CN109507561A - A kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode - Google Patents
A kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode Download PDFInfo
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- CN109507561A CN109507561A CN201811375308.9A CN201811375308A CN109507561A CN 109507561 A CN109507561 A CN 109507561A CN 201811375308 A CN201811375308 A CN 201811375308A CN 109507561 A CN109507561 A CN 109507561A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2648—Characterising semiconductor materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
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Abstract
The present invention discloses a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode, it includes magnet deflection machine, free sample stage, magnet-analyzer separation module, the magnet deflection machine, free sample stage, magnet-analyzer separation module use the diamagnetic materials such as PLA plastics and copper metal material, make magnet far from test macro probe, separate system in magnetics with magnet, guarantee the stability of magnet control with properties of samples measurement, compensating for existing semiconductor parameter measuring system can not be by magnetic field, the integrated blank of light field.On the other hand, magnet displacement freedom degree is high, it is possible to provide the continuously adjustable magnetic field in size, angle, direction can support the even variation of experimental study independent variable.
Description
Technical field
The present invention relates to field of semiconductor materials more particularly to it is a kind of based on the semiconductor of variable magnetic field and free electrode spy
Property stably measured system.
Background technique
General semiconductor parameter measuring system purposes is not related to magnetics module, it is generally the case that semiconductor parameter is surveyed
Amount system hardware is mostly made of magnetic metal material, and in magnetic field, hardware is easy offset commitment positions, seriously affects DATA REASONING
Stability, or even lose set function, thus only provide the function accessories such as temperature, light intensity.For example, partly leading on the market at present
The test platform (including pedestal, test arm, probe etc.) of body parameter analyzer is mostly magnetic alloy material, when experiment needs external magnetic
When, will also have a powerful attraction to instrument magnetic alloy part while magnetic field sources (magnet) are close to sample, thus
Make to test probe from deviating from the position by magnet absorption, be unable to measure data, is also easy that serious damage will be caused to sample.In recent years with
The development of multi-iron material, while there is the ferroelectricity photovoltaic material of magnetoelectric effect and photovoltaic effect to become people gradually
Research hotspot, for magneto-electric coupled material, externally-applied magnetic field is extremely important research factor, because the invention one kind can provide
Even variation magnetic field becomes compeling for multifunctional material area research without the device adversely affected to photovoltaic effect measuring system
It is essential and wants.
Summary of the invention
The purpose of the present invention is to provide a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode
System, making up semiconductor parameter measuring system can not be by magnetic field and the integrated blank of light field.
The technical solution adopted by the present invention is that:
A kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode comprising magnet deflection machine, freedom
Sample stage, magnet-analyzer separation module, magnet deflection machine include magnet spaces frame, magnet, plastics liner disk, the first copper wire,
Two copper wires and Tesla meter,
Free sample stage is placed in the upper surface of magnet spaces frame, be respectively provided in magnet spaces frame two sides be vertically arranged it is logical
Road, plastics liner disk are placed in inside magnet spaces frame, and magnet is placed in plastics liner disk, above the plastics liner disk in magnet spaces frame
Equipped with rotatable first rotation copper bar and the second rotation copper bar, one end of the first copper wire is fixed on the first rotation copper bar, the
The other end of one copper wire around being fixed on the first rotation copper bar after a side bottom of plastics liner disk, fix by one end of the second copper wire
In on the second rotation copper bar, the other end of the second copper wire is around being fixed on the second rotation copper bar after another side bottom of plastics liner disk
On, the first rotation copper bar and second rotates the side that copper bar both ends both pass through magnet spaces frame,
Free sample stage includes that porous plate, agate ball, the first indium electrode and the second indium electrode, porous plate are placed in magnet spaces frame
On, porous plate upper surface is equipped at least three circular hole, and two of them circular hole is respectively used to the first indium electrode of setting and the second indium electricity
Pole;Agate ball is placed in other any circular holes, and forms triangular array with the position of the first indium electrode and the second indium electrode;
Sample is placed in the plane of triangular array formation and is parallel to porous plate setting, sample and the first indium electrode, the second indium electricity
Pole comes into full contact with, and agate ball carrys out balance sample by the position of change hole on porous plate;
The upper surface of the test probe and sample of Tesla meter, Tesla meter is for magnetic field strength at test sample;
The magnet-analyzer separation module includes two conducting wires, and the first indium electrode and the second indium electrode are respectively correspondingly connected with one
One end of bar conducting wire, the other end of two conducting wires are each passed through the channel in magnet spaces frame corresponding side surface and from magnet spaces framves
The distance of the hole of bottom horizontal extension L length outward, magnet are strong in the magnetic field that the end of the other end of two conducting wires generates
Spend H < 1Oe.The other end of two conducting wires is respectively connected to the detection channel of Semiconductor Parameter Analyzer 21.
