CN115431105A - Spherical off-axis mirror processing method - Google Patents
Spherical off-axis mirror processing method Download PDFInfo
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- CN115431105A CN115431105A CN202211084525.9A CN202211084525A CN115431105A CN 115431105 A CN115431105 A CN 115431105A CN 202211084525 A CN202211084525 A CN 202211084525A CN 115431105 A CN115431105 A CN 115431105A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/14—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms
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- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The application provides a spherical off-axis mirror processing method, which comprises the following steps: step S1, preparing a blank piece, wherein the blank piece is provided with a first surface and a second surface which are parallel to each other; s2, mounting the blank piece in a first tool, wherein the first surface is exposed out of the first tool; a first included angle is formed between the axis of the blank and the axis of the first tool; s3, machining the first surface into a first off-axis surface by adopting an axisymmetric machining method to obtain a semi-finished product; s4, mounting the semi-finished product in a second tool, wherein the second surface is exposed out of the second tool; the second tool and the semi-finished product piece jointly form a first axisymmetric shape; s5, processing the second surface into a second off-axis surface by adopting an axisymmetric processing method to obtain a finished product; the finished part and the second tool jointly form a second axisymmetric shape. The processing method is simple and reasonable, and is convenient to operate.
Description
Technical Field
The application relates to the technical field of manufacturing of precision optical parts, in particular to a spherical off-axis mirror processing method.
Background
The off-axis mirror element has the advantages of enlarging the field range, having no central obstruction, improving the imaging quality of an optical system, reducing the size and the weight and the like, and is more and more widely applied in the fields of space optics, military and national defense, high-tech civil use and the like.
Because the geometric axis of the off-axis mirror is not coincident with the optical axis, a rotational symmetry axis does not exist in the geometric dimension, and the off-axis mirror is high in processing difficulty. At present, two methods are mainly adopted for optical processing of spherical off-axis mirrors: firstly, grinding and polishing the axisymmetric main mirror, and then cutting the axisymmetric main mirror according to the outline dimension of the off-axis mirror, wherein the method is easy to scratch the polished surface and the cut edge is easy to break; and secondly, splicing the primary mirror and the secondary mirror, namely splicing the off-axis mirror and the drilled primary mirror, and then grinding and polishing the axisymmetric primary mirror and the secondary mirror, wherein the method is easy to generate an edge effect in the polishing process of the spliced edge, the two methods both need the grinding and polishing of the primary mirror, the processing difficulty is increased, and the production cost can be greatly increased for expensive raw materials.
Therefore, if the advantages of the off-axis spherical surface are widely applied, designing a quick and low-cost processing method of the spherical off-axis mirror is of great significance.
Disclosure of Invention
The purpose of the application is to solve the above problems, and provide a quick and low-cost processing method of a spherical off-axis mirror, which is used for processing the spherical off-axis mirror and ensuring the position precision and the surface shape quality of the spherical off-axis mirror.
The application provides a spherical off-axis mirror processing method, wherein the spherical off-axis mirror is provided with a first off-axis surface and a second off-axis surface; a first off-axis angle is formed between the axis of the first off-axis surface and the axis of the second off-axis surface, and the machining method comprises the following steps:
step S1, preparing a blank piece, wherein the blank piece is provided with a first surface and a second surface which are parallel to each other;
s2, mounting the blank in a first tool, wherein the first surface is exposed outside the first tool; a first included angle is formed between the axis of the blank and the axis of the first tool, and the intersection point of the axis of the blank and the axis of the first tool is positioned above the first tool;
s3, machining the first surface into the first off-axis surface by adopting an axisymmetric machining method to obtain a semi-finished product;
s4, mounting the semi-finished product in a second tool, wherein the second surface is exposed outside the second tool; the second tool and the semi-finished product piece jointly form a first axisymmetric shape;
s5, processing the second surface into a second off-axis surface by adopting an axisymmetric processing method to obtain a finished product; and the finished part and the second tool jointly form a second axisymmetric shape.
According to the technical solution provided by some embodiments of the present application, the size of the first included angle is a difference between the second chord angle and the first chord angle; wherein the first chord angle is an included angle formed by a chord line of the first off-axis surface and a symmetry axis of the first off-axis surface; the second chord angle is an included angle formed by a chord line of the second off-axis surface and a symmetry axis of the first off-axis surface.
