CN109524338A - Swing type ceramic chips scraping blade loading and unloading method - Google Patents
Swing type ceramic chips scraping blade loading and unloading method Download PDFInfo
- Publication number
- CN109524338A CN109524338A CN201811185559.0A CN201811185559A CN109524338A CN 109524338 A CN109524338 A CN 109524338A CN 201811185559 A CN201811185559 A CN 201811185559A CN 109524338 A CN109524338 A CN 109524338A
- Authority
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- China
- Prior art keywords
- swing arm
- ceramic chips
- sucker
- loading
- unloading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 73
- 238000007790 scraping Methods 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000009958 sewing Methods 0.000 claims abstract description 30
- 238000007599 discharging Methods 0.000 abstract description 8
- 230000007246 mechanism Effects 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 206010054949 Metaplasia Diseases 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000015689 metaplastic ossification Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Intermediate Stations On Conveyors (AREA)
- Specific Conveyance Elements (AREA)
Abstract
The invention discloses a kind of swing type ceramic chips scraping blade loading and unloading method, solve the problems, such as that equipment cost height existing for existing ceramic chips scraping blade charging and discharging mechanism and loading and unloading occupied space are big.Parallelogram four-bar linkage before driven swing arm (12), loading and unloading sewing platform base (3) and rectangle sucker (11) form before preceding active swing arm (8), the right side, parallelogram four-bar linkage after driven swing arm (20), loading and unloading sewing platform base (3) and rectangle sucker (11) form behind active swing arm (15), the right side afterwards, under the driving of servo motor (4), the leftward or rightward swing of rectangle sucker (11) can be achieved, complete ceramic chips from ceramic chips feeding table (1) to the loading and unloading ceramic chips scraping blade platform (14).Cost of investment of the present invention is low, and mechanism is simple, and operation is easy, and saves space occupied.
Description
Technical field
The present invention relates to a kind of charging and discharging mechanisms of ceramic chips, in particular to are made when scraping blade after a kind of pair of ceramic chips filling perforation
Charging and discharging mechanism and loading and unloading method.
Background technique
The interconnection of integrated circuit between each ceramic chips is realized by ceramic chips process for filling hole, and process for filling hole refers to
Filled therewith is carried out to the hole on ceramic chips by steel mesh；After carrying out process for filling hole on ceramic chips, need to fill out on ceramic chips
The slurry of hole rear projection removes, and entire removal process is: first by the ceramic chips after filling perforation by expecting ceramic chips on charging & discharging machine
On scraping machine, ceramic chips scraping machine carries out scraping blade processing to the ceramic chips after feeding, and scraping blade treated ceramic chips pass through up and down
Material machine is sent back to.Existing ceramic chips scraping blade process equipment has the following characteristics that (1) in the automatic metaplasia of entire IC products
In production, the height of existing automatic assembly line is almost the same with the height of the scraping blade platform of scraping machine；(2) ceramic chips scraping blade
During picking up (i.e. the feeding, discharge of ceramic chips scraper), the requirement for scraping tablet position error to green is not also high.Existing production line
On ceramic chips scraper used by charging & discharging machine be vertically expect horizontal shift structure charging & discharging machine, this structure it is upper
Blanking machine is realized by two axis driving structure of XZ, is had the characteristics that positioning accuracy is high, structure is complicated and operation is loaded down with trivial details, is deposited
In cost of investment height, the problem of loading and unloading occupied space is big, loading and unloading low efficiency.
Summary of the invention
The present invention provides a kind of swing type ceramic chips scraping blade loading and unloading methods, solve existing ceramic chips scraping blade or more
Expect equipment cost height existing for mechanism and the big technical problem of loading and unloading occupied space.
