CN207439997U - A kind of low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum compatibility - Google Patents
A kind of low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum compatibility Download PDFInfo
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- CN207439997U CN207439997U CN201721305743.5U CN201721305743U CN207439997U CN 207439997 U CN207439997 U CN 207439997U CN 201721305743 U CN201721305743 U CN 201721305743U CN 207439997 U CN207439997 U CN 207439997U
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- 238000000605 extraction Methods 0.000 claims abstract description 14
- 238000005259 measurement Methods 0.000 claims abstract description 12
- 238000013519 translation Methods 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims abstract description 5
- 230000005855 radiation Effects 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 9
- 238000013461 design Methods 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 3
- 108010083687 Ion Pumps Proteins 0.000 claims description 2
- 238000012806 monitoring device Methods 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 3
- 229910000831 Steel Inorganic materials 0.000 claims 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 abstract description 4
- 238000012986 modification Methods 0.000 abstract description 4
- 230000000704 physical effect Effects 0.000 abstract description 2
- 238000000053 physical method Methods 0.000 abstract 1
- 230000014616 translation Effects 0.000 description 8
- 230000032258 transport Effects 0.000 description 7
- 238000011065 in-situ storage Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 235000013399 edible fruits Nutrition 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011900 installation process Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
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- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
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- 238000012625 in-situ measurement Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
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Abstract
The utility model discloses a kind of low temperature high-intensity magnetic field original position feeding devices of ultrahigh vacuum compatibility, belong to vacuum instrument apparatus field, which is made of low temperature high-intensity magnetic field system, ultrahigh vacuum cavity system, surface regulator control system and support system.Low temperature high-intensity magnetic field system is used to provide traditional physical measurement environment；Support system is used to integrally provide structural support to device；And the core of the utility model is ultrahigh vacuum cavity system and surface regulator control system.Ultra-high vacuum system is made of for providing surface modification necessary vacuum environment main cavity, the commercial pump housing；Surface regulator control system is made of for generating all kinds of atom and molecules differential extraction rotating platform, large flange, fine tuning translation stage, master lever and various Surface Science devices.Traditional detection device of physical property is combined by the utility model with Surface Science device, and measurement is transported so as to fulfill original position of the sample in ultrahigh vacuum and low temperature strong magnetic field circumstance.
Description
Technical field
The utility model belongs to vacuum equipment instrument field, is related to the device that a kind of original position transports measurement, especially a kind of
A kind of low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum compatibility.
Background technology
It is a kind of novel measuring for being combined traditional detection device of physical property with Surface Science device that original position, which transports measuring device,
Measure device.Usually tradition, which transports means, can only measure the sample of fixed property, in contrast the advantage in situ for transporting means
In in measurement process experimenter can not have to destroy vacuum, continuously done by Surface Science device for measurement device
Go out modification, so as to change the property of sample.Therefore it is that verification influences the more direct means of properties of samples that original position, which transports measurement,.So
And the current whole world is sold there is no commercial transportation measuring system in situ, user must be carried out certainly by the purpose of usage of oneself
Row design and assembly.Since design and fabrication technology is complicated, existing in-situ measurement system or lack high-intensity magnetic field in the world at present,
It is needed when either surface modification means are single or sample loads and unloads inside air.In general, survey is transported in situ
Amount device need to include Vacuum generating system, vacuum detecting system, extremely low temperature generation system, high-intensity magnetic field generation system, continuous
The low temperature seal of sample space and open operation mechanism etc. in vacuum.For equipment is not rich enough there are function in the world at present
The problems such as richness, imperfect design, we carried out this large amount of initiative designs.
Utility model content
The utility model realizes that original position of the sample in ultrahigh vacuum and low temperature strong magnetic field circumstance transports measurement, proposes a kind of
The experimental provision of data acquisition all processes can be completed to be worked into continuous ultra-high vacuum environment from the surface modification of sample.
