CN112222954B - Processing method of non-spherical convex silicon lens with platform - Google Patents
Processing method of non-spherical convex silicon lens with platform Download PDFInfo
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- CN112222954B CN112222954B CN202010960434.1A CN202010960434A CN112222954B CN 112222954 B CN112222954 B CN 112222954B CN 202010960434 A CN202010960434 A CN 202010960434A CN 112222954 B CN112222954 B CN 112222954B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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Abstract
The invention provides a method for processing an aspheric convex silicon lens with a platform, which is used for solving the problem that an aspheric convex assembly platform is difficult to process in the prior art. The processing method comprises the following steps: s1, fixing the non-processing surface and the outer circle of the silicon lens blank, roughly grinding the processing surface to form a spherical surface, and reserving a first processing allowance in the center thickness direction; s3, processing the spherical surface of the processing surface into a required aspheric surface shape by utilizing a point contact mode, processing a platform, and reserving a third processing allowance in the center thickness direction; and S5, removing the third machining allowance layer by using a single-point diamond turning or ultra-precise point contact grinding mode, and machining the machined surface into a non-spherical convex surface with a platform to reach the machining size and meet the optical index requirement. The invention combines surface (line) contact and point contact superfinishing to prepare the precise non-spherical convex silicon lens with the platform, realizes the preparation of the non-spherical convex silicon lens and successfully completes the assembly of the non-spherical convex silicon lens in application.
Description
Technical Field
The invention belongs to the field of optical ultra-precision machining, and particularly relates to a machining method of an aspherical silicon lens with a platform.
Background
The application of the aspheric surface in the optical system can play roles in optimizing imaging quality and simplifying system structure, and the application of the aspheric surface in the optical system is more and more extensive with the continuous progress of optical design and optical part manufacturing technology.
In the prior art, in consideration of the processing manufacturability, the concave surface of the aspheric lens is designed into a platform form, the convex surface is rarely designed into the platform form, and the processing of the aspheric lens with the platform convex is also rarely reported. The existing aspheric surface is processed by firstly processing a best fitting spherical surface in a milling or grinding mode and then processing the aspheric surface. However, according to the process route of firstly processing the best-fit spherical surface and then processing the aspheric surface by the common aspheric surface, when the best-fit spherical surface with the platform is processed by applying the conventional generating normal contact milling or rough grinding by utilizing the surface contact form of the grinding disc, the grinding wheel or the grinding disc interferes with the platform; when the optical surface processing is performed, the silicon aspheric surface is processed by surface contact, interference will occur at the joint of the platform and the convex surface, and the processing of the biconvex aspheric lens with the platform is difficult to complete.
Disclosure of Invention
In view of the above-mentioned defects or shortcomings in the prior art, the present invention aims to provide a method for processing a non-spherical convex silicon lens with a platform, which combines surface contact and point contact, and prepares a precise non-spherical convex silicon lens with a platform through spherical surface processing, convex surface processing with a platform and hyperfine processing, so as to realize the preparation of the non-spherical convex silicon lens and smoothly complete the assembly of the non-spherical convex silicon lens in application.
In order to achieve the above purpose, the embodiment of the invention adopts the following technical scheme:
a processing method of an aspheric convex silicon lens with a platform comprises the following steps:
step S1, fixing the non-processing surface and the excircle of the silicon lens blank, roughly grinding the processing surface to form a spherical surface, and reserving a first processing allowance in the center thickness direction;
step S3, processing the spherical surface of the processing surface into a needed aspheric surface shape by a point contact mode, processing a platform, and reserving a third processing allowance in the center thickness direction;
and step S5, removing the third machining allowance layer by using a single-point diamond turning or ultra-precise point contact grinding mode, machining the machined surface into an aspheric convex surface with a platform to reach the machining size, wherein the aspheric convex surface, the platform and the joint meet the preset optical index requirement.
In the scheme, the aspheric convex silicon lens with the platform is single-sided or double-sided; when the silicon lens is a biconvex aspheric surface, in the processing process, after the step S1, turning over the silicon lens, and repeating the step S1; after the step S3, the silicon lens is turned over, and the step S3 is repeated; after step S5, the silicon lens is turned over, and step S5 is repeated.
