CN109483365A - A kind of calcium fluoride material ladder revolution non-spherical lens processing method - Google Patents
A kind of calcium fluoride material ladder revolution non-spherical lens processing method Download PDFInfo
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- CN109483365A CN109483365A CN201811473618.4A CN201811473618A CN109483365A CN 109483365 A CN109483365 A CN 109483365A CN 201811473618 A CN201811473618 A CN 201811473618A CN 109483365 A CN109483365 A CN 109483365A
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- turning
- processing method
- calcium fluoride
- spherical lens
- diamond
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Milling Processes (AREA)
Abstract
Calcium fluoride material ladder revolution non-spherical lens processing method process of the present invention includes: milling polishing, rise compensation, cutter screening, refine tooling, turning, surface testing, feedback modifiers.It is an advantage of the invention that reducing the low frequency aberration that diamond cutter turning introduces using the classic method grinding and polishing plane of better economy；Rise compensation is carried out to each ladder optical surface, so that stepped replicated optics surface is once completed the turning that is loaded, and the centre of gyration of each stepped surfaces is overlapped, minimum centering error requirement is realized, it is accumulative to reduce face shape error；The diamond cutter that turnery processing uses is screened, it is preferential to select the relatively small cornerite range of arc contour error, improve processing surface figure accuracy and beauty defects grade；Refine tooling makes ladder turn round each aspherical optical axis and plane optical axis coincidence, improves the vertical precision on part two sides；The surface face shape that entire part is evaluated with Central of the parts Optical Surface inspection data, makes it have detectability.
Description
Technical field
The invention belongs to precision rotating non-spherical lens optical processing technology fields, are related to a kind of calcium fluoride material ladder time
Turn non-spherical lens processing method.
Background technique
Ultra-machining turning technique can realize the optical surface processing of a variety of optical crystal materials, using natural diamond circular arc
The infrared crystal optical element of cutter turning can reach submicron order surface surface figure accuracy and Nanoscale Surface roughness, especially needle
It is a kind of stabilization, efficient certainty processing technology to the turnery processing of aspheric surface.
Under normal circumstances, ultra-machining turning technique is suitable for the turnery processing of single optical surface, surface face shape and table
Face quality etc. is required to reach higher technical indicator.And unit is often used for the processing on stepped replicated optics surface
Gradually single is loaded and adds up with turning accuracy error optical surface by processing method, this processing method, the part list processed
Centering error and surface surface figure accuracy between first optical surface is poor, and easily occurs " to prick when Turning cells optical surface knife
Knife " phenomenon will lead to optical material fragmentation when serious.To sum up, the skill faced is processed in order to solve stepped replicated optics surface
Art problem needs the processing technology using a kind of low-risk, high-precision stepped replicated optics surface face.
Summary of the invention
(1) goal of the invention
The purpose of the present invention is: overcome defect in the prior art, it is aspherical to provide a kind of calcium fluoride material ladder revolution
Lens processing method.
(2) technical solution
In order to solve the above technical problem, the present invention provides calcium fluoride material ladders to turn round non-spherical lens processing method,
Itself the following steps are included:
Step 1: grinding and polishing optical element plane；
Step 2: rise compensation being carried out to unit optical surface, guarantees the stepped turning in replicated optics surface；
Step 3: screening cutter, by emulation turning used in diamond cutter arc profile cornerite, to diamond cutter into
Row screening and setting angle biasing；
Step 4: refine tooling, after guaranteeing that part turns card, the turning surface centre of gyration is overlapped again with main shaft gyration；
Step 5: turning step type replicated optics surface；
Step 6: optical surface after turning being evaluated and detected amendment.
(3) beneficial effect
Calcium fluoride material ladder provided by above-mentioned technical proposal turns round non-spherical lens processing method, and beneficial effect is
Following two points:
(1) all unit optical surfaces avoid the list that unit optical surface gradually processes introducing using the turning that is once loaded
Secondary turn of card and turning accuracy error are cumulative, have prevented Turning cells optical surface turning and have played incident " knife " phenomenon when knife,
Improve the concentricity and surface surface figure accuracy between unit optical surface；
(2) by calculating ladder replicated optics face cutter for same profile, profile used in diamond cutter is sieved
Choosing reduces the error that tool surface profile introduces.Meanwhile on the basis of center cell optical surface, ladder replicated optics are estimated
Face surface maximum face shape error simultaneously optimizes it, and surface figure accuracy is made to have quantizating index.
Detailed description of the invention
Fig. 1 is a kind of high-precision step type replicated optics face processing process schematic diagram of the invention.