The low temperature high-intensity magnetic field original position feeding device of the ultrahigh vacuum compatibility of complete set is whole as shown in Figure 1, by special fixed
Low temperature high-intensity magnetic field system (1), ultrahigh vacuum cavity system (2), surface regulator control system (3) and a few part groups of support system (4) of system
Into.The core that the low temperature high-intensity magnetic field of the utility model ultrahigh vacuum compatibility transports measuring device in situ is ultrahigh vacuum cavity system
(2), the design of surface regulator control system (3) and compatible with other parts.User can buy suitable type according to self-demand
Number the low temperature high-intensity magnetic field system (1) of specific customization arrange in pairs or groups therewith, and support system (4) is relatively simple can be according to using area
It flexibly carries out, therefore is not described in detail.
The core of the utility model, we are achieved by the following technical programs.
Ultrahigh vacuum cavity system (2) part is as shown in Fig. 2, mainly include main cavity (5), commercial molecular pump (6) and commercialization
Ionic pump (7) forms.Wherein commercial molecular pump (6) and commercial ion pump (7) can select to purchase according to user's use demand, can
By flange-interface (25) access system, not do excessive elaboration here.Main cavity (5) by upper and lower flanged pipe with it is special
The low temperature high-intensity magnetic field system lower flange (8) and special differential extraction rotating platform (9) of customization are attached respectively.
Main cavity (5) main body carries the flange-interface structure of many Various Functions in its main body, has into hollow cylindrical
Body is as in Figure 3-5.Mainly include sample stage steering operation bar (10), observation window flange (11), crystal oscillator film thickness monitoring device
(12), flange (13), observation window flange (14), observation window flange (15), reserved flange (16), manual support operation lever are reserved
(17), flange (18) (19) (20), sample introduction flange (21), ultrahigh vacuum detection device mass spectrograph (22), vacuum thermocouple rule are reserved
(23), flange (24) (25), electric operating bar (26), reserved flange (27), blind flange (28) are reserved.Flange-interface is airtight
It is welded in the main body of main cavity (5), each function module is fixed by the way of CF flanges using screw and flange-interface.On
Basic requirement of experiment can be completed by stating the function flange mentioned, and reserve improvement and upgrading that flange is then subsequent experimental equipment
It prepares.
In addition low temperature high-intensity magnetic field system needs radiation shield to be used for completely cutting off extraneous heat radiation so that system can be down to most
Low temperature.At the same time Quantum Transport in situ opens a vacuum when being manipulated to sample surfaces, it is necessary to from radiation shield
Passage.Therefore the utility model device needs handling and storage in the vacuum to radiation shield (29) to be designed, concrete structure
As shown in figs 6-8.Radiation shield (29) is stored in the position as shown in the figure of main cavity (5).Radiation shield (29) mistake in order to prevent
Weight, manual support operation lever (17) can adjust upward, and play certain support booster action, electric operating bar (26) can be used
Carry out transverse shifting radiation shield (29).In order to realize the operation to radiation shield (29), we devise buckle structure (30), and
The lower section of radiation shield (29) is fixed in using screw.Buckle structure (30) main body is in hollow cylinder, and concrete structure can
With there are many scheme, we provide a kind of outer layer with gap structure (31) and two pairs of end direction broken line slots (32) herein
(33) design；Electric operating bar (26) end uses the fixed fork-shaped fixed seat (34) of screw, and fork-shaped fixed seat (34) carries
Circular gap (35).Therefore gap structure (31) and circular gap (35) can match together, complete radiation shield (29)
With the flexible connection of electric operating bar (26).
Surface regulator control system (3) as described and depicted in figs. 9-13, including special differential extraction rotating platform (9), special large flange
(38), translation stage (41), master lever (43) and various Surface Science devices (46) are finely tuned.
