CN104079203A - High-dynamic charge type piezoelectric ceramic drive power supply - Google Patents
High-dynamic charge type piezoelectric ceramic drive power supply Download PDFInfo
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- CN104079203A CN104079203A CN201410276574.1A CN201410276574A CN104079203A CN 104079203 A CN104079203 A CN 104079203A CN 201410276574 A CN201410276574 A CN 201410276574A CN 104079203 A CN104079203 A CN 104079203A
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- piezoelectric ceramic
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- electric capacity
- drive power
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Abstract
The invention relates to a high-dynamic charge type piezoelectric ceramic drive power supply. The signal output end of a control module is connected with the forward end of a power amplifier, the signal output end of the power amplifier is connected with a piezoelectric ceramic element, and the piezoelectric ceramic element is connected with a precise capacitor. The high-dynamic charge type piezoelectric ceramic drive power supply is characterized in that one end of the precise capacitor and one end of the piezoelectric ceramic element are respectively connected with the input end of an error integral operational amplifier, and the output end of the error integral operational amplifier is connected with the negative end of the power amplifier.
Description
Technical field
The present invention relates to a kind of high dynamic electric lotus type drive power supply for piezoelectric ceramics.
Background technology
Along with scientific and technological development, the operand of people's research is deep into microscopic fields.Piezoelectric ceramic has that volume is little, displacement resolution is high, frequency response is high, noiseless, the feature such as do not generate heat, and is a kind of desirable micro-driving element.Piezoelectric ceramic actuator is applied to a lot of microscopic fields, such as the various operations of polymer, biological cell, the manufacture of Micro Electro Mechanical System and detection, ultraprecise machining, the production of large scale integrated circuit, micro-operation, scanning probe microscopy (SPM) system, fiber alignment, the precision positioning of semiconductor plate-making etc.The high dynamic performance of piezoelectric ceramic, depends on the performance of driving power to a great extent, the response speed of such as drive power supply for piezoelectric ceramics, output effective bandwidth, stability, carrying load ability etc.What at present, drive power supply for piezoelectric ceramics application was more is the control mode of voltage-type.Drive power supply for piezoelectric ceramics static state or the low frequency characteristic of voltage control mode are better, and the application under static state or low frequency environments is more, but its effective bandwidth is very narrow, only have several KHz left and right, under high dynamic applications, cannot meet the demands.Although traditional charge type drive power supply for piezoelectric ceramics can meet the demands to a certain extent, but there is serious leakage current, piezoelectric ceramic load in floating ground state, has not only caused very large difficulty to the application of typical earthing type load, and has limited the dynamic characteristic of driving power all the time.Therefore,, for the high dynamic applications of drive power supply for piezoelectric ceramics, solving the influence of leakage current of electric charge control type driving power and improving its effective bandwidth is technical problem urgently to be resolved hurrily.
The drive power supply for piezoelectric ceramics of FamTom Hegima Co., Ltd's invention, adopt high pressure integrated operational amplifier to carry out voltage and power amplification, with respect to adopting resolution element, improve integrated level and the reliability of system, reduced discrete type and the uncertainty of systematic function.The drive power supply for piezoelectric ceramics of Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences's invention, power adjustment is convenient, controls flexibly, and temperature is floated little, good stability, and can control charging current, improve sluggishness, the creep properties of piezoelectric ceramic actuator.The drive power supply for piezoelectric ceramics that the digital potentiometer of Guangxi University regulates, can realize and controlling voltage is accurate, output voltage stabilization, the feature such as resolution can spread, and quiescent dissipation is little.That aforementioned each technical scheme all exists is large with leakage current, poor dynamic. the problems such as output bandwidth is low.
Based on the existing defect of above each solution and deficiency, this team provides the electric charge control type drive power supply for piezoelectric ceramics that a kind of output voltage stabilization, effective band are wide, can meet high dynamic applications.
Summary of the invention
The object of the invention is to provide a kind of high dynamic electric lotus type drive power supply for piezoelectric ceramics, can effectively reduce leakage current, improves the positioning precision of piezoelectric ceramic, and output voltage stabilization, effective band are wide, can meet high dynamic applications.
Realize the object of the invention technical scheme:
A kind of high dynamic electric lotus type drive power supply for piezoelectric ceramics, control module signal output part connects the forward end of power amplifier, the signal output part of power amplifier connects piezoelectric ceramic, piezoelectric ceramic is connected to accurate electric capacity, it is characterized in that: one end of accurate electric capacity and one end of piezoelectric ceramic and the input that is connected respectively error intergal operational amplifier, the negative end of the output termination power amplifier of error intergal operational amplifier.