According to the technical scheme provided by some embodiments of the application, in the step S2, when the blank is installed in the first tool, a straight line where an intersection point of the axis of the blank and the axis of the first tool and the lowest point of the first surface are located is perpendicular to the axis direction of the first tool.
According to the technical scheme provided by some embodiments of the present application, the blank prepared in step S1 is a cylindrical structure, and the preparation of the blank specifically includes: grinding the blank to the finished size by using an edge grinding machine; and manually and finely grinding the blank by using a single-shaft machine by using a loose abrasive until the parallelism of the first surface and the second surface is less than a first preset value, and the perpendicularity of the first plane and the second plane with the side surface of the blank piece is respectively less than a second preset value.
According to the technical scheme provided by some embodiments of the application, the first preset value is 0.01mm; the second preset value is 0.01mm.
According to the technical solution provided by some embodiments of the present application, in step S3, the processing the first surface into the first off-axis surface includes: the first surface is first coarsely ground, then the coarsely ground first surface is finely ground, and then the finely ground first surface is polished.
According to the technical scheme provided by some embodiments of the application, in step S3, after the first surface is processed into the first off-axis surface, the surface shape precision and the surface finish quality of the first off-axis surface also need to be detected, and when the surface shape precision and the surface finish quality of the first off-axis surface are judged to be respectively qualified, the step S4 is continued.
According to the technical scheme provided by some embodiments of the present application, before the step S4 of installing the semi-finished product in the second tooling, the method further includes: and cleaning the first off-axis surface of the semi-finished product piece, and coating a protective layer on the cleaned first off-axis surface.
According to the technical scheme provided by some embodiments of the present application, step S5 further includes: and detecting the surface shape precision and the surface smoothness of the second off-axis surface, and stopping machining when the surface shape precision and the surface smoothness of the second off-axis surface are respectively qualified.
According to the technical scheme provided by some embodiments of the application, the qualified standard of the surface shape precision is as follows: PV < lambda/4 and RMS < lambda/25.
Compared with the prior art, the beneficial effect of this application: the spherical off-axis mirror processing method provided by the application adopts a tool auxiliary mode, so that the processing of the off-axis mirror is converted into the processing of the axisymmetric spherical mirror, and the processing method is simple and reasonable and is convenient to operate; specifically, the position of the off-axis mirror is converted by the clamping tool (comprising a first tool and a second tool), the off-axis spherical mirror is processed into an axisymmetric spherical surface, the clamped off-axis mirror and the clamping tool are regarded as an integral axisymmetric spherical surface, the processing is simplified, and the problem of difficulty in processing the off-axis mirror is effectively solved.
Drawings
FIG. 1 is a schematic view of a spherical off-axis mirror to be processed according to an embodiment of the present application;
FIG. 2 is a schematic diagram of an off-axis angle of a spherical off-axis mirror to be processed according to an embodiment of the present application;
FIG. 3 is a schematic structural view of a blank placed in a first tooling;
FIG. 4 is a schematic structural view of a semi-finished product and a first tooling;
FIG. 5 is a schematic structural view of the semi-finished product placed in the second tooling;
fig. 6 is a schematic structural view of a spherical off-axis mirror finished part and a second tool.
The text labels in the figures are represented as:
1. a spherical off-axis mirror; 101. a first off-axis surface; 102. a second off-axis surface; 2. a first tool; 3. a blank member; 4. a semi-finished piece; 5. and a second tool.
Detailed Description
The following detailed description of the present application is given for the purpose of enabling those skilled in the art to better understand the technical solutions of the present application, and the description in this section is only exemplary and explanatory, and should not be taken as limiting the scope of the present application in any way.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
The embodiment provides a method for processing a spherical off-axis mirror, the spherical off-axis mirror to be processed by the method is shown in fig. 1, and the design technical indexes of the spherical off-axis mirror 1 are as follows:
the diameter of the excircle is 130mm, the radius of the convex spherical surface R1=603.6mm, the radius of the concave spherical surface R2= -412.3mm, the central thickness is 15.2 +/-0.1 mm, the off-axis angle is 11.67 degrees, the surface shape precision PV < lambda/4 and RMS < lambda/25, wherein the surface shape precision is expressed by a simple numerical index peak-valley value (PV) and a root mean square value (RMS) of a wave surface, and when the surface shape is tested by a laser interferometer, lambda =0.6328 mu m.
