CN104711670A - Sample support for molecular beam epitaxial growth and angle resolved photoelectron spectroscope testing - Google Patents
Sample support for molecular beam epitaxial growth and angle resolved photoelectron spectroscope testing Download PDFInfo
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- CN104711670A CN104711670A CN201510155485.6A CN201510155485A CN104711670A CN 104711670 A CN104711670 A CN 104711670A CN 201510155485 A CN201510155485 A CN 201510155485A CN 104711670 A CN104711670 A CN 104711670A
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- epitaxial growth
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Abstract
The invention provides a sample support for molecular beam epitaxial growth and angle resolved photoelectron spectroscope testing, which comprises a circular support, a pressure sheet and a square support, wherein the pressure sheet is fixed on the circular support through a fixture; the square support comprises a sample carrying part and a grip connected with the sample carrying part; the sample carrying part is pressed between the pressure plate and the circular support; the circular support is also provided with a manipulator inlet/outlet tank body and a sight hole for observing whether the manipulator grabs the square support; the grip is provided with a grabbing hole; and the manipulator grabs and draws out the square support via the grabbing hole. The sample support is suitable for a sample rack in a molecular beam epitaxy apparatus and a sample rack in angle resolved photoelectron spectroscope testing, thereby implementing in-situ growth and in-situ electronic structure measurement of the molecular beam epitaxy/angle resolved photoelectron spectroscope integrated system.
Description
Technical field
The present invention relates to ultrahigh vacuum(HHV) apparatus field, particularly relate to and a kind ofly not only may be used for molecular beam epitaxy growth in situ simultaneously but also be applicable to the sample carrier of angle resolved photoelectron spectroscope instrument in situ test.
Background technology
Molecular beam epitaxy system (MBE) is the new technology preparing high quality monocrystalline film under ultra-high vacuum environment that new development is got up, and is subject to the favor of increasing scientific research person owing to can realize accurate controlling diaphragm layer component, doping content and the superthin layer such as quantum well, superlattice quantum structure material.And angle resolved photoelectron spectroscope instrument (ARPES) utilizes photovoltaic effect directly to observe the method for the electronic structure of solid material under ultra-high vacuum environment, being described as the microscope of electronic structure " one can see ", is the best sharp weapon observing electronic structure.The integrated system (MBE/ARPES) of molecular beam epitaxy and angle resolved photoelectron spectroscope instrument can solve due to problems such as the contaminating impurities that causes in sample transfer process in Material growth, device technology link, test analysis process due to it, and can realize growth in situ in situ test uniqueness advantage and be more and more subject to the favor of scientific research personnel.Molecular beam epitaxy/angle resolved photoelectron spectroscope instrument ultrahigh vacuum(HHV) integrated system is exactly MBE ultrahigh vacuum(HHV) thin film growth chamber and ARPES ultrahigh vacuum(HHV) are measured chamber realize being connected by ultrahigh vacuum(HHV) cushion chamber, thus realize under ultrahigh vacuum(HHV) under environment to the growth in situ of artificial material film and measurement, greatly can reduce the uncertain factor that material surface secondary pollution causes like this, also solve traditional ARPES system to can not the problem that cannot directly measure of the sample Electron structure of cleavage simultaneously.
At present, the sample carrier of business-like molecular beam epitaxial device is all make circular holder by Mo, and be the square holder of being made up of the copper product with satisfactory electrical conductivity for the sample carrier of angle resolved photoelectron spectroscope instrument, the incompatible difficulty that result in sample in-situ growth and in site measurement of sample carrier.
Just need to design a kind of sample carrier to address this problem, it had not only gone for molecular beam epitaxial growth simultaneously but also be applicable to the measurement of angle resolved photoelectron spectroscope instrument.
Summary of the invention
The shortcoming of prior art in view of the above, the object of the present invention is to provide a kind of sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope, the problem that the sample carrier for the sample carrier and angle resolved photoelectron spectroscope test that solve the growth of prior art Middle molecule beam epitaxy is incompatible.
For achieving the above object and other relevant objects, the invention provides a kind of sample carrier for molecular beam epitaxial growth and angle resolved photoelectron spectroscope test, described sample carrier at least comprises: circular holder, compressing tablet, square holder;
Described compressing tablet is fixed in described circle holder by mounting block;
The handle that described square holder comprises sample supporting part and is connected with described sample supporting part, described sample supporting part is pressed between described compressing tablet and circular holder.
