CN109648428A - A kind of high-precision CVD ZnSe Dove prism processing method - Google Patents
A kind of high-precision CVD ZnSe Dove prism processing method Download PDFInfo
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- CN109648428A CN109648428A CN201811319710.5A CN201811319710A CN109648428A CN 109648428 A CN109648428 A CN 109648428A CN 201811319710 A CN201811319710 A CN 201811319710A CN 109648428 A CN109648428 A CN 109648428A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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Abstract
The invention discloses a kind of high-precision CVD ZnSe Dove prism processing methods, the top surface M3 of CVD ZnSe Dove prism and two sides M1, M2 are as three positioning surfaces, bottom surface H and with former and later two surfaces P, Q of bottom surface H angle at 45 ° as three optical surfaces；It is the following steps are included: step 1: milling blank；Step 2: round tool turning Dove prism positioning surface M1, M2, M3 and optical surface H；Step 3: using the CNC ultraprecision diamond turning lathe turning tool positioning surface with revolution B axle then be loaded Dove prism；Step 4: using CNC ultraprecision diamond turning lathe and fly cutter turning Dove prism three optical surfaces P, Q and H with revolution B axle.The present invention greatly improves the angle precision after turning between Dove prism optical surface.
Description
Technical field
The invention belongs to diamond super precision turning technical fields, are related to a kind of high-precision CVD ZnSe Dove prism processing
Method.
Background technique
Dove prism is made of two or more optical flats and several ground flats, between each plane
The optical element required with certain angle.Under normal circumstances, Dove prism processing is using in disk in conventional gypsum or elasticity
The single-pieces such as disk, auxiliary block grinding and polishing are retouched, and above-mentioned processing method requires technique in very high and process to Personal Skills
There is very big randomness in parameter, Yi Fanfu, the process-cycle is uncertain, at high cost, precision is low.
Diamond super precision turning technology processing CVD ZnS material can realize the surface figure accuracy and nanoscale of sub-micron
Surface roughness, revolution B axle position feedback resolution ratio reach ± 1 second of arc up to 0.004 second of arc, positioning accuracy.In prism turning
It is placed on B axle in the process and being aided with special tooling makes the turning that is once loaded of its effective optical surface that prism angle can be greatly improved
Precision is spent, is a kind of high-precision certainty prism processing method.
Summary of the invention
(1) goal of the invention
The object of the present invention is to provide a kind of high-precision CVD ZnSe Dove prism processing methods, realize the vehicle that is once loaded
Prism angle precision can be greatly improved by cutting.
(2) technical solution
In order to solve the above technical problem, the present invention provides a kind of high-precision CVD ZnSe Dove prism processing method,
The top surface M3 of CVD ZnSe Dove prism and two sides M1, M2 as three positioning surfaces, bottom surface H and with bottom surface H folder at 45 °
Former and later two surfaces P, Q at angle is as three optical surfaces；Itself the following steps are included:
Step 1: milling blank；
Step 2: round tool turning Dove prism positioning surface M1, M2, M3 and optical surface H；
Step 3: then being filled using the CNC ultraprecision diamond turning lathe turning tool positioning surface with revolution B axle
Card Dove prism；
Step 4: using CNC ultraprecision diamond turning lathe and fly cutter turning Dove prism three with revolution B axle
A optical surface P, Q and H.
(3) beneficial effect
High-precision CVD ZnSe Dove prism processing method provided by above-mentioned technical proposal, turning blank is by accurate CNC
Milling and grinding machine forming, morpheme size and angle are guaranteed by machine tool accuracy, reduce subsequent turning amount；Dove prism turnery processing
Tooling modified in place by ultraprecise CNC diamond lathe, Dove prism after being loaded each positioning surface and optical surface respectively with
Machine tool chief axis is parallel or orthogonal with B axle, improves the vertical precision of Dove prism angle precision and side, i.e. positioning surface and optical surface
Between vertical precision；Dove prism optical surface is the multiple rotary turnery processing that is once loaded, and greatly improves ladder after turning
Angle precision between shape lens optical surface.
Detailed description of the invention
Fig. 1 is CVD ZnSe Dove prism schematic three dimensional views of the invention.