The spherical off-axis mirror 1 is provided with a first off-axis surface 101 and a second off-axis surface 102; in this embodiment, the first off-axis surface 101 is a concave spherical surface, the second off-axis surface 102 is a convex spherical surface, and the concave spherical surface is processed first and then the convex spherical surface is processed in the processing process; in other embodiments of the present application, the convex spherical surface may be used as the first off-axis surface 101, and the concave spherical surface may be used as the second off-axis surface 102. A first off-axis angle is formed between the axis of the first off-axis surface 101 and the axis of the second off-axis surface 102, and in this embodiment, the value of the first off-axis angle is 11.67 °.
Referring to fig. 2, m1 is a symmetry axis of the convex spherical surface, m2 is a symmetry axis of the concave spherical surface, and an included angle formed between m1 and m2 is a first off-axis angle, i.e., an off-axis angle of the spherical off-axis mirror 1; n1 is a chord line of the convex spherical surface, namely a straight line where two end points of the convex spherical surface are located, and n2 is a chord line of the concave spherical surface, namely a straight line where two end points of the concave spherical surface are located; alpha is an included angle formed between n1 and m2, and beta is an included angle formed between n2 and m 2.
Referring to fig. 3 to fig. 6, the processing method for a spherical off-axis mirror provided in this embodiment adopts a tool-assisted manner to convert the processing of the off-axis mirror into the processing of an axisymmetric spherical mirror, and the processing method includes the following steps:
step S1, preparing a blank piece, wherein the blank piece is provided with a first surface and a second surface which are parallel to each other.
The blank 3 is a short cylindrical structure, the thickness (i.e. the length of the cylindrical structure) of the blank 3 is greater than the maximum thickness between two off-axis surfaces of the spherical off-axis mirror 1 to be processed, and the preparation of the blank 3 specifically includes: grinding the excircle of the blank to the finished size of 130mm by using an edge grinding machine; manually fine grinding the two planes by using a single-shaft machine by using a loose grain grinding material, fine grinding and leveling to ensure the parallelism and the verticality of the blank piece 3 and ensure accurate positioning reference, wherein in the embodiment, fine grinding is carried out until the parallelism of the first surface and the second surface is less than a first preset value, and the verticality of the first surface and the second surface and the side surface (namely, the excircle) of the blank piece 3 is respectively less than a second preset value; wherein the first preset value is 0.01mm; the second preset value is 0.01mm; the thickness of the blank is 26.2 +/-0.1 mm.
S2, mounting the blank piece in a first tool, wherein the first surface is exposed outside the first tool 2; a first included angle is formed between the axis of the blank and the axis of the first tool 2, and the intersection point of the axis of the blank and the axis of the first tool is located above the first tool.
Further, the magnitude of the first included angle is the difference between the second chord angle (i.e. alpha) and the first chord angle (i.e. beta); wherein the first chord angle (β) is an angle formed by a chord line (n 2) of the first off-axis plane and a symmetry axis (m 2) of the first off-axis plane; the second chord angle (i.e., α) is the angle formed by the chord line (i.e., n 1) of the second off-axis plane and the axis of symmetry (i.e., m 2) of the first off-axis plane.
Referring to fig. 3, the structural size of the first fixture 2 is designed according to the size of the spherical off-axis mirror 1 to be processed, which is processed by using a numerical control processing center and is made of glass; the first tool 2 is a concave surface clamping tool, the outer contour of the first tool 2 is a cylindrical contour, and a first groove is formed in the upper surface of the first tool; the first groove is a groove with a circular section; the bottom of the first groove is a plane and is obliquely arranged, namely, an obliquely arranged cylindrical groove is dug on the upper surface of the first tool 2; the central axis of the first fixture 2 is vertical to the central axis of fig. 3, an included angle is formed between the central axis of the first groove and the central axis of the first fixture 2, the included angle is γ, and γ = α - β.
The intersection point formed by the central axis of the first tool 2 and the central axis of the first groove is marked as a point A, and the point A is positioned above the first tool 2; since the first groove is obliquely arranged, the inner side wall of the groove has the longest part and the shortest part in a direction parallel to the central axis of the first groove, which are two parts connected to the left side and the right side of the bottom of the first groove in fig. 3, respectively; a straight line passing through the point a, being parallel to the surface of the first tool 2 (i.e., extending in the horizontal direction), and intersecting with the extension line of the straight line where the longest portion of the first groove sidewall is located is taken as a straight line B, the intersection point of the straight line B and the extension line of the straight line where the longest portion of the first groove sidewall is located is taken as a point C, the intersection point of the longest portion of the first groove sidewall and the bottom of the first groove is taken as a point D, and the distance between the point C and the point D is equal to the thickness of the blank member 3.