In the scheme, the spherical radius is the radius of the arc determined by two edge points of the first surface platform and three points of the central vertex of the aspheric convex surface.
In the scheme, the rough grinding forms a spherical surface, and the processing is carried out by adopting a cup-shaped grinding wheel line contact generating method milling grinding or grinding disc surface contact rough grinding.
In the above scheme, in step S3, the point contact processing method is right-angle cup-shaped wheel milling or single-point diamond turning rough turning.
In the scheme, the first machining allowance value is 0.5mm-0.8 mm; the third machining allowance value is 0.1mm-0.3 mm.
In the scheme, in the step S5, a single-point diamond cutter is adopted to directly turn the shape and the precision required by the machined surface, and the center thickness is directly hit to the index required size; or an ultraprecise machine tool is adopted to grind the non-spherical convex surface with the platform on the processing surface by ultraprecision.
In the above scheme, the processing method further includes:
and step S7, cleaning, and turning to the next procedure after the cleaning is finished.
The invention has the following beneficial effects:
the processing method of the non-spherical convex silicon lens with the platform provided by the embodiment of the invention combines surface (line) contact and point contact, changes the original processing mode of processing an aspheric surface after processing a best fitting spherical surface, and prepares the precise non-spherical convex silicon lens with the platform through spherical surface processing, convex surface processing with the platform and superfine processing, thereby realizing the preparation of the non-spherical convex silicon lens with the platform and finishing the assembly of the non-spherical convex silicon lens in application. According to the method, the spherical radius selects the mode of the excircle edge and the central point of the part to be processed, so that the machining allowance of the subsequent convex aspheric surface with the platform is minimum, the machining efficiency is improved, and the problem of interference between the surface (line) and the platform when the spherical surface is machined is solved.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:
fig. 1 is a schematic view of a biconvex aspherical silicon lens with a platform according to a first embodiment of the present invention;
fig. 2 is a flowchart of a processing method of a biconvex aspherical silicon lens with a platform according to a first embodiment of the invention;
FIG. 3 is a schematic view of the processing profile and the balance in the first embodiment of the present invention;
fig. 4 is a schematic view of a flatbed single-sided aspheric convex silicon lens according to a second embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
Fig. 1 is a schematic view of a shape of a biconvex aspherical silicon lens with a mesa according to a first embodiment of the present invention. As shown in fig. 1, the present invention provides a method for processing a biconvex aspheric surface with a platform, aiming at the characteristics of a silicon material lens, such as high hardness, easy occurrence of microcracks during the processing process, etc. Through ultra-precision machining, the high polishing degree, the high transparency and the high precision of the biconvex aspheric lens are realized, the platform is machined, and the convex aspheric lens is convenient to assemble.
According to the embodiment of the invention, a spherical surface is roughly formed in a linear contact or surface contact mode, then an aspheric surface and a platform are milled and formed in a point contact mode, and finally the final processing of the optical surface of the aspheric surface and the surface of the platform is completed in a point contact mode, so that the rapid and high-quality manufacturing of the convex aspheric surface silicon lens with the platform is realized. Fig. 2 shows a flow chart of a processing method of a biconvex aspherical silicon lens with a platform according to an embodiment of the invention, and fig. 3 shows a schematic diagram of processing morphology and residual amount in the flow chart. As shown in fig. 2 and 3, specifically, the processing method includes the following steps:
step S1, fixing the second surface and the excircle of the blank material of the silicon lens, roughly grinding the first surface to form a spherical surface, and reserving a first machining allowance d in the center thickness direction11。
In this step, the rough grinding forms a spherical surface, and the spherical surface is processed by a cup-shaped grinding wheel line contact generating method milling or grinding disc surface contact rough grinding. The surface contact mode is finished by adopting a rough grinding disc for grinding or adopting a diamond grinding wheel for milling. When the rough grinding disc is adopted for processing, the granularity of the adopted diamond is not more than 240# diamond dust, and when the diamond grinding wheel is adopted for milling processing, the granularity of the grinding wheel is not more than D70. The spherical radius is the radius of an arc determined by three points, namely a first surface platform edge point A1, a first surface platform edge point C1 and a non-spherical convex surface center vertex B1.
