CN109444331A - A kind of ultrahigh vacuum heating device and its heating means - Google Patents
A kind of ultrahigh vacuum heating device and its heating means Download PDFInfo
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- CN109444331A CN109444331A CN201811160088.8A CN201811160088A CN109444331A CN 109444331 A CN109444331 A CN 109444331A CN 201811160088 A CN201811160088 A CN 201811160088A CN 109444331 A CN109444331 A CN 109444331A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/44—Sample treatment involving radiation, e.g. heat
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
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Abstract
The present invention relates to a kind of ultrahigh vacuum heating device and its heating means, there is the adapter that can be connected with magnetic rod, it can be by adapter by the outgoing and incoming ultra-high vacuum system of entire sample stage；With the sample slot that can place sample, can be realized by sample slot mobile while sample and specimen heating holder；With DC heating brush-system, in conjunction with specific sample frame, DC heating brush can realize directional transmissions of the direct current on sample；With positioning conductive jack, the polarized plug placed in cavity is inserted by the jack, can not only realize the positioning of sample stage, but also can realize the connection with cavity external circuit, to realize the direct current electric heating for not destroying vacuum；Warm table has center engraved structure, in conjunction with specific sample frame, can realize that sample laser heats using infrared laser heater.The present invention can realize that heating speed is fast to sample good heating efficiency while keeping ultra-high vacuum environment, and temperature is high, and temperature gradient is small, and thermometric is accurate.
Description
Technical field
The invention belongs to heating in vacuum technical field, especially a kind of ultrahigh vacuum heating device and its heating means.
Background technique
Vacuum refers to subatmospheric power (105Pa the gas compartment) can divide under normal conditions according to the range of vacuum degree
For black vacuum (105-103Pa), low vacuum (103-10-1Pa), high vacuum (10-1-10-6Pa), ultrahigh vacuum (10-6-10-10Pa)
With extremely high vacuum (< 10-10Pa).In ultrahigh vacuum field, including the molecule of vacuum vessel wall absorption, gas molecule is deposited
Can almost it ignore, holding time for solid cleaning surface opposite can also extend.Vacuum technique is widely used in electronics
Technology, aeronautical and space technology, the fields such as accelerator, surface physics, microelectronics, material science.In particular, under vacuum conditions,
The research in the fields such as Surface Science, semiconductor application and nuclear fusion device can be carried out, these projects are for solving current mankind
Face as the problems such as environment, the energy, new material plays an important role.So development is in this extreme ring in ultrahigh vacuum field
The demand of working equipment becomes especially urgent under border.
In the prior art, to realize to the cleaning of sample surfaces in ultrahigh vacuum and sample moving back at different temperatures
Fire processing, the method mostly bombarded using Resistant heating or back scattering, both heating method heating efficiencies are low, resistance wire distance
Farther out, temperature gradient is larger between the two for material, thermometric inaccuracy, and is difficult to be heated to excessive temperature to sample.DC heating
Technology can be directly electric current is applied on sample, and heating efficiency is higher, and temperature gradient is smaller, but the use in ultrahigh vacuum field
It is also fewer, it is chiefly used in the heat treatment to semiconductor material, but prior art DC heating platform is all to be fixed on vacuum cavity
In, in order to realize the transfer of sample position, need to cooperate using manipulator and vacuum rotating equipment, and the two higher cost, make
Design is also the weak link of vacuum system, is easily damaged after being used for multiple times.The brush of DC heating is along with sample
Repeatedly plug easily relaxes, cannot achieve good contact, the prior art can only stop cavity if there is this problem
Vacuum state makes cavity exposure atmosphere, removes maintenance, time-consuming and laborious.Can be mobile with warm table so researching and developing a sample, and
It is extremely urgent that brush can not destroy the i.e. maintainable ultrahigh vacuum DC heating equipment of chamber vacuum.
Currently, China is all far from satisfying needs in high-end vacuum equipment development & production and the universal aspect of technology, more
Do not have strength and international opponent's direct competitive, the research funding that country puts into every year has sizable ratio to be used to buying state
Outer research equipment, this not only makes the scientific research in China under one's control, it is also difficult to possess original scientific achievement.Therefore, rapidly
The development for improving China's Vacuum Technology and Equipment, is the task of top priority.
Summary of the invention
Aiming at the problems existing in the prior art, a kind of structure of innovative design of the present invention is simple, low in cost, user
Just, easy to maintenance, it is easy to accomplish the ultrahigh vacuum heating device and its heating means of bulk industrial production.