Installing the blank 3 prepared in the step S1 on the first tool 2, and enabling the second surface and part of the excircle of the blank 3 to be tightly attached to the inner wall of the first groove; the first surface extends out of the first tool 2 from the notch of the first groove, after the installation is finished, the central axis of the blank 3 coincides with the central axis of the groove, namely, a first included angle is formed between the central line axis of the blank 3 and the axis of the first tool 2, the angle value of the first included angle is gamma, and gamma = alpha-beta; meanwhile, a straight line of an intersection point of the axis of the blank member 3 and the axis of the first tool 2 and a lowest point of the first surface is vertical to the axis direction of the first tool 2, namely the straight line of the two is in the horizontal direction; specifically, a straight line where the point a and the lowest point of the first surface of the blank member 3 are located is parallel to the surface of the first tooling 2, i.e., perpendicular to the central axis of the first tooling 2, and the lowest point of the blank member 3 exposed outside the first groove coincides with the point C.
And S3, machining the first surface into the first off-axis surface by adopting an axisymmetric machining method to obtain a semi-finished product.
Referring to fig. 4, during machining, the blank 3 and the first tooling 2 are regarded as a whole, the whole is assumed to be an axisymmetric structure, and the imaginary symmetry axis is the central axis direction of the first tooling 2 (i.e., the vertical direction in fig. 5), and the first surface exposed out of the blank 3 is machined by using an axisymmetric machining method using a symmetry axis machine tool.
Specifically, machining the first surface into the first off-axis surface 101 includes: firstly, roughly grinding a first surface, finely grinding the roughly ground first surface, and polishing the finely ground first surface; the first surface of the clamped blank piece 3 can be milled and ground by using a milling and grinding machine according to the value of the concave spherical radius R2 given by the design requirement, and coarse grinding and fine grinding are carried out firstly, or the first surface of the clamped blank piece 3 can be spherical-opened by hand according to the value of the concave spherical radius R2 given by the design requirement by using a single-shaft machine, and fine grinding is carried out firstly and then coarse grinding is carried out; the polishing operation was carried out by a uniaxial machine, the center thickness of the semi-finished product 4 after finish grinding was 15.43. + -. 0.1mm, the removal amount by polishing was 0.01-0.03mm, and the center thickness of the semi-finished product 4 after completion of polishing was 15.4. + -. 0.1mm.
In this step, after the first surface is processed into the first off-axis surface 101, the surface shape precision and the surface smoothness of the first off-axis surface 101 also need to be detected, and when the surface shape precision and the surface smoothness of the first off-axis surface 101 are judged to be qualified, the step S4 is continued, and if the surface shape precision and the surface smoothness are not qualified, polishing needs to be repeated until both parameters are qualified. The qualified standard of the surface shape precision is as follows: PV < λ/4, rms < λ/25, where λ =0.6328 μ ι η; the surface smoothness is the surface defect of the optical parts, each part has the requirement of the surface smoothness, namely the surface defect, and in the embodiment, the standard for judging the qualified surface smoothness is shown in GB/T1185-2006.
S4, mounting the semi-finished product in a second tool, wherein the second surface is exposed outside the second tool; the second tool and the semi-finished product piece jointly form a first axisymmetric shape.
In order to prevent scratches from being caused to the first off-axis surface 101 which is qualified after being polished, before the semi-finished product 4 is installed on the second tooling 5, the first off-axis surface 101 of the semi-finished product 4 needs to be cleaned, and a protective layer is coated on the cleaned first off-axis surface 101 to protect a polished surface, wherein the protective layer can be protective adhesive paper.
Referring to fig. 5, the structural size of the second tooling 5 is designed according to the size of the spherical off-axis mirror 1 to be processed, which is processed by using a numerical control processing center and is made of glass; the second tool 5 is a convex clamping tool, the outer contour of the second tool 5 is a cylindrical contour, and a second groove is formed in the upper surface of the second tool; the second groove is a groove with a circular section, namely, a cylindrical groove is dug on the upper surface of the second tool 5, and the central axis of the cylindrical groove is overlapped with the central axis of the second tool 5; the groove bottom of the second groove is an arc surface, the arc surface of the second groove protrudes outwards towards the opening direction of the second groove, and the radian of the arc surface is matched with the concave spherical surface (namely the first off-axis surface 101) of the spherical off-axis mirror 1 to be processed; the central axis of the second fixture 5 is vertical to the direction in fig. 5.