Preferably, d is11The value is 0.5mm-0.8 mm.
Step S2, fixing the first surface spherical surface and the excircle of the blank material of the silicon lens, roughly grinding the second surface to form a spherical surface, and reserving a second machining allowance d in the center thickness direction21。
In this step, the rough grinding is performed to form a spherical surface, and the spherical surface is processed by a cup-shaped grinding wheel line contact generating method milling or grinding disc surface contact rough grinding, which may be the same as or different from the first surface processing method. The spherical radius is the radius of an arc determined by three points of a platform edge point A2 and a platform edge point C2 of the second surface and a center vertex B2 of the convex surface.
Step S3, processing the second surface into needed aspheric surface shape by point contact, and processing a platform, reserving a third processing allowance d in the center thickness direction22。
In the step, the point contact processing mode adopts a right-angle cup-shaped wheel milling and grinding forming mode or a single-point diamond turning rough turning forming mode. Preferably, the diamond cup wheel in a right-angle form is used for programming, the second surface profile is directly milled and formed by a right-angle point, and in order to ensure the subsequent processing quality, the granularity of the cup wheel is not larger than D46.
Preferably, d22The value is 0.1mm-0.3 mm.
Step S4, fixing the second surface aspheric surface and the excircle of the blank material of the silicon lens, processing the first surface spherical surface into the needed aspheric surface shape in a point contact mode, processing a platform, and reserving a fourth processing allowance d in the center thickness direction12。
In the step, the point contact processing mode adopts a right-angle cup-shaped wheel milling and grinding forming mode or a single-point diamond turning rough turning forming mode.
Preferably, d22The value is 0.1mm-0.3 mm.
And step S5, removing the fourth machining allowance layer by using a single-point diamond turning or ultra-precise point contact grinding mode, machining the first surface into an aspheric convex surface with a platform to reach the machining size, wherein the aspheric convex surface, the platform and the joint meet the optical index requirements.
In the step, a single-point diamond lathe is adopted for processing, a single-point diamond cutter is adopted for directly turning the shape and the precision required by the first surface, and the center thickness is directly hit to the index required size; or an ultraprecise machine tool is adopted to grind the non-spherical convex surface of the first surface belt platform by ultraprecision.
And step S6, turning over the surface under the premise that the excircle is fixed, removing the fourth machining allowance layer by using a single-point diamond turning or ultra-precise point contact grinding mode, machining the second surface into an aspheric convex surface with a platform to reach the machining size, wherein the aspheric convex surface, the platform and the joint meet the optical index requirement.
Preferably, the method for processing a biconvex aspherical silicon lens with a platform according to this embodiment further includes:
and step S7, cleaning, and turning to the next procedure after the cleaning is finished.
In this embodiment, the adjustment of the first surface and the second surface may be performed by turning only the outer circle while fixing the outer circle in steps S1 and S2; in step S3 and step S4, the outer circle may be fixed and turned over. Therefore, under one-time clamping, two procedures are completed only by turning over.
Fig. 4 shows a schematic external view of a non-spherical convex silicon lens with a platform according to a second embodiment of the present invention. As shown in fig. 4, the single-sided aspheric convex silicon lens with a flat surface is different from the biconvex aspheric silicon lens of the first embodiment only in single-sided and double-sided aspects. The basic flow of the processing method for a single-sided aspheric convex silicon lens with a platform according to the present embodiment is substantially the same as that of the first embodiment, and the difference is that the inversion is not required, and steps S2, S4, and S6 are omitted.
According to the technical scheme, the processing method of the non-spherical convex silicon lens with the platform in the embodiment has the advantages that the efficiency and the processing precision of the ultra-precision processing of the non-spherical convex silicon lens with the platform are both considered in a mode of combining surface contact and point contact through the procedures of rough forming, fine forming, ultra-precision processing and the like, and the problem of the ultra-precision processing of the non-spherical convex silicon lens with the platform is effectively solved. The method has the advantages that large allowance is removed through rough forming, the allowance of conversion from the spherical surface to the aspheric surface is removed through a point contact forming mode, machining efficiency and machining precision are both considered, a foundation is laid for subsequent ultra-precision machining, and the method is a quick and effective machining method for the aspheric convex silicon lens.
