CN109507561B - Semiconductor characteristic stability measuring system based on variable magnetic field and free electrode - Google Patents

Abstract

The invention discloses a semiconductor characteristic stability measuring system based on a variable magnetic field and a free electrode, which comprises a magnet positioner, a free sample stage and a magnet-analyzer separation module, wherein the magnet positioner, the free sample stage and the magnet-analyzer separation module are made of diamagnetic materials such as PLA plastics and copper metal materials, and the magnet is far away from a probe of a testing system, so that the system is separated from the magnet in the aspect of magnetism, the stability of magnet control and sample property measurement is ensured, and the blank that the existing semiconductor parameter measuring system cannot integrate the magnetic field and the optical field is filled. On the other hand, the magnet has high deflection freedom, can provide a magnetic field with continuously adjustable size, angle and direction, and can support the experiment to research the uniform change of independent variables.

Description

A Stable Measurement System of Semiconductor Properties Based on Variable Magnetic Field and Free Electrode

technical field

The invention relates to the field of semiconductor materials, in particular to a stable measurement system of semiconductor characteristics based on a variable magnetic field and a free electrode.

Background technique

The general purpose of semiconductor parameter measurement system does not involve the magnetic module. Usually, the hardware of the semiconductor parameter measurement system is mostly composed of magnetic metal materials. In the magnetic field, the hardware is easy to shift to a given position, which seriously affects the stability of data measurement, and even Loss of established functions, so only functional accessories such as temperature and light intensity are provided. For example, the test platforms (including bases, measuring arms, probes, etc.) of the semiconductor parameter analyzers currently on the market are mostly magnetic alloy materials. When an external magnetic field is required for the experiment, when the magnetic field source (magnet) is close to the sample, it will also The magnetic alloy part of the instrument has a strong attraction, so that the test probe is deviated from the position and is attracted by the magnet, which cannot measure the data, and will easily cause serious scratches to the sample. In recent years, with the development of multiferroic materials, ferroelectric photovoltaic materials with both magnetoelectric coupling effect and anomalous photovoltaic effect have gradually become a research hotspot. For magnetoelectric coupling materials, the external magnetic field is an extremely important research factor. A device that can provide a uniformly varying magnetic field without adversely affecting the photovoltaic effect measurement system has become an urgent need for research in the field of multifunctional materials.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a stable measurement system of semiconductor characteristics based on a variable magnetic field and a free electrode, so as to make up for the blank that the semiconductor parameter measurement system cannot integrate the magnetic field and the optical field.

The technical scheme adopted in the present invention is:

A stable measurement system of semiconductor characteristics based on variable magnetic field and free electrode, which includes a magnet positioner, a free sample stage, a magnet-analyzer separation module, and the magnet positioner includes a magnet space frame, a magnet, a plastic backing plate, a first a copper wire, a second copper wire, and a Teslameter,

The free sample stage is placed on the upper surface of the magnet space frame. There are vertically arranged channels on both sides of the magnet space frame. The plastic lining plate is placed inside the magnet space frame. The magnet is placed on the plastic lining plate. A first rotating copper rod and a second rotating copper rod are rotatable above the lining plate, one end of the first copper wire is fixed on the first rotating copper rod, and the other end of the first copper wire goes around one side of the plastic lining plate The bottom is fixed on the first rotating copper rod, one end of the second copper wire is fixed on the second rotating copper rod, and the other end of the second copper wire goes around the bottom of the other side of the plastic lining plate and is fixed on the second rotating copper rod. On the rod, both ends of the first rotating copper rod and the second rotating copper rod pass through the side of the magnet space frame,

The free sample stage includes a porous plate, agate balls, a first indium electrode and a second indium electrode, the porous plate is placed on the magnet space frame, and at least three circular holes are arranged on the surface of the porous plate, two of which are respectively used for setting The first indium electrode and the second indium electrode; the agate ball is placed in any other circular hole, and forms a triangular array with the positions of the first indium electrode and the second indium electrode; the sample is placed on the plane formed by the triangular array and parallel to the The perforated plate is set, the sample is in full contact with the first indium electrode and the second indium electrode, and the agate ball balances the sample by changing the position of the holes on the perforated plate;

The test probe of the Teslameter and the upper surface of the sample, the Teslameter is used to detect the magnetic field strength at the sample;

The magnet-analyzer separation module includes two wires, the first indium electrode and the second indium electrode are respectively connected to one end of a wire, and the other ends of the two wires respectively pass through the channels in the corresponding sides of the magnet space frame and are separated from the magnet. The hole at the bottom of the space frame extends horizontally to the outside for a distance of L length, and the magnetic field intensity H<1Oe generated by the magnet at the other end of the two wires. The other ends of the two wires are respectively connected to the detection channels of the semiconductor parameter analyzer 21 .