Be used for the scheme of a kind of optimization of the sample carrier of molecular beam epitaxial growth and angle resolved photoelectron spectroscope test as the present invention, described circle holder be also provided with the cell body of mechanical manipulator turnover and observe the vision slit whether mechanical manipulator grabs described square holder.
Be used for the scheme of a kind of optimization of the sample carrier of molecular beam epitaxial growth and angle resolved photoelectron spectroscope test as the present invention, described handle be provided with and capture hole, mechanical manipulator captures by capturing hole and extracts square holder out.
Be used for a kind of scheme of optimization of the sample carrier of molecular beam epitaxial growth and angle resolved photoelectron spectroscope test as the present invention, the center of circle in described crawl hole and the center of circle of vision slit overlapping in vertical direction.
Be used for the scheme of a kind of optimization of the sample carrier of molecular beam epitaxial growth and angle resolved photoelectron spectroscope test as the present invention, the sample supporting part of described square holder is some or all of to be pressed between described compressing tablet and circular holder.
Be used for the scheme of a kind of optimization of the sample carrier of molecular beam epitaxial growth and angle resolved photoelectron spectroscope test as the present invention, the shape of described cell body is strip, and depth range is 1.5 ~ 2.5mm.
Be used for the scheme of a kind of optimization of the sample carrier of molecular beam epitaxial growth and angle resolved photoelectron spectroscope test as the present invention, the material of described compressing tablet is the resilient material of high temperature resistant low-vapor pressure, and the shape of described compressing tablet is square, trapezoidal or circular.
Be used for the scheme of a kind of optimization of the sample carrier of molecular beam epitaxial growth and angle resolved photoelectron spectroscope test as the present invention, described circle holder is consistent with the material of mounting block.
Be used for the scheme of a kind of optimization of the sample carrier of molecular beam epitaxial growth and angle resolved photoelectron spectroscope test as the present invention, the material of described circle holder and mounting block is molybdenum.
Be used for the scheme of a kind of optimization of the sample carrier of molecular beam epitaxial growth and angle resolved photoelectron spectroscope test as the present invention, the material of described square holder is copper metal.
As mentioned above, the sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope of the present invention, comprising: circular holder, compressing tablet, square holder; Described compressing tablet is fixed in described circle holder by mounting block; The handle that described square holder comprises sample supporting part and is connected with described sample supporting part, described sample supporting part is pressed between described compressing tablet and circular holder.The sample carrier of the present invention's design had both gone for the specimen holder in molecular beam epitaxial device, also be applicable to the specimen holder in angle resolved photoelectron spectroscope test simultaneously, thus realize the object of molecular beam epitaxy/angle resolved photoelectron spectroscope instrument integrated system growth in situ and the measurement of original position electronic structure.
Accompanying drawing explanation
Fig. 1 is the square holder schematic diagram of angle resolved photoelectron spectroscope test in the present invention.
Fig. 2 is the overall schematic top plan view of sample carrier that the present invention tests for molecular beam epitaxial growth and angle resolved photoelectron spectroscope.
Element numbers explanation
1 circular holder
2 compressing tablets
3 square holders
31 sample supporting parts
32 handles
321 capture hole
4 mounting blocks
5 cell bodies
6 vision slits
Embodiment
Below by way of specific specific examples, embodiments of the present invention are described, those skilled in the art the content disclosed by this specification sheets can understand other advantages of the present invention and effect easily.The present invention can also be implemented or be applied by embodiments different in addition, and the every details in this specification sheets also can based on different viewpoints and application, carries out various modification or change not deviating under spirit of the present invention.
Refer to accompanying drawing 1 ~ Fig. 2.It should be noted that, the diagram provided in the present embodiment only illustrates basic conception of the present invention in a schematic way, then only the assembly relevant with the present invention is shown in graphic but not component count, shape and size when implementing according to reality is drawn, it is actual when implementing, and the kenel of each assembly, quantity and ratio can be a kind of change arbitrarily, and its assembly layout kenel also may be more complicated.
