CN107525846A - A kind of compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum - Google Patents
A kind of compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum Download PDFInfo
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- CN107525846A CN107525846A CN201710941220.8A CN201710941220A CN107525846A CN 107525846 A CN107525846 A CN 107525846A CN 201710941220 A CN201710941220 A CN 201710941220A CN 107525846 A CN107525846 A CN 107525846A
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- 238000000605 extraction Methods 0.000 claims abstract description 15
- 238000005259 measurement Methods 0.000 claims abstract description 14
- 238000013519 translation Methods 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 11
- 230000009471 action Effects 0.000 claims abstract description 10
- 230000008569 process Effects 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 claims abstract description 5
- 230000000704 physical effect Effects 0.000 claims abstract description 5
- 239000013078 crystal Substances 0.000 claims abstract description 4
- 238000012806 monitoring device Methods 0.000 claims abstract description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract 2
- 230000005855 radiation Effects 0.000 claims description 34
- 238000013461 design Methods 0.000 claims description 8
- 108010083687 Ion Pumps Proteins 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- 238000003032 molecular docking Methods 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 abstract description 9
- 230000014616 translation Effects 0.000 description 8
- 238000009434 installation Methods 0.000 description 4
- 238000011065 in-situ storage Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 235000013399 edible fruits Nutrition 0.000 description 2
- 238000011900 installation process Methods 0.000 description 2
- 102000006391 Ion Pumps Human genes 0.000 description 1
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- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012625 in-situ measurement Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
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Abstract
The invention discloses a kind of compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum, belong to vacuum instrument apparatus field.The device is made up of low temperature high-intensity magnetic field system, ultrahigh vacuum cavity system, surface regulator control system and the support system of specific customization.The core of the present invention is ultrahigh vacuum cavity system, surface regulator control system；Ultra-high vacuum system is connected with the low temperature high-intensity magnetic field system and surface regulator control system of specific customization respectively up and down, wherein ultra-high vacuum system is made up of main cavity, the commercial pump housing, and main cavity is then process by 304 or 316 stainless steels of hollow cylindrical, it is airtight on main cavity to be welded with flange-interface, it can be fixed with functional modules such as action bars, crystal oscillator film thickness monitoring devices by the way of CF flanges；Surface regulator control system is made up of special differential extraction rotation platform, special large flange, fine setting translation stage, master lever and various Surface Science devices, is fixed each other by way of CF flanges.Traditional detection device of physical property is combined by the present invention with Surface Science device, so as to realize that original position of the sample in ultrahigh vacuum and low temperature strong magnetic field circumstance transports measurement.
Description
Technical field
The invention belongs to vacuum equipment instrument field, is related to the device that a kind of original position transports measurement, especially a kind of
The compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum.
Background technology
It is a kind of novel measuring for being combined traditional detection device of physical property with Surface Science device that original position, which transports measurement apparatus,
Measure device.As a rule tradition, which transports means, can only measure the sample of fixed property, in contrast the advantage in situ for transporting means
In in measurement process experimenter can not have to destroy vacuum, continuously done by Surface Science device for measurement device
Go out modification, so as to regulate and control the property of sample.Therefore it is that checking influences the more direct means of properties of samples that original position, which transports measurement,.So
And the current whole world does not have commercial transportation measuring system in situ and sold, user must be carried out certainly by the application target of oneself
Row design and assembly.Because design and fabrication technology is complicated, existing in-situ measurement system or lack high-intensity magnetic field in the world at present,
Needed when either surface modification means are single or sample loads and unloads inside air.In general, original position transports survey
Amount device need to include Vacuum generating system, vacuum detecting system, extremely low temperature generation system, high-intensity magnetic field generation system, continuous
The low temperature seal of sample space and open operation mechanism etc. in vacuum.For function to be present not rich enough for equipment in the world at present
The problems such as richness, imperfect design, we carried out a large amount of initiative designs to this.
The content of the invention
The present invention realizes that original position of the sample in ultrahigh vacuum and low temperature strong magnetic field circumstance transports measurement, proposes that one kind can
Completion is worked into the experimental provision of data acquisition all processes from the surface modification of sample in continuous ultra-high vacuum environment.