Accurate electric capacity connects balanced compensated resistance, balanced compensated resistor satisfied following formula,
R
c·C
c＝R
p·C
p
In formula, Rc represents balanced compensated resistance, and Rp represents piezoelectric ceramic equivalent resistance;
Cc represents accurate electric capacity, and Cp represents piezoelectric ceramic equivalent capacity.
Piezoelectric ceramic one end ground connection, the accurate electric capacity of a termination; The signal output part of another termination power amplifier of accurate electric capacity.
Power operational amplifier is selected high-voltage MOSFET operational amplifier.
Accurate electric capacity is selected the accurate electric capacity of metal Merlon.
Error integrator is selected OPA603 high speed operation amplifier.
The beneficial effect that the present invention has:
The present invention utilize piezoelectric ceramic displacement and its with the linear principle of free charge, be applied to the charging charge at piezoelectric ceramic two ends by control to realize the displacement of Linear Control piezoelectric ceramic.Ideally the quantity of electric charge of piezoelectric ceramic and the quantity of electric charge of accurate electric capacity equate, but due to the impact of piezoelectric ceramic leakage current, even if increased balance resistance compensation, but still have the existence of leakage current, cause the quantity of electric charge at piezoelectric ceramic and accurate electric capacity two ends unequal, thereby piezoelectric ceramic positioning precision is inaccurate.In order to reduce to a greater degree leakage current, the present invention draws respectively one end of piezoelectric ceramic and one end of accurate electric capacity, and is connected to error intergal operational amplifier.Error intergal operational amplifier is all the time in the size of the quantity of electric charge at the piezoelectric ceramic two ends quantity of electric charge and accurate electric capacity two ends relatively, the difference of the quantity of electric charge obtaining is fed back to the negative end of power amplifier, in time regulate, reach and maintain the piezoelectric ceramic two ends quantity of electric charge and the basically identical object of the accurate electric capacity two ends quantity of electric charge, thereby effectively improve the positioning precision of piezoelectric ceramic.
The balanced compensated resistor satisfied following formula of the present invention, can effectively improve the low frequency characteristic of drive power supply for piezoelectric ceramics.
R
c·C
c＝R
p·C
p
In formula, Rc represents balanced compensated resistance, and Rp represents piezoelectric ceramic equivalent resistance;
Cc represents accurate electric capacity, and Cp represents piezoelectric ceramic equivalent capacity.
Because piezoelectric ceramic is consistent with the quantity of electric charge of feedback capacity (accurate electric capacity), the present invention is by piezoelectric ceramic and feedback capacity transposition, by piezoelectric ceramic one end ground connection.Driving power can directly drive the load of earthing type piezoelectric ceramic, also can be applied in typical piezoelectric ceramic navigation system.
Error integrator of the present invention must be selected high speed operation amplifier, otherwise not only has obvious lagging influence, and signal is easy to distortion.Error integrator is selected OPA603 high speed operation amplifier, and its transfer ratio, up to 1000V/ μ S, can meet the demands.Power operational amplifier is selected high-voltage MOSFET operational amplifier, output current reaches 4A, and when single-ended power supply, maximum output voltage can reach 400V, can reach ± 200V of maximum output voltage when both end power supplying, building-out capacitor transfer ratio in the time of 10pF can reach 50V/us, can meet the demands.Accurate electric capacity is chosen the accurate electric capacity of metal Merlon, and its equivalent resistance is more much larger than the equivalent resistance of piezoelectric ceramic, and therefore the leakage current of the relative piezoelectric ceramic of leakage current of accurate electric capacity is little a lot, in low performance requirement situation, even can ignore.
Brief description of the drawings
Fig. 1 is circuit theory diagrams of the present invention;
Dynamic characteristic one schematic diagram when Fig. 2 is the load of 1uF piezoelectric ceramic;
Dynamic characteristic two schematic diagrames when Fig. 3 is the load of 1uF piezoelectric ceramic;
Dynamic characteristic three schematic diagrames when Fig. 4 is the load of 1uF piezoelectric ceramic;
Dynamic characteristic one schematic diagram when Fig. 5 is the load of 0.22uF piezoelectric ceramic;
Dynamic characteristic two schematic diagrames when Fig. 6 is the load of 0.22uF piezoelectric ceramic;
Fig. 7 is the micro-workbench resetting of 1.8uF piezoelectric ceramic situation map.
