CN104291017A - Demountable independent vacuum cavity with in-situ measurement effect - Google Patents
Demountable independent vacuum cavity with in-situ measurement effect Download PDFInfo
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- CN104291017A CN104291017A CN201410578813.9A CN201410578813A CN104291017A CN 104291017 A CN104291017 A CN 104291017A CN 201410578813 A CN201410578813 A CN 201410578813A CN 104291017 A CN104291017 A CN 104291017A
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Abstract
The invention provides a demountable independent vacuum cavity with an in-situ measurement effect. The demountable independent vacuum cavity is composed of a main cavity body (21), valves (22), flanges (23), an observation window (24), an ion gauge (25), a sample holder (32), a sample heating device (33), a magnetic rod (34), an SAES getter pump (42) and a small cavity body (41) where the SAES getter pump (42) is located. The demountable independent vacuum cavity is a stainless steel independent cavity for transferring samples under the ultrahigh vacuum condition, and the effect similar to in-situ measurement is achieved. The cavity can integrate material growing equipment, a measurement instrument and other resources, and cooperation opportunities of different laboratories are effectively increased. The demountable independent vacuum cavity is simple in design, low in cost and strong in function, and simple annealing treatment can be carried out on the samples. Spatial isolation of the material growing equipment and the measurement instrument is achieved, and greater possibility is brought to experimental study and cooperation.
Description
Technical field
The invention belongs to vacuum system cavity design technical field, be specifically related to a kind of under UHV condition, the releasable independent vacuum cavity of material for transfer sample.
Background technology
Grow and prepare new material (such as some monocrystalline, powder, thin-films Oxygen compound and the ever-increasing device of quantity) and become very popular research topic.The experimental study carrying out new material has great scientific meaning and broad prospect of application, and studying these material characters needs to use the performance of characterization device to this material to test usually.In most cases, material growing device and characterization device two overlap independently device, and be now difficult to prepare situation to material and carry out Real-Time Monitoring accurately, growing simultaneously and measuring these materials all needs to carry out under UHV condition.Method relatively more conventional is at present connected together by this two covering device, carry out in-situ measurement (in-situ measurement refers to test analysis real-time in scientific experiment), but this needs relatively large experimental site, bring many inconvenience to cooperative study again simultaneously.How guarantee is under the condition of ultrahigh vacuum, and successfully being transferred in measuring system by the film grown is problem demanding prompt solution.
In view of the situation, we devise a kind of releasable independent vacuum cavity, shift the material such as monocrystalline or film for keeping UHV condition.Not only design and manufacture cost is low for this releasable independent vacuum cavity, and can shift sample under higher vacuum condition, also has to the function of sample auxiliary heating (annealing) simultaneously.This device by sample standby for different project team system, can transfer to the laboratory with measuring instrument, can integrate the resource of different experiments room like this, widens further and deepens experimental study and cooperation.In the NSRL of our this style of opening, be particularly suitable for experiment user and adopt this device.Because the experimental apparatus of exosyndrome material is very general, so this follow-on vacuum cavity has very large application space.
Therefore, not enough for prior art.An experimental installation for improvement, particularly can ensure that the vacuum cavity of UHV condition divert film sample substitutes in-situ measurement and seemed and be necessary very much.
Summary of the invention
The technical problem to be solved in the present invention is: overcome prior art deficiency, provides the corrosion-resistant steel individual cavity that a kind of structure is simple, with low cost, shift sample in UHV condition, realizes the effect being similar to in-situ measurement.This cavity can integrate the resource such as material growing device and measuring instrument, effectively increases the moment of cooperation between different experiments room.
The technical solution used in the present invention is: a kind of releasable independent vacuum cavity with in-situ measurement effect, be made up of main cavity, valve, flange, observation window, ion gauge, specimen holder, sample heating device, magnetic rod, the little cavity of SAES getter pump and place thereof, specimen holder is for placing sample, sample heating device is used for simple furnace run sample, in main cavity top and bottom, be reserved with sufficient space so that main cavity inwall can not be touched when specimen holder freely up and down moves; For magnetic rod, require that upper and lower mobile range will exceed the distance between specimen holder and heating arrangement, also require that magnetic rod can 360 degree of rotations, each sample cell can align to facilitate with flange and imports into and spread out of sample so simultaneously; The little cavity in SAES absorbent pump place is connected by valve with main cavity, and this little cavity leaves enough spaces, to play effect of absorbent pump comprehensively, thus keeps the main cavity of this releasable independent vacuum cavity to reach 10
-9the degree of vacuum of mbar.
