CN109648428B - High-precision CVD ZnSe trapezoidal prism processing method - Google Patents
High-precision CVD ZnSe trapezoidal prism processing method Download PDFInfo
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- CN109648428B CN109648428B CN201811319710.5A CN201811319710A CN109648428B CN 109648428 B CN109648428 B CN 109648428B CN 201811319710 A CN201811319710 A CN 201811319710A CN 109648428 B CN109648428 B CN 109648428B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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Abstract
The invention discloses a high-precision CVD ZnSe trapezoidal prism processing method, wherein a top surface M3 and two side surfaces M1 and M2 of the CVD ZnSe trapezoidal prism are used as three positioning surfaces, and a bottom surface H and front and back surfaces P, Q forming an included angle of 45 degrees with the bottom surface H are used as three optical surfaces; which comprises the following steps: the first step is as follows: milling and grinding a blank; the second step is that: turning trapezoidal prism positioning surfaces M1, M2, M3 and an optical surface H by using an arc cutter; the third step: turning a tool positioning surface by using a CNC ultra-precise diamond turning machine tool with a rotary B shaft, and then installing a trapezoidal prism; the fourth step: three optical surfaces P, Q and H of a trapezoidal prism were turned using a CNC ultra-precision diamond turning machine with a rotary B-axis and a fly cutter. The invention greatly improves the angle precision between the optical surfaces of the trapezoidal prism after turning.
Description
Technical Field
The invention belongs to the technical field of diamond ultra-precision turning, and relates to a high-precision CVD ZnSe trapezoidal prism processing method.
Background
The trapezoidal prism is composed of two or more optical planes and a plurality of grinding planes, and optical parts with certain angle requirements are arranged between the planes. Generally, the trapezoidal prism is machined by adopting a traditional gypsum hanging wall or an elastic hanging wall and an auxiliary block for single-piece manual repair, the machining method has high requirements on personal skills, and the process parameters in the machining process have high randomness and are easy to repeat, the machining period is uncertain, the cost is high, and the precision is low.
The CVD ZnS material processed by the diamond ultra-precision turning technology can realize submicron surface shape precision and nanoscale surface roughness, the position feedback resolution of the rotary B axis can reach 0.004 arc-second, and the positioning precision can reach +/-1 arc-second. The prism turning process is characterized in that the prism is placed on a B axis and is assisted by a special tool to enable an effective optical surface of the prism to be clamped and turned at one time, so that the angle precision of the prism can be greatly improved, and the method is a high-precision deterministic prism processing method.
Disclosure of Invention
Objects of the invention
The purpose of the invention is: the method for processing the CVD ZnSe trapezoidal prism with high precision is provided, and the angle precision of the prism can be greatly improved by one-time clamping and turning.
(II) technical scheme
In order to solve the technical problems, the invention provides a high-precision CVD ZnSe trapezoidal prism processing method, wherein a top surface M3 and two side surfaces M1 and M2 of the CVDZnSe trapezoidal prism are used as three positioning surfaces, and a bottom surface H and front and back surfaces P, Q forming an included angle of 45 degrees with the bottom surface H are used as three optical surfaces; which comprises the following steps:
the first step is as follows: milling and grinding a blank;
the second step is that: turning trapezoidal prism positioning surfaces M1, M2, M3 and an optical surface H by using an arc cutter;
the third step: turning a tool positioning surface by using a CNC ultra-precise diamond turning machine tool with a rotary B shaft, and then installing a trapezoidal prism;
the fourth step: three optical surfaces P, Q and H of a trapezoidal prism were turned using a CNC ultra-precision diamond turning machine with a rotary B-axis and a fly cutter.