Fig. 2 is stepped replicated optics element processing and implementation example diagram of the invention.
Specific embodiment
To keep the purpose of the present invention, content and advantage clearer, with reference to the accompanying drawings and examples, to tool of the invention
Body embodiment is described in further detail.
Shown in referring to Fig.1, calcium fluoride material ladder of the present invention revolution non-spherical lens processing method the following steps are included:
Step 1: utilizing the classic method grinding and polishing optical element plane of better economy；
Step 2: rise compensation being carried out to unit optical surface, guarantees that ladder is superimposed the turning in replicated optics surface；
Step 3: screening cutter, by emulation turning used in diamond cutter arc profile cornerite, to diamond cutter into
Row screening and setting angle biasing；
Step 4: refine tooling, after guaranteeing that part turns card, the turning surface centre of gyration is overlapped again with main shaft gyration；
Step 5: turning optical surface；
Step 6: optical surface after turning being evaluated and detected amendment.
In step 1, milling molding is carried out to optical element blank using milling and grinding machine, uniaxial machine is used after milling and is aided with brill
Mountain flour is polished directly infrared base material plane, obtains half-finished parts.After processing, plane surface shape precision is up to 20nm
(@632.8nm), beauty defects grade is up to IR-IV；
In step 2, other unit optical surfaces are carried out on the basis of the centre of gyration vertex of center cell or plane
Rise compensation.Turning unifying datum after compensation, between unit optical surface, it is ensured that the turning of all unit optical surfaces adds
Work；
In step 3, computer sim- ulation is carried out to knife tool arc cornerite used in unit optical surface turning, obtains turning rank
The arc wrap angle range that terraced optical surface uses.Knife tool arc profile is detected using 800X microscope, filters out above-mentioned meter
The optimal round tool cornerite of cutter for same arc wrap angle range Internal periphery is calculated, carries out cutter according to optimal round tool cornerite
Biasing；
In step 4, using CNC ultra-precise cutting lathe, the Natural Diamond Tools filtered out by step S3 are to lens
Each positioning surface of tool for processing carries out Ultra-precision Turning, and tool positioning surface is vertical with machine tool chief axis rotating shaft after processing；
In step 5, using CNC ultra precision diamond turning machine, it is aided with the Natural Diamond Tools that step S3 is filtered out, according to
The compensated optical surface equation of rise carries out turning to stepped replicated optics face using numerically-controlled machine tool.Turning process parameter:
1000~4000r/min of the speed of mainshaft, cutting-in 0.004~0.1mm/ times, 3~8mm/min of the amount of feeding；
In step 6, surface figure accuracy detection is carried out to center unit light face with contact contourgraph or interferometer, detects PV
Value plus δ are regarded as final face shape test result, if face shape is qualified, for final products；If surface testing work step cannot reach
It is required to surface figure accuracy, according to testing result feedback modifiers, until face, shape index meets technical requirements；Wherein, PV value is practical
The difference of maxima and minima in the comparison curves of surface and theoretical surface, δ are the profile errors of arc wrap angle used in turning.
Embodiment
It is aspherical for a kind of stepped revolution of infra-red material high-precision according to the method for the present invention, using CNC ultraprecise vehicle
It cuts lathe and is aided with natural diamond circular arc knife and ultra-precise cutting processing is carried out to it.The present invention is related to below with reference to sample is implemented
And to a kind of aspherical method for turning of the trapezoidal revolution of high-precision be described, processing process figure is shown in Fig. 1.
A kind of replicated optics lens stepped three times are processed, see Fig. 2.
Material: calcirm-fluoride, diameter: Φ 43mm, center thickness h=7.5 ± 0.05mm, S1, S2 and S3 be along edge in
Three optical surfaces of the heart, S12 and S23 are the excessive band between three optical surfaces, and S4 is plane.
The normal equation of three optical surfaces is equal are as follows:
Wherein h2=x2+y2, design parameter is shown in Table lattice 1, beauty defects grade B=IV, plane surface shape precision RMS:
30nm, aspheric surface precision PV < 0.4 μm, the position precision ± 0.002mm between unit is aspherical, centre deviation 30 ".