Fig. 2 is Dove prism optical surface and positioning surface schematic diagram of the invention.
Fig. 3 is Dove prism flow process chart of the invention.
Fig. 4 is the schematic diagram that the face P, H and Q is successively processed in the present invention.
Fig. 5 is turning machining sketch chart under ultraprecise CNC diamond turning lathe coordinate system in the present invention.
Specific embodiment
To keep the purpose of the present invention, content and advantage clearer, with reference to the accompanying drawings and examples, to of the invention
Specific embodiment is described in further detail.
The present invention relates to Dove prism include three optical surfaces and three positioning reference planes, in systems use when by
Top surface and two side positioning, light are projected after 45 ° of two secondary reflections of surface by bottom optical surface by bottom surface incidence.Therefore optics table
Angle precision between face and positioning surface is the important indicator of Dove prism, and above-mentioned diamond super precision turning technology is processing
The effective means of high-precision CVD ZnSe Dove prism.
Specifically, shown in referring to Figures 1 and 2, the top surface M3 of Dove prism and two sides M1, M2 are positioned as three
Face, bottom surface H and with former and later two surfaces of bottom surface H angle at 45 ° as three optical surfaces.
The present invention carries out Dove prism forming using CNC milling and grinding machine；Using the CNC ultraprecise gold with revolution B axis
Hard rock turning machine is aided with Natural Diamond Tools to three positioning surfaces (M1, M2 and M3) of prism and optical surface (P, Q and H)
Carry out ultra-precise cutting processing.
Processing technology of the present invention is carried out according to Fig. 3:
Step 1: milling blank；
Step 2: round tool turning Dove prism positioning surface M1, M2, M3 and optical surface H；
Step 3: then being filled using the CNC ultraprecision diamond turning lathe turning tool positioning surface with revolution B axle
Card Dove prism；
Step 4: using CNC ultraprecision diamond turning lathe and fly cutter turning Dove prism three with revolution B axle
A optical surface P, Q and H；
In the first step as described above, blocky CVD ZnSe material milling is shaped using CNC milling and grinding machine, is obtained trapezoidal
Prism blank, there are 0.2mm~0.3mm machining allowances for three positioning surfaces of blank and three optical surfaces.After milling, trapezoidal rib
Angle precision between mirror optical surface is better than 10 ', and the vertical precision in the side of positioning surface and optical surface is better than 10 '；
In second step as described above, diamond round tool and the trapezoidal rib of ultraprecise CNC diamond lathe turning are used
Mirror three positioning surfaces M1, M2 and M3 and an optical surface H after the completion of turning, obtain Dove prism semi-finished product, and turning is determined
Meet morpheme size and cooperation required precision between plane and between positioning surface and optical surface；
In third step as described above, using the CNC ultraprecision diamond turning lathe with revolution B axle to tool locating
Face carries out turning, guarantees the positioning surface perpendicular or parallel to the B axle centre of gyration；Dove prism is loaded in tooling, is made trapezoidal
Prism positioning surface normal orientation is parallel to the B axis centre of gyration, optical surface center normal orientation and machine tool chief axis centre of gyration weight
It closes；
In 4th step as described above, fly using with the CNC ultraprecision diamond turning lathe and diamond for turning round B axle
Knife turning Dove prism, by rotating B axle, successively three optical surfaces P, H and Q of turning Dove prism；Wherein, Dove prism
Three optical surfaces are the turning that is once loaded.
Embodiment
For CVD ZnSe Dove prism, using CNC ultra precision diamond turning machine and be aided with diamond circular arc cutter to its into
The processing of row ultra-precise cutting.In the following, in conjunction with attached drawing and example to the present invention relates to a kind of trapezoidal rib of high-precision CVD ZnSe
Mirror processing method is described, and processing process is shown in Fig. 3.