(III) advantageous effects
According to the high-precision CVD ZnSe trapezoidal prism processing method provided by the technical scheme, the turning blank is formed by a precision CNC milling and grinding machine, the shape and position size and the angle of the turning blank are ensured by the precision of a machine tool, and the subsequent turning amount is reduced; the trapezoidal prism turning tool is finished by an ultra-precise CNC diamond lathe in place, and after the trapezoidal prism is clamped, each positioning surface and each optical surface are parallel or orthogonal to a main shaft and a B shaft of the machine tool respectively, so that the angle precision and the side perpendicular precision of the trapezoidal prism, namely the perpendicular precision between the positioning surface and the optical surface, are improved; the trapezoidal prism optical surface is subjected to once clamping and multiple rotating turning, and the angle precision between the turned trapezoidal prism optical surfaces is greatly improved.
Drawings
FIG. 1 is a three-dimensional schematic view of a CVD ZnSe trapezoidal prism of the present invention.
FIG. 2 is a schematic view of the optical surfaces and alignment surfaces of the trapezoidal prism of the present invention.
Fig. 3 is a flow chart of the trapezoidal prism processing of the present invention.
Fig. 4 is a schematic view of the sequential processing P, H and Q-plane of the present invention.
FIG. 5 is a schematic view of the cutting process in the coordinate system of the ultra-precise CNC diamond turning machine of the present invention.
Detailed Description
In order to make the objects, contents, and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
The invention relates to a trapezoidal prism which comprises three optical surfaces and three positioning reference surfaces, wherein when the trapezoidal prism is used in a system, the trapezoidal prism is positioned by a top surface and two side surfaces, light enters from a bottom surface, and is emitted from a bottom optical surface after being reflected twice by a 45-degree surface. Therefore, the angle precision between the optical surface and the positioning surface is an important index of the trapezoidal prism, and the diamond ultra-precision turning technology is an effective means for processing the high-precision CVD ZnSe trapezoidal prism.
Specifically, referring to fig. 1 and 2, the top surface M3 and two side surfaces M1, M2 of the trapezoidal prism serve as three positioning surfaces, and the bottom surface H and the front and rear two surfaces forming an angle of 45 ° with the bottom surface H serve as three optical surfaces.
The invention adopts a CNC milling and grinding machine to form and process the trapezoidal prism; and a CNC ultra-precise diamond turning machine with a rotary B axis is adopted, and a natural diamond cutter is used for carrying out ultra-precise turning on three positioning surfaces (M1, M2 and M3) and an optical surface (P, Q and H) of the prism.
The processing technology of the invention is carried out according to the figure 3:
the first step is as follows: milling and grinding a blank;
the second step is that: turning trapezoidal prism positioning surfaces M1, M2, M3 and an optical surface H by using an arc cutter;
the third step: turning a tool positioning surface by using a CNC ultra-precise diamond turning machine tool with a rotary B shaft, and then installing a trapezoidal prism;
the fourth step: three optical surfaces P, Q and H of a trapezoidal prism are turned by using a CNC ultra-precise diamond turning machine tool with a rotary B axis and a fly cutter;
in the first step, a CNC milling machine is used for milling and forming the bulk CVD ZnSe material to obtain a trapezoidal prism blank, and turning allowance of 0.2 mm-0.3 mm is reserved on three positioning surfaces and three optical surfaces of the blank. After milling, the angle precision between the optical surfaces of the trapezoidal prism is better than 10 ', and the side hanging precision of the positioning surface and the optical surfaces is better than 10';
in the second step, three positioning surfaces M1, M2 and M3 and an optical surface H of the trapezoidal prism are turned by using a diamond arc cutter and an ultra-precise CNC diamond lathe, after turning is finished, a semi-finished product of the trapezoidal prism is obtained, and the turning positioning surfaces and the optical surface meet the requirements on shape and position size and matching precision;
in the third step, a CNC ultra-precise diamond turning machine tool with a rotary B axis is used for turning a positioning surface of the tool, and the positioning surface is ensured to be vertical or parallel to the rotary center of the B axis; clamping the trapezoidal prism on a tool, so that the normal direction of a positioning surface of the trapezoidal prism is parallel to the B-axis rotation center, and the normal direction of the optical surface center is superposed with the rotation center of the machine tool spindle;
in the fourth step as described above, the three optical surfaces P, H and Q of the trapezoidal prism are turned in sequence by rotating the B axis using the CNC ultra-precision diamond turning machine with the rotation B axis and the diamond fly turning trapezoidal prism; wherein, three optical surfaces of trapezoidal prism are the turning of once dress card.