Further, the ends of one end of the first rotating copper rod and the second rotating copper rod passing through the side surface of the magnet space frame are relatively fixed by the fixing rod and the dovetail clip.

Further, limit blocks are provided on the sides of the first rotating copper rod and the second rotating copper rod corresponding to the magnet space frame, and the relative positions of the first rotating copper rod and the second rotating copper rod are prevented by fixing the relative positions through the twisted and deformed limit blocks. fall off.

Further, the plastic lining plate, the magnet space frame, and the perforated plate are formed of PLA plastic.

Further, the first rotating copper rod and the second rotating copper rod are plastically deformed from cold-worked copper.

Further, the magnet space frame is designed by AutoCAD drawing software and processed by Cura slicing software, and the shape features are obvious and completely original. The perforated plate is designed by AutoCAD drawing software and processed by Cura slicing software. The shape features are obvious and completely original.

Further, the distance between the center of the first indium electrode and the center of the second indium electrode is 1 cm.

Further, the free sample stage can arbitrarily adjust the relative positions of the agate ball, the first indium electrode and the second indium electrode, and directly place the sample on it without any other operations.

Further, the size of the magnetic field of the magnet positioner is adjustable in the range of 0 to Hmax, where Hmax is the magnetic field strength of the magnet at a distance of 1 cm from the magnet. The size of the Hmax can be adjusted by replacing the magnet material or increasing or decreasing the number of magnets. The magnetic field strength of the magnet positioner is continuous within the adjustable range.

Further, the magnetic field direction of the magnet positioner is adjustable.

Further, the magnetic field angle of the magnet positioner is adjustable within the range of 0-45°. The setting angle of the magnetic field angle of the magnet positioner within the adjustable range is continuous.

Further, the wires of the magnet-analyzer separation module are made of diamagnetic conductor material.

The present invention adopts the above technical scheme, adopts diamagnetic materials such as PLA plastic and copper metal material as the main body of the system, and keeps the magnet away from the probe of the test system, so that the system is separated from the magnet in the magnetic force, so as to ensure the stability of the control of the magnet and the measurement of the sample properties. It makes up for the gap that the existing semiconductor parameter measurement system cannot integrate the magnetic field and the optical field. uniform variation of the variable.

Description of drawings

The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments;

1 is a schematic structural diagram of a semiconductor characteristic stability measurement system based on a variable magnetic field and a free electrode of the present invention;

2 is a schematic diagram of the working principle of a magnet positioner, a free sample stage and a magnet-analyzer separation module of a semiconductor characteristic stable measurement system based on a variable magnetic field and a free electrode of the present invention;

FIG. 3 is a schematic structural diagram of a backing plate of a semiconductor characteristic stable measurement system based on a variable magnetic field and a free electrode according to the present invention;

4 is a schematic diagram of the upper surface of a porous plate of a semiconductor characteristic stable measurement system based on a variable magnetic field and a free electrode of the present invention;

5 is a schematic diagram of the bottom structure of a porous plate of a semiconductor characteristic stable measurement system based on a variable magnetic field and a free electrode according to the present invention;

6 is a schematic structural diagram of a magnet space frame of a semiconductor characteristic stable measurement system based on a variable magnetic field and a free electrode according to the present invention;

FIG. 7 is a schematic bottom view of a magnet space frame of a semiconductor characteristic stable measurement system based on a variable magnetic field and a free electrode according to the present invention.