Further, the end of one end that the first rotation copper bar and the second rotation copper bar pass through magnet spaces frame side passes through
Fixed link cooperates dovetail clip relatively fixed.
Further, the lateral position of the first rotation copper bar and the second rotation copper bar respective magnet space frame is equipped with limited block,
And prevent the first rotation copper bar and second from rotating falling off for copper bar by the fixed relative position of the limited block of twist distortion.
Further, the plastics liner disk, magnet spaces frame, porous plate are by PLA plastic shaping.
Further, the first rotation copper bar, the second rotation copper bar are formed by hard cooper plastic deformation.
Further, the magnet spaces frame is designed by AutoCAD mapping software, is processed by Cura Slice Software, shape
Shape feature is obvious, completely original.The porous plate is designed by AutoCAD mapping software, is processed by Cura Slice Software, shape
Feature is obvious, completely original.
Further, the spacing between the first indium electrode centers and the second indium electrode centers is 1cm.
Further, the free sample stage can arbitrarily adjust the agate ball and the first indium electrode, the second indium electrode
Relative position, directly sample is put up, be not necessarily to other any operations.
Further, the magnetic field size of the magnet deflection machine is adjustable within the scope of 0 ~ Hmax, Hmax be magnet away from
From the magnetic field strength at magnet 1cm.The size of the Hmax is adjusted by replacement magnet material or increase and decrease magnet number.Institute
Setting magnetic field strength of the magnet deflection machine magnetic field size stated in adjustable extent is continuous.
Further, the magnetic direction of the magnet deflection machine is adjustable.
Further, the magnetic field angle of the magnet deflection machine is adjustable within the scope of 0 ~ 45 °.The magnet deflection machine
Setting angle of the magnetic field angle in adjustable extent be continuous.
Further, the magnet-analyzer separation module conducting wire is made of anti-magnetic conductor material.
The invention adopts the above technical scheme, using the diamagnetic materials such as PLA plastics and copper metal material as system body,
And make magnet far from test macro probe, it separates system on magneticaction with magnet, guarantees magnet control and properties of samples
The stability of measurement, compensating for existing semiconductor parameter measuring system can not be by magnetic field, the integrated blank of light field;Another party
Face, it is high that magnet conjugates freedom degree, it is possible to provide the continuously adjustable magnetic field in size, angle, direction can support experimental study independent variable
Even variation.
Detailed description of the invention
The present invention is described in further details below in conjunction with the drawings and specific embodiments;
Fig. 1 is a kind of structural representation of the characteristic of semiconductor stably measured system based on variable magnetic field and free electrode of the present invention
Figure;
Fig. 2 is a kind of magnet displacement of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode of the present invention
Device, free sample stage and magnet-analyzer separation module operation principle schematic diagram;
Fig. 3 is that a kind of liner disk structure of the characteristic of semiconductor stably measured system based on variable magnetic field and free electrode of the present invention is shown
It is intended to;
Fig. 4 is a kind of the upper of porous plate of the characteristic of semiconductor stably measured system based on variable magnetic field and free electrode of the present invention
Schematic surface;
Fig. 5 is a kind of bottom of the porous plate of the characteristic of semiconductor stably measured system based on variable magnetic field and free electrode of the present invention
Portion's structural schematic diagram;
Fig. 6 is a kind of magnet spaces frame of the characteristic of semiconductor stably measured system based on variable magnetic field and free electrode of the present invention
Structural schematic diagram;
Fig. 7 is a kind of magnet spaces frame of the characteristic of semiconductor stably measured system based on variable magnetic field and free electrode of the present invention
Elevational schematic view.