As shown in Figure 1, the invention provides a kind of sample carrier tested for molecular beam epitaxial growth (MBE) and angular resolution photoelectron spectrum (ARPES), described sample carrier at least comprises: circular holder 1, compressing tablet 2 and square holder 3, and described compressing tablet 2 is fixed in described circle holder 1 by mounting block 4; The handle 32 that described square holder 3 comprises sample supporting part 31 and is connected with described sample supporting part 31, described sample supporting part 31 is pressed between described compressing tablet 2 and circular holder 1.
Described circle holder 1 can be the sample carrier of business-like molecular beam epitaxial device, is generally 2 inches.The material of described circle holder 1 can be resistant to elevated temperatures molybdenum, certainly, also can select the material of other suitable high temperature high voltage resistants.At the edge of described circle holder 1, some structures for being fixedly linked with the specimen holder of molecular beam epitaxial device can be set.
Described compressing tablet 2 is fixed in described circle holder 1, and according to the structure design of molecular beam epitaxial device itself and the processing requirement of growing film, described compressing tablet 2 is preferably fixed on the central position of described circle holder 1.The mounting block 4 being used for fixing compressing tablet 2 can be screw, certainly, can be also other suitable fixed forms, not limit at this.The material of described mounting block can be consistent with the material of circle holder, is molybdenum screw.The material of described compressing tablet is the resilient material of high temperature resistant low-vapor pressure.Described compressing tablet 2 has certain elasticity, be convenient to utilize mechanical manipulator (diagram) easily can extract square holder 3 out after pushing down square holder 3, the shape of compressing tablet 2 can be square, trapezoidal or circular, can certainly be other any shapes pushing down square holder, this is not restricted.In the present embodiment, described compressing tablet 2 is square.As shown in Figure 1, adopting four molybdenum screws to be fixed on four angles of square compressing tablet 2, thus fix compressing tablet 2, reserving mid-way for pushing down square holder 3.
The hand 32 that described square holder 3 comprises sample supporting part 31 and is connected with described sample supporting part 31, described sample supporting part 31 is pressed between described compressing tablet 2 and circular holder 1.Exemplarily, the sample supporting part 31 of described square holder 3 is some or all of is pressed between described compressing tablet 2 and circular holder 1.In the present embodiment, the sample supporting part 31 of described square holder 3 is all pressed between described compressing tablet 2 and circular holder 1, and handle 32 is exposed at the outside of compressing tablet 2.The substrate (diagram) treating growing film is first placed on described sample supporting part 31 surface, afterwards by the film of molecular beam epitaxial device at substrate surface growth desired thickness.
The copper sample holder that described square holder 3 adopts electroconductibility under extremely low temperature good.Certainly, also can be that other are applicable to the metallic substance of angle resolved photoelectron spectroscope test.In the present embodiment, square holder 3 is preferably copper metal.
In addition, described circle holder 1 is provided with a cell body 5, and this cell body 5 is convenient to the turnover of mechanical manipulator.In the present embodiment, the length direction of described cell body 5 is consistent with the direction that square holder 3 is taken out.The degree of depth of described cell body 5 and width can be determined according to the size of mechanical manipulator, and exemplarily, the shape of described cell body 5 is preferably strip, and width range is 0.8 ~ 1.2cm, and depth range is 1.5 ~ 2.5mm.In the present embodiment, the width of described cell body 5 is 1cm, and the degree of depth is 2mm.
Described circle holder 1 is also provided with a vision slit 6, and utilize this vision slit 6, operator can observe molecular beam epitaxial device internal mechanical hand and whether grab square holder 3.Preferably, described vision slit 6 is arranged in cell body 5.
The conveniently crawl of mechanical manipulator, described handle 32 is provided with a crawl hole 321, and the center of circle capturing hole 321 is overlapping in vertical direction with the center of circle of vision slit 6.By vision slit 6, gripper of manipulator gets the crawl hole 321 on square holder handle, and whole square holder 3 can be released smoothly afterwards, the square holder 3 be drawn out of directly can put into angle resolved photoelectron spectroscope instrument, carries out in situ test.