Detailed ways

As shown in one of Figures 1-7, the present invention discloses a semiconductor characteristic stable measurement system based on a variable magnetic field and a free electrode, which includes a magnet positioner 1, a free sample stage 2, and a magnet-analyzer separation module 3 , the magnet positioner 1 includes a magnet space frame 13, a magnet 4, a plastic backing plate 5, a first copper wire 6, a second copper wire 7 and a Tesla meter 14,

The free sample stage 2 is placed on the upper surface of the magnet space frame 13. There are vertically arranged channels on both sides of the magnet space frame 13. The plastic lining plate 5 is arranged between the two sides of the magnet space frame 13. The magnets 4 can be Choose the positive and negative directions and place them on the plastic liner 5 to control the N/S pole direction of the magnet, thereby providing the magnetic field direction of the magnetic field environment of the sample 22; the magnet space frame 13 is provided with a first rotation corresponding to the rotation above the plastic liner 5 The copper rod 8 and the second rotating copper rod 9, one end of the first copper wire 6 is fixed on the first rotating copper rod 8, and the other end of the first copper wire 6 goes around the bottom of one side of the plastic lining plate 5 and is fixed on the first rotating copper rod 8. On a rotating copper rod 8, one end of the second copper wire 7 is fixed on the second rotating copper rod 9, and the other end of the second copper wire 7 goes around the bottom of the other side of the plastic lining plate 5 and is fixed on the second rotating copper rod On the rod 9, both ends of the first rotating copper rod 8 and the second rotating copper rod 9 pass through the side surface of the magnet space frame 13,

Specifically, by adjusting the first rotating copper rod 8 and the second rotating copper rod 9, the lengths of the first copper wire 6 and the second copper wire 7 in the vertical direction are changed synchronously to lift and lower the plastic lining plate 5, and the distance between the magnet 4 and the sample 22 is changed. distance, thereby changing the magnetic field strength of the sample 22; by adjusting the first rotating copper rod 8 and the second rotating copper rod 9, in order to change the relative length of the vertical part of the first copper wire 6 and the second copper wire 7 to rotate the plastic lining plate 5, and then change the angle between the magnet 4 and the sample 22, thereby changing the direction of the magnetic field that the sample 22 is subjected to; each time the first rotating copper rod 8 and the second rotating copper rod 9 are adjusted, at the end through the fixed rod 12 and the two ends of the rod. The dovetail clip 10 is fixed.

The free sample stage 2 is used to place the sample 22 horizontally, and can freely select the test area in the sample 22, which can be directly placed and removed for convenient testing. The free sample stage 2 includes a porous plate 15, agate balls 16, a first indium electrode 17 and a second indium electrode 18. The porous plate 15 is placed on the magnet space frame 13, and the upper surface of the porous plate 15 is provided with at least three circular holes, wherein The two circular holes are respectively used to set the first indium electrode 17 and the second indium electrode 18; the agate ball 16 is placed in any other circular hole, and by changing the placement position of the agate ball 16 in the plurality of holes, the agate ball 16 and the positions of the first indium electrode 17 and the second indium electrode 18 form a triangular array; the sample 22 is placed on the plane formed by the triangular array and parallel to the porous plate 15, and the sample 22 is connected with the first indium electrode 17 and the second indium electrode 15. 18 Fully contacted, the agate ball 16 balances the sample 22 by changing the position of the holes on the perforated plate 15;

The test probe of the teslameter 14 is connected to the upper surface of the sample 22. The teslameter 14 is used to detect the magnetic field strength at the sample 22, and adjust the magnetic field by manual feedback.

The magnet-analyzer separation module 3 is used to separate the magnet from the test probe of the semiconductor analyzer and other metal materials, so as to prevent the magnet and the test probe from attracting each other to damage the system test structure and affect the test of the sample 22 . The magnet-analyzer separation module 3 includes two wires 19 , the first indium electrode 17 and the second indium electrode 18 are respectively connected to one end of a wire 19 , and the other ends of the two wires 19 pass through the magnet space frame 13 corresponding to each other. The channel in the side extends horizontally from the hole at the bottom of the magnet space frame 13 to the outside for a distance of L length, and the magnetic field strength H<1Oe generated by the magnet 4 at the other end of the other end of the two wires 19 . The other ends of the two wires 19 are respectively connected to the detection channels of the semiconductor parameter analyzer 21 .