A kind of high-precision CVD ZnSe Dove prism is processed, sees Fig. 1.Wherein, the folder in the face optical surface H and the face P and the face Q
Angle is 135 ° ± 10 ", the vertical precision in the side in the face M1 and the face M2 and the face H is 1 '；The side in the face M1 and the face M2 and the face P or Q hang down precision be
1′。
Step 1: milling blank；
CVD ZnSe blank material is ground using accurate CNC milling and grinding machine, obtains Dove prism blank, blank three
The machining allowance of a positioning surface M1, M2, M3 and three optical surfaces P, Q, H are 0.25mm；Meanwhile the face optical surface H and the face P
Angle with the face Q is the vertical precision in side in 135 ° of faces ± 10 ', M1 and the face M2 and the face H better than 10 '；The face M1 and the face M2 and P or Q
Precision hang down better than 10 ' in the side in face.
Step 2: three positioning surfaces (M1, M2 and M3) of round tool turning Dove prism and an optical surface (H)；
Using three positioning surfaces (M1, M2 and M3) of diamond round tool turning Dove prism and an optical surface
(H), after the turning of ultraprecise CNC diamond lathe, Dove prism semi-finished product, the morpheme ruler between Dove prism M1 and M2 are obtained
Very little is final processing dimension, and the depth of parallelism is better than 1 ", the morpheme size between Dove prism M3 and H is final processing dimension and H
The sum of the remaining processing Lathe quantity in face, the depth of parallelism is better than 1 ".
Step 3: ultra-precise cutting tooling and being loaded；
Using CNC ultra precision diamond turning machine turning tool, turning is completed and is loaded after Dove prism, positioning surface M1, M2
Normal orientation is parallel to the B axle centre of gyration, and optics working face (H) center normal orientation is overlapped with the machine tool chief axis centre of gyration.This
When, the vertical precision of M1 and M2 and the B axle centre of gyration are better than 10 ".
Step 4: three optical surfaces (P, Q and H) of fly cutter turning Dove prism；
As shown in Figure 4 and Figure 5, using CNC ultra precision diamond turning machine and it is aided with the diamond fly cutter successively trapezoidal rib of turning
Three optics work surfaces of mirror, it may be assumed that the face P, the face H and the face Q.Three optical surface center normal direction and main shaft rotation center are flat after turning
Row, the main shaft rotation center and B axle centre of gyration absolute upright under lathe coordinate system of super precision lathe, and M1 and M2 and B axle
The vertical precision of the centre of gyration is better than 10 " (third steps).Therefore the side of M1 and M2 and H is hung down, precision is better than 10 ", M1 and M2 and P or Q
Side hang down precision be better than 10 ".
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvement and deformations can also be made, these improve and become
Shape also should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of high-precision CVD ZnSe Dove prism processing method, the top surface M3 of CVD ZnSe Dove prism and two sides
M1, M2 are as three positioning surfaces, bottom surface H and with former and later two surfaces P, Q of bottom surface H angle at 45 ° as three optical surfaces；
Characterized by comprising the following steps:
Step 1: milling blank；
Step 2: round tool turning Dove prism positioning surface M1, M2, M3 and optical surface H；
Step 3: using the CNC ultraprecision diamond turning lathe turning tool positioning surface with revolution B axle then be loaded ladder
Shape prism；
Step 4: using three optics of CNC ultraprecision diamond turning lathe and fly cutter turning Dove prism with revolution B axle
Surface P, Q and H.
2. high-precision CVD ZnSe Dove prism processing method as described in claim 1, which is characterized in that the first step
In, blocky CVD ZnSe material milling is shaped using CNC milling and grinding machine, obtains Dove prism blank.
3. high-precision CVD ZnSe Dove prism processing method as claimed in claim 2, which is characterized in that the first step
In, there are 0.2mm~0.3mm machining allowances for three positioning surfaces of blank and three optical surfaces.
4. high-precision CVD ZnSe Dove prism processing method as claimed in claim 3, which is characterized in that the first step
In, after milling, the angle precision between Dove prism optical surface is better than 10 ', and the vertical precision in the side of positioning surface and optical surface is excellent
In 10 '.
5. high-precision CVD ZnSe Dove prism processing method as claimed in claim 4, which is characterized in that the second step
In, use diamond round tool and ultraprecise three positioning surfaces M1, M2 and M3 of CNC diamond lathe turning Dove prism and one
A optical surface H after the completion of turning, obtains Dove prism semi-finished product, between the positioning surface of turning and positioning surface and optical surface
Between meet default morpheme size and cooperation required precision.