Embodiment
As shown in Figure 1; control module signal output part VIN connects the forward end of power amplifier A; wherein control module is made up of host computer, MCU, DA transducer; this is prior art; power operational amplifier A selects high-voltage MOSFET operational amplifier; wherein output is connected to field-effect transistor Q1, Q2, Q3, Q4, and model is 2N4416, for input protection.The signal output part of power amplifier A meets accurate capacitor C c, and accurate capacitor C c selects the accurate electric capacity of metal Merlon, another termination piezoelectric ceramic Cp of accurate capacitor C c, one end ground connection of piezoelectric ceramic Cp.One end and one end of piezoelectric ceramic Cp and the input that is connected respectively error intergal operational amplifier of accurate capacitor C c, error integrator is selected OPA603 high speed operation amplifier, the negative end of the output termination power amplifier A of error intergal operational amplifier.Accurate capacitor C c meets balanced compensated resistance R c, balanced compensated resistor satisfied following formula,
R
c·C
c＝R
p·C
p
In formula, Rc represents balanced compensated resistance, and Rp represents piezoelectric ceramic equivalent resistance;
Cc represents accurate electric capacity, and Cp represents piezoelectric ceramic equivalent capacity.
Ideally the quantity of electric charge of piezoelectric ceramic Cp and the quantity of electric charge of accurate capacitor C c equate, but due to the impact of piezoelectric ceramic Cp leakage current, even if increased balance resistance compensation, but still have the existence of leakage current, cause the quantity of electric charge at piezoelectric ceramic and accurate electric capacity two ends unequal, thereby piezoelectric ceramic positioning precision is inaccurate.In order to reduce to a greater degree leakage current, the present invention draws respectively one end of piezoelectric ceramic Cp and one end of accurate capacitor C c, and is connected to error intergal operational amplifier OPA603.Error intergal operational amplifier OPA603 is all the time in the size of the quantity of electric charge at the piezoelectric ceramic Cp two ends quantity of electric charge and accurate capacitor C c two ends relatively, the difference of the quantity of electric charge obtaining is fed back to the negative end of power amplifier A, in time regulate, reach and maintain the piezoelectric ceramic Cp two ends quantity of electric charge and the basically identical object of the accurate capacitor C c two ends quantity of electric charge, thereby effectively improve the positioning precision of piezoelectric ceramic.
Further illustrate beneficial effect of the present invention below in conjunction with performance test.High dynamic electric lotus type drive power supply for piezoelectric ceramics of the present invention has been carried out to performance test, and curve 1 is input control sinusoidal signal, and curve 2 is piezoelectric ceramic two ends output signals.The load of 1uF piezoelectric ceramic, input signal peak-to-peak value is 500mV, the dynamic characteristic of frequency input signal from 50Hz, 5KHz to 23KHz is shown in Fig. 2,3,4.Piezoelectric ceramic two ends output voltage is approximately 22 times of input control voltage.Can find out, piezoelectric ceramic two ends output voltage can be followed input control signal, and its peak-to-peak value is similar to 11V, and phase place is not almost offset, and low frequency dynamic characteristic is good, and in the situation that not affecting distorted signals, output signal frequency maximum can reach 23KHz.
The load of 0.22uF piezoelectric ceramic, input signal peak-to-peak value is 200mV, and frequency is that the test of 10KHz, 50KHz is shown in shown in Fig. 5,6, and piezoelectric ceramic two ends output voltage is approximately 100 times of input control voltage.Can find out, electric capacity two ends output signal dynamic following input control signal preferably, its peak-to-peak value is similar to 20V, and phase place is not almost offset.When control sinusoidal signal frequency is increased to 50KHz, peak-to-peak value tapers to 10V left and right.If the in the situation that control object only having higher requirements to frequency in high dynamic application, still can use high dynamic electric lotus type drive power supply for piezoelectric ceramics.
Piezoelectric ceramic equivalent capacity is about the micro-workbench of piezoelectric ceramic of 1.8uF, and input control signal peak-to-peak value progressively to 3V, then during from 3V to 500mV, is measured the displacement situation of piezoelectric ceramic, piezoelectric ceramic resetting situation as shown in Figure 7 from 500mV.Can find out, the linearity is very good, and error is in 1%.
Claims (6)
1. a high dynamic electric lotus type drive power supply for piezoelectric ceramics, control module signal output part connects the forward end of power amplifier, the signal output part of power amplifier connects piezoelectric ceramic, piezoelectric ceramic is connected to accurate electric capacity, it is characterized in that: one end of accurate electric capacity and one end of piezoelectric ceramic and the input that is connected respectively error intergal operational amplifier, the negative end of the output termination power amplifier of error intergal operational amplifier.