The magnet-analyzer separation module 3 has the function of keeping the magnet 4 away from the probe of the test system, so that the semiconductor parameter analyzer 21 is magnetically separated from the magnet 4, and the ends of the two wires are connected to the test channel of the semiconductor parameter analyzer 21, and the magnet 4. The magnetic field strength H<1Oe generated at the end is not enough to make the magnet 4 change the probe position of the semiconductor parameter analyzer 21, so as to ensure the control of the magnet 4 and the stability of the property measurement of the sample 22, which makes up for the existing semiconductor The parameter measurement system cannot integrate the magnetic field and the optical field. On the other hand, the magnet 4 has a high degree of freedom of displacement, and can provide a magnetic field whose size, angle and direction are continuously adjustable, which can support the uniform change of independent variables in experimental research.

Further, the ends of one end of the first rotating copper rod 8 and the second rotating copper rod 9 passing through the side surface of the magnet space frame 13 are relatively fixed by the fixing rod 12 and the dovetail clip 10 .

Further, limit blocks 20 are provided at the sides of the first rotating copper rod 8 and the second rotating copper rod 9 corresponding to the magnet space frame 13, and the relative positions are fixed by the twisted and deformed limit blocks 20 to prevent the first rotating copper rod 8 and The second rotating copper rod 9 falls off.

Further, the plastic lining plate 5, the magnet space frame 13, and the porous plate 15 are formed of PLA plastic.

Further, the first rotating copper rod 8 and the second rotating copper rod 9 are plastically deformed by cold working copper.

Further, the magnet space frame 13 is designed by AutoCAD drawing software and processed by Cura slicing software. The shape features are obvious and completely original. The perforated plate 15 is designed by AutoCAD drawing software and processed by Cura slicing software. The shape features are obvious and completely original. Then PLA plastic is printed by 3D printing technology, and the softening temperature is Tmax≥70℃, so the system working environment temperature T≤60℃.

Further, the distance between the center of the first indium electrode 17 and the center of the second indium electrode 18 is 1 cm. Therefore, the adjustable distance between the test electrodes of the sample 22 should be about 1 cm. However, because the placement position of the agate ball 16 in the hole of the free sample stage 2 can be changed, the position of the sample 22 can be adjusted freely, which increases the distance between the two electrodes of the sample 22. The matching adaptability of the distance d to the distance D.

Further, the free sample stage 2 can arbitrarily adjust the relative positions of the agate ball 16 and the first indium electrode 17 and the second indium electrode 18 , and directly place the sample 22 on it without any other operations.

The magnet positioner 1, the free sample stage 2, and the magnet-analyzer separation module 3 are made of diamagnetic materials such as PLA plastic and copper metal materials. PLA (polylactic acid) plastic is a new type of bio-based and renewable biodegradable material. The material is made of starch raw materials proposed by renewable plant resources (such as cereal husks, straw, and wheat straw). It is a green polymer material with good biodegradability. It is completely degraded under specific conditions, and finally generates carbon dioxide and water, which does not pollute the environment, which is very beneficial to the protection of the environment. It is recognized as an environmentally friendly material. It is proved that the softening temperature is 80℃, so the system working environment temperature can be below 60℃, covering the general working environment temperature range.

Further, the size of the magnetic field of the magnet positioner 1 is adjustable within the range of 0 to Hmax, where Hmax is the magnetic field strength of the magnet 4 at a distance of 1 cm from the magnet 4 . The size of the Hmax can be adjusted by replacing the material of the magnet 4 or increasing or decreasing the number of the magnet 4 . The magnetic field strength of the magnet positioner 1 is set continuously within the adjustable range.

Further, the magnetic field direction of the magnet positioner 1 is adjustable.

Further, the magnetic field angle of the magnet positioner 1 is adjustable within the range of 0-45°. The setting angle of the magnetic field angle of the magnet positioner 1 is continuous within the adjustable range.

Further, the wire 19 of the magnet-analyzer separation module 3 is made of diamagnetic conductor material.

The present invention adopts the above technical scheme, adopts diamagnetic materials such as PLA plastic and copper metal material as the main body of the system, and keeps the magnet 4 away from the probe of the test system, so that the system is separated from the magnet 4 in the magnetic force, and the control of the magnet 4 and the sample 22 is ensured. The stability of the property measurement makes up for the gap that the existing semiconductor parameter measurement system cannot integrate the magnetic field and the optical field; Uniform changes in independent variables can be supported in experimental studies.

