CN109524338B - Oscillating green ceramic chip doctor blade feeding and discharging method - Google Patents
Oscillating green ceramic chip doctor blade feeding and discharging method Download PDFInfo
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- CN109524338B CN109524338B CN201811185559.0A CN201811185559A CN109524338B CN 109524338 B CN109524338 B CN 109524338B CN 201811185559 A CN201811185559 A CN 201811185559A CN 109524338 B CN109524338 B CN 109524338B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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Abstract
The invention discloses a method for feeding and discharging a swing type green ceramic chip scraper, which solves the problems of high equipment cost and large occupied space for feeding and discharging of the conventional green ceramic chip scraper feeding and discharging mechanism. Preceding initiative swing arm (8), driven swing arm (12) before the right side, it forms preceding parallelogram four-bar linkage to go up unloading platform base (3) and rectangular sucking disc (11), back initiative swing arm (15), driven swing arm (20) after the right side, it forms back parallelogram four-bar linkage to go up unloading platform base (3) and rectangular sucking disc (11), under the drive of servo motor (4), can realize the swing left or right of rectangular sucking disc (11), accomplish the unloading of scraping the raw ceramic chip between piece platform (14) from raw ceramic chip pay-off platform (1) to raw ceramic chip. The invention has the advantages of low investment cost, simple mechanism, easy operation and floor space saving.
Description
Technical Field
The invention relates to a feeding and discharging mechanism for green ceramic chips, in particular to a feeding and discharging mechanism and a feeding and discharging method used in scraping after hole filling of the green ceramic chips.
Background
The interconnection of the integrated circuits among the green ceramic chips is realized by a green ceramic chip hole filling process, wherein the hole filling process is to fill slurry into holes in the green ceramic chips through a steel mesh; after the hole filling process is carried out on the green ceramic chip, the slurry protruding from the green ceramic chip after hole filling needs to be removed, and the whole removing process is as follows: the raw ceramic chips after hole filling are fed to a raw ceramic chip scraping machine through a feeding and discharging machine, the raw ceramic chips after feeding are subjected to scraping treatment by the raw ceramic chip scraping machine, and the raw ceramic chips after scraping treatment are sent back through the feeding and discharging machine. The prior art equipment for scraping the green ceramic chip has the following characteristics: (1) In the automatic production of the whole integrated circuit product, the height of the existing automatic production line is basically consistent with the height of a scraping blade platform of a scraping blade machine; (2) In the process of picking up the green ceramic chip scraper (namely feeding and discharging the scraping material of the green ceramic chip), the requirement on the positioning error of the green ceramic chip scraper is not high. The feeding and discharging machine adopted by the raw ceramic chip scraping on the existing production line is a feeding and discharging machine with a vertical feeding and discharging horizontal moving structure, the feeding and discharging machine with the structure is realized through an XZ two-axis driving structure, and the feeding and discharging machine has the characteristics of high positioning precision, complex structure and complex operation, and has the problems of high investment cost, large space occupied by feeding and discharging and low feeding efficiency.
Disclosure of Invention
The invention provides a method for feeding and discharging a swing type green ceramic chip doctor blade, which solves the technical problems of high equipment cost and large occupied space for feeding and discharging in the conventional green ceramic chip doctor blade feeding and discharging mechanism.
The invention solves the technical problems by the following technical scheme:
the upper and lower material table bases are arranged between the raw ceramic chip feeding table and the raw ceramic chip scraping table, a speed reducer is arranged on the upper and lower material table bases, a servo motor is fixedly arranged on the lower end face of the upper and lower material table bases and is connected with the input end of the speed reducer, a through shaft extending out of the front and rear horizontal direction double ends is arranged at the output end of the speed reducer, the front end of the through shaft is connected with the lower end of a front driving swing arm through a connecting key, the rear end of the through shaft is connected with the lower end of a rear driving swing arm through another connecting key, the upper end of the front driving swing arm is connected to a left front power arm hinge seat of a front connecting block, the upper end of the rear driving swing arm is connected to a left rear power arm hinge seat of a rear connecting block of a suction cup, a front connecting block of the suction cup and a rear connecting block are respectively arranged on a rectangular suction cup, a right upper and lower driven arm hinge seat is arranged at the right end of a right front and lower driven arm hinge seat, a right lower driven arm hinge seat is hinged to a right lower driven arm hinge seat, and an upper and a right lower driven arm hinge seat is hinged to a right driven arm and is arranged on a right driven arm hinge seat.
The green ceramic chip feeding table is provided with a green ceramic chip; a rotation limiter of a through shaft is arranged on the base of the feeding and discharging platform.