Specific embodiment
As shown in one of Fig. 1-7, the invention discloses a kind of characteristic of semiconductor based on variable magnetic field and free electrode is steady
Determine measuring system comprising magnet deflection machine 1, free sample stage 2, magnet-analyzer separation module 3, magnet deflection machine 1 include
Magnet spaces frame 13, magnet 4, plastics liner disk 5, the first copper wire 6, the second copper wire 7 and Tesla meter 14,
Free sample stage 2 is placed in the upper surface of magnet spaces frame 13, is respectively provided with and is vertically arranged in 13 two sides of magnet spaces frame
Channel, plastics liner disk 5 be set to magnet spaces frame 13 two sides between, the magnet 4 may be selected positive and negative both direction and be placed in modeling
Expect to control magnet N/S extreme direction, and then to can provide the magnetic direction of 22 magnetic field environment of sample in liner disk 5;Magnet spaces frame 13
Rotation is equipped with the first rotation copper bar 8 and the second rotation copper bar 9 above corresponding plastics liner disk 5, and one end of the first copper wire 6 is fixed on the
On one rotation copper bar 8, the other end of the first copper wire 6 is around being fixed on the first rotation copper bar 8 after a side bottom of plastics liner disk 5
On, one end of the second copper wire 7 is fixed on the second rotation copper bar 9, and the other end of the second copper wire 7 is around the another of plastics liner disk 5
It is fixed on after side bottom on the second rotation copper bar 9, the first rotation copper bar 8 and the second rotation 9 both ends of copper bar both pass through magnet spaces
The side of frame 13,
Specifically, by adjusting the first rotation copper bar 8 and the second rotation copper bar 9, synchronous change the first copper wire 6 and the second copper wire 7
The length of vertical direction goes up and down plastics liner disk 5, changes magnet 4 at a distance from sample 22, to change magnetic field suffered by sample 22
Intensity;By adjusting the first rotation copper bar 8 and the second rotation copper bar 9, to change 7 vertical component effect of the first copper wire 6 and the second copper wire
The relative length divided carrys out rotary plastic liner disk 5, and then changes the angle of magnet 4 and sample 22, to change magnetic suffered by sample 22
The direction of field;The first rotation copper bar 8 and the second rotation copper bar 9 are adjusted every time, all pass through fixed link 12 and both ends in end
Dovetail clip 10 is fixed.
Free sample stage 2 can freely select the test zone in sample 22 for being horizontally arranged sample 22, can directly put
It sets and removes, facilitate test.Free sample stage 2 includes porous plate 15, agate ball 16, the first indium electrode 17 and the second indium electrode
18, porous plate 15 is placed on magnet spaces frame 13, and 15 upper surface of porous plate is equipped at least three circular hole, two of them circular hole difference
For the first indium electrode 17 and the second indium electrode 18 to be arranged;Agate ball 16 is placed in other any circular holes, and by changing Ma
Placement location of the Nao ball 16 in multiple holes forms agate ball 16 and the position of the first indium electrode 17 and the second indium electrode 18
Triangular array;Sample 22 is placed in the plane of triangular array formation and is parallel to the setting of porous plate 15, sample 22 and the
One indium electrode 17, the second indium electrode 18 come into full contact with, position of the agate ball 16 by change hole on porous plate 15, Lai Pingheng
Sample 22;
The upper surface of the test probe and sample 22 of Tesla meter 14, Tesla meter 14 are used for magnetic field strength at test sample 22,
With manual feedback flux control.
The magnet-analyzer separation module 3 is used for the test probe and other metals of magnet and semiconductor analysis instrument
Material separation prevents magnet and test probe from attracting each other and destroying system testing structure, influences the test of sample 22.The magnet 4-
Analyzer separation module 3 includes two conducting wires 19, and the first indium electrode 17 and the second indium electrode 18 are respectively correspondingly connected with a conducting wire
19 one end, the other end of two conducting wires 19 are each passed through the channel in 13 corresponding side surface of magnet spaces frame and from magnet spaces framves
The distance of the hole of 13 bottoms horizontal extension L length outward, the magnetic that magnet 4 is generated in the end of the other end of two conducting wires 19
Field intensity H < 1Oe.The other end of two conducting wires 19 is respectively connected to the detection channel of Semiconductor Parameter Analyzer 21.
Magnet-analyzer separation module 3 has the function of making magnet 4 far from test macro probe, makes semiconductor parameter point
Analyzer 21 separates in magnetics with magnet 4, and the end of two conducting wires is connected with 21 testing channel of Semiconductor Parameter Analyzer, magnet
The 4 magnetic field strength H < 1Oe generated in end, the field strength are insufficient to allow the probe of the change Semiconductor Parameter Analyzer 21 of magnet 4
Position guarantees the stability of control and the measurement of 22 property of sample of magnet 4, and compensating for existing semiconductor parameter measuring system can not
By magnetic field, the integrated blank of light field.On the other hand, it is high to conjugate freedom degree for magnet 4, it is possible to provide size, angle, direction continuously may be used
The magnetic field of tune can support the even variation of experimental study independent variable.