The compatible low temperature high-intensity magnetic field original position feeding device of the ultrahigh vacuum of complete set is overall as shown in figure 1, by special fixed
Low temperature high-intensity magnetic field system (1), ultrahigh vacuum cavity system (2), surface regulator control system (3) and a few part groups of support system (4) of system
Into.The compatible low temperature high-intensity magnetic field original position of ultrahigh vacuum of the present invention transport measurement apparatus core be ultrahigh vacuum cavity system (2),
The design of surface regulator control system (3) and compatible with other parts.User can buy suitable types according to self-demand
The low temperature high-intensity magnetic field system (1) of specific customization is arranged in pairs or groups therewith, and support system (4) is relatively simple can be flexible according to using area
Carry out, therefore be not described in detail.
The core of the present invention, we are achieved by the following technical programs.
Ultrahigh vacuum cavity system (2) part is as shown in Fig. 2 mainly include main cavity (5), commercial molecular pump (6) and commercialization
Ionic pump (7) forms.Wherein commercial molecular pump (6) and commercial ion pump (7), vacuum analytical equipment such as ion vacuum rule, superelevation
Vacuum checking device mass spectrograph (22) etc. can select to purchase according to user's use demand, can by flange-interface (25) and
Other backup flange access systems, do not do excessive elaboration here.Main cavity (5) passes through upper and lower flanged pipe and specific customization
Low temperature high-intensity magnetic field system lower flange (8) and special differential extraction rotation platform (9) are attached respectively.
Main cavity (5) main body carries the flange-interface structure of many Various Functions in its main body, had into hollow cylindrical
Body is as in Figure 3-5.Mainly include sample stage steering operation bar (10), observation window flange (11), crystal oscillator film thickness monitoring device
(12) flange (13), observation window flange (14), observation window flange (15), reserved flange (16), manual support action bars, are reserved
(17) flange (18) (19) (20), sample introduction flange (21), ultrahigh vacuum detection means mass spectrograph (22), vacuum thermocouple rule, are reserved
(23) flange (24) (25), electric operating bar (26), reserved flange (27), blind flange (28), are reserved.Flange-interface is airtight
It is welded in the main body of main cavity (5), each functional module is fixed by the way of CF flanges using screw and flange-interface.On
Basic requirement of experiment can be completed by stating the function flange mentioned, and reserve improvement and upgrading that flange is then subsequent experimental equipment
Prepare.
In addition low temperature high-intensity magnetic field system needs the heat radiation that radiation shield is used for completely cutting off the external world so that system can be down to most
Low temperature；At the same time Quantum Transport in situ opens a vacuum when being manipulated to sample surfaces, it is necessary to from radiation shield
Passage.Therefore apparatus of the present invention include the radiation shield (29) of particular design, can in vacuo install, dismantle and store, and have
Body structure is as shown in figs 6-8.Radiation shield (29) is stored in the position as shown in the figure of main cavity (5).In order to prevent radiation shield
(29) overweight, manual support action bars (17) can adjust upward, and play certain support booster action, electric operating bar (26)
Transverse shifting radiation shield (29) can be used for.In order to realize the operation to radiation shield (29), we devise buckle structure
(30), and using screw it is fixed in the lower section of radiation shield (29).Buckle structure (30) main body is in hollow cylinder, specifically
Structure can have kinds of schemes, and we provide a kind of outer layer and carry gap structure (31) and two pairs of end direction broken line grooves herein
(32) design of (33)；Electric operating bar (26) end makes the fork-shaped fixed seat (34) being screwed, fork-shaped fixed seat (34)
With circular gap (35).Therefore gap structure (31) and circular gap (35) can match together, complete radiation shield
(29) and electric operating bar (26) flexible connection.
Surface regulator control system (3) as described and depicted in figs. 9-13, including special differential extraction rotation platform (9), special large flange
(38) translation stage (41), master lever (43) and various Surface Science devices (46), are finely tuned.