Installing the semi-finished product 4 coated with the protective gummed paper in the second tool 5, and tightly attaching the first off-axis surface 101 and part of the excircle of the semi-finished product 4 with the protective layer to the inner wall of the second groove; the second surface extends out of the notch of the second groove to the outside of the second tooling 5, after the installation is finished, the second surface of the semi-finished product 4 is perpendicular to the central axis of the second tooling 5, that is, the second surface of the semi-finished product 4 is parallel to the second tooling 5, and at this time, the second tooling 5 and the semi-finished product 4 form a first axisymmetric shape together, as shown in fig. 5.
S5, processing the second surface into a second off-axis surface by adopting an axisymmetric processing method to obtain a finished product; and the finished part and the second tool jointly form a second axisymmetric shape.
Referring to fig. 6, during machining, the semi-finished product 4 and the second tooling 5 are regarded as a whole, the whole is an axisymmetric structure, the symmetry axis of the whole is the central axis direction of the second tooling 5 (i.e. the vertical direction in fig. 6), and the machining method of axisymmetric machining is adopted to machine the exposed second surface of the semi-finished product 4 by using a symmetry axis machine tool.
Specifically, machining the second surface into the second off-axis surface 102 includes: firstly, roughly grinding the second surface, then finely grinding the roughly ground second surface, and polishing the finely ground second surface; wherein, the second surface of the clamped blank piece 3 can be milled and ground by a milling and grinding machine according to the value of the convex spherical radius R1 given by the design requirement, and coarse grinding and fine grinding are firstly carried out, or the second surface of the clamped semi-finished product 4 can be spherical-opened by hand according to the value of the concave spherical radius R1 given by the design requirement by a single-shaft machine, and fine grinding is firstly carried out and then coarse grinding is carried out; the polishing operation is carried out by a single-spindle machine; wherein the grinding removal amount is 0.2mm, the polishing removal amount is 0.01-0.03mm, and the center thickness of the semi-finished product 4 after polishing is 15.2 +/-0.1 mm.
In this step, after the second surface is processed into the second off-axis surface 102, the surface shape precision and the surface finish of the second off-axis surface 102 also need to be detected, and when the surface shape precision and the surface finish of the second off-axis surface 102 are judged to be unqualified, polishing needs to be repeated until both parameters are qualified. The qualified standard of the surface shape precision is as follows: PV < λ/4, rms < λ/25, where λ =0.6328 μ ι η; the surface smoothness is the surface defect of the optical part, each part has the requirement of the surface smoothness, namely the surface defect, and in the embodiment, the qualified judgment standard of the surface smoothness is shown in GB/T1185-2006; and if the surface shape precision and the surface smoothness of the second off-axis surface 102 are judged to be qualified, stopping processing, and cleaning the second off-axis surface to obtain a finished spherical off-axis mirror.
According to the method for processing the spherical off-axis mirror, the off-axis mirror is processed into the axisymmetric spherical mirror in a tool-assisted mode, and the processing method is simple, reasonable and convenient to operate; the off-axis spherical mirror machining method has the advantages that the position of the off-axis mirror is converted by the clamping tool (comprising the first tool and the second tool), the off-axis spherical mirror is machined into the axisymmetric spherical surface, the clamped off-axis mirror and the clamping tool are regarded as the axisymmetric spherical surface, machining is simplified, the problem that the off-axis mirror is difficult to machine is effectively solved, the problems that splicing of a mother off-axis mirror or cutting after grinding and polishing of the off-axis mirror is difficult and the like are not needed, manufacturing cost can be greatly reduced, one set of tool can be used for batch production and can be used repeatedly, and the off-axis spherical mirror machining method is rapid and low in cost.
The processing method is convenient, efficient, high in processing precision and low in risk, the qualification rate of the finally processed off-axis spherical mirror can reach 100%, and the quality is stable, economic and fast particularly in batch production.