The technical solution for realizing the aim of the invention is as follows:
A kind of ultrahigh vacuum heating device, including specimen holder, specimen heating holder and intracavitary positioning conductive column, the specimen holder
It can be engaged with specimen heating holder, the specimen heating holder can be engaged with intracavitary positioning conductive column, the specimen heating holder packet
Include adapter, sample stage main body, sample slot, direct current brush-system, position conductive jack and be set to sample stage main body after
A connecting hole on end face, the adapter are fixedly connected with the front end of sample stage main body, and the sample slot is fixed on sample
The middle part of platform main body,
The direct current brush-system includes that brush, direct current brush-system screw rod, insulating ceramic film, fastening nut and silver are led
The bottom end of line, the direct current brush-system screw rod passes through the sample slot and sample stage main body and fixation, the brush pass through
Direct current brush-system screw rod and the upper end position that direct current brush-system screw rod is fixed on by insulating ceramic film and fastening nut, institute
Stating and positioning conductive jack includes the first positioning conductive jack and the second positioning conductive jack, and the first positioning conductive jack and second is determined
Position conductive jack is fixed on one heart in two on rear side of sample stage main body through-holes respectively using ceramic glue, and the silver wire includes the
One silver wire and the second silver wire, the first silver wire connection first position conductive jack and are electrically isolated from direct current brush-system screw rod
Brush, the second silver wire connection the second positioning conductive jack and sample stage main body,
The intracavitary positioning conductive column includes vacuum electrode, support rod, master positioning column, positions conductive plug and conducting wire,
Middle support rod includes a thinner cylindrical section and a thicker cylindrical section for integrally connected, and one end of the thinner cylindrical section is welded on very
On the ring flange of empty electrode, the other end and thicker cylindrical section integrally connected are fixedly connected with master on the end face of the thicker cylindrical section
Positioning column, the thicker cylindrical section are opened up along its axial direction there are two through-hole, and the positioning conductive plug is fixed with one heart by ceramic glue
In described two through-holes so that positioning conductive plug and support rod insulate, one end of two conducting wires respectively with vacuum electric
Pole connection, the other end are connect with positioning conductive plug respectively.
Further, the specimen holder includes hollow out specimen holder, a nut, a specimen holder insulating ceramic film, connects brush electricity
Pole piece connects brush electrode tabletting, connects specimen holder electrode slice, connecing the tabletting of specimen holder electrode, a specimen holder screw rod, sample, described to engrave
Empty specimen holder includes a centrally located through-hole and the screw hole on a angle, and a specimen holder screw rod is each passed through an institute
Screw hole is stated, the side specimen holder screw rod is passed through by nut and a specimen holder insulating ceramic film in the side of hollow out specimen holder
Connect brush electrode piece and connect brush electrode tabletting and fix, this is passed through by other a nut in the other side of hollow out specimen holder
Connecing specimen holder electrode slice and connecing specimen holder electrode tabletting for a specimen holder screw rod of the other side is fixed, and the sample, which is transversely lapped at, connects electricity
It brush electrode piece and connects on specimen holder electrode slice, the side of the sample, which is located at, to be connect brush electrode piece and connect between brush electrode tabletting
And be fixed, the other side of the sample, which is located at, to be connect specimen holder electrode slice and connects between specimen holder electrode tabletting and compress solid
It is fixed.
Further, a specimen holder insulating ceramic film is exhausted including the first specimen holder insulating ceramic film, the second specimen holder
Edge potsherd, third specimen holder insulating ceramic film, the 4th specimen holder insulating ceramic film, the first specimen holder insulating ceramic film and
Second specimen holder insulating ceramic film, which is located at, to be connect brush electrode piece and connects a spiral shell between brush electrode piece and hollow out specimen holder
Between mother, third specimen holder insulating ceramic film and the 4th specimen holder insulating ceramic film are located at and connect brush electrode tabletting and be located at
Between a nut for connecing brush electrode tabletting side.
Further, contacted between the sample stage main body and sample slot for segment bounds, the sample stage main body with
Slot heat-insulated tabletting is set in discontiguous gap between sample slot.
Further, the sample slot includes the sample socket body partially contacted between sample stage main body, from institute
State the surface a home slot vertically extended of sample socket body and a specimen holder being fixedly connected respectively with a home slot
Dropping-prevention piece forms a sliding groove structure in top end part between each home slot and specimen holder dropping-prevention piece.
