CN1700017A - Super high vacuum system sample feeding apparatus - Google Patents
Super high vacuum system sample feeding apparatus Download PDFInfo
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- CN1700017A CN1700017A CN 200510080000 CN200510080000A CN1700017A CN 1700017 A CN1700017 A CN 1700017A CN 200510080000 CN200510080000 CN 200510080000 CN 200510080000 A CN200510080000 A CN 200510080000A CN 1700017 A CN1700017 A CN 1700017A
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Abstract
The invention discloses a new pattern super high vacuum system sample transmission device which comprises: sample holder, sample transmission rod and sample receiving platform. Sample holder comprises rectangle molybdenum holder, two hollow molybdenum screws and concave insulating gasket, wherein both ends of molybdenum holder has through-hole used to fix molybdenum screws; in the middle of molybdenum holder's lower parts posits a boss which opens screw thread hole to match transmission rod and; molybdenum screw posits with molybdenum holder through nut; molybdenum screw and cap's lower has first electrode used to fix sample and flow current with insulating gasket; insulating circle are separately posited between first electrode and molybdenum holder and between cap and molybdenum holder. Different samples such as semiconductor, insulator and metal can use the invention to transmit and handle the sample in super high vacuum scanning tunneling microscope system, molecular beam epitaxy system, extremely condition electric transport testing system and its associating system.
Description
Technical field
The present invention relates to a kind of sample transferring device of ultra-high vacuum system, be particularly useful for scanning tunnel microscope (STM), molecular beam epitaxy (MBE) and extreme condition electronic transport test macro.
Background technology
Ultra-high vacuum system is meant under the environment of artificial ultrahigh vacuum, to the system that dissimilar samples is grown, sign and rerum natura are measured.Current, ultra-high vacuum system has been applied in each research fields such as semiconductor, physics, chemistry, material and bio-science.Sample transferring device is the important component part of ultra-high vacuum system, is made up of sample holder, sample transmission rod (or passing the sample hand) and sample reception platform three parts usually, is used for the various piece of system that sample is sent to.Sample transferring device structure more complicated in present most ultra-high vacuum system, it is little to transform leeway, so cost of manufacture is higher, compatible relatively poor to different ultra-high vacuum systems.
Summary of the invention
At the problem of above-mentioned existence, the object of the present invention is to provide a kind of super high vacuum system sample feeding apparatus, this apparatus structure is succinctly effective, pays attention to the compatibility of different system in the design, thereby has saved cost, has simplified operation, has increased the scope of using.
For achieving the above object, a kind of super high vacuum system sample feeding apparatus of the present invention comprises: the sample holder, sample transmission rod and sample reception platform, described sample holder comprises the molybdenum holder, the molybdenum screw of two hollows and insulation liner, described molybdenum holder two ends have through hole, be used to install described molybdenum screw, the center section of this molybdenum holder bottom has a boss, described boss has threaded hole, described molybdenum screw fixes by molybdenum nut and described molybdenum holder, the nut lower end of described molybdenum screw is installed with first electrode, be used for importing electric current, also be respectively arranged with dead ring between described first electrode and the molybdenum holder and between described nut and the molybdenum holder with described insulation liner fixed sample and to sample; Described sample transmission rod comprises magnetic force bar and sample transmission rod head, and an end of sample transmission rod head is the screw rod that matches with described threaded hole, and the other end and described magnetic force bar fix; Described sample reception platform comprises conductive contact and receiving platform main body, described receiving platform main body is the box body of a both ends open that matches with described sample holder profile, described sample holder can place in this main body by described sample transmission rod, described conductive contact is installed in this main body, and can insert in the hole of opening at described molybdenum screw center.
Further, described molybdenum holder is rectangular build, also is provided with at least 2 silk mouths on it, and this mouth connects along described molybdenum holder short transverse, and is positioned at below the described dielectric substrate, by being screwed into location molybdenum screw to regulate the height of dielectric substrate.
Further, the hole that open at described molybdenum screw center is a turbination at the nut place, is cylindrical at the screw rod place.
Further, described conductive contact is the beryllium copper pin that insulate mutually with described receiving platform main body.
Further, also comprise a gripping mechanism, described gripping mechanism is the beryllium copper spring that is installed on the described receiving platform main body madial wall, by described gripping mechanism described sample holder is fixed in the described main body.