Further, main cavity reserves an observation window, convenient observation cavity inner case, flange height is consistent with observation window.
Further, main cavity reserves an ion gauge, facilitate real-time monitored inside cavity degree of vacuum.
Further, specimen holder just has a sample cell every 120 degree, a specimen holder can place three sample carriers simultaneously, sample carrier places sample, can also add a specimen holder more if needed, now can place six sample carriers at most simultaneously.
Further, sample heating device provides heating by tungsten filament, tungsten filament two ends wire adopts ceramic gasket and metallic member to isolate, and tungsten filament surrounding adopts four biscuit metal materials to surround an airtight little space.
The advantage of the present invention and prior art is:
Simplicity of design of the present invention, cost are lower, powerful.
The present invention can carry out simple annealing in process to sample.
Present invention achieves sample grown equipment to be separated with the space of testing tool, bring more possibility to experimental study and cooperation.
Accompanying drawing explanation
Fig. 1 is a kind of use diagram of circuit with the releasable independent vacuum cavity of in-situ measurement effect of the present invention.
Fig. 2 is a kind of structural system assembly drowing with the releasable independent vacuum cavity of in-situ measurement effect of the present invention.
To be that the present invention is a kind of have specimen holder and magnetic rod detail drawing in the releasable independent vacuum cavity of in-situ measurement effect to Fig. 3.
To be that the present invention is a kind of have absorbent pump and cavity schematic diagram in the releasable independent vacuum cavity of in-situ measurement effect to Fig. 4.
Detailed description of the invention
In the following description, for illustrative purposes, some details is suggested to provide complete understanding of the present invention.But, it will be apparent to those skilled in the art that, adopt some or all feature of the present invention to implement the present invention, do not need some specific detail also can implement the present invention.In other cases, known structure and equipment is shown in block diagram form to prevent obscure fundamental principle of the present invention.
Should be appreciated that Fig. 1 to Fig. 4 be only schematic and can not to scale (NTS) draw.
The present invention devises a kind of individual cavity that can shift sample, below in conjunction with accompanying drawing, is described in detail the specific embodiment of the present invention:
Fig. 1 is use diagram of circuit of the present invention.Under normal circumstances, sample grown system 11 (such as pulsed laser deposition device) is directly connected through transition phase 12 with sample test system 13, in sample grown system 11, the sample of preparation can directly be sent in sample test system 13 through transition phase 12, can ensure that sample carries out in-situ measurement under UHV condition, but this method needs two cover systems to connect together, and this brings inconvenience to experimental study.We design an individual cavity 14, can first this individual cavity 14 be placed in sample grown system 11, the sample of growth just can be transferred in individual cavity 14, and then the individual cavity 14 containing sample and sample grown system 11 are separated and then are connected in sample test system 13, in this individual cavity 14, sample just can be transferred in sample test system 13, carries out required test job.In the present invention, individual cavity 14 instead of transition phase 12, can ensure that sample is transferred to sample test system 13 from sample grown system 11 under UHV condition, realizes being separated of sample grown system 11 and sample test system 13.The present invention can be good at integrating the resource between different experiments room, improves the efficiency of experimental study and cooperation.