The present invention is to solve the above technical problem by the following technical programs:
A kind of swing type ceramic chips scraping blade charging and discharging mechanism, including ceramic chips feeding table and ceramic chips scraping blade platform, send in ceramic chips
It is provided with loading and unloading sewing platform base between material platform and ceramic chips scraping blade platform, retarder is provided on loading and unloading sewing platform base, upper and lower
Expect to be fixedly installed servo motor on the lower end surface of sewing platform base, the input terminal of servo motor and retarder links together, and is subtracting
The axis stretched out along anterior-posterior horizontal direction both-end is provided on the output end of fast device, the front end of axis passes through connecting key and preceding active
The lower end of swing arm links together, and the rear end of axis is linked together by another connecting key and the lower end of rear active swing arm, preceding
The upper end of active swing arm is connected to before sucker on the left front power arm hinge seat of link block, and the upper end of rear active swing arm is connected to suction
After disk on the left back power arm hinge seat of link block, link block is to be separately positioned on rectangle suction after link block and sucker before sucker
On disk, the right end of link block is provided with right front upper slave arm hinge seat before sucker, cuts with scissors on right front upper slave arm hinge seat
Be connected to driven swing arm before the right side, it is right before the lower end of driven swing arm be hinged on right front lower slave arm hinge seat, right front lower slave arm hinge
Chain seat is fixed on loading and unloading sewing platform base, slave arm hinge seat is gone up after being provided with the right side on link block after sucker, behind the right side
Be hinged with driven swing arm behind the right side on upper slave arm hinge seat, it is right after the lower end of driven swing arm be hinged on lower slave arm hinge seat behind the right side
On, lower slave arm hinge seat is fixed on loading and unloading sewing platform base after right.
Ceramic chips are provided on ceramic chips feeding table；The rotation Ii miter of axis is provided on loading and unloading sewing platform base.
A kind of swing type ceramic chips scraping blade loading and unloading method, comprising the following steps:
Loading and unloading sewing platform base is arranged in the first step between ceramic chips feeding table and ceramic chips scraping blade platform, on loading and unloading sewing platform base
Retarder is set, servo motor, the input terminal of servo motor and retarder are fixedly installed on the lower end surface of loading and unloading sewing platform base
It links together；
Second step is provided with the axis stretched along anterior-posterior horizontal direction both-end on the output end of retarder, and the front end of axis passes through
Connecting key and the lower end of preceding active swing arm link together, the lower end that the rear end of axis passes through another connecting key and rear active swing arm
It links together, the upper end of preceding active swing arm is connected to rear active swing arm before sucker on the left front power arm hinge seat of link block
Upper end be connected to after sucker on the left back power arm hinge seat of link block, link block is difference after link block and sucker before sucker
It is arranged on rectangle sucker, right front upper slave arm hinge seat is arranged in the right end of link block before sucker, right front upper driven
On arm hinge seat it is hinged right before driven swing arm, it is right before the lower end of driven swing arm be hinged on right front lower slave arm hinge seat, before right
Lower slave arm hinge seat is fixed on loading and unloading sewing platform base, upper slave arm hinge after setting is right on link block after sucker
Seat, behind the right side on upper slave arm hinge seat it is hinged it is right after driven swing arm, it is right after driven swing arm lower end be hinged on behind the right side under it is driven
On arm hinge seat, lower slave arm hinge seat is fixed on loading and unloading sewing platform base after right；
Third step, control servo motor, rotate axis counterclockwise, the lower end of the preceding active swing arm of axis drive and rear active swing arm
Lower end rotated down to the left, the upper end of the upper end of preceding active swing arm and rear active swing arm swings to the left simultaneously, it is right before slave pendulum
Rectangle sucker is swung to the surface of ceramic chips feeding table with swinging to the left by driven swing arm after arm and the right side, and rectangle is inhaled
Disk picks up the ceramic chips on ceramic chips feeding table；
4th step, control servo motor, rotate clockwise axis, the lower end of the preceding active swing arm of axis drive and rear active swing arm
Lower end rotated to upper right side, the upper end of the upper end of preceding active swing arm and rear active swing arm is swung to the right simultaneously, it is right before slave pendulum
Rectangle sucker is swung to the surface of ceramic chips scraping blade platform with swinging to the right by driven swing arm after arm and the right side, and rectangle is inhaled
The ceramic chips picked up are placed on ceramic chips scraping blade platform by disk, complete the work of ceramic chips feeding.