Further, the first rotation copper bar 8 and the second rotation copper bar 9 pass through the end of one end of 13 side of magnet spaces frame
Cooperate dovetail clip 10 relatively fixed by fixed link 12.
Further, the lateral position of the first rotation copper bar 8 and the second rotation 9 respective magnet space frame 13 of copper bar is equipped with limit
Block 20, and prevent the first rotation copper bar 8 and second from rotating the de- of copper bar 9 by the fixed relative position of the limited block of twist distortion 20
It falls.
Further, the plastics liner disk 5, magnet spaces frame 13, porous plate 15 are by PLA plastic shaping.
Further, the first rotation copper bar 8, second rotates copper bar 9 and is formed by hard cooper plastic deformation.
Further, the magnet spaces frame 13 is designed by AutoCAD mapping software, is processed by Cura Slice Software,
Shape feature is obvious, completely original.The porous plate 15 is designed by AutoCAD mapping software, is processed by Cura Slice Software,
Shape feature is obvious, completely original.PLA plastic shaping, softening temperature Tmax >=70 DEG C are printed by 3D printing technique again, therefore are
System operating ambient temperature T≤60 DEG C.
Further, the spacing between 17 center of the first indium electrode and 18 center of the second indium electrode is 1cm.Therefore sample
Adjustable spacing between the test electrode of product 22 should be 1cm or so, but because agate ball 16 can be changed in the hole of free sample stage 2
Placement location, can freely adjust 22 position of sample, increase the matching of distance d and space D between 22 the two poles of the earth electrode of sample
Adaptability.
Further, the free sample stage 2 can arbitrarily adjust the agate ball 16 and the first indium electrode 17, the second indium
The relative position of electrode 18 directly puts up sample 22, is not necessarily to other any operations.
The magnet deflection machine 1, free sample stage 2, magnet-analyzer separation module 3 use PLA plastics and copper metal material
The diamagnetic materials such as material, PLA(polylactic acid) plastics are that a kind of novel biology base and recyclable organism degradable material, use are renewable
The starch raw material that is proposed of plant resources (such as the not plump shell of cereal, straw, straw) be made, be Green Polymer Material, have
Good biodegradability, can be degradable under given conditions by microorganism in nature after use, ultimately generates dioxy
Change carbon and water, free from environmental pollution, this is highly beneficial to protection environment, is generally acknowledged environment-friendly material, fusing point is in 155-185
DEG C, and the system material carries out high temperature experiment in laboratory, it was demonstrated that its softening temperature is at 80 DEG C, thus system context temperature
Degree can be at 60 DEG C hereinafter, covering general work environment warm area.
Further, the magnetic field size of 4 deflection machine 1 of magnet is adjustable within the scope of 0 ~ Hmax, and Hmax is that magnet 4 exists
The magnetic field strength at 1cm is spaced away from magnet 4.The size of the Hmax by replacement 4 material of magnet or increase and decrease 4 numbers of magnet come
It adjusts.Setting magnetic field strength of 4 deflection machine of magnet, the 1 magnetic field size in adjustable extent is continuous.
Further, the magnetic direction of 4 deflection machine 1 of magnet is adjustable.
Further, the magnetic field angle of 4 deflection machine 1 of magnet is adjustable within the scope of 0 ~ 45 °.The magnet 4 becomes
Setting angle of the magnetic field angle of position device 1 in adjustable extent is continuous.
Further, the conducting wire 19 of the magnet 4- analyzer separation module 3 is made of anti-magnetic conductor material.
The invention adopts the above technical scheme, using the diamagnetic materials such as PLA plastics and copper metal material as system body,
And make magnet 4 far from test macro probe, it separates system on magneticaction with magnet 4, guarantees the control of magnet 4 and sample 22
The stability of property measurement, compensating for existing semiconductor parameter measuring system can not be by magnetic field, the integrated blank of light field;It is another
Aspect, it is high that magnet 4 conjugates freedom degree, it is possible to provide the continuously adjustable magnetic field in size, angle, direction can support experimental study from change
The even variation of amount.