Each part from the point of view of specific：Wherein special differential extraction rotation platform (9) by flange upwards and main cavity
(5) it is attached, the exhaust flange interface (37) of special differential extraction rotation platform (9) is connected with the external pump housing maintains its work
Vacuum environment, mechanical motor (36) can then complete the spinfunction of special differential extraction rotation platform (9), and user can root
The suitably special differential extraction rotation platform (9) of size is selected according to the use demand of itself；Special large flange (38) is with difference
Flange-interface (39) (40), user need to select with special differential extraction rotation platform (9) size matching special large flange
(38), and can be according to the different flange-interface of the use demand customized number of itself (39) (40).Wherein need to select it
In flange-interface (39) installation fine setting translation stage (41) and master lever (43), remaining flange-interface (40) can be according to oneself
The different Surface Science device (46) of body demand installation function；Finely tune translation stage (41) and pass through flange and special large flange (38)
Flange-interface (39) is attached, and then master lever (43) passes through master lever upper flange (44) and fine setting translation stage (41) again
It is attached.It is in x/y plane and longitudinal that the spiral adjuster (42) of fine setting translation stage (41) can complete master lever (43)
The adjustment of relatively small tilt angle.Mechanical motor (45) can complete moving up and down for master lever (43)；All kinds of Surface Science devices
(46) then it is attached using the flange-interface (40) of flange and special large flange (38).
Brief description of the drawings
Fig. 1：Ultrahigh vacuum compatibility low temperature high-intensity magnetic field device front view
Fig. 2：Ultrahigh vacuum compatibility low temperature high-intensity magnetic field device core view
Fig. 3：Ultrahigh vacuum cavity system main cavity front view
Fig. 4：Ultrahigh vacuum cavity system main cavity rearview
Fig. 5：Ultrahigh vacuum cavity system main cavity right view
Fig. 6：Main cavity deposits radiation shield detail view
Fig. 7：Radiation shield detail view
Fig. 8：Electric operating bar and blind flange detail view
Fig. 9：Surface regulator control system isometric views
Figure 10：Surface regulator control system front view
Figure 11：Special large flange detail view
Figure 12：Finely tune translation stage and master lever isometric views
Figure 13：Finely tune translation stage and master lever front view
Figure 14：Surface regulator control system bottom view
Figure 15：Sample stage sample introduction schematic diagram
Figure 16：Sample stage operational view
Figure 17：Radiation shield loads and unloads view
Label in each figure：The low temperature high-intensity magnetic field system of 1- specific customizations；2- ultrahigh vacuum cavity systems；3- surfaces regulation and control system
System；4- support systems；5- main cavities；6- commercialization molecular pumps；7- commercial ion pumps；Under the low temperature high-intensity magnetic field system of 8- specific customizations
Flange；The special differential extraction rotation platforms of 9-；10- sample stage steering operation bars；11- observation window flanges；12- crystal oscillator film thickness monitorings
Device；13- reserves flange；14- observation window flanges；15- observation window flanges；16- reserves flange；17- manual support action bars；
18- reserves flange；19- reserves flange；20- reserves flange；21- sample introduction flanges；22- high vacuum detection means mass spectrographs；23- is true
Empty thermocouple rule；24- reserves flange；25- reserves flange；26- electric operating bars；27- reserves flange；28- blind flanges；29- prevents
Radiation shield；30- buckle structures；31- gap structures；32- broken line grooves；33- broken line grooves；34- fork-shaped fixed seats；35- circle gap；
36- mechanical motors；37- exhaust flange interfaces；The special large flanges of 38-；39- flange-interfaces；40- flange-interfaces；41- fine setting translations
Platform；42- spiral adjusters；43- master levers；44- master lever upper flanges；45- mechanical motors；46- Surface Science devices；
47- sample stages；48- buckle structures；49- square grooves；50- broken line grooves；The square latches of 51-；52- action bars locking caps；53- ears
Structure.
Specific embodiment
The compatible low temperature high-intensity magnetic field original position feeding device integrated connection of ultrahigh vacuum after the completion of connection as described above, integrally imitate
Fruit is as shown in Figure 1.Sample measurement is completed in the low temperature high-intensity magnetic field system 1 of specific customization, and the regulation and control of properties of samples use surface
Regulator control system 3 is completed, and ultrahigh vacuum cavity system 2 is to connect the low temperature high-intensity magnetic field system 1 and surface regulator control system 3 of specific customization
Important component, while it is also required to complete the task of handling in sample stage 47 and the vacuum of radiation shield 9.