Examples
Aiming at the CVD ZnSe trapezoidal prism, a CNC ultra-precise diamond lathe is adopted and is assisted with a diamond arc cutter to carry out ultra-precise turning processing on the CVD ZnSe trapezoidal prism. The invention relates to a high-precision CVD ZnSe trapezoidal prism processing method, which is described in the following with reference to the attached drawings and examples, and the processing process flow is shown in FIG. 3.
A high precision CVD ZnSe trapezoidal prism was machined, see FIG. 1. Wherein, the included angles of the H surface of the optical surface, the P surface and the Q surface are 135 degrees +/-10 degrees, and the side sag precision of the M1 surface, the M2 surface and the H surface is 1'; the sag accuracy of the M1 plane, the M2 plane, and the P or Q plane is 1'.
The first step is as follows: milling and grinding a blank;
grinding the CVD ZnSe blank material by adopting a precise CNC milling and grinding machine to obtain a trapezoidal prism blank, wherein the machining allowance of three positioning surfaces M1, M2 and M3 and three optical surfaces P, Q, H of the blank is 0.25 mm; meanwhile, the included angles of the H surface of the optical surface, the P surface and the Q surface are 135 degrees +/-10 ', and the side sag accuracy of the M1 surface, the M2 surface and the H surface is better than 10'; the sag accuracy of the M1 surface, the M2 surface and the P or Q surface is better than 10'.
The second step is that: three positioning surfaces (M1, M2 and M3) and an optical surface (H) of the trapezoidal prism are turned by the arc cutter;
three positioning surfaces (M1, M2 and M3) and an optical surface (H) of the trapezoidal prism are turned by a diamond arc cutter, and after the trapezoidal prism is turned by an ultra-precise CNC diamond lathe, a semi-finished product of the trapezoidal prism is obtained, the form and position size between the trapezoidal prisms M1 and M2 is a final machining size, the parallelism is superior to 1 ', the form and position size between the trapezoidal prism M3 and H is the sum of the final machining size and the residual machining turning amount of the H surface, and the parallelism is superior to 1'.
The third step: turning and clamping the tool ultra-precisely;
after the turning of a CNC ultra-precise diamond lathe is finished and the trapezoidal prism is clamped, the normal directions of the positioning surfaces M1 and M2 are parallel to the B-axis rotation center, and the normal direction of the center of the optical working surface (H) coincides with the rotation center of the machine tool spindle. At this time, the vertical accuracy of M1 and M2 to the center of rotation of the B axis is better than 10 ".
The fourth step: fly cutting three optical surfaces (P, Q and H) of trapezoidal prism;
as shown in fig. 4 and 5, three optical surfaces of the trapezoidal prism are turned in sequence by using a CNC ultra-precise diamond lathe and a diamond fly cutter, that is: p-plane, H-plane and Q-plane. After turning, the center normal directions of the three optical surfaces are parallel to the rotation center of the main shaft, the rotation center of the main shaft of the ultra-precision lathe is absolutely vertical to the rotation center of the B shaft under a machine tool coordinate system, and the vertical accuracy of M1 and M2 to the rotation center of the B shaft is better than 10' (the third step). Therefore, the side sag accuracy of M1, M2 and H is better than 10 ', and the side sag accuracy of M1, M2, P or Q is better than 10'.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (5)
1. A high-precision CVD ZnSe trapezoidal prism processing method, wherein a top surface M3 and two side surfaces M1 and M2 of the CVD ZnSe trapezoidal prism are used as three positioning surfaces, and a bottom surface H and a front surface P, Q and a rear surface P, Q which form an included angle of 45 degrees with the bottom surface H are used as three optical surfaces; the method is characterized by comprising the following steps:
the first step is as follows: milling and grinding a blank;
the second step is that: turning trapezoidal prism positioning surfaces M1, M2, M3 and an optical surface H by using an arc cutter;
the third step: turning a tool positioning surface by using a CNC ultra-precise diamond turning machine tool with a rotary B shaft, and then installing a trapezoidal prism;