Fig. 2 is structural system assembly drowing of the present invention.Fig. 2 A is the front view of whole individual cavity 14, and individual cavity 14 mainly comprises main cavity 21.Fig. 2 B is the section-drawing along aa direction, this cross section view describes the situation of main cavity 21 inside in detail, it is inner that specimen holder 32, sample heating device 33 are positioned at main cavity 21, and specimen holder 32 is mainly used in placing sample carrier 31, and sample heating device 33 is positioned at below specimen holder 32; When sample needs to carry out furnace run, use magnetic rod 34 that whole specimen holder 32 is moved up a segment distance to ensure that heating arrangement 33 and cavity flange 23 are at same height together with heating arrangement 33, could import into smoothly like this and spread out of sample carrier 31; Main cavity 21 internal reservation has sufficient space so that can not touch main cavity 21 inside when specimen holder 32 moves up simultaneously.Fig. 2 C is the section along bb direction, specimen holder 32, SAES absorbent pump 42 and place thereof little cavity 41 inner case in this figure more detailed description main cavity 21, specimen holder 32 just there is a sample cell every 120 degree, a specimen holder places at most three sample carriers 31, regulate magnetic rod 34 to make specimen holder 32 can 360 degree of rotations, each sample cell can align to facilitate with flange 23 and import and spread out of sample carrier 31 into like this; SAES absorbent pump 42 place cavity 41 is connected with main cavity 21, and this cavity 41 has reserved a lot of remaining space to play effect of absorbent pump comprehensively, thus keeps individual cavity 14 to have good degree of vacuum.Fig. 2 D more intuitively presents the present invention and is made up of the little cavity 41 in main cavity 21, valve 22, flange 23, observation window 24, ion gauge 25, sample carrier 31, specimen holder 32, sample heating device 33, magnetic rod 34, SAES getter pump 42 and place.Main cavity 21 reserves an observation window 24, convenient observation cavity inner case.
Fig. 3 is specimen holder and magnetic rod detail drawing in system.Fig. 3 A shows that the specimen holder 32 of sample carrier 31 and placement sample carrier assembles schematic diagram.Sample carrier 31 adopts oxygen-free copper material, and first can fix the part that left end is outstanding when capturing sample carrier 31, film or single crystal samples are fixed on the place of sample carrier 31 intermediate projections; Specimen holder 32 just there is a sample cell for placing sample carrier 31 every 120 degree, a specimen holder can place three sample carriers 31 simultaneously, if experiment demand can not be met, a specimen holder 32 can also be added again bottom magnetic rod 34, six sample carriers 31 can be placed so altogether, most of requirement of experiment can be met.Fig. 3 B is sample carrier 31 and heating arrangement 33 explosive view thereof.Heated to sample carrier 31 by tungsten filament in this device, be heated to hundreds of degree Celsius can to sample carrier 31, two wires are drawn at the two ends of tungsten filament, wire from magnetic rod to be connected internally to main cavity 21 outside, tungsten filament and corrosion-resistant steel cavity cross section ceramic gasket insulate.Bottom sample carrier, surrounding adopts stainless steel sheet to isolate a separate space for heating (conveniently observe and the front apron in this figure is saved) to sample carrier 31.Fig. 3 C is magnetic rod 34 schematic diagram regulating specimen holder 32 height in main cavity 21.Magnetic rod 34 adopts the product of Huntington company, and magnetic rod 34 can lengthen linear moving range according to our needs.Because specimen holder 32 needs 360 degree of rotations, so require that magnetic rod 34 has 360 degree of spinfunctions.
Fig. 4 is absorbent pump and little cavity schematic diagram in system.Fig. 4 A is SAES absorbent pump place cavity 41, and this cavity has reserved enough spaces can play good effect in order to absorbent pump 42.Fig. 4 B is SAES absorbent pump schematic diagram.Absorbent pump 42 adopts The CapaciTorr D200 type non-evaporable absorbent pump (NEG), and this absorbent pump 42 is made up of High Performance St172 (Zr-V-Fe) alloy material, and alloy serves as getter MAT'L and is combined with active gases.The absorbent pump of this model is applicable to the cavity of small volume, although pumping speed is little, the pumping speed for hydrogen and carbonic oxide is relatively more remarkable, reaches 200l/s, 140l/s respectively.This absorbent pump 42 can maintain individual cavity 10
-9the degree of vacuum of mbar.
Individual cavity structure is simple, comparatively light, can be good at shift experiment sample.According to above design, the design completing individual cavity also needs to purchase some spare and accessory parts, specifically asks for an interview table 1.