1 unit optical surface parameter list of table
Step 1: milling polishes；
Milling processing is carried out to calcium fluoride material with milling and grinding machine, obtains lens blank, blank center thickness is 7.65 ±
0.05mm.Using uniaxial machine and it is aided with diamond dust optical element plane is polished, plane surface shape precision RMS after polishing:
25nm (@632.8nm), beauty defects grade B=IV；
Step 2: rise compensates；
Lens aspheric surfaces includes S1, the S2 and S3 tri- stepped surfaces of revolution, and aspheric surfaces is standard aspheric equation,
And its centre of gyration is respectively 10mm, 7.5mm and 6mm with respect to the rise of plane.Therefore S1, S2 and S3 are carried out on the basis of plane
Rise compensation, i.e. Z1=Z+10, Z2=Z+7.5, Z3=Z+6.After compensation, the turning unifying datum of optical surface is plane, this
When, three optical surfaces can a turnery processing；
Step 3: cutter screens；
According to the normal equation of S1, S2 and S3, the circle of diamond cutter used in single optical surface turnery processing is calculated
Arc cornerite, i.e., -20.6 °~-15.98 ° (S1), -11.27 °~-21.95 ° (S2) and 0 °~5.79 ° (S3).Therefore turning is entire
Diamond round tool cornerite range used in optical surface is -21.95 °~5.79 °, i.e., 27.74 °.Using 800X microscope pair
Diamond round tool profile is detected, and optimal profile section within the scope of 27.74 ° of cornerite is filtered out.Through detecting, final choice vehicle
Cutting and processing the profile tolerance of diamond cutter contour segment used is 0.02 μm；
Step 4: refine tooling；
Using CNC super precision lathe, Ultra-precision Turning is carried out to each positioning surface of tooling by Natural Diamond Tools, is added
Tool positioning surface is vertical with main shaft gyration axis after work, i.e. the plane in ladder replicated optics face is vertical with main shaft rotation center；
Step 5: turning；
Using CNC ultra precision diamond turning machine, it is aided with diamond cutter and turning is carried out to stepped replicated optics face.Turning
Technological parameter: speed of mainshaft 3000r/min, cutting-in 0.05mm/ times, amount of feeding 2mm/min；
Step 6: detection；
Surface testing is carried out to the face S1 according to optical surface equation using contact ultraprecise contourgraph.If detection faces shape PV+
0.02 μm < 0.4 μm, i.e., it is believed that face pictograph closes technical requirements；
Step 7: feedback modifiers；
If detection faces shape work step cannot reach surface figure accuracy requirement, according to testing result feedback modifiers, until face shape index
Meet technical requirements.
In above-described embodiment, using a kind of high-precision step type replicated optics method for processing surface of the invention, it is to pass through
The following reaches high-precision index:
1, reduce diamond cutter turning using the classic method grinding and polishing plane of better economy by the first step and draw
The low frequency aberration entered, while reducing processing cost；
2, by second step, rise compensation is carried out to other unit optical surfaces on the basis of plane.After compensation, optics table
The turning unifying datum in face, it is ensured that turnery processing of all unit optical surfaces avoids unit optical surface and gradually processes
The single of introducing turns card and trueness error accumulation, has prevented existing when Turning cells optical surface turning plays knife incident " knife "
As improving the concentricity and surface surface figure accuracy between unit optical surface；
3, by third step, the diamond cutter that turnery processing uses is screened, arc contour error is preferentially selected
Relatively small cornerite range, cutter itself profile errors introduced when reducing turnery processing.Meanwhile with center cell optics table
It on the basis of face, estimates ladder replicated optics face surface maximum face shape error and it is optimized, there is surface figure accuracy controllable
Quantizating index.
4, make to process surface figure accuracy using a kind of stepped replicated optics face evaluation method by the 6th step and the 7th step
With reliability.
According to a kind of above-mentioned high-precision step type replicated optics method for processing surface, the optical element surface defect of embodiment processing
Sick grade IR-V, plane surface shape precision RMS:22nm, aspheric surface precision PV < 0.32 μm, the position between unit is aspherical
Precision 0.001mm, centre deviation 15 ", prepare high-precision ladder replicated optics element.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvement and deformations can also be made, these improvement and deformations
Also it should be regarded as protection scope of the present invention.
Claims (9)
1. a kind of calcium fluoride material ladder turns round non-spherical lens processing method, which comprises the following steps:
Step 1: grinding and polishing optical element plane；
Step 2: rise compensation being carried out to unit optical surface, guarantees the stepped turning in replicated optics surface；
Step 3: screening cutter sieves diamond cutter by diamond cutter arc profile cornerite used in emulation turning
Choosing and setting angle biasing；
Step 4: refine tooling, after guaranteeing that part turns card, the turning surface centre of gyration is overlapped again with main shaft gyration；
Step 5: turning step type replicated optics surface；
Step 6: optical surface after turning being evaluated and detected amendment.
2. calcium fluoride material ladder as described in claim 1 turns round non-spherical lens processing method, which is characterized in that the step
In rapid 1, milling molding is carried out using optical element blank of the milling and grinding machine to calcirm-fluoride material, uniaxial machine is used after milling and is aided with
Diamond dust is polished directly optical element plane, obtains half-finished parts.