Further, described spring can insulate with described receiving platform main body, simultaneously as electrode.
Further, between described sample and insulation liner, also be disposed with second electrode and heating resistor, be provided with another dead ring between described second electrode and the molybdenum holder.
Further, be provided with the insulation pad between described sample and described second electrode, an available insulator in described first electrode substitutes.
Further, also be provided with the metal pad that is used for described sample bed hedgehopping on the described insulation liner.
Further, also comprise a beryllium copper spring electrode, this beryllium copper spring electrode is fixed on the side of described sample holder by an insulating trip, and is electrically connected with described sample.
The invention has the beneficial effects as follows, because its one-piece construction is effectively succinct more, processing and fabricating and use operation become more easy, compatible better, so different samples such as semiconductor, insulator, metal all can use the present invention to carry out the transmission and the processing of sample in UHV STM system (STM), molecular beam epitaxy system (MBE), extreme condition electronic transport test macro and association system thereof.
Description of drawings
Fig. 1 a, b are that the master of sample holder looks, schematic top plan view, and Fig. 1 c is the STRUCTURE DECOMPOSITION figure of Fig. 1 a.
Fig. 2 a is the sample transmission rod synoptic diagram, and Fig. 2 b is the enlarged drawing of sample transmission rod front end.
Fig. 3 is a sample reception platform synoptic diagram.
Fig. 4 a is the sample holder exploded view that is applicable to the high resistant sample, and Fig. 4 b is the sample holder exploded view that is applicable to metal sample.
Fig. 5 a is that the sample holder that is applied to the MBE system improves synoptic diagram, and Fig. 5 b is applied to the sample holder improvement synoptic diagram that sample extreme condition (high-intensity magnetic field, utmost point low temperature) play transports test macro.
Embodiment:
The present invention includes: the sample holder, sample transmission rod and sample reception platform, as Fig. 1 a, b, shown in the c, the sample holder comprises rectangular build molybdenum holder 3, the molybdenum screw 8 of two hollows and insulation liner 4, molybdenum holder 3 two ends have through hole, be used to install molybdenum screw 8, the center section of molybdenum holder 3 bottoms has a boss, boss has threaded hole 9, molybdenum screw 8 fixes by molybdenum nut 1 and molybdenum holder 3, the nut lower end of molybdenum screw 8 is installed with first electrode 7, be used for importing electric currents, also be respectively arranged with dead ring 2 between first electrode 7 and the molybdenum holder 3 and between nut 1 and the molybdenum holder 3 with insulation liner 4 fixed samples 5 and to sample 5,6, also be provided with 4 silk mouths 10 in the molybdenum holder 3, silk mouthfuls 10 connects along molybdenum holder 3 short transverses, and be positioned at below the dielectric substrate 4, locate the height of molybdenum screw by being screwed into, thereby clamp sample 5 with adjusting dielectric substrate 4; Wherein, the hole that open at molybdenum screw 8 centers is a turbination at the nut place, is cylindrical at the screw rod place, and dead ring 2,6 is made by alundum (Al or processable ceramic, and insulation liner 4 is made by alundum (Al or processable ceramic, and first electrode 7 is made by tantalum or molybdenum.Sample transmission rod comprises shown in Fig. 2 a, b: magnetic force bar 11 and stainless steel or molybdenum system sample transmission rod head 12, and an end of sample transmission rod head 12 is the screw rod 14 that matches with threaded hole 9, the other end 13 is fixed on the magnetic force bar 11.Receiving platform as shown in Figure 3, comprise: the receiving platform main body 17 of beryllium copper pin 15, beryllium copper spring 16 and high pure metal (as oxygen-free copper) system, receiving platform main body 17 is the box body of a both ends open that matches with sample holder profile, the sample holder can place main body 17 inside by sample transmission rod, and by being installed in the beryllium copper spring 16 and main body 17 clampings on main body 17 madial walls, beryllium copper pin 15 is installed in the main body 17, and can insert in the hole of opening at molybdenum screw 8 centers.When sample transmits, at first rotating magnetic force bar 11 handles is screwed into sample transmission rod front end screw rod 14 and makes in the threaded hole 9 of sample holder the sample holder is locked on the magnetic force bar 14, promote magnetic force bar 11 handles then, utilize magnetic force to drive inner stock and do linear movement, with the sample delivery near the sample reception platform.Next regulate the position of sample holder, make the beryllium copper pin 15 on the receiving platform can insert the diplopore of molybdenum screw 8 in the sample holder smoothly with respect to receiving platform.At this moment, the beryllium copper spring on the receiving platform 16 also can make the sample holder be clamped on the receiving platform under the acting in conjunction of beryllium copper spring 16 and beryllium copper pin 15 to the certain extruding of sample holder one side generation.At last, the screw rod 14 of outwarding winding is withdrawn sample transmission rod, and whole biography sample process has just been finished, and this moment, sample 5 was along with the sample holder just has been fixed on the sample reception platform.Two beryllium copper pins 15 of receiving platform are directly to contact with two molybdenum screws 8 of sample holder, can lead to big current flow heats sample, for element semiconductor, can adopt the structure of present embodiment to obtain clean sample surfaces by removing the impurity that adheres on the sample directly for the alive mode heated sample of sample.