Further, the material of the conducting wire is silver.
Further, described device further includes vacuum cavity, is stretched out on the vacuum cavity logical inside a connection cavity
Road, the channel end include a mounting flange, and the intracavitary positioning conductive column can be protruded into described true by the channel
Cavity body, the ring flange of the vacuum electrode can dock realization with the mounting flange and be tightly connected.
Further, described device further includes laser heating instrument and infrared laser temperature measurer, the laser heating instrument and institute
A window for stating vacuum cavity is fixedly connected, another window of the infrared laser temperature measurer and the vacuum cavity is fixed
Connection.
A kind of heating means of ultrahigh vacuum heating device as described above, comprising the following steps:
Step 1: the specimen holder is inserted into sample slot after sample is fixed on the specimen holder, so that the electricity
What brush one end rode over specimen holder connects brush electrode on piece；
Step 2: adapter is mutually connected with the magnetic rod being located in sample cavity under atmospheric condition, and to sample introduction
Chamber vacuumizes, and when vacuum reaches desired value, opens the slide valve of connection vacuum cavity and sample cavity, will be heated by magnetic rod
Sample stage is sent into vacuum cavity from sample cavity and specimen heating holder insertion is located on the intracorporal intracavitary positioning conductive column of vacuum chamber,
Realize positioning conductive jack with position docking for conductive plug and docking for connecting hole and master positioning column, unclamp magnetic rod and hold in the mouth
Magnetic rod is drawn back in the linking of connector, closes slide valve；
Step 3: by the logical upper direct current of vacuum electrode, the heating of sample in a vacuum can be realized, pass through infrared measurement of temperature
Instrument can be realized real-time monitoring temperature.
Further, it can concurrently or separately be heated using laser in the step 3, that is, pass through laser heating instrument for laser
It is irradiated on sample by the central through hole of the hollow out specimen holder and realizes laser heating.
Compared with prior art, the present invention it is significantly a little:
(1) the configuration of the present invention is simple, easily operated: can without using expensive and fragile manipulator and vacuum rotating equipment,
The combination and transmission of sample and sample stage can be realized；
(2) present invention is at low cost, for ease of maintenaince: after having excluded other multidimensional vacuum operated equipments, it is only necessary to which production is originally
DC heating can be realized in vacuum heater, and entire heating device can take out chamber in the case where not destroying main cavity vacuum
Body, each part can easily repair replacement；
(3) the special brush designs of the present invention can realize DC heating, and the hollow design of specimen holder and warm table can be realized
Laser heating, two kinds of heating methods can not only be independently operated, but also can be used simultaneously, and the rate of heat addition is fast, and temperature gradient is small, sample selection
Range is wide；
(4) heating efficiency of the present invention is high and uniform: there is no the barrier of vacuum or specimen holder between heating unit and sample,
Fever range concentrates on sample, can get bigger heating effect using lesser energy；
(5) real-time temperature feedback can be achieved, operator is helped to control temperature.
Detailed description of the invention
Fig. 1 is specimen holder general structure schematic diagram of the present invention.
Fig. 2 is specimen heating holder general structure schematic diagram of the present invention.
Fig. 3 is specimen heating holder partial structure diagram of the present invention.
Fig. 4 is specimen heating holder partial structure diagram of the present invention.
Fig. 5 is the partial view B in Fig. 4.
Fig. 6 is the direct current brush system structure diagram of specimen heating holder of the present invention.
Fig. 7 is specimen heating holder partial structure diagram of the present invention.
Fig. 8 is the partial view A in Fig. 7.
Fig. 9 is specimen holder of the present invention and ultrahigh vacuum specimen heating holder fit structure schematic diagram.
Figure 10 is the structural schematic diagram of the intracavitary positioning conductive column of the present invention.
Figure 11 is the structural representation of the specimen heating holder that the present invention works good with specimen holder and intracavitary positioning conductive column cooperation
Figure.
Figure 12 be the present invention it is intracavitary positioning conductive column and specimen heating holder intracavitary locations and intracavitary positioning conductive column,
Laser heating instrument and infrared radiation thermometer are in the position view outside chamber.