Firstly the need of the installation process for completing sample stage.
Sample can be manually mode be fixed in sample stage 47, we carry out buckle structure 48 and sample stage 47
It is fixed.Both enter ultrahigh vacuum cavity system 2 as overall from sample introduction flange 21, generally now sample stage long axis direction along y
Direction, and the low temperature high-intensity magnetic field system 1 of specific customization is located at the top of main cavity 5, therefore we use sample stage steering operation bar
10 by sample stage 47 using y directions as axle, be rotated by 90 ° so that the long axis direction of sample stage 47 turns to z directions.Concrete structure such as Figure 16
Shown, the end of sample stage steering operation bar 10 is fixed with action bars locking cap 52, and square latch 51 enters the side of buckle structure 48
In shape groove 49, this operation is completed by rotating.
Then master lever 43 is fixed with ear structure 53 using screw, and ear structure 53 can be with the broken line of sample stage 47
Groove 50 coordinates, and completes master lever 43 and is flexibly connected with sample stage 47.With the use of the mechanical motor of master lever 43
The 45 low temperature high-intensity magnetic field systems 1 that sample stage can be delivered to specific customization measure.
Before carrying out the measurements, it is also necessary to install radiation shield 29, now radiation shield 29 is stored in ultrahigh vacuum cavity
Among system 2, as shown in figure 17.Radiation shield 29 can be delivered to cental axial position using electric operating bar 26, then used
Master lever 43 delivers to radiation shield 29 specified location in the low temperature high-intensity magnetic field system 1 of specific customization, is then log out main operation
Bar 43.Because master lever 43 is also required to complete the cargo handling process of sample stage 47, therefore we devise similar 48 lock knot
Structure 30.By the cooperation of gap structure 31 and circular gap 35, completion radiation shield 29 is flexibly connected with electric operating bar 26；
Cooperation with ear structure 53 is completed by broken line groove 32 or 33, the activity of completion radiation shield 29 and master lever 43 is even
Connect.Radiation shield is fixed on the bottom of the low temperature high-intensity magnetic field system 1 of specific customization using contact pin, and radiation proof is fixed using frictional force
The position of cover 29.
After installation radiation shield 29, the measurement process of properties of samples can be proceeded by.In measurement process, such as
Fruit needs to complete the regulation and control of properties of samples, then the program for needing to use above-mentioned steps opposite removes radiation shield, and uses surface
Regulator control system 3.
Due to just completing the installation process of sample stage 47 and radiation shield 29, now master lever 43 is located at central shaft
On.It should be noted that the pivot of special differential extraction rotation platform is on the central shaft of system, and side has been biased into it
Face.Its deviate distance be exactly equal to each small flange on special large flange 38 the special center of large flange 38 of half-breadth away from
From.Therefore, we need to only drive the rotation of special differential extraction rotation platform 9 using mechanical motor 36, you can each needs
The Surface Science device 46 used is rotated to cental axial position.Now corresponding Surface Science device 46 is right against sample, operation
Surface Science device 46 can realize the regulation process to properties of samples.
Similarly, opposite inverse operation can then complete the taking-up of sample stage 47 and the installation of radiation shield 29 after measurement process
Process.
Embodiment described above is not intended to limit the present invention, any those skilled in the art, is not departing from this hair
In bright spirit and scope, various change and retouching can be done, therefore protection scope of the present invention regards right institute circle
It is fixed.
Claims (4)
- A kind of 1. compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum, it is characterised in that the low temperature including specific customization High-intensity magnetic field system, ultrahigh vacuum cavity system, surface regulator control system and a few part compositions of support system.The strong magnetic of low temperature of specific customization Field system is attached with ultrahigh vacuum cavity system main cavity by flange；Ultrahigh vacuum cavity system main cavity and surface regulation and control system The special differential extraction rotation platform of system is attached by flange；Low temperature high-intensity magnetic field system, ultrahigh vacuum cavity system and surface Regulator control system is connected to become is fixed on floor ground entirely through support system.