the fourth step: three optical surfaces P, Q and H of a trapezoidal prism are turned by using a CNC ultra-precise diamond turning machine tool with a rotary B axis and a fly cutter;
in the first step, a CNC milling machine is used for milling and forming the blocky CVD ZnSe material to obtain a trapezoidal prism blank;
in the first step, turning allowance of 0.2 mm-0.3 mm is reserved on three positioning surfaces and three optical surfaces of the blank;
in the first step, after milling, the angle precision between the optical surfaces of the trapezoidal prism is better than 10 ', and the side verticality precision of the positioning surface and the optical surface is better than 10';
in the second step, a diamond arc cutter and an ultra-precise CNC diamond lathe are used for turning three positioning surfaces M1, M2 and M3 of the trapezoidal prism and an optical surface H, after turning is completed, a semi-finished product of the trapezoidal prism is obtained, and the turning positioning surfaces and the optical surface meet the requirements of preset form and position size and matching precision;
in the third step, a CNC ultra-precise diamond turning machine tool with a rotary B shaft is used for turning a positioning surface of the tool, and the positioning surface is ensured to be vertical or parallel to a rotary center of the B shaft; and clamping the trapezoidal prism on the tool, so that the normal direction of the positioning surface of the trapezoidal prism is parallel to the B-axis rotation center, and the normal direction of the optical surface center coincides with the rotation center of the machine tool spindle.
2. The high-precision CVD ZnSe trapezoidal prism processing method as set forth in claim 1, wherein in the fourth step, the three optical surfaces P, H and Q of the trapezoidal prism are turned in sequence by rotating the B axis using a CNC ultra-precision diamond turning machine with a rotation B axis and a diamond fly turning trapezoidal prism; wherein, three optical surfaces of trapezoidal prism are the turning of once dress card.
3. The method of claim 1, wherein in the second step, the form and position dimension between the positioning surfaces M1 and M2 of the semi-finished product of the trapezoidal prism is the final processing dimension, and the parallelism of the semi-finished product of the trapezoidal prism is better than 1'; the form and position size between the positioning surface M3 of the trapezoidal prism semi-finished product and the optical surface H is the sum of the final machining size and the residual machining turning amount of the H surface, and the parallelism of the trapezoidal prism semi-finished product and the optical surface H is better than 1'.
4. The method for processing the high-precision CVD ZnSe trapezoidal prism as claimed in claim 1, wherein in said third step, after the trapezoidal prism is mounted and clamped on the jig, the vertical precision of the positioning surfaces M1 and M2 to the B-axis rotation center is better than 10 ".
5. The method for processing the high-precision CVD ZnSe trapezoidal prism as claimed in claim 2, wherein in said fourth step, after turning the three optical surfaces P, H and Q of the trapezoidal prism, the normal directions of the centers of the three optical surfaces are parallel to the rotation center of the main shaft, and the rotation center of the main shaft of the ultra-precision lathe and the rotation center of the B-axis are absolutely perpendicular in the machine coordinate system.
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| CN110370094B (en) * | 2019-07-29 | 2020-11-10 | 丹阳丹耀光学有限公司 | Machining process and equipment for frosted prism |
| CN110842476B (en) * | 2019-11-19 | 2021-09-24 | 中国船舶重工集团公司第七0七研究所 | Method for manufacturing pentahedron reflector applied to high-speed scanning system |
| CN112123597A (en) * | 2020-09-07 | 2020-12-25 | 天津津航技术物理研究所 | Method for processing small-caliber high-precision optical lens |
| CN112692679A (en) * | 2020-12-31 | 2021-04-23 | 昆明云锗高新技术有限公司 | High-precision prism bonding device and processing method |
| CN117124483B (en) * | 2023-07-13 | 2024-03-08 | 同济大学 | Free-form surface prism high-precision compensation processing method based on online and offline detection |
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