Specific embodiment
Referring to Fig. 1-11, a kind of ultrahigh vacuum heating device, including specimen holder 1, specimen heating holder 2, intracavitary positioning are conductive
Column, in which:
In conjunction with Fig. 1, specimen holder 1 include hollow out specimen holder 1-1, nut 1-2, insulating ceramics 1-3, connect brush electrode piece 1-4,
Brush electrode tabletting 1-5 is met, specimen holder electrode slice 1-6 is met, meets specimen holder electrode tabletting 1-7, specimen holder screw rod 1-8, sample 1-9
(such as semiconductor).It builds by shown in schematic diagram, first four specimen holder screw rod 1-8 is screwed into the screw hole of hollow out specimen holder 1-1,
Four nut 1-2 are reused to be screwed into specimen holder screw rod 1-8 until being anchored on hollow out specimen holder 1-1；Specimen holder on right side
Small head-up placement two insulating ceramicses 1-3-1,1-3-2 are on nut 1-2-1,1-2-2 on screw rod 1-8；Brush electricity will be connect
Pole piece 1-4 passes through right side specimen holder screw rod 1-8-1,1-8-2 and is placed on side insulation right ceramics 1-3-1,1-3-2, will connect sample
Frame electrode slice 1-5 passes through left side specimen holder screw rod 1-8-3,1-8-4 and is placed on left side nut 1-2-3,1-2-4；By sample 1-9
It is transversely lapped on two electrode slices；Brush electrode tabletting 1-5 is met in sample 1- across right side specimen holder screw rod 1-8-1,1-8-2 placement
On 9, specimen holder electrode tabletting 1-7 is met in 1-9 on sample across left side specimen holder screw rod 1-8-3,1-8-4 placement；Insulation is made pottery
Porcelain 1-3-3,1-3-4 are small upside down, and across right side, specimen holder screw rod 1-8-1,1-8-2, which are placed on, connects on brush electrode tabletting 1-5,
And using two nuts 1-2-5,1-2-6 be screwed into right side specimen holder screw rod 1-8-1,1-8-2 to fastening insulating ceramics 1-3-3,
1-3-4；It is screwed into left side specimen holder screw rod 1-8-3,1-8-4 using two nuts 1-2-7,1-2-8, until fastening left side connects specimen holder
Electrode tabletting 1-7.
In conjunction with Fig. 2-9, specimen heating holder 2 includes adapter 2-1, sample stage main body 2-2, sample slot 2-3, direct current brush
System 2-4, positioning conductive jack 2-5 and the connecting hole 2-17 being set on sample stage main body 2-2 rear end face.Adapter 2-
1 is connected using screw 2-6 with sample stage main body 2-2, is formed entirety, is passed through the connection of adapter 2-1 and magnetic rod；Sample is inserted
Slot 2-3 include home slot 2-7, the heat-insulated tabletting 2-8 of slot, specimen holder dropping-prevention piece 2-9 constitute, home slot 2-7 and slot is heat-insulated
Tabletting uses screw 2-10 to be connected with sample stage main body 2-2 simultaneously, and specimen holder dropping-prevention piece 2-9 uses screw 2-11 and home slot 2-
7 are connected；Direct current brush-system 2-4 includes brush 2-12, direct current brush-system screw rod 2-13, insulating ceramics 2-14, fastening nut
2-15 and silver wire 2-16, is screwed into the one end direct current brush-system screw rod 2-13 for fastening nut 2-15-1, by insulating ceramics 2-14-
The 1 small direct current brush-system screw rod 2-13 that head-up passes through is placed on 2-15-1 on fastening nut, and brush 2-12 is passed through direct current
Brush system screw rod 2-13 is placed on 2-14-1 on insulating ceramics, using insulating ceramics 2-14-2 and fastening nut 2-15-2 by brush
2-12 and direct current brush-system screw rod 2-13 insulate and fix, and form an entirety, another using direct current brush-system screw rod 2-13
One end is connected with sample stage main body 2-2 and sample slot 2-3；It positions conductive jack 2-5 and is concentrically mounted to sample using ceramic glue
In through-hole on rear side of sample platform main body 2-2；Using silver wire 2-16-1,2-16-2 connect respectively two positioning conductive jack 2-5-1,
2-5-2, the other end of silver wire 2-16 are separately connected the brush 2-12 and sample for being electrically isolated from direct current brush-system screw rod 2-13
Platform main body 2-2, silver wire 2-16 can be used screw connection, also can directly be intertwined and connected.