A method for feeding and discharging a swing type green ceramic chip scraper comprises the following steps:
step one, arranging a loading and unloading platform base between a raw ceramic chip feeding platform and a raw ceramic chip scraping platform, arranging a speed reducer on the loading and unloading platform base, fixedly arranging a servo motor on the lower end surface of the loading and unloading platform base, and connecting the servo motor with the input end of the speed reducer;
a through shaft extending along the front-rear horizontal direction is arranged at the output end of the speed reducer, the front end of the through shaft is connected with the lower end of a front driving swing arm through a connecting key, the rear end of the through shaft is connected with the lower end of a rear driving swing arm through another connecting key, the upper end of the front driving swing arm is connected to a left front power arm hinge seat of a suction cup front connecting block, the upper end of the rear driving swing arm is connected to a left rear power arm hinge seat of a suction cup rear connecting block, the suction cup front connecting block and the suction cup rear connecting block are respectively arranged on a rectangular suction cup, a right front upper driven arm hinge seat is arranged at the right end of the suction cup front connecting block, a right front driven swing arm is hinged to the right front upper driven arm hinge seat, the lower end of the right front driven swing arm is hinged to a right front lower driven arm hinge seat, the right front lower driven arm hinge seat is fixedly arranged on an upper and lower material table base, a right rear upper and lower driven arm hinge seat is fixedly arranged on the suction cup rear connecting block, a right rear upper and right rear driven arm hinge seat is hinged to a right rear upper and lower driven arm hinge seat;
thirdly, controlling a servo motor to enable a through shaft to rotate anticlockwise, driving the lower end of a front driving swing arm and the lower end of a rear driving swing arm to rotate towards the lower left side, simultaneously swinging the upper end of the front driving swing arm and the upper end of the rear driving swing arm leftwards, swinging a right front driven swing arm and a right rear driven swing arm to the right above a green ceramic chip feeding table along with leftward swinging, and sucking the green ceramic chips on the green ceramic chip feeding table by the rectangular sucking disc;
the fourth step, control servo motor, make logical axle clockwise rotation, the lower extreme that leads to the axle and drive preceding initiative swing arm and the lower extreme of back initiative swing arm rotate to the upper right side, the upper end of preceding initiative swing arm and the upper end of back initiative swing arm swing right simultaneously, right front driven swing arm and right back driven swing arm are along with swing right, swing rectangular chuck to the raw ceramic chip and scrape the piece platform directly over, the raw ceramic chip that rectangular chuck will suck is placed on raw ceramic chip and is scraped the piece platform, accomplish raw ceramic chip material loading work.
The invention uses the feeding and discharging mechanical arm which can swing to complete the feeding and discharging of the green ceramic chips, has low investment cost, simple mechanism and easy operation, and saves the occupied space.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Detailed Description
The invention is described in detail below with reference to the accompanying drawings:
a swing type raw ceramic chip doctor blade feeding and discharging mechanism comprises a raw ceramic chip feeding table 1 and a raw ceramic chip doctor blade table 14, a feeding and discharging table base 3 is arranged between the raw ceramic chip feeding table 1 and the raw ceramic chip doctor blade table 14, a speed reducer 5 is arranged on the feeding and discharging table base 3, a servo motor 4 is fixedly arranged on the lower end surface of the feeding and discharging table base 3, the servo motor 4 is connected with the input end of the speed reducer 5, a through shaft 6 extending from the two ends in the front-and-back horizontal direction is arranged on the output end of the speed reducer 5, the front end of the through shaft 6 is connected with the lower end of a front driving swing arm 8 through a connecting key 7, the rear end of the through shaft 6 is connected with the lower end of a rear driving swing arm 15 through another connecting key, the upper end of the front driving swing arm 8 is connected with a left front power arm hinge seat 9 of a sucker front connecting block 10, the upper end of a rear driving swing arm 15 is connected to a left rear power arm hinge seat 16 of a suction cup rear connecting block 17, a suction cup front connecting block 10 and the suction cup rear connecting block 17 are respectively arranged on a rectangular suction cup 11, a right front upper driven arm hinge seat 18 is arranged at the right end of the suction cup front connecting block 10, a right front driven swing arm 12 is hinged on the right front upper driven arm hinge seat 18, the lower end of the right front driven swing arm 12 is hinged on a right front lower driven arm hinge seat 13, the right front lower driven arm hinge seat 13 is fixedly arranged on an upper and lower material table base 3, a right rear upper driven arm hinge seat 19 is arranged on the suction cup rear connecting block 17, a right rear driven swing arm 20 is hinged on the right rear upper driven arm hinge seat 19, the lower end of the right rear driven swing arm 20 is hinged on a right rear lower driven arm hinge seat 21, and the right rear lower driven arm hinge seat 21 is fixedly arranged on the upper and lower material table base 3; the front driving swing arm 8, the right front driven swing arm 12, the upper and lower material platform base 3 and the rectangular sucker 11 form a front parallelogram four-bar linkage mechanism, the rear driving swing arm 15, the right rear driven swing arm 20, the upper and lower material platform base 3 and the rectangular sucker 11 form a rear parallelogram four-bar linkage mechanism, and under the driving of the servo motor 4, the left or right swinging of the rectangular sucker 11 can be realized, and the raw ceramic chips are completely fed and discharged from the raw material feeding platform 1 to the raw ceramic chip scraping platform 14.