The invention is not limited to the machining methods, machines and tools described in the above examples, nor to a planform double or single sided aspheric convex lens, as long as either side is a lens or mirror with a planform convex optical surface within the scope of the invention.
The foregoing description is only exemplary of the preferred embodiments of the invention and is illustrative of the principles of the technology employed. It will be appreciated by those skilled in the art that the scope of the invention herein disclosed is not limited to the particular combination of features described above, but also encompasses other arrangements formed by any combination of the above features or their equivalents without departing from the spirit of the invention. For example, the above features and (but not limited to) features having similar functions disclosed in the present invention are mutually replaced to form the technical solution.
Claims (7)
1. A processing method of an aspheric convex silicon lens with a platform is characterized by comprising the following steps:
step S1, fixing the non-processing surface and the excircle of the silicon lens blank, roughly grinding the processing surface to form a spherical surface, and reserving a first processing allowance in the center thickness direction; the spherical radius is the radius of an arc determined by two edge points of the first surface platform and a central vertex of the non-spherical convex surface;
step S3, processing the spherical surface of the processing surface into a needed aspheric surface shape by a point contact mode, processing a platform, and reserving a third processing allowance in the center thickness direction;
and step S5, removing the third machining allowance layer by using a single-point diamond turning or ultra-precise point contact grinding mode, avoiding the interference between the surface machining or linear machining spherical surface and the platform, machining the machined surface into an aspheric convex surface with the platform to reach the machining size, wherein the aspheric convex surface, the platform and the joint meet the preset optical index requirement.
2. The method of processing a convex silicon lens with a mesa as claimed in claim 1, wherein the convex silicon lens with a mesa is one-sided or two-sided; when the silicon lens is a biconvex aspheric surface, in the processing process, after the step S1, turning over the silicon lens, and repeating the step S1; after the step S3, the silicon lens is turned over, and the step S3 is repeated; after step S5, the silicon lens is turned over, and step S5 is repeated.
3. The method of processing a non-spherical convex silicon lens with a platform according to claim 1 or 2, wherein the rough grinding is performed to form a spherical surface, and the processing is performed by a cup-shaped grinding wheel line contact generating method milling grinding or a grinding disc surface contact rough grinding method.
4. The method for processing a non-spherical convex silicon lens with a platform according to claim 1 or 2, wherein in the step S3, the point contact processing method is right-angle cup-shaped wheel milling or single-point diamond turning rough turning.
5. The method for processing the aspheric convex silicon lens with the platform as claimed in claim 1 or 2, wherein the first processing margin is 0.5mm to 0.8 mm; the third machining allowance value is 0.1mm-0.3 mm.
6. The method for processing the aspheric convex silicon lens with the platform as claimed in claim 1 or 2, wherein in step S5, a single point diamond tool is used to directly turn out the shape and precision required by the processing surface, and the center thickness directly reaches the required size; or an ultraprecise machine tool is adopted to grind the non-spherical convex surface with the platform on the processing surface by ultraprecision.
7. The method of processing a non-spherical convex silicon lens with a platform as claimed in claim 1 or 2, wherein the method further comprises:
and step S7, cleaning, and turning to the next procedure after the cleaning is finished.
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| CN102269830B (en) * | 2011-04-26 | 2013-04-03 | 中国航空工业集团公司洛阳电光设备研究所 | Processing method for improving central deviation precision of non-spherical lens |
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| CN104339243A (en) * | 2014-11-26 | 2015-02-11 | 哈尔滨工业大学 | Grinding machine tool and method for processing aspherical monocrystalline silicon lens on machine tool |
| CN105467480B (en) * | 2015-11-23 | 2017-08-11 | 天津津航技术物理研究所 | A kind of high-precision CVD ZnSe lens machining method for aspheric surface |
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