2. high dynamic electric lotus type drive power supply for piezoelectric ceramics according to claim 1, is characterized in that: accurate electric capacity connects balanced compensated resistance, balanced compensated resistor satisfied following formula,
R
c·C
c＝R
p·C
p
In formula, Rc represents balanced compensated resistance, and Rp represents piezoelectric ceramic equivalent resistance;
Cc represents accurate electric capacity, and Cp represents piezoelectric ceramic equivalent capacity.
3. high dynamic electric lotus type drive power supply for piezoelectric ceramics according to claim 2, is characterized in that: piezoelectric ceramic one end ground connection, the accurate electric capacity of a termination; The signal output part of another termination power amplifier of accurate electric capacity.
4. high dynamic electric lotus type drive power supply for piezoelectric ceramics according to claim 3, is characterized in that: power operational amplifier is selected high-voltage MOSFET operational amplifier.
5. high dynamic electric lotus type drive power supply for piezoelectric ceramics according to claim 4, is characterized in that: accurate electric capacity is selected the accurate electric capacity of metal Merlon.
6. high dynamic electric lotus type drive power supply for piezoelectric ceramics according to claim 5, is characterized in that: error integrator is selected OPA603 high speed operation amplifier.
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| CN201410276574.1A CN104079203A (en) | 2014-06-19 | 2014-06-19 | High-dynamic charge type piezoelectric ceramic drive power supply |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104320017A (en) * | 2014-10-28 | 2015-01-28 | 中国科学院长春光学精密机械与物理研究所 | Piezoelectric ceramic driving device |
| CN106533252B (en) * | 2016-10-25 | 2019-01-04 | 哈尔滨工业大学 | High Precision Piezoelectric Ceramic analog line driver based on non-linear Charge controlled |
| CN110518829A (en) * | 2019-09-11 | 2019-11-29 | 合肥工业大学 | A kind of piezoelectric bimorph charge driving circuit |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1773742A (en) * | 2005-10-27 | 2006-05-17 | 中国科学院上海光学精密机械研究所 | Piezoelectric ceramic driving electric source |
| CN101282095A (en) * | 2008-05-15 | 2008-10-08 | 中国科学院电工研究所 | Inertial shock motor drive power supply |
| CN101599715A (en) * | 2009-06-25 | 2009-12-09 | 天津大学 | Dynamic bipolar drive power supply for piezoelectric ceramics and implementation method |
| CN201504224U (en) * | 2009-09-30 | 2010-06-09 | 中国船舶重工集团公司第七一○研究所 | Fixed amplitude driving circuit used for sonar wideband frequency-modulation signal transmission |
| CN203896217U (en) * | 2014-06-19 | 2014-10-22 | 哈尔滨工程大学 | High-dynamic charge type piezoelectric ceramic driving power supply |
-
2014
- 2014-06-19 CN CN201410276574.1A patent/CN104079203A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1773742A (en) * | 2005-10-27 | 2006-05-17 | 中国科学院上海光学精密机械研究所 | Piezoelectric ceramic driving electric source |
| CN101282095A (en) * | 2008-05-15 | 2008-10-08 | 中国科学院电工研究所 | Inertial shock motor drive power supply |
| CN101599715A (en) * | 2009-06-25 | 2009-12-09 | 天津大学 | Dynamic bipolar drive power supply for piezoelectric ceramics and implementation method |
| CN201504224U (en) * | 2009-09-30 | 2010-06-09 | 中国船舶重工集团公司第七一○研究所 | Fixed amplitude driving circuit used for sonar wideband frequency-modulation signal transmission |
| CN203896217U (en) * | 2014-06-19 | 2014-10-22 | 哈尔滨工程大学 | High-dynamic charge type piezoelectric ceramic driving power supply |
Non-Patent Citations (1)
| Title |
|---|
| 王澄: "面向动态精密定位压电陶瓷驱动技术研究", 《中国优秀硕士学位论文全文数据库》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104320017A (en) * | 2014-10-28 | 2015-01-28 | 中国科学院长春光学精密机械与物理研究所 | Piezoelectric ceramic driving device |
| CN106533252B (en) * | 2016-10-25 | 2019-01-04 | 哈尔滨工业大学 | High Precision Piezoelectric Ceramic analog line driver based on non-linear Charge controlled |
| CN110518829A (en) * | 2019-09-11 | 2019-11-29 | 合肥工业大学 | A kind of piezoelectric bimorph charge driving circuit |
| CN110518829B (en) * | 2019-09-11 | 2021-05-28 | 合肥工业大学 | Piezoelectric bimorph charge driving circuit |
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Application publication date: 20141001 |