Spare and accessory parts needed for table 1 individual cavity
| Sequence number | Quantity | Model |
| Magnetic rod | 1 | VFS-169-R?Series |
| SAES absorbent pump | 1 | CapaciTorr?D200 |
| Flange | Some | CF35 |
| Observation window | 1 | CF35 |
| Ion gauge | 1 | |
| Valve | 2 | |
| Tungsten filament | 1 | |
| Sample carrier | Some | |
| Ceramic gasket | Some |
In a word, present invention achieves and under sample grown equipment and testing tool separation case, the sample such as film or monocrystalline to be shifted and the function of auxiliary heating.System architecture is simple, easy to use, can well integrate Material growth and test equipment, effectively improves the efficiency of experimental study.
The part that the present invention does not elaborate belongs to the known technology of this area.
Although be described the illustrative detailed description of the invention of the present invention above, so that those skilled in the art understand the present invention, but should be clear, the invention is not restricted to the scope of detailed description of the invention, to those skilled in the art, as long as the spirit and scope of the present invention that various change limits in appended claim and determines, these changes are apparent, all should be encompassed in right of the present invention.
Claims (5)
1. one kind has the releasable independent vacuum cavity of in-situ measurement effect, it is characterized in that: by main cavity (21), valve (22), flange (23), observation window (24), ion gauge (25), specimen holder (32), sample heating device (33), magnetic rod (34), SAES getter pump (42) and place thereof little cavity (41) form, specimen holder (32) is for placing sample, sample heating device (33) is for simple furnace run sample, in main cavity (21) top and bottom, be reserved with sufficient space so that main cavity (21) inwall can not be touched when specimen holder (32) freely up and down moves, for magnetic rod (34), require that upper and lower mobile range will exceed the distance between specimen holder (32) and heating arrangement (33), also require that magnetic rod (34) can 360 degree of rotations, each sample cell can align to facilitate with flange (23) and imports into and spread out of sample so simultaneously, the little cavity in SAES absorbent pump (42) place (41) is connected by valve (22) with main cavity (21), this little cavity (41) leaves enough spaces, to play effect of absorbent pump comprehensively, thus the main cavity (21) of this releasable independent vacuum cavity (14) is kept to reach 10
-9the degree of vacuum of mbar.
2. a kind of releasable independent vacuum cavity with in-situ measurement effect according to claim 1, is characterized in that: main cavity (21) reserves an observation window (24), convenient observation cavity inner case.
3. a kind of releasable independent vacuum cavity with in-situ measurement effect according to claim 1, is characterized in that: main cavity (21) is connected to an ion gauge (25), facilitates real-time monitored inside cavity degree of vacuum.
4. a kind of releasable independent vacuum cavity with in-situ measurement effect according to claim 1, it is characterized in that: specimen holder (32) just has a sample cell every 120 degree, a specimen holder can place three sample carriers (31), and (31) place sample to sample carrier.
5. a kind of releasable independent vacuum cavity with in-situ measurement effect according to claim 1, it is characterized in that: sample heating device (33) is heated by tungsten filament, tungsten filament two ends wire is insulated by ceramic gasket and metallic member.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410578813.9A CN104291017B (en) | 2014-10-25 | 2014-10-25 | A kind of releasable independent vacuum cavity with site measurement effect |
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| CN201410578813.9A CN104291017B (en) | 2014-10-25 | 2014-10-25 | A kind of releasable independent vacuum cavity with site measurement effect |
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| CN104291017B CN104291017B (en) | 2017-07-28 |
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Cited By (2)
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|---|---|---|---|---|
| CN108445330A (en) * | 2018-06-12 | 2018-08-24 | 清华大学 | Original position detection device |
| CN114904592A (en) * | 2021-02-10 | 2022-08-16 | 中国科学院物理研究所 | Sample transfer device under ultrahigh vacuum condition |
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| CN114904592B (en) * | 2021-02-10 | 2024-05-07 | 中国科学院物理研究所 | Sample transfer device under ultrahigh vacuum condition |
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| CN104291017B (en) | 2017-07-28 |
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