Each component from the point of view of specific：Wherein special differential extraction rotating platform (9) by flange upwards and main cavity
(5) it is attached, the exhaust flange interface (37) of special differential extraction rotating platform (9) is connected with the external pump housing maintains its work
Vacuum environment, mechanical motor (36) can then complete the spinfunction of special differential extraction rotating platform (9), and user can root
The suitably special differential extraction rotating platform (9) of size is selected according to the use demand of itself；Special large flange (38) is with difference
Flange-interface (39) (40), user need to select and the matched special large flange of special differential extraction rotating platform (9) size
It (38), and can be according to the different flange-interface of the use demand customized number of itself (39) (40).It wherein needs to select it
In flange-interface (39) installation fine tuning translation stage (41) and master lever (43), remaining flange-interface (40) can be according to oneself
The different Surface Science device (46) of body demand installation function；It finely tunes translation stage (41) and passes through flange and special large flange (38)
Flange-interface (39) is attached, and then master lever (43) passes through master lever upper flange (44) and fine tuning translation stage (41) again
It is attached.It is in x/y plane and longitudinal that the spiral adjuster (42) of fine tuning translation stage (41) can complete master lever (43)
The adjustment of relatively small tilt angle.Mechanical motor (45) can complete moving up and down for master lever (43)；All kinds of Surface Science devices
(46) then it is attached using the flange-interface (40) of flange and special large flange (38).
Description of the drawings
Fig. 1：Ultrahigh vacuum is compatible with low temperature high-intensity magnetic field device front view
Fig. 2：Ultrahigh vacuum compatibility low temperature high-intensity magnetic field device core view
Fig. 3：Ultrahigh vacuum cavity system main cavity front view
Fig. 4：Ultrahigh vacuum cavity system main cavity rearview
Fig. 5：Ultrahigh vacuum cavity system main cavity right view
Fig. 6：Main cavity stores radiation shield detail view
Fig. 7：Radiation shield detail view
Fig. 8：Electric operating bar and blind flange detail view
Fig. 9：Surface regulator control system isometric views
Figure 10：Surface regulator control system front view
Figure 11：Special large flange detail view
Figure 12：Finely tune translation stage and master lever isometric views
Figure 13：Finely tune translation stage and master lever front view
Figure 14：Surface regulator control system bottom view
Figure 15：Sample stage sample introduction schematic diagram
Figure 16：Sample stage operational view
Figure 17：Radiation shield loads and unloads view
Label in each figure：The low temperature high-intensity magnetic field system of 1- specific customizations；2- ultrahigh vacuum cavity systems；3- surfaces regulation and control system
System；4- support systems；5- main cavities；6- commercialization molecular pumps；7- commercial ions pump；Under the low temperature high-intensity magnetic field system of 8- specific customizations
Flange；The special differential extraction rotating platforms of 9-；10- sample stage steering operation bars；11- observation window flanges；12- crystal oscillator film thickness monitorings
Device；13- reserves flange；14- observation window flanges；15- observation window flanges；16- reserves flange；17- manual support operation levers；
18- reserves flange；19- reserves flange；20- reserves flange；21- sample introduction flanges；22- high vacuum detection device mass spectrographs；23- is true
Empty thermocouple rule；24- reserves flange；25- reserves flange；26- electric operating bars；27- reserves flange；28- blind flanges；29- prevents
Radiation shield；30- buckle structures；31- gap structures；32- broken line slots；33- broken line slots；34- fork-shaped fixed seats；35- circle gap；
36- mechanical motors；37- exhaust flange interfaces；The special large flanges of 38-；39- flange-interfaces；40- flange-interfaces；41- fine tuning translations
Platform；42- spiral adjusters；43- master levers；44- master lever upper flanges；45- mechanical motors；46- Surface Science devices；
47- sample stages；48- buckle structures；49- square grooves；50- broken line slots；The square bolts of 51-；52- operation lever locking caps；53- ears
Structure.
Specific embodiment
The low temperature high-intensity magnetic field original position feeding device integrated connection of ultrahigh vacuum compatibility is as described above, connect whole effect after finishing
Fruit is as shown in Figure 1.Sample measurement is completed in the low temperature high-intensity magnetic field system 1 of specific customization, and the regulation and control of properties of samples use surface
Regulator control system 3 is completed, and ultrahigh vacuum cavity system 2 is the connection low temperature high-intensity magnetic field system 1 of specific customization and surface regulator control system 3
Important component, while it is also required to complete the task of handling in sample stage 47 and 9 vacuum of radiation shield.
Firstly the need of the installation process for completing sample stage.