A green ceramic chip 2 is arranged on the green ceramic chip feeding table 1; a rotation limiter of a through shaft 6 is arranged on the loading and unloading platform base 3; two rotary motion shafts, namely a front driving swing arm 8 and a rear driving swing arm 15 are fixed on the loading and unloading platform base 3, three photoelectric sensors are mounted on the through shaft 6 and used for detecting a zero point and two limit positions of motion, and the taking and placing positions of the rectangular sucker 11 can be determined through the rotation angle of the servo motor 4.
A method for feeding and discharging a swing type green ceramic chip scraper comprises the following steps:
firstly, arranging a loading and unloading platform base 3 between a raw ceramic chip feeding platform 1 and a raw ceramic chip scraping platform 14, arranging a speed reducer 5 on the loading and unloading platform base 3, fixedly arranging a servo motor 4 on the lower end surface of the loading and unloading platform base 3, and connecting the servo motor 4 with the input end of the speed reducer 5;
secondly, a through shaft 6 extending from the front end to the rear end in the horizontal direction is arranged at the output end of the speed reducer 5, the front end of the through shaft 6 is connected with the lower end of a front driving swing arm 8 through a connecting key 7, the rear end of the through shaft 6 is connected with the lower end of a rear driving swing arm 15 through another connecting key, the upper end of the front driving swing arm 8 is connected to a left front power arm hinge base 9 of a suction cup front connecting block 10, the upper end of the rear driving swing arm 15 is connected to a left rear power arm hinge base 16 of a suction cup rear connecting block 17, the suction cup front connecting block 10 and the suction cup rear connecting block 17 are respectively arranged on a rectangular suction cup 11, a right front upper driven arm hinge base 18 is arranged at the right end of the suction cup front connecting block 10, a right rear upper right driven arm hinge base 18 is hinged to the right front upper driven arm hinge base 18, the lower end of the right front driven arm 12 is hinged to a right front driven arm hinge base 13, the right front lower driven arm hinge base 13 is fixedly arranged on an upper right feeding table base 3, a right rear driven arm hinge base 19 is arranged on the suction cup rear connecting block 17, a right driven arm hinge base 19 is hinged to a right driven arm upper driven arm hinge base 20, and a right driven arm lower base 21 is hinged to the right driven arm lower base 21;
thirdly, controlling a servo motor 4 to enable a through shaft 6 to rotate anticlockwise, enabling the through shaft 6 to drive the lower end of a front driving swing arm 8 and the lower end of a rear driving swing arm 15 to rotate towards the lower left side, enabling the upper end of the front driving swing arm 8 and the upper end of the rear driving swing arm 15 to swing towards the left side simultaneously, enabling a right front driven swing arm 12 and a right rear driven swing arm 20 to swing towards the left side along with the swing towards the right side, enabling a rectangular sucker 11 to swing to the position right above a raw ceramic chip feeding table 1, and enabling the rectangular sucker 11 to suck the raw ceramic chips 2 on the raw ceramic chip feeding table 1;
the fourth step, control servo motor 4, make and lead to 6 clockwise rotations, lead to 6 lower extremes that drive the lower extreme of swing arm 8 and the lower extreme of back initiative swing arm 15 and rotate to the upper right side of driving before the axle drives, the upper end of preceding initiative swing arm 8 and the upper end of back initiative swing arm 15 swing right simultaneously, right front driven swing arm 12 and right back driven swing arm 20 are along with swinging right, swing the rectangular sucking disc 11 to the raw ceramic chip scraping table 14 directly over, the raw ceramic chip 2 that rectangular sucking disc 11 will suck is placed on raw ceramic chip scraping table 14, accomplish raw ceramic chip material loading work.