Claims (10)

1. a semiconductor characteristic stability measurement system based on variable magnetic field and free electrode, is characterized in that: it comprises magnet positioner, free sample stage, magnet-analyzer separation module, and magnet positioner comprises magnet space frame, magnet , plastic backing plate, first copper wire, second copper wire and Tesla meter, The free sample stage is placed on the upper surface of the magnet space frame. There are vertically arranged channels on both sides of the magnet space frame. The plastic lining plate is arranged between the two sides of the magnet space frame. The frame is provided with a first rotating copper rod and a second rotating copper rod corresponding to the top of the plastic lining plate. The side bottom is fixed on the first rotating copper rod, one end of the second copper wire is fixed on the second rotating copper rod, and the other end of the second copper wire goes around the bottom of the other side of the plastic lining plate and is fixed on the second rotating copper rod. On the copper rod, both ends of the first rotating copper rod and the second rotating copper rod pass through the side of the magnet space frame, The free sample stage includes a porous plate, agate balls, a first indium electrode and a second indium electrode, the porous plate is placed on the magnet space frame, and at least three circular holes are arranged on the surface of the porous plate, two of which are respectively used for setting The first indium electrode and the second indium electrode; the agate ball is placed in any other circular hole, and forms a triangular array with the positions of the first indium electrode and the second indium electrode; the sample is placed on the plane formed by the triangular array and parallel to the The perforated plate is set, the sample is in full contact with the first indium electrode and the second indium electrode, and the agate ball balances the sample by changing the position of the holes on the perforated plate; The test probe of the Teslameter and the upper surface of the sample, the Teslameter is used to detect the magnetic field strength at the sample; The magnet-analyzer separation module includes two wires, the first indium electrode and the second indium electrode are respectively connected to one end of a wire, and the other ends of the two wires respectively pass through the channels in the corresponding sides of the magnet space frame and are separated from the magnet. The hole at the bottom of the space frame extends horizontally to the outside for a distance of L length. The magnetic field intensity H<1Oe generated by the magnet at the other end of the two wires is connected to the detection channel of the semiconductor parameter analyzer respectively. 2 . The semiconductor characteristic stability measurement system based on variable magnetic field and free electrode according to claim 1 , wherein the first rotating copper rod and the second rotating copper rod pass through one end of the side surface of the magnet space frame. 3 . The end is relatively fixed by the fixing rod and the dovetail clip. 3 . The semiconductor characteristic stability measurement system based on variable magnetic field and free electrode according to claim 1 , wherein: the first rotating copper rod and the second rotating copper rod are arranged at the side of the corresponding magnet space frame. 4 . A limit block is provided, and the relative position is fixed by the twisted and deformed limit block to prevent the first rotating copper rod and the second rotating copper rod from falling off. 4 . The semiconductor characteristic stability measurement system based on variable magnetic field and free electrodes according to claim 1 , wherein the plastic backing plate, the magnet space frame and the porous plate are formed of PLA plastic. 5 . 5 . The semiconductor characteristic stability measurement system based on variable magnetic field and free electrode according to claim 1 , wherein the first rotating copper rod and the second rotating copper rod are plastically deformed from cold-worked copper. 6 . . 6 . The semiconductor characteristic stability measurement system based on a variable magnetic field and a free electrode according to claim 1 , wherein the distance between the center of the first indium electrode and the center of the second indium electrode is 1 cm. 7 . 7. A semiconductor characteristic stability measurement system based on variable magnetic field and free electrodes according to claim 1, wherein the magnetic field size of the magnet positioner is adjustable in the range of 0~Hmax, and Hmax is the magnet The magnetic field strength at a distance of 1cm from the magnet, the size of Hmax is adjusted by replacing the magnet material or increasing or decreasing the number of magnets, and the magnetic field strength of the magnet positioner is continuous within the adjustable range. 8 . The semiconductor characteristic stability measurement system based on a variable magnetic field and a free electrode according to claim 1 , wherein the magnetic field direction of the magnet positioner is adjustable. 9 . 9 . The semiconductor characteristic stability measurement system based on a variable magnetic field and a free electrode according to claim 1 , wherein the magnetic field angle of the magnet positioner is adjustable within a range of 0 to 45°, and the magnetic field is adjustable. 10 . The setting angle of the angle within the adjustable range is continuous. 10 . The semiconductor characteristic stability measurement system based on a variable magnetic field and a free electrode according to claim 1 , wherein the wire of the magnet-analyzer separation module is made of a diamagnetic conductor material. 11 .

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