Sample can be manually mode be fixed in sample stage 47, we carry out buckle structure 48 and sample stage 47
It is fixed.The two as a whole from sample introduction flange 21 into ultrahigh vacuum cavity system 2, usually at this time sample stage long axis direction along y
Direction, and the low temperature high-intensity magnetic field system 1 of specific customization is located at 5 top of main cavity, therefore we use sample stage steering operation bar
10 by sample stage 47 using y directions as axis, be rotated by 90 ° so that 47 long axis direction of sample stage turns to z directions.Concrete structure such as Figure 16
Shown, 10 end of sample stage steering operation bar is fixed with operation lever locking cap 52, and square bolt 51 enters the side of buckle structure 48
In shape slot 49, this operation is completed by rotating.
Then master lever 43 is fixed with ear structure 53 using screw, and ear structure 53 can be with the broken line of sample stage 47
Slot 50 coordinates, and completes master lever 43 and is flexibly connected with sample stage 47.With the use of the mechanical motor of master lever 43
45 can send sample stage the low temperature high-intensity magnetic field system 1 to specific customization to measure.
Before carrying out the measurements, it is also necessary to install radiation shield 29, radiation shield 29 is stored in ultrahigh vacuum cavity at this time
Among system 2, as shown in figure 17.Radiation shield 29 can be sent to cental axial position using electric operating bar 26, then used
Master lever 43 send radiation shield 29 to the designated position into the low temperature high-intensity magnetic field system 1 of specific customization.It is then log out main operation
Bar 43.Since master lever 43 is also required to complete the cargo handling process of sample stage 47, we devise similar 48 lock knot
Structure 30.By gap structure 31 and the cooperation of circular gap 35, completion radiation shield 29 is flexibly connected with electric operating bar 26；
Cooperation with ear structure 53 is completed by broken line slot 32 or 33, the activity of completion radiation shield 29 and master lever 43 is even
It connects.Radiation shield is fixed on the bottom of the low temperature high-intensity magnetic field system 1 of specific customization using contact pin, and radiation protection is fixed using frictional force
The position of cover 29.
After installation is complete radiation shield 29, the measurement process of properties of samples can be proceeded by.In measurement process, such as
Fruit needs to complete the regulation and control of properties of samples, then needs to remove radiation shield using the opposite program of above-mentioned steps, and use surface
Regulator control system 3.
Due to just completing the installation process of sample stage 47 and radiation shield 29, master lever 43 is located at central shaft at this time
On.It should be noted that the pivot of special differential extraction rotating platform is on the central shaft of system, and side has been biased into it
Face.Its deviate distance be exactly equal to each small flange on special large flange 38 special 38 center of large flange of half-breadth away from
From.Therefore, we need to only drive the rotation of special differential extraction rotating platform 9 using mechanical motor 36, you can each needs
The Surface Science device 46 used is rotated to cental axial position.Corresponding Surface Science device 46 is right against sample at this time, operation
Surface Science device 46 can realize the regulation process to properties of samples.
Similarly, opposite inverse operation can then complete the taking-up process of sample stage 47 and radiation shield 29 after measurement process.
Embodiment described above is not intended to limit the utility model, and any those skilled in the art is not departing from
In the spirit and scope of the utility model, various change and retouching can be done, therefore the scope of protection of the utility model regards right
Claimed range is defined.
Claims (4)
1. a kind of low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum compatibility, which is characterized in that including low temperature high-intensity magnetic field system,
Ultrahigh vacuum cavity system, surface regulator control system and a few part compositions of support system；Low temperature high-intensity magnetic field system and ultrahigh vacuum cavity system
System main cavity is attached by flange；The differential extraction rotating platform of ultrahigh vacuum cavity system main cavity and surface regulator control system
It is attached by flange；Low temperature high-intensity magnetic field system, ultrahigh vacuum cavity system and surface regulator control system be connected to become entirely through
Support system is fixed on floor ground.