- 2. ultrahigh vacuum low-temperature physical property measuring device as claimed in claim 1, it is characterised in that the ultrahigh vacuum cavity system By main cavity, commercial molecular pump and commercial ion pump group into.Wherein main cavity is process using 304 or 316 stainless steels, main chamber Phosphor bodies are hollow cylindrical.Main cavity upper and lower respectively has a flanged pipe, low temperature high-intensity magnetic field that can respectively with specific customization System, surface regulator control system are attached；The flange-interface structure of many Various Functions is carried on main chamber phosphor bodies, can be connected Various functions module mainly includes sample stage steering operation bar, observation window flange, crystal oscillator film thickness monitoring device, manual support operation Bar, sample introduction flange, ultrahigh vacuum detection means mass spectrograph, vacuum thermocouple rule, electric operating bar, blind flange, reserved flange.Method In the main body of main cavity, each functional module is connect the blue equal airtight welding of interface by the way of CF flanges using screw and flange Mouth is fixed.
- 3. ultrahigh vacuum low-temperature physical property measuring device as claimed in claim 1, it is characterised in that the ultrahigh vacuum cavity system There is the radiation shield storage area of the low temperature high-intensity magnetic field system of specific customization by main cavity indoor design, be provided with main cavity vertical The master lever and transverse movement action bars directly moved is used for aiding in completing supporting, move and storing for radiation shield；It is special fixed A part for the bottom radiation shield of the low temperature high-intensity magnetic field system of system is the part that is flexibly connected, using contact pin mode, using rubbing Wipe power and be fixed on low temperature high-intensity magnetic field system bottom.Specific implementation form is：The master lever of vertical movement is arranged on main cavity master Flange-interface below body, make to be screwed；Transverse movement action bars is arranged on the blind flange of main cavity body side, makes It is screwed；During sample introduction, first radiation shield is removed from low temperature high-intensity magnetic field system bottom using master lever, reuses transverse direction Motor performance bar is stored in radiation shield in main cavity；During measurement, by the mode opposite with above-mentioned path, eventually through master Action bars utilizes radiation shield and is frictionally held in low temperature high-intensity magnetic field system bottom.
- 4. ultrahigh vacuum low-temperature physical property measuring device as claimed in claim 1, it is characterised in that surface regulator control system is by special Differential extraction rotation platform, special large flange, fine setting translation stage, master lever and various Surface Science devices composition.It is wherein special Differential extraction rotation platform side processed is connected with ultrahigh vacuum cavity system by flange, and opposite side is connected with special large flange；It is special The pivot of differential extraction rotation platform processed has been biased into side not on the central shaft of system, and the distance that it deviates is just It is equal to the distance at the special large flange center of half-breadth of each small flange on special large flange well；Can root on special large flange According to the flange-interface of the customized different sizes of demand, one of flange-interface is attached with fine setting translation stage, and remaining flange connects Mouth can be according to the different Surface Science device of use demand access function；Fine setting translation stage opposite side uses CF with master lever The mode of flange makes to be fixed, for being finely adjusted to the position of master lever, to realize master lever and protective shield of radiation, can Dismantle the docking of sample stage.
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| CN201710941220.8A CN107525846A (en) | 2017-10-11 | 2017-10-11 | A kind of compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum |
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| CN201710941220.8A CN107525846A (en) | 2017-10-11 | 2017-10-11 | A kind of compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108445330A (en) * | 2018-06-12 | 2018-08-24 | 清华大学 | Original position detection device |
| CN111473192A (en) * | 2020-04-13 | 2020-07-31 | 北京大学 | Ultrahigh vacuum compatible thermal radiation shielding device and shielding method thereof |
| CN114535780A (en) * | 2022-02-17 | 2022-05-27 | 南京大学 | Perovskite surface instantaneous local heating and in-situ characterization vacuum laser device and method |
| CN114813735A (en) * | 2022-04-15 | 2022-07-29 | 仪晟科学仪器(嘉兴)有限公司 | Ultrahigh vacuum extremely-low temperature nano material preparation and characterization equipment |
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| CN207439997U (en) * | 2017-10-11 | 2018-06-01 | 北京大学 | A kind of low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum compatibility |
Cited By (7)
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