In conjunction with Figure 10-11, intracavitary positioning conductive column 3 includes vacuum electrode 3-1, support rod 3-2, master positioning column 3-3, and fixed
Position conductive plug 3-4, silver wire 3-5.Wherein support rod 3-2 is welded on the ring flange of vacuum electrode 3-1；Master positioning column 3-3
It is welded on the end face of support rod 3-2；It is fixed in the through-hole of support rod 3-2 using insulating ceramics glue by conductive plug 3-4 is positioned,
So that positioning conductive plug 3-4 and support rod 3-2 insulate；Two one end silver wire 3-5 are connect respectively in intracavitary vacuum electrode
On 3-1, the other end is connect with positioning conductive plug 3-4 respectively, and screw connection can be used in silver wire 3-5, also can the direct company of winding
It connects.
In conjunction with Fig. 9, specimen holder 1 is inserted into sample slot 2-3, what the one end brush 2-12 rode over specimen holder 1 connects brush electrode
On piece 1-4, the adapter 2-1 of sample stage is mutually connected with the magnetic rod under atmospheric condition, and sample cavity is vacuumized, to
When vacuum reaches desired value, slide valve, connection sample cavity and sample preparation chamber are opened, DC heating platform is inserted into intracavitary positioning conductive column
On 3, release magnetic rod is connected with adapter 1, draws back magnetic rod, closes slide valve.It is powered at this time to the electrode outside conductive column,
It can be realized, not destroy the sample introduction and sample DC heating of vacuum.
In conjunction with Figure 12, described device further includes vacuum cavity, is stretched out on the vacuum cavity logical inside a connection cavity
Road, the channel end include a mounting flange, and the intracavitary positioning conductive column 3 can be protruded into described true by the channel
Cavity body, the ring flange of the vacuum electrode 3-1 can dock realization with the mounting flange and be tightly connected.
Described device further includes laser heating instrument 4 and infrared laser temperature measurer 5, the laser heating instrument 4 and the vacuum
One window of cavity is fixedly connected, and the infrared laser temperature measurer 5 is fixedly connected with another window of the vacuum cavity.
The heating means of the ultrahigh vacuum heating device of the present embodiment, comprising the following steps:
Step 1: in conjunction with Fig. 9, the specimen holder 1 insertion sample is inserted after sample 1-9 is fixed on the specimen holder 1
Slot 2-3, so that the one end the brush 2-12 rides over the connecing on brush electrode piece 1-4 of specimen holder 1；
Step 2: adapter 2-1 is mutually connected with the magnetic rod being located in sample cavity under the atmospheric condition, and into
Sample chamber vacuumizes, and when vacuum reaches desired value, opens the slide valve of connection vacuum cavity and sample cavity, will be added by magnetic rod
Hot sample stage 2 is sent into vacuum cavity from sample cavity and the insertion of specimen heating holder 2 is located at the intracorporal intracavitary positioning conduction of vacuum chamber
On column 3, realize positioning conductive jack 2-5 with position conductive plug 3-4 dock and connecting hole 2-17 and master positioning column 3-3
Docking, release magnetic rod are connected with adapter 2-1's, draw back magnetic rod, close slide valve；
Step 3: by the logical upper direct current of vacuum electrode 3-1, the heating of sample 1-9 in a vacuum can be realized, by red
Outer temperature measurer 5 can be realized real-time monitoring temperature.
Further, it can concurrently or separately be heated using laser in the step 3, that is, pass through laser heating instrument 4 for laser
It is irradiated on sample 1-9 by the central through hole of the hollow out specimen holder 1-1 and realizes laser heating.
After specimen heating holder 2 is put into vacuum cavity, the sample 1-9 on specimen holder 1 is located at the horizontal court in growth position and front
Under, there is a glass window immediately below sample, fixes an infrared radiation thermometer 5 in outside glass window, it can observing samples 1-9 temperature in real time
The heating of degree, either DC heating or laser or the two are used together, and can realize accurate temperature feedback.
Basic principles and main features and advantage of the invention have been shown and described above.The technical staff of the industry should
Understand, the present invention is not limited to the above embodiments, and the above embodiments and description only describe originals of the invention
Reason, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes and improvements
It all fall within the protetion scope of the claimed invention.The claimed scope of the invention is by appended claims and its equivalent circle
It is fixed.