Claims (10)
1. a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode, it is characterised in that: it includes magnetic
Body deflection machine, free sample stage, magnet-analyzer separation module, magnet deflection machine include magnet spaces frame, magnet, plastic lining
Disk, the first copper wire, the second copper wire and Tesla meter,
Free sample stage is placed in the upper surface of magnet spaces frame, be respectively provided in magnet spaces frame two sides be vertically arranged it is logical
Road, plastics liner disk are set between the two sides of magnet spaces frame, and magnet is placed in plastics liner disk, and magnet spaces frame corresponds to plastics liner disk
Top rotation is equipped with the first rotation copper bar and the second rotation copper bar, and one end of the first copper wire is fixed on the first rotation copper bar, the
The other end of one copper wire around being fixed on the first rotation copper bar after a side bottom of plastics liner disk, fix by one end of the second copper wire
In on the second rotation copper bar, the other end of the second copper wire is around being fixed on the second rotation copper bar after another side bottom of plastics liner disk
On, the first rotation copper bar and second rotates the side that copper bar both ends both pass through magnet spaces frame,
Free sample stage includes that porous plate, agate ball, the first indium electrode and the second indium electrode, porous plate are placed in magnet spaces frame
On, porous plate upper surface is equipped at least three circular hole, and two of them circular hole is respectively used to the first indium electrode of setting and the second indium electricity
Pole;Agate ball is placed in other any circular holes, and forms triangular array with the position of the first indium electrode and the second indium electrode;
Sample is placed in the plane of triangular array formation and is parallel to porous plate setting, sample and the first indium electrode, the second indium electricity
Pole comes into full contact with, and agate ball carrys out balance sample by the position of change hole on porous plate;
The upper surface of the test probe and sample of Tesla meter, Tesla meter is for magnetic field strength at test sample;
The magnet-analyzer separation module includes two conducting wires, and the first indium electrode and the second indium electrode are respectively correspondingly connected with one
One end of bar conducting wire, the other end of two conducting wires are each passed through the channel in magnet spaces frame corresponding side surface and from magnet spaces framves
The distance of the hole of bottom horizontal extension L length outward, magnet are strong in the magnetic field that the end of the other end of two conducting wires generates
H < 1Oe is spent, the other end of two conducting wires is respectively connected to the detection channel of Semiconductor Parameter Analyzer.
2. a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode according to claim 1,
It is characterized by: the end of one end that the first rotation copper bar and the second rotation copper bar pass through magnet spaces frame side passes through admittedly
Fixed pole cooperates dovetail clip relatively fixed.
3. a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode according to claim 1,
It is characterized by: the lateral position of the first rotation copper bar and the second rotation copper bar respective magnet space frame is equipped with limited block, and
Prevent the first rotation copper bar and second from rotating falling off for copper bar by the fixed relative position of the limited block of twist distortion.
4. a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode according to claim 1,
It is characterized by: the plastics liner disk, magnet spaces frame, porous plate are by PLA plastic shaping.
5. a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode according to claim 1,
It is characterized by: the first rotation copper bar, the second rotation copper bar are formed by hard cooper plastic deformation.
6. a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode according to claim 1,
It is characterized by: the spacing between the first indium electrode centers and the second indium electrode centers is 1cm.
7. a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode according to claim 1,
It is characterized by: the magnetic field size of the magnet deflection machine is adjustable within the scope of 0 ~ Hmax, Hmax is magnet apart from magnet 1cm
The size of the magnetic field strength at place, Hmax is adjusted by replacement magnet material or increase and decrease magnet number, and magnet deflection machine magnetic field
Setting magnetic field strength of the size in adjustable extent is continuous.
8. a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode according to claim 1,
It is characterized by: the magnetic direction of the magnet deflection machine is adjustable.
9. a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode according to claim 1,
It is characterized by: the magnetic field angle of the magnet deflection machine is adjustable within the scope of 0 ~ 45 °, and magnetic field angle is in adjustable extent
It is continuous that angle, which is arranged,.
10. a kind of characteristic of semiconductor stably measured system based on variable magnetic field and free electrode according to claim 1,
It is characterized by: the magnet-analyzer separation module conducting wire is made of anti-magnetic conductor material.
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CN113193836A (en) * | 2021-04-30 | 2021-07-30 | 福建师范大学 | Method for modulating photovoltaic effect of thin film by magnetic field |
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CN113118635A (en) * | 2021-04-21 | 2021-07-16 | 深圳信息职业技术学院 | Magnetic field laser polishing device and method |
CN113193836A (en) * | 2021-04-30 | 2021-07-30 | 福建师范大学 | Method for modulating photovoltaic effect of thin film by magnetic field |
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