CN105806810B - Spectral reflectivity in-situ test system under vacuum environment - Google Patents
Spectral reflectivity in-situ test system under vacuum environment Download PDFInfo
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- CN105806810B CN105806810B CN201610380063.3A CN201610380063A CN105806810B CN 105806810 B CN105806810 B CN 105806810B CN 201610380063 A CN201610380063 A CN 201610380063A CN 105806810 B CN105806810 B CN 105806810B
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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Abstract
The invention discloses a kind of spectral reflectivity in-situ test systems under vacuum environment, including irradiation chamber and measurement chamber, two horizontal cavity horizontal distributions, it measures and is separated between chamber and irradiation chamber by gate valve, sample beam and reference beam are introduced vacuum measurement chamber by vacuum-packed ultraviolet, near-infrared mixing silica fibre by spectrophotometer system, and test signal return by vacuum cable through walls that vacuum measurement is intracavitary, carry out the calculating and processing of the data of spectral reflectivity；It irradiates and UV source is set above chamber, sample feeding mechanism pushes the back and forth movement of test position of the test sample group from the irradiation test position of vacuum and low temperature irradiation chamber to vacuum measurement chamber and the operation of sample disengaged position；Kinetic control system is for the test of test specimen group spectral reflectivity, mobile, separation centralized control.Uncertainty of measurement of the invention is 1%, measurement reproducibility 0.5%；Sample separation, sample presentation and sampling are controlled by computer integration, high degree of automation.
Description
Technical field
The invention belongs to space ultraviolet radioactive environment and effect ground simulation test fields, and in particular to one kind is used for vacuum
The system that spectral reflectivity in-situ test is carried out to Spacecraft Material sample under environment.
Background technique
The important surfacing of spacecraft is climbed for a long time is exposed at spacecraft surface, by space ultraviolet radioactive environmental effect degeneration shadow
It rings serious.Solar spectrum reflectivity is the very important surface property parameter of spacecraft, it characterizes reflection of the satellite to sunlight
Size, solar reflectivity degeneration normally behave as reflection and reduce, and solar reflectivity degeneration will cause satellite temperature rising, be to restrict
The spacecraft long-life, highly reliable development a key factor.Therefore, it is necessary to be moved back according to space environment and solar spectrum reflectivity
Change feature, after being exposed to space ultraviolet radioactive environment for a long time using ground simulation test verifying spacecraft surfacing, performance
Whether design requirement is still able to satisfy.
After spacecraft surfacing is irradiated in a vacuum, if be exposed in atmospheric environment, it may appear that spectral reflectance
Rate recovery effect.Meanwhile if carrying out dystopy measurement in test, not only resulting in measurement result, there are errors, and can interrupt
Test, can not carry out long run test.Influence in order to avoid recovery effect to solar spectrum reflectance test result, provides one
Spectral reflectivity in-situ test system of the kind under vacuum environment is very necessary.The spacecraft surfacing sun is not measured still
The efficiency test means of spectral reflectivity parameter degradation, and to grasp Spacecraft Material moving back in the ultraviolet radioactive environment of space
Law and safeguard procedures are of great significance.
Summary of the invention
The purpose of the present invention is to provide a kind of spectral reflectivity in-situ test systems under vacuum environment, meet empty
Between the demand of sample spectra reflectivity in situ measurement is tested in ultraviolet radioactive ground simulation test.
Object of the present invention is to what is be achieved through the following technical solutions:
For the spectral reflectivity in-situ test system under vacuum environment, including irradiation chamber and measurement chamber, two horizontal chambers
Body horizontal distribution measures and is separated between chamber and irradiation chamber by gate valve, and irradiation chamber and measurement chamber have vacuum-pumping system respectively,
It is evacuated respectively in the case where electric gate valve is closed, spectrophotometer system passes through vacuum-packed ultraviolet, near-infrared mixing
Sample beam and reference beam are introduced vacuum measurement chamber by silica fibre, and by vacuum cable through walls that vacuum measurement is intracavitary
Signal return is tested, the calculating and processing of the data of spectral reflectivity are carried out；It irradiates and UV source, sample presentation machine is set above chamber
Structure pushes the round-trip fortune of test position of the test sample group from the irradiation test position of vacuum and low temperature irradiation chamber to vacuum measurement chamber
Dynamic and sample disengaged position operation；Kinetic control system is tested for test specimen group spectral reflectivity, is mobile, is separation
Centralized control.
Wherein, the top setting three-dimensional moving mechanism of chamber, the diffusing reflection integrating sphere that will be loaded on work top are measured
After detector is moved to the intracavitary predetermined test position of vacuum measurement, one by one to the sample sets by ultraviolet irradiation under vacuum environment
Carry out spectral reflectivity test；Sample beam and reference beam introduce diffusing reflection integrating sphere detector as measurement standard light source,
And control outside the vacuum measurement chamber being transmitted to the test signal of diffusing reflection integrating sphere detector using vacuum cable through walls and
Spectrophotometer system carries out the acquisition and data processing of test signal.
Wherein, the upper surface of several bar shaped toolings is respectively provided with the groove for pasting test sample, lower surface and sample stage
Upper surface cooperation positioning, sample stage be placed in measurement chamber guide rail above；Chamber guide rail is measured for sample stage in vacuum measurement
The test position of chamber and irradiation chamber irradiation test position move back and forth during support and guiding.
Further, sample separating mechanism is provided with below sample stage, sample separation is fully wrapped