Claims (10)
1. a kind of ultrahigh vacuum heating device, including specimen holder (1), specimen heating holder (2) and intracavitary positioning conductive column (3), institute
Stating specimen holder (1) can engage with specimen heating holder (2), and the specimen heating holder (2) can connect with intracavitary positioning conductive column (3)
Close, which is characterized in that the specimen heating holder (2) include adapter (2-1), sample stage main body (2-2), sample slot (2-3),
Direct current brush-system (2-4), positioning conductive jack (2-5) and the connection being set on sample stage main body (2-2) rear end face
Hole (2-17), the adapter (2-1) are fixedly connected with the front end of sample stage main body (2-2), and the sample slot (2-3) is fixed
In the middle part of sample stage main body (2-2),
The direct current brush-system (2-4) includes brush (2-12), direct current brush-system screw rod (2-13), insulating ceramic film (2-
14) bottom end of, fastening nut (2-15) and silver wire (2-16), the direct current brush-system screw rod (2-13) pass through the sample
Slot (2-3) and sample stage main body (2-2) are simultaneously fixed, and the brush (2-12) passes through direct current brush-system screw rod (2-13) and leads to
It crosses insulating ceramic film (2-14) and fastening nut (2-15) is fixed on the upper end position of direct current brush-system screw rod (2-13), it is described
Positioning conductive jack (2-5) includes the first positioning conductive jack (2-5-1) and the second positioning conductive jack (2-5-2), and first is fixed
Sample stage main body is fixed in position conductive jack (2-5-1) and the second positioning conductive jack (2-5-2) with one heart using ceramic glue respectively
In two through-holes on rear side of (2-2), the silver wire (2-16) includes the first silver wire (2-16-1) and the second silver wire (2-
16-2), the first silver wire (2-16-1) connection first positions conductive jack (2-5-1) and is electrically isolated from direct current brush-system screw rod
The brush (2-12) of (2-13), the second positioning conductive jack (2-5-2) of the second silver wire (2-16-2) connection and sample stage main body
(2-2),
The intracavitary positioning conductive column (3) includes vacuum electrode (3-1), support rod (3-2), master positioning column (3-3), positioning conduction
Plug (3-4) and conducting wire (3-5), wherein support rod (3-2) includes a thinner cylindrical section and a thicker cylindrical section for integrally connected,
One end of the thinner cylindrical section is welded on the ring flange of vacuum electrode (3-1), the other end and thicker cylindrical section integrally connected,
It is fixedly connected on the end face of the thicker cylindrical section master positioning column (3-3), there are two the thicker cylindrical section is opened up along its axial direction
Through-hole, the positioning conductive plug (3-4) are positioned concentrically in described two through-holes so that positioning conduction by ceramic glue
Plug (3-4) and support rod (3-2) insulate, and one end of two conducting wires (3-5) is connect with vacuum electrode (3-1) respectively, the other end
It is connect respectively with positioning conductive plug (3-4).
2. ultrahigh vacuum heating device according to claim 1, which is characterized in that the specimen holder (1) includes hollow out sample
Product frame (1-1), 4 specimen holder insulating ceramic films (1-3), connects brush electrode piece (1-4), connects brush electrode 8 nuts (1-2)
Tabletting (1-5) connects specimen holder electrode slice (1-6), connects specimen holder electrode tabletting (1-7), 4 specimen holder screw rods (1-8), samples
(1-9), the hollow out specimen holder (1-1) include a centrally located through-hole and the screw hole on 4 angles, 4 samples
Product frame screw rod (1-8) is each passed through 4 screw holes, passes through 4 nuts (1-2) and 4 in the side of hollow out specimen holder (1-1)
Specimen holder insulating ceramic film (1-3) passes through connecing brush electrode piece (1-4) and connecing brush for the specimen holder screw rod (1-8) of the side 2
Electrode tabletting (1-5) is fixed, passes through the other side by other 4 nuts (1-2) in the other side of hollow out specimen holder (1-1)
2 specimen holder screw rods (1-8) connect specimen holder electrode slice (1-6) and fixed, the sample that connects specimen holder electrode tabletting (1-7)
(1-9), which is transversely lapped at, to be connect brush electrode piece (1-4) and connects on specimen holder electrode slice (1-6), and the side of the sample (1-9), which is located at, to be connect
It brush electrode piece (1-4) and connects between brush electrode tabletting (1-5) and is fixed, the other side of the sample (1-9) is located at
It connects specimen holder electrode slice (1-6) and connects between specimen holder electrode tabletting (1-7) and be fixed.