A kind of 2. low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum compatibility as described in claim 1, which is characterized in that institute
State ultrahigh vacuum cavity system by main cavity, commercial molecular pump and commercial ion pump group into；Wherein main cavity uses 304 or 316 not
Rust steel is process, and main chamber phosphor bodies are hollow cylindrical；Main cavity upper and lower respectively there are one flanged pipe, can respectively with low temperature
High-intensity magnetic field system, surface regulator control system are attached；The flange-interface structure of many Various Functions is carried on main chamber phosphor bodies, it can
Mainly include sample stage steering operation bar, observation window flange, manually crystal oscillator film thickness monitoring device, branch to connect various functions module
Support operation lever, sample introduction flange, ultrahigh vacuum detection device mass spectrograph, vacuum thermocouple rule, electric operating bar, blind flange, reserve
Flange；For the equal airtight welding of flange-interface in the main body of main cavity, each function module uses screw by the way of CF flanges
It is fixed with flange-interface.
A kind of 3. low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum compatibility as described in claim 1, which is characterized in that institute
Stating ultrahigh vacuum cavity system is had the radiation shield storage space of low temperature high-intensity magnetic field system by main cavity indoor design, is pacified on main cavity
Master lever and transverse movement operation lever equipped with vertical movement are used for aiding in completing supporting, move and storing for radiation shield；
A part for the bottom radiation shield of low temperature high-intensity magnetic field system is the component of flexible connection, using contact pin mode, utilizes frictional force
It is fixed on low temperature high-intensity magnetic field system bottom；Specific implementation form is：The master lever of vertical movement is mounted under main chamber phosphor bodies
The flange-interface of side, makes to be screwed；Transverse movement operation lever is mounted on the blind flange of main cavity body side, uses spiral shell
Silk is fixed；During sample introduction, first radiation shield from low temperature high-intensity magnetic field system bottom is removed using master lever, reuses transverse movement
Operation lever is stored in radiation shield in main cavity；During measurement, by the mode opposite with above-mentioned path, eventually by main operation
Bar utilizes radiation shield and is frictionally held in low temperature high-intensity magnetic field system bottom.
A kind of 4. low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum compatibility as described in claim 1, which is characterized in that table
Face regulator control system is by differential extraction rotating platform, large flange, fine tuning translation stage, master lever and various Surface Science device groups
Into；Wherein with ultrahigh vacuum cavity system by flanged joint, opposite side is connected with large flange for differential extraction rotating platform one side；Difference
The pivot of point pumping rotating platform and has been biased into side not on the central shaft of system, and the distance deviateed is just etc.
Distance in the half-breadth large flange center of each small flange on large flange；On large flange can according to demand customized size it is each
Different flange-interface, one of flange-interface are attached with fine tuning translation stage, remaining flange-interface can be according to using need
Seek the Surface Science device that access function is different；Fine tuning translation stage opposite side makes progress with master lever by the way of CF flanges
It is fixed, it is finely adjusted for the position to master lever, to realize master lever and protective shield of radiation, pair of detachable sample stage
It connects.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721305743.5U CN207439997U (en) | 2017-10-11 | 2017-10-11 | A kind of low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum compatibility |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721305743.5U CN207439997U (en) | 2017-10-11 | 2017-10-11 | A kind of low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum compatibility |
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| CN207439997U true CN207439997U (en) | 2018-06-01 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107525846A (en) * | 2017-10-11 | 2017-12-29 | 北京大学 | A kind of compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum |
| CN110961171A (en) * | 2018-09-30 | 2020-04-07 | 中国科学院上海微系统与信息技术研究所 | Low-temperature sample support |
-
2017
- 2017-10-11 CN CN201721305743.5U patent/CN207439997U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107525846A (en) * | 2017-10-11 | 2017-12-29 | 北京大学 | A kind of compatible low temperature high-intensity magnetic field original position feeding device of ultrahigh vacuum |
| CN107525846B (en) * | 2017-10-11 | 2024-06-21 | 北京大学 | Ultrahigh vacuum compatible low-temperature strong magnetic field in-situ transportation device |
| CN110961171A (en) * | 2018-09-30 | 2020-04-07 | 中国科学院上海微系统与信息技术研究所 | Low-temperature sample support |
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