The present invention completes the loading and unloading of ceramic chips using that can swing loading and unloading manipulator, and cost of investment is low, and mechanism is simple,
Operation is easy, and saves space occupied.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawing:
A kind of swing type ceramic chips scraping blade charging and discharging mechanism, including ceramic chips feeding table 1 and ceramic chips scraping blade platform 14, in ceramic chips
It is provided with loading and unloading sewing platform base 3 between feeding table 1 and ceramic chips scraping blade platform 14, is provided with retarder on loading and unloading sewing platform base 3
5, servo motor 4 is fixedly installed on the lower end surface of loading and unloading sewing platform base 3, servo motor 4 is connect with the input terminal of retarder 5
Together, the axis 6 stretched out along anterior-posterior horizontal direction both-end is provided on the output end of retarder 5, the front end of axis 6 passes through
Connecting key 7 and the lower end of preceding active swing arm 8 link together, and the rear end of axis 6 passes through another connecting key and rear active swing arm 15
Lower end link together, the upper end of preceding active swing arm 8 is connected to before sucker on the left front power arm hinge seat 9 of link block 10,
The upper end of active swing arm 15 is connected to after sucker on the left back power arm hinge seat 16 of link block 17 afterwards, 10 He of link block before sucker
Link block 17 is separately positioned on rectangle sucker 11 after sucker, and the right end of link block 10 is provided with right front upper before sucker
Slave arm hinge seat 18 is hinged with driven swing arm 12 before the right side on right front upper slave arm hinge seat 18, driven swing arm 12 before the right side
Lower end is hinged on right front lower slave arm hinge seat 13, and right front lower slave arm hinge seat 13 is fixed at loading and unloading sewing platform base 3
On, slave arm hinge seat 19 is gone up after being provided with the right side on link block 17 after sucker, it is hinged on upper slave arm hinge seat 19 behind the right side
Have a driven swing arm 20 behind the right side, it is right after the lower end of driven swing arm 20 be hinged on behind the right side on lower slave arm hinge seat 21, it is right after under it is driven
Arm hinge seat 21 is fixed on loading and unloading sewing platform base 3；Driven swing arm 12, loading and unloading sewing platform base 3 before preceding active swing arm 8, the right side
Preceding parallelogram four-bar linkage, driven swing arm 20, loading and unloading platform behind rear active swing arm 15, the right side are formed with rectangle sucker 11
Parallelogram four-bar linkage after pedestal 3 and rectangle sucker 11 form, it is under the driving of servo motor 4, it can be achieved that rectangular
The leftward or rightward swing of shape sucker 11 is completed ceramic chips from ceramic chips feeding table 1 to ceramic chips scraping blade platform 14
Loading and unloading.
Ceramic chips 2 are provided on ceramic chips feeding table 1；The rotary stopper of axis 6 is provided on loading and unloading sewing platform base 3
Device；Two rotary motion axis, i.e., preceding active swing arm 8 and rear active swing arm 15 are all fixed on loading and unloading sewing platform base 3, in axis 6
There are three photoelectric sensors for upper installation, for detecting the zero point and two extreme positions of movement, the pick-and-place position of rectangle sucker 11
Setting can be determined by the rotation angle of servo motor 4.