3. ultrahigh vacuum heating device according to claim 2, which is characterized in that 4 specimen holder insulating ceramic films
(1-3) is exhausted including the first specimen holder insulating ceramic film (1-3-1), the second specimen holder insulating ceramic film (1-3-2), third specimen holder
Edge potsherd (1-3-3), the 4th specimen holder insulating ceramic film (1-3-4), the first specimen holder insulating ceramic film (1-3-1) and
Second specimen holder insulating ceramic film (1-3-2), which is located at, to be connect brush electrode piece (1-4) and connects brush electrode piece (1-4) and hollow out
Between 2 nuts (1-2) between specimen holder (1-1), third specimen holder insulating ceramic film (1-3-3) and the insulation of the 4th specimen holder
Potsherd (1-3-4), which is located at, to be met brush electrode tabletting (1-5) and is located at 2 spiral shells for connecing the side brush electrode tabletting (1-5)
Between female (1-2).
4. ultrahigh vacuum heating device according to claim 1-3, which is characterized in that the sample stage main body
It is contacted between (2-2) and sample slot (2-3) for segment bounds, between the sample stage main body (2-2) and sample slot (2-3)
The heat-insulated tabletting of slot (2-8) is set in discontiguous gap.
5. ultrahigh vacuum heating device according to claim 4, which is characterized in that the sample slot (2-3) include with
Sample slot (2-3) ontology for partially being contacted between sample stage main body (2-2), from the surface of sample slot (2-3) ontology
2 home slots (2-7) vertically extended and 2 specimen holder dropping-prevention pieces being fixedly connected respectively with 2 home slots (2-7)
(2-9) forms a sliding groove structure in top end part between each home slot (2-7) and specimen holder dropping-prevention piece (2-9).
6. ultrahigh vacuum heating device according to claim 1, which is characterized in that the material of the conducting wire (3-5) is silver.
7. ultrahigh vacuum heating device according to claim 2, which is characterized in that described device further includes vacuum cavity,
The channel inside a connection cavity is stretched out on the vacuum cavity, the channel end includes a mounting flange, described intracavitary
Positioning conductive column (3) can protrude into the vacuum cavity by the channel, and the ring flange of the vacuum electrode (3-1) can be with
The mounting flange docking, which is realized, to be tightly connected.
8. ultrahigh vacuum heating device according to claim 7, which is characterized in that described device further includes laser heating instrument
(4) and infrared laser temperature measurer (5), the laser heating instrument (4) is fixedly connected with a window of the vacuum cavity, described
Infrared laser temperature measurer (5) is fixedly connected with another window of the vacuum cavity.
9. a kind of heating means of ultrahigh vacuum heating device as claimed in claim 8, which is characterized in that including following step
It is rapid:
Step 1: the specimen holder (1) is inserted into sample slot (2- after sample (1-9) is fixed on the specimen holder (1)
3), so that the one end the brush (2-12) rides over the connecing on brush electrode piece (1-4) of specimen holder (1)；
Step 2: adapter (2-1) is mutually connected with the magnetic rod being located in sample cavity under atmospheric condition, and to sample introduction
Chamber vacuumizes, and when vacuum reaches desired value, opens the slide valve of connection vacuum cavity and sample cavity, will be heated by magnetic rod
Sample stage (2) is sent into vacuum cavity and specimen heating holder (2) insertion is located at the intracorporal intracavitary positioning of vacuum chamber and leads from sample cavity
On electric column (3), realize positioning conductive jack (2-5) with position conductive plug (3-4) dock and connecting hole (2-17) with master
The docking of positioning column (3-3), release magnetic rod are connected with adapter (2-1's), draw back magnetic rod, close slide valve；
Step 3: by vacuum electrode (3-1) logical upper direct current, the heating of sample (1-9) in a vacuum can be realized, by red
Outer temperature measurer (5) can be realized real-time monitoring temperature.
10. according to the method described in claim 9, it is characterized in that, can concurrently or separately be added using laser in the step 3
Laser is irradiated to sample (1-9) by the central through hole of the hollow out specimen holder (1-1) by laser heating instrument (4) by heat
Upper realization laser heating.
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| CN111710628A (en) * | 2020-06-03 | 2020-09-25 | 西安交通大学 | Ultrahigh vacuum environment multifunctional sample stage and in-situ patterning method for sample |
| CN114904592A (en) * | 2021-02-10 | 2022-08-16 | 中国科学院物理研究所 | Sample transfer device under ultrahigh vacuum condition |
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