6. high-precision CVD ZnSe Dove prism processing method as claimed in claim 5, which is characterized in that the third step
In, turning is carried out to tool positioning surface using the CNC ultraprecision diamond turning lathe with revolution B axle, guarantees the positioning surface
Perpendicular or parallel to the B axle centre of gyration；Dove prism is loaded in tooling, Dove prism positioning surface normal orientation is parallel to
The B axle centre of gyration, optical surface center normal orientation are overlapped with the machine tool chief axis centre of gyration.
7. high-precision CVD ZnSe Dove prism processing method as claimed in claim 6, which is characterized in that the 4th step
In, using CNC ultraprecision diamond turning lathe and diamond fly cutter turning Dove prism with revolution B axle, by rotating B
Axis, successively three optical surfaces P, H and Q of turning Dove prism；Wherein, three optical surfaces of Dove prism are the vehicle that is once loaded
It cuts.
8. high-precision CVD ZnSe Dove prism processing method as claimed in claim 5, which is characterized in that the second step
In, the morpheme size between the positioning surface M1 and M2 of Dove prism semi-finished product is final processing dimension, and the depth of parallelism is better than 1 "；Ladder
Morpheme size between the positioning surface M3 and optical surface H of shape prism semi-finished product is that final processing dimension and the remaining of the face H are processed
The sum of Lathe quantity, the depth of parallelism are better than 1 ".
9. high-precision CVD ZnSe Dove prism processing method as claimed in claim 6, which is characterized in that the third step
In, after Dove prism is loaded in tooling, the vertical precision of positioning surface M1 and M2 and the B axle centre of gyration is better than 10 ".
10. high-precision CVD ZnSe Dove prism processing method as claimed in claim 7, which is characterized in that the 4th step
In, after turning Dove prism three optical surfaces P, H and Q, three optical surface center normal direction are parallel with main shaft rotation center, surpass
The main shaft rotation center and B axle centre of gyration absolute upright under lathe coordinate system of fine turning lathe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201811319710.5A CN109648428B (en) | 2018-11-07 | 2018-11-07 | High-precision CVD ZnSe trapezoidal prism processing method |
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| CN201811319710.5A CN109648428B (en) | 2018-11-07 | 2018-11-07 | High-precision CVD ZnSe trapezoidal prism processing method |
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| CN109648428B CN109648428B (en) | 2020-04-24 |
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Cited By (5)
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| CN110370094A (en) * | 2019-07-29 | 2019-10-25 | 丹阳丹耀光学有限公司 | A kind of processing technology and equipment of frosted prism |
| CN110842476A (en) * | 2019-11-19 | 2020-02-28 | 中国船舶重工集团公司第七0七研究所 | Method for manufacturing pentahedron reflector applied to high-speed scanning system |
| CN112123597A (en) * | 2020-09-07 | 2020-12-25 | 天津津航技术物理研究所 | Method for processing small-caliber high-precision optical lens |
| CN112692679A (en) * | 2020-12-31 | 2021-04-23 | 昆明云锗高新技术有限公司 | High-precision prism bonding device and processing method |
| CN117124483A (en) * | 2023-07-13 | 2023-11-28 | 同济大学 | Free-form surface prism high-precision compensation processing method based on online and offline detection |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110370094A (en) * | 2019-07-29 | 2019-10-25 | 丹阳丹耀光学有限公司 | A kind of processing technology and equipment of frosted prism |
| CN110842476A (en) * | 2019-11-19 | 2020-02-28 | 中国船舶重工集团公司第七0七研究所 | Method for manufacturing pentahedron reflector applied to high-speed scanning system |
| CN112123597A (en) * | 2020-09-07 | 2020-12-25 | 天津津航技术物理研究所 | Method for processing small-caliber high-precision optical lens |
| CN112692679A (en) * | 2020-12-31 | 2021-04-23 | 昆明云锗高新技术有限公司 | High-precision prism bonding device and processing method |
| CN117124483A (en) * | 2023-07-13 | 2023-11-28 | 同济大学 | Free-form surface prism high-precision compensation processing method based on online and offline detection |
| CN117124483B (en) * | 2023-07-13 | 2024-03-08 | 同济大学 | Free-form surface prism high-precision compensation processing method based on online and offline detection |
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