A kind of swing type ceramic chips scraping blade loading and unloading method, comprising the following steps:
Loading and unloading sewing platform base 3 is arranged in the first step between ceramic chips feeding table 1 and ceramic chips scraping blade platform 14, in loading and unloading stylobate
Retarder 5 is set on seat 3, servo motor 4, servo motor 4 and retarder are fixedly installed on the lower end surface of loading and unloading sewing platform base 3
5 input terminal links together；
Second step is provided with the axis 6 stretched along anterior-posterior horizontal direction both-end on the output end of retarder 5, and the front end of axis 6 is logical
It crosses connecting key 7 and the lower end of preceding active swing arm 8 links together, the rear end of axis 6 passes through another connecting key and rear active swing arm
15 lower end links together, and the upper end of preceding active swing arm 8 is connected to the left front power arm hinge seat 9 of link block 10 before sucker
On, the upper end of rear active swing arm 15 is connected to after sucker on the left back power arm hinge seat 16 of link block 17, link block before sucker
10 and sucker after link block 17 be separately positioned on rectangle sucker 11, before the right end setting of link block 10 is right before sucker
Upper slave arm hinge seat 18, it is hinged right on right front upper slave arm hinge seat 18 before driven swing arm 12, it is right before driven swing arm 12
Lower end is hinged on right front lower slave arm hinge seat 13, and right front lower slave arm hinge seat 13 is fixed at loading and unloading sewing platform base 3
On, upper slave arm hinge seat 19 after setting is right on link block 17 after sucker, the hinged right side on upper slave arm hinge seat 19 behind the right side
Driven swing arm 20 afterwards, it is right after the lower end of driven swing arm 20 be hinged on behind the right side on lower slave arm hinge seat 21, lower slave arm hinge after right
Chain seat 21 is fixed on loading and unloading sewing platform base 3；
Third step, control servo motor 4, make axis 6 is counterclockwise to rotate, the lower end of active swing arm 8 and rear active before axis 6 drives
The upper end of the lower end of swing arm 15 rotated down to the left, the upper end of preceding active swing arm 8 and rear active swing arm 15 is swung to the left simultaneously, right
Rectangle sucker 11 is swung to ceramic chips feeding table 1 with swinging to the left by driven swing arm 20 after preceding driven swing arm 12 and the right side
Surface, rectangle sucker 11 pick up the ceramic chips 2 on ceramic chips feeding table 1；
4th step, control servo motor 4, rotate clockwise axis 6, the lower end of active swing arm 8 and rear active before axis 6 drives
The lower end of swing arm 15 is rotated to upper right side, and the upper end of the upper end of preceding active swing arm 8 and rear active swing arm 15 is swung to the right simultaneously, right
Rectangle sucker 11 is swung to ceramic chips scraping blade platform 14 with swinging to the right by driven swing arm 20 after preceding driven swing arm 12 and the right side
The ceramic chips 2 picked up are placed on ceramic chips scraping blade platform 14 by surface, rectangle sucker 11, complete the work of ceramic chips feeding.
Claims (1)
1. a kind of swing type ceramic chips scraping blade loading and unloading method, comprising the following steps:
Loading and unloading sewing platform base (3) are arranged between ceramic chips feeding table (1) and ceramic chips scraping blade platform (14) in the first step, upper and lower
Expect that retarder (5) are arranged on sewing platform base (3), servo motor (4) are fixedly installed on the lower end surface of loading and unloading sewing platform base (3), watch
It takes motor (4) and the input terminal of retarder (5) links together；
Second step is provided with the axis (6) stretched along anterior-posterior horizontal direction both-end on the output end of retarder (5), axis (6)
Front end is linked together by connecting key (7) and the lower end of preceding active swing arm (8), and the rear end of axis (6) passes through another connecting key
It links together with the lower end of rear active swing arm (15), the upper end of preceding active swing arm (8) is connected to link block (10) before sucker
On left front power arm hinge seat (9), the upper end of rear active swing arm (15) is connected to the left back power arm of link block (17) after sucker