Shown in Fig. 4 a, present embodiment and embodiment 1 different place is also to be disposed with between second electrode 20 and heating resistor 19, the second electrodes 20 and the molybdenum holder 3 to be provided with another dead ring 18 between sample 5 and insulation liner 4.
For high resistance (insulation) sample, obviously can not directly heat with electric current.Present embodiment adopts the double-level-metal electrode for the high resistance sample, and first electrode 7 only is used for fixing sample 5, the second electrodes 20 and is used for clamping heating resistor 19.When second electrode, 20 two ends pass to electric current, heating resistor 19 heating, indirect heating sample 5.
Shown in Fig. 4 b, the difference of present embodiment and embodiment 2 is to be provided with insulation pad 21, the first electrodes 7 and can replaces with insulator between the sample 5 and second electrode 20.
For metal sample, consider that some occasion has special requirement to the ground connection of sample 5, change insulator into one in first electrode 7 of fixed sample 5 (symmetry two), with sample 5 and 20 insulation of second electrode, just can when heating, avoid electric current to cause short circuit simultaneously by sample 5.
In addition, can also adopt structure shown in Fig. 5 a, b.Shown in Fig. 5 a, filled up two disjunct metal pads 22 on the insulation liner 4 of sample holder, the shape of pressing from both sides two metal electrodes 7 of sample 5 usefulness simultaneously also can correspondingly change, and makes sample 5 be raised by whole.Because of 5 positions of sample with respect to the sample holder higher, so but the electron beam glancing incidence to sample 5 surfaces.Because the pad 22 of sample 5 bottoms is a metal,, the electron beam of glancing incidence can not cause the electric charge accumulation simultaneously even having part to bang to pad 22 yet.Therefore this sample holder is particularly suitable for being equipped with the ultrahigh vacuum MBE system of high electron energy diffractometer (RHEED).(RHEED adopts the way of high energy electron glancing incidence sample surfaces to monitor the MBE growth.) shown in Fig. 5 b, beryllium copper spring 24 has been installed across an insulcrete 23 in the side of sample holder, and be electrically connected with sample 5.Beryllium copper spring 24 is not still lost elasticity under liquid helium temperature, can be used on the occasion (as liquid helium temperature) of utmost point low temperature.Want the rerum natura of measuring samples under utmost point low temperature, high-intensity magnetic field (as 10 teslas), available platinum line is linked the measured structure on the sample with beryllium copper spring 24, simultaneously the 15 usefulness leads of the beryllium copper spring on the sample reception platform shown in Figure 3 are connected, reed is just corresponding in twos to have become the electrode of measuring samples 5.Application in the present invention that Here it is electronic transport test macro under extreme conditions.