3. calcium fluoride material ladder as claimed in claim 2 turns round non-spherical lens processing method, which is characterized in that the step
In rapid 2, rise compensation is carried out to other unit optical surfaces on the basis of the centre of gyration vertex of center cell or plane, is mended
Turning unifying datum after repaying, between unit optical surface.
4. calcium fluoride material ladder as claimed in claim 3 turns round non-spherical lens processing method, which is characterized in that the step
In rapid 3, diamond cutter arc profile is detected using 800X microscope, filters out above-mentioned calculating cutter for same circular arc packet
Cutter is biased by the optimal round tool cornerite of angular region Internal periphery according to optimal round tool cornerite.
5. calcium fluoride material ladder as claimed in claim 4 turns round non-spherical lens processing method, which is characterized in that the step
In rapid 4, using CNC turning machine, the Natural Diamond Tools filtered out by step S3 are to each of lens tool for processing
Positioning surface is processed, and tool positioning surface is vertical with machine tool chief axis rotating shaft after processing.
6. calcium fluoride material ladder as claimed in claim 5 turns round non-spherical lens processing method, which is characterized in that the step
In rapid 5, using CNC diamond lathe, it is aided with the Natural Diamond Tools that step S3 is filtered out, according to the compensated optics of rise
Surface equation carries out turning to stepped replicated optics face using numerically-controlled machine tool.
7. calcium fluoride material ladder as claimed in claim 6 turns round non-spherical lens processing method, which is characterized in that the step
In rapid 5, turning process parameter are as follows: 1000~4000r/min of the speed of mainshaft, cutting-in 0.004~0.1mm/ times, the amount of feeding 3~
8mm/min。
8. calcium fluoride material ladder as claimed in claim 7 turns round non-spherical lens processing method, which is characterized in that the step
In rapid 6, surface figure accuracy detection is carried out to center unit light face with contact contourgraph or interferometer, detection PV value adds δ
Final face shape test result is considered, if face shape is qualified, for final products；If surface testing work step cannot reach surface figure accuracy
It is required that feedback modifiers according to testing result, until face, shape index meets technical requirements；Wherein, PV value is actual surface and theory
The difference of maxima and minima in the comparison curves on surface, δ are the profile errors of arc wrap angle used in turning.
9. calcium fluoride material ladder as claimed in claim 8 turns round non-spherical lens processing method, which is characterized in that the step
In rapid 1, optical element material: calcirm-fluoride, diameter: Φ 43mm, center thickness h=7.5 ± 0.05mm, S1, S2 and S3 are along side
Edge is to three optical surfaces at center, and the excessive band of S12 and S23 between three optical surfaces, S4 is bottom plane；
The normal equation of three optical surfaces is equal are as follows:
Wherein, h2=x2+y2, design parameter is shown in Table lattice 1, plane surface shape precision RMS:30nm, aspheric surface precision PV < 0.4
μm, the position precision ± 0.002mm between unit is aspherical, centre deviation 30 "；
Table 1
In step 2, lens aspheric surfaces includes S1, the S2 and S3 tri- stepped surfaces of revolution, and aspheric surfaces is standard aspheric
Equation, and its centre of gyration is respectively 10mm, 7.5mm and 6mm with respect to the rise of plane, thus on the basis of plane to S1, S2 and
S3 carries out rise compensation, i.e. Z1=Z+10, Z2=Z+7.5, Z3=Z+6；After compensation, the turning unifying datum of optical surface is flat
Face；
In step 3, according to the normal equation of S1, S2 and S3, diamond tool used in single optical surface turnery processing is calculated
Tool arc wrap angle, i.e., S1:-20.6 °~-15.98 °, S2:-11.27 °~-21.95 ° and S3:0 °~5.79 °；Therefore turning is entire
Diamond round tool cornerite range used in optical surface is -21.95 °~5.79 °, i.e., 27.74 °；Using 800X microscope pair
Diamond round tool profile is detected, and optimal profile section within the scope of 27.74 ° of cornerite is filtered out；Through detecting, final choice vehicle
Cutting and processing the profile tolerance of diamond cutter contour segment used is 0.02 μm.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111238461A (en) * | 2020-03-09 | 2020-06-05 | 中国建筑材料科学研究总院有限公司 | Harmonic oscillator and preparation method thereof |
| CN112123597A (en) * | 2020-09-07 | 2020-12-25 | 天津津航技术物理研究所 | Method for processing small-caliber high-precision optical lens |
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