortened, and the lower piezoelectric plate 1-2 is charged by the charge Q2The piezoelectric bimorph 1 is reduced and extended, and is bent and deformed upwards; with voltage UiReduction of upper laminate piezoelectric sheet 1-1 due to electric charge Q1Reduced elongation and lower piezoelectric plate 1-2 due to charge Q2And increases and shortens, the piezoelectric bimorph 1 bends and deforms downward.
As shown in FIG. 6, the charge difference Q of the piezoelectric bimorph 12-Q1With the voltage U of the control signal source 8iChanges and maintains a linear relation, thereby accurately controlling the bending deformation displacement x of the piezoelectric bimorph 1PThe test results show that the hysteresis under charge driving is obviously improved compared with that under voltage driving.
Claims (3)
1. A piezoelectric bimorph charge driving circuit is characterized in that: the piezoelectric double-chip high-voltage direct current high-voltage power supply comprises a piezoelectric double-chip, a sensing capacitor A, a sensing capacitor B, a high-voltage direct current positive power supply, a high-voltage direct current negative power supply, a high-voltage amplifier, an isolation amplifier A, an isolation amplifier B, a differential amplifier and a control signal source;
the upper piezoelectric sheet of the piezoelectric bimorph is connected with a high-voltage direct-current positive power supply after being connected with the sensing capacitor A in series through the upper electrode of the upper piezoelectric sheet, the lower piezoelectric sheet of the piezoelectric bimorph is connected with a high-voltage direct-current negative power supply after being connected with the sensing capacitor B in series through the lower electrode of the lower piezoelectric sheet, and the middle common electrode of the upper piezoelectric sheet and the lower piezoelectric sheet is connected with the output end of the high-voltage amplifier;
the input end of the isolation amplifier A is connected with the sensing capacitor A, and the input end of the isolation amplifier B is connected with the sensing capacitor B;
the input end of the differential amplifier is respectively connected with the output ends of the isolation amplifier A and the isolation amplifier B;
and the input end of the high-voltage amplifier is respectively connected with the control signal source and the output end of the differential amplifier.
2. A piezoelectric bimorph charge-driving circuit according to claim 1, characterized in that: the piezoelectric bimorph adopts the polarization direction from top to bottom.
3. A piezoelectric bimorph charge-driving circuit according to claim 1, characterized in that: the sensing capacitor A and the sensing capacitor B are respectively polystyrene capacitors, and the capacitance of the sensing capacitor A and the capacitance of the sensing capacitor B are 10-100 times of that of the piezoelectric bimorph.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1770615A (en) * | 2005-09-16 | 2006-05-10 | 哈尔滨工业大学 | Piezo-electric ceramic drive power supply based on electric charge control |
| CN104079203A (en) * | 2014-06-19 | 2014-10-01 | 哈尔滨工程大学 | High-dynamic charge type piezoelectric ceramic drive power supply |
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| US6933662B2 (en) * | 2002-10-31 | 2005-08-23 | The Boeing Company | Electrostrictive compound actuator |
| KR101325645B1 (en) * | 2010-09-16 | 2013-11-06 | 한국전자통신연구원 | electric device used the energy harvesting |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1770615A (en) * | 2005-09-16 | 2006-05-10 | 哈尔滨工业大学 | Piezo-electric ceramic drive power supply based on electric charge control |
| CN104079203A (en) * | 2014-06-19 | 2014-10-01 | 哈尔滨工程大学 | High-dynamic charge type piezoelectric ceramic drive power supply |
Non-Patent Citations (1)
| Title |
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| 压电陶瓷微位移器驱动电源设计及研究;王硕;《CNKI优秀硕士学位论文全文库》;20141231;全文 * |
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