Claims (1)
1. A method for feeding and discharging a swing type green ceramic chip scraper comprises the steps that a rotation limiter of a through shaft (6) is arranged on a base (3) of a feeding and discharging platform; the method is characterized by comprising the following steps:
firstly, arranging an upper and lower material table base (3) between a raw ceramic chip feeding table (1) and a raw ceramic chip scraping table (14), arranging a speed reducer (5) on the upper and lower material table base (3), fixedly arranging a servo motor (4) on the lower end surface of the upper and lower material table base (3), and connecting the servo motor (4) with the input end of the speed reducer (5);
secondly, a through shaft (6) extending along the front-rear horizontal direction double ends is arranged on the output end of the speed reducer (5), the front end of the through shaft (6) is connected with the lower end of a front driving swing arm (8) through a connecting key (7), the rear end of the through shaft (6) is connected with the lower end of a rear driving swing arm (15) through another connecting key, the upper end of the front driving swing arm (8) is connected with a left front power arm hinge seat (9) of a sucker front connecting block (10), the upper end of the rear driving swing arm (15) is connected with a left rear power arm hinge seat (16) of a sucker rear connecting block (17), the sucker front connecting block (10) and the sucker rear connecting block (17) are respectively arranged on a rectangular sucker (11), a right front driven upper arm hinge seat (18) is arranged at the right end of the sucker front connecting block (10), a right front driven upper arm hinge seat (12) is hinged on the right front driven upper arm hinge seat (18), a right front driven lower arm hinge seat (13) is hinged on a right front driven upper driven arm hinge seat (19), a right driven lower arm hinge seat (19) is hinged on a right driven lower driven upper driven arm hinge seat (19), a right driven lower arm hinge seat (19) is arranged on a right driven upper driven arm hinge seat (19), and a right driven lower driven arm hinge seat (19) is hinged on a right driven arm hinge seat (17), the right rear lower driven arm hinge base (21) is fixedly arranged on the upper and lower material table base (3); two rotary motion shafts, namely a front driving swing arm (8) and a rear driving swing arm (15), are fixed on the loading and unloading platform base (3);
thirdly, controlling a servo motor (4) to enable a through shaft (6) to rotate anticlockwise, enabling the through shaft (6) to drive the lower end of a front driving swing arm (8) and the lower end of a rear driving swing arm (15) to rotate towards the left lower side, enabling the upper end of the front driving swing arm (8) and the upper end of the rear driving swing arm (15) to swing towards the left simultaneously, enabling a right front driven swing arm (12) and a right rear driven swing arm (20) to swing a rectangular sucker (11) to be right above a green ceramic chip feeding table (1) along with the leftward swing, and enabling the rectangular sucker (11) to suck the green ceramic chips (2) on the green ceramic chip feeding table (1);
the fourth step, control servo motor (4), make logical axle (6) clockwise rotation, the lower extreme that leads to axle (6) and drive preceding initiative swing arm (8) and the lower extreme of back initiative swing arm (15) rotate to the upper right side, the upper end of preceding initiative swing arm (8) and the upper end of back initiative swing arm (15) are swung right simultaneously, right front driven swing arm (12) and right back driven swing arm (20) are along with the swing right, swing rectangular sucking disc (11) to the raw ceramic chip and scrape piece platform (14) directly over, rectangular sucking disc (11) will be inhaled raw ceramic chip (2) and place on raw ceramic chip scrapes piece platform (14), accomplish raw ceramic chip material loading work.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811185559.0A CN109524338B (en) | 2018-10-11 | 2018-10-11 | Oscillating green ceramic chip doctor blade feeding and discharging method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811185559.0A CN109524338B (en) | 2018-10-11 | 2018-10-11 | Oscillating green ceramic chip doctor blade feeding and discharging method |
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| CN109524338A CN109524338A (en) | 2019-03-26 |
| CN109524338B true CN109524338B (en) | 2022-11-15 |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105437393A (en) * | 2015-12-16 | 2016-03-30 | 中国电子科技集团公司第二研究所 | Accurate positioning mechanism for green ceramic chip processing |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6145830A (en) * | 1998-01-15 | 2000-11-14 | Fuji Photo Film Co., Ltd. | Sheet material supplying apparatus |
| TW483809B (en) * | 1999-08-04 | 2002-04-21 | Sankyo Seiki Seisakusho Kk | Workpiece transporting device |
| CN106976271A (en) * | 2017-04-14 | 2017-07-25 | 扬力集团股份有限公司 | A kind of handling equipment and its method for forcing press |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105437393A (en) * | 2015-12-16 | 2016-03-30 | 中国电子科技集团公司第二研究所 | Accurate positioning mechanism for green ceramic chip processing |
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