Sample carrier of the present invention is utilized to carry out the step of molecular beam epitaxy growth in situ and angle resolved photoelectron spectroscope in situ test as follows:
Step one, is placed into circle holder 1 on the specimen holder in molecular beam epitaxial device chamber;
Step 2, pushes down square holder 3 with compressing tablet 2, and square holder fixed by the molybdenum screw tightened on compressing tablet 2, and the sample carrier fixed can at molecular beam epitaxy system situ growing film sample;
Step 3, after sample thin film has grown, in ultrahigh vacuum(HHV) cushion chamber between molecular beam epitaxial device and angle resolved photoelectron spectroscope tester, utilize mechanical manipulator and observed the concrete operations of mechanical manipulator by vision slit 6, thus square holder 3 level from circular molybdenum holder 1 is extracted out;
Step 4, loads the specimen holder of angle resolved photoelectron spectroscope instrument by the square holder 3 of extracting out, start in site measurement.
In sum, the invention provides a kind of sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope, comprising: circular holder, compressing tablet, square holder; Described compressing tablet is fixed in described circle holder by mounting block; The handle that described square holder comprises sample supporting part and is connected with described sample supporting part, described sample supporting part is pressed between described compressing tablet and circular holder.The sample carrier of the present invention's design had both gone for the specimen holder in molecular beam epitaxial device, also be applicable to the specimen holder in angle resolved photoelectron spectroscope test simultaneously, thus realize the object of molecular beam epitaxy/angle resolved photoelectron spectroscope instrument integrated system growth in situ and the measurement of original position electronic structure.
So the present invention effectively overcomes various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Any person skilled in the art scholar all without prejudice under spirit of the present invention and category, can modify above-described embodiment or changes.Therefore, such as have in art usually know the knowledgeable do not depart from complete under disclosed spirit and technological thought all equivalence modify or change, must be contained by claim of the present invention.
Claims (10)
1. for the sample carrier that molecular beam epitaxial growth and angle resolved photoelectron spectroscope are tested, it is characterized in that, described sample carrier at least comprises: circular holder, compressing tablet, square holder;
Described compressing tablet is fixed in described circle holder by mounting block;
The handle that described square holder comprises sample supporting part and is connected with described sample supporting part, described sample supporting part is pressed between described compressing tablet and circular holder.
2. the sample carrier for molecular beam epitaxial growth and angle resolved photoelectron spectroscope test according to claim 1, is characterized in that: described circle holder be also provided with the cell body of mechanical manipulator turnover and observe mechanical manipulator and whether grab the vision slit of described square holder.
3. the sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope according to claim 2, is characterized in that: described handle is provided with and captures hole, and mechanical manipulator captures by capturing hole and extracts square holder out.
4. according to claim 3 for molecular beam epitaxial growth and angle resolved photoelectron spectroscope test sample carrier, it is characterized in that: the center of circle in described crawl hole and the center of circle of vision slit overlapping in vertical direction.
5. the sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope according to claim 1, is characterized in that: the sample supporting part of described square holder is some or all of to be pressed between described compressing tablet and circular holder.
6. the sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope according to claim 2, is characterized in that: the shape of described cell body is strip, and width range is 0.8 ~ 1.2cm, and depth range is 1.5 ~ 2.5mm.
7. the sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope according to claim 1, it is characterized in that: the material of described compressing tablet is the resilient material of high temperature resistant low-vapor pressure, the shape of described compressing tablet is square, trapezoidal or circular.
8. the sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope according to claim 1, is characterized in that: described circle holder is consistent with the material of mounting block.
9. the sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope according to claim 8, is characterized in that: the material of described circle holder and mounting block is molybdenum.
10. the sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope according to claim 1, is characterized in that: the material of described square holder is copper metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510155485.6A CN104711670B (en) | 2015-04-02 | 2015-04-02 | The sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510155485.6A CN104711670B (en) | 2015-04-02 | 2015-04-02 | The sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope |
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| Publication Number | Publication Date |
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| CN104711670A true CN104711670A (en) | 2015-06-17 |
| CN104711670B CN104711670B (en) | 2017-12-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510155485.6A Expired - Fee Related CN104711670B (en) | 2015-04-02 | 2015-04-02 | The sample carrier tested for molecular beam epitaxial growth and angle resolved photoelectron spectroscope |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109444331A (en) * | 2018-09-30 | 2019-03-08 | 中国科学技术大学 | A kind of ultrahigh vacuum heating device and its heating means |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110133026B (en) * | 2019-04-25 | 2020-09-04 | 中国科学院上海微系统与信息技术研究所 | Sample holder for X-ray photoelectron spectroscopy in-situ test and application thereof |
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2015
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| CN104711670B (en) | 2017-12-29 |
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