The principles and embodiments of the present application are explained herein using specific examples, which are provided only to help understand the method and the core idea of the present application. The foregoing is only a preferred embodiment of the present application, and it should be noted that there are no specific structures which are objectively limitless due to the limited character expressions, and it will be apparent to those skilled in the art that a plurality of modifications, decorations or changes can be made without departing from the principle of the present invention, and the technical features mentioned above can be combined in a suitable manner; such modifications, variations, combinations, or adaptations of the invention in other instances, which may or may not be practiced, are intended to be within the scope of the present application.
Claims (10)
1. A spherical off-axis mirror processing method is provided, wherein the spherical off-axis mirror is provided with a first off-axis surface and a second off-axis surface; the processing method is characterized by comprising the following steps:
step S1, preparing a blank piece, wherein the blank piece is provided with a first surface and a second surface which are parallel to each other;
s2, mounting the blank piece in a first tool, wherein the first surface is exposed outside the first tool; a first included angle is formed between the axis of the blank and the axis of the first tool, and the intersection point of the axis of the blank and the axis of the first tool is positioned above the first tool;
s3, machining the first surface into the first off-axis surface by adopting an axisymmetric machining method to obtain a semi-finished product;
s4, mounting the semi-finished product in a second tool, wherein the second surface is exposed outside the second tool; the second tool and the semi-finished product piece jointly form a first axisymmetric shape;
s5, processing the second surface into a second off-axis surface by adopting an axisymmetric processing method to obtain a finished product; and the finished part and the second tool jointly form a second axisymmetric shape.
2. The method for processing the spherical off-axis mirror according to claim 1, wherein the first included angle is the difference between the second chord angle and the first chord angle; wherein the first chord angle is an included angle formed by a chord line of the first off-axis surface and a symmetry axis of the first off-axis surface; the second chord angle is an included angle formed by a chord line of the second off-axis surface and a symmetry axis of the first off-axis surface.
3. A method for processing a spherical off-axis mirror according to claim 1, wherein in step S2, when the blank is installed in the first fixture, a straight line between an intersection point of the axis of the blank and the axis of the first fixture and the lowest point of the first surface is perpendicular to the axis direction of the first fixture.
4. A method for processing a spherical off-axis mirror according to claim 1, wherein the blank prepared in step S1 is of a cylindrical structure, and the preparation of the blank specifically comprises: grinding the blank to the finished size by using an edge grinding machine; and manually and finely grinding the blank by using a single-shaft machine by using a loose abrasive until the parallelism of the first surface and the second surface is less than a first preset value, and the perpendicularity of the first plane and the second plane with the side surface of the blank piece is respectively less than a second preset value.
5. The method for processing a spherical off-axis mirror according to claim 4, wherein the first preset value is 0.01mm; the second preset value is 0.01mm.
6. A method for processing a spherical off-axis mirror according to claim 1, wherein the step S3 of processing the first surface into the first off-axis surface comprises: the first surface is first coarsely ground, then the coarsely ground first surface is finely ground, and then the finely ground first surface is polished.
7. A method for processing a spherical off-axis mirror according to claim 1, wherein in step S3, after the first surface is processed into the first off-axis surface, the surface shape precision and the surface smoothness thereof are detected, and when the surface shape precision and the surface smoothness of the first off-axis surface are judged to be qualified, the step S4 is continued.
8. A method for processing a spherical off-axis mirror according to claim 1, wherein before the step S4 of installing the semi-finished product in the second tooling, the method further comprises: and cleaning the first off-axis surface of the semi-finished product, and coating a protective layer on the cleaned first off-axis surface.
9. The method for processing the spherical off-axis mirror according to claim 1, wherein the step S5 further comprises: and detecting the surface shape precision and the surface smoothness of the second off-axis surface, and stopping machining when the surface shape precision and the surface smoothness of the second off-axis surface are judged to be qualified.
10. A spherical off-axis mirror processing method according to claim 7 or 9, wherein the qualified standard of the surface shape precision is: PV < lambda/4 and RMS < lambda/25.
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| CN202211084525.9A Pending CN115431105A (en) | 2022-09-06 | 2022-09-06 | Spherical off-axis mirror processing method |
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| CN116442055A (en) * | 2023-04-07 | 2023-07-18 | 北京创思工贸有限公司 | Wedge lens processing method |
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| CN116442055B (en) * | 2023-04-07 | 2024-01-30 | 北京创思工贸有限公司 | Wedge lens processing method |
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