On hinge seat (16), link block (17) is separately positioned on rectangle sucker (11) after link block (10) and sucker before sucker
, right front upper slave arm hinge seat (18) is arranged in the right end of link block (10) before sucker, in right front upper slave arm hinge seat
(18) on it is hinged right before driven swing arm (12), it is right before the lower end of driven swing arm (12) be hinged on right front lower slave arm hinge seat (13)
On, right front lower slave arm hinge seat (13) is fixed on loading and unloading sewing platform base (3), is arranged on link block (17) after sucker
Behind the right side upper slave arm hinge seat (19), behind the right side on upper slave arm hinge seat (19) it is hinged it is right after driven swing arm (20), it is right after from
The lower end of movable pendulum arm (20) is hinged on behind the right side on slave arm hinge seat (21) down, lower slave arm hinge seat (21) fixed setting after right
On loading and unloading sewing platform base (3)；
Third step, control servo motor (4), rotate axis (6) counterclockwise, the lower end of active swing arm (8) before axis (6) drives
With the lower end of rear active swing arm (15) rotated down to the left, the upper end of preceding active swing arm (8) and the upper end of rear active swing arm (15)
Swing to the left simultaneously, it is right before driven swing arm (20) with swinging to the left behind driven swing arm (12) and the right side, by rectangle sucker (11)
The surface of ceramic chips feeding table (1) is swung to, rectangle sucker (11) inhales the ceramic chips (2) on ceramic chips feeding table (1)
It rises；
4th step, control servo motor (4), rotate clockwise axis (6), the lower end of active swing arm (8) before axis (6) drives
It is rotated with the lower end of rear active swing arm (15) to upper right side, the upper end of preceding active swing arm (8) and the upper end of rear active swing arm (15)
Swing to the right simultaneously, it is right before driven swing arm (20) is with swinging to the right behind driven swing arm (12) and the right side, by rectangle sucker (11)
The surface of ceramic chips scraping blade platform (14) is swung to, the ceramic chips picked up (2) are placed on ceramic chips and scraped by rectangle sucker (11)
On piece platform (14), the work of ceramic chips feeding is completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811185559.0A CN109524338B (en) | 2018-10-11 | 2018-10-11 | Oscillating green ceramic chip doctor blade feeding and discharging method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811185559.0A CN109524338B (en) | 2018-10-11 | 2018-10-11 | Oscillating green ceramic chip doctor blade feeding and discharging method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109524338A true CN109524338A (en) | 2019-03-26 |
| CN109524338B CN109524338B (en) | 2022-11-15 |
Family
ID=65772464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811185559.0A Expired - Fee Related CN109524338B (en) | 2018-10-11 | 2018-10-11 | Oscillating green ceramic chip doctor blade feeding and discharging method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109524338B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6145830A (en) * | 1998-01-15 | 2000-11-14 | Fuji Photo Film Co., Ltd. | Sheet material supplying apparatus |
| WO2001010608A1 (en) * | 1999-08-04 | 2001-02-15 | Kabushiki Kaisha Sankyo Seiki Seisakusho | Work transfer device |
| CN105437393A (en) * | 2015-12-16 | 2016-03-30 | 中国电子科技集团公司第二研究所 | Accurate positioning mechanism for green ceramic chip processing |
| CN106976271A (en) * | 2017-04-14 | 2017-07-25 | 扬力集团股份有限公司 | A kind of handling equipment and its method for forcing press |
-
2018
- 2018-10-11 CN CN201811185559.0A patent/CN109524338B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6145830A (en) * | 1998-01-15 | 2000-11-14 | Fuji Photo Film Co., Ltd. | Sheet material supplying apparatus |
| WO2001010608A1 (en) * | 1999-08-04 | 2001-02-15 | Kabushiki Kaisha Sankyo Seiki Seisakusho | Work transfer device |
| CN105437393A (en) * | 2015-12-16 | 2016-03-30 | 中国电子科技集团公司第二研究所 | Accurate positioning mechanism for green ceramic chip processing |
| CN106976271A (en) * | 2017-04-14 | 2017-07-25 | 扬力集团股份有限公司 | A kind of handling equipment and its method for forcing press |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109524338B (en) | 2022-11-15 |
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Granted publication date: 20221115 |
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