Claims (10)
1, a kind of super high vacuum system sample feeding apparatus, comprise: the sample holder, sample transmission rod and sample reception platform, it is characterized in that, described sample holder comprises the molybdenum holder, the molybdenum screw of two hollows and insulation liner, described molybdenum holder two ends have through hole, be used to install described molybdenum screw, the center section of this molybdenum holder bottom has a boss, described boss has threaded hole, described molybdenum screw fixes by molybdenum nut and described molybdenum holder, the nut lower end of described molybdenum screw is installed with first electrode, is used for importing electric current with described insulation liner fixed sample and to sample, also is respectively arranged with dead ring between described first electrode and the molybdenum holder and between described nut and the molybdenum holder; Described sample transmission rod comprises magnetic force bar and sample transmission rod head, and an end of sample transmission rod head is the screw rod that matches with described threaded hole, and the other end and described magnetic force bar fix; Described sample reception platform comprises conductive contact and receiving platform main body, described receiving platform main body is the box body of a both ends open that matches with described sample holder profile, described sample holder can place in this main body by described sample transmission rod, described conductive contact is installed in this main body, and can insert in the hole of opening at described molybdenum screw center.
2, a kind of super high vacuum system sample feeding apparatus according to claim 1, it is characterized in that, described molybdenum holder is rectangular build, also be provided with at least 2 silk mouths on it, this mouth connects along described molybdenum holder short transverse, and be positioned at below the described dielectric substrate, by being screwed into location molybdenum screw to regulate the height of dielectric substrate.
3, a kind of super high vacuum system sample feeding apparatus according to claim 2 is characterized in that, the hole that open at described molybdenum screw center is a turbination at the nut place, is cylindrical at the screw rod place.
4, a kind of super high vacuum system sample feeding apparatus according to claim 3 is characterized in that, described conductive contact is the beryllium copper pin that insulate mutually with described receiving platform main body.
5, a kind of super high vacuum system sample feeding apparatus according to claim 4, it is characterized in that, also comprise a gripping mechanism, described gripping mechanism is the beryllium copper spring that is installed on the described receiving platform main body madial wall, by described gripping mechanism described sample holder is fixed in the described main body.
6, a kind of super high vacuum system sample feeding apparatus according to claim 5 is characterized in that, described spring can insulate with described receiving platform main body, simultaneously as electrode.
7, according to the arbitrary described a kind of super high vacuum system sample feeding apparatus of claim 1 to 6, it is characterized in that, between described sample and insulation liner, also be disposed with second electrode and heating resistor, be provided with another dead ring between described second electrode and the molybdenum holder.
8, a kind of super high vacuum system sample feeding apparatus according to claim 7 is characterized in that, is provided with the insulation pad between described sample and described second electrode, and an available insulator in described first electrode substitutes.
9, according to the arbitrary described a kind of super high vacuum system sample feeding apparatus of claim 1 to 6, it is characterized in that, also be provided with the metal pad that is used for described sample bed hedgehopping on the described insulation liner.
10, according to the arbitrary described a kind of super high vacuum system sample feeding apparatus of claim 1 to 6, it is characterized in that, also comprise a beryllium copper spring electrode, this beryllium copper spring electrode is fixed on the side of described sample holder by an insulating trip, and is electrically connected with described sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510080000 CN1700017B (en) | 2005-06-29 | 2005-06-29 | Super high vacuum system sample feeding apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510080000 CN1700017B (en) | 2005-06-29 | 2005-06-29 | Super high vacuum system sample feeding apparatus |
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| Publication Number | Publication Date |
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| CN1700017A true CN1700017A (en) | 2005-11-23 |
| CN1700017B CN1700017B (en) | 2010-05-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510080000 Expired - Fee Related CN1700017B (en) | 2005-06-29 | 2005-06-29 | Super high vacuum system sample feeding apparatus |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100458492C (en) * | 2006-06-08 | 2009-02-04 | 中芯国际集成电路制造(上海)有限公司 | Light emission microscope opposite side sample fixer |
| CN104291017A (en) * | 2014-10-25 | 2015-01-21 | 中国科学技术大学 | Demountable independent vacuum cavity with in-situ measurement effect |
| CN107525846A (en) * | 2017-10-11 | 2017-12-29 | 北京大学 | A kind of compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum |
| CN107677771A (en) * | 2017-09-15 | 2018-02-09 | 北京大学 | Ultrahigh vacuum cryogenic sample platform |
| CN108068118A (en) * | 2016-11-14 | 2018-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of sample conveyance system applied to vacuum interacted system |
| CN108504992A (en) * | 2018-06-12 | 2018-09-07 | 清华大学 | Electrode evaporation coating device |
| CN109444331A (en) * | 2018-09-30 | 2019-03-08 | 中国科学技术大学 | A kind of ultrahigh vacuum heating device and its heating means |
| CN110895287A (en) * | 2018-09-12 | 2020-03-20 | 中国科学院大连化学物理研究所 | Vacuum interconnected surface analysis device and use method thereof |
| CN111912688A (en) * | 2020-08-18 | 2020-11-10 | 费勉仪器科技（上海）有限公司 | Multifunctional in-situ sample processing device under ultrahigh vacuum |
| CN113884707A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Heating frame interconnection assembly and transfer vacuum sample holder |
| CN113884523A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Transfer vacuum sample holder, small sample holder and vacuum interconnection system |
| CN113960149A (en) * | 2020-07-15 | 2022-01-21 | 中国科学院苏州纳米技术与纳米仿生研究所 | Bearing device, equipment and method for FIB-SIMS interconnection experiment |
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| CN2496827Y (en) * | 2001-07-06 | 2002-06-26 | 中国科学院等离子体物理研究所 | Super high-vacuum conveying mechanism |
| KR100554511B1 (en) * | 2003-10-31 | 2006-03-03 | 삼성전자주식회사 | Apparatus for aligning specimen and Apparatus for dimpling specimen of including thereof |
| CN2837849Y (en) * | 2005-06-29 | 2006-11-15 | 中国科学院物理研究所 | Sample conveying device of ultra-high vacuum system |
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2005
- 2005-06-29 CN CN 200510080000 patent/CN1700017B/en not_active Expired - Fee Related
Cited By (17)
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| CN100458492C (en) * | 2006-06-08 | 2009-02-04 | 中芯国际集成电路制造(上海)有限公司 | Light emission microscope opposite side sample fixer |
| CN104291017A (en) * | 2014-10-25 | 2015-01-21 | 中国科学技术大学 | Demountable independent vacuum cavity with in-situ measurement effect |
| CN108068118A (en) * | 2016-11-14 | 2018-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of sample conveyance system applied to vacuum interacted system |
| CN108068118B (en) * | 2016-11-14 | 2021-06-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | Sample conveying system applied to vacuum interconnection system |
| CN107677771A (en) * | 2017-09-15 | 2018-02-09 | 北京大学 | Ultrahigh vacuum cryogenic sample platform |
| CN107525846A (en) * | 2017-10-11 | 2017-12-29 | 北京大学 | A kind of compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum |
| CN108504992A (en) * | 2018-06-12 | 2018-09-07 | 清华大学 | Electrode evaporation coating device |
| CN108504992B (en) * | 2018-06-12 | 2023-10-03 | 清华大学 | Electrode vapor deposition device |
| CN110895287A (en) * | 2018-09-12 | 2020-03-20 | 中国科学院大连化学物理研究所 | Vacuum interconnected surface analysis device and use method thereof |
| CN110895287B (en) * | 2018-09-12 | 2021-02-12 | 中国科学院大连化学物理研究所 | Vacuum interconnected surface analysis device and use method thereof |
| CN109444331A (en) * | 2018-09-30 | 2019-03-08 | 中国科学技术大学 | A kind of ultrahigh vacuum heating device and its heating means |
| CN113884523A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Transfer vacuum sample holder, small sample holder and vacuum interconnection system |
| CN113884707A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Heating frame interconnection assembly and transfer vacuum sample holder |
| CN113884707B (en) * | 2020-07-02 | 2024-09-27 | 中国科学院苏州纳米技术与纳米仿生研究所 | Heating frame interconnection assembly and vacuum sample transferring support |
| CN113960149A (en) * | 2020-07-15 | 2022-01-21 | 中国科学院苏州纳米技术与纳米仿生研究所 | Bearing device, equipment and method for FIB-SIMS interconnection experiment |
| CN111912688A (en) * | 2020-08-18 | 2020-11-10 | 费勉仪器科技（上海）有限公司 | Multifunctional in-situ sample processing device under ultrahigh vacuum |
| CN111912688B (en) * | 2020-08-18 | 2023-10-10 | 费勉仪器科技（上海）有限公司 | In-situ multifunctional sample processing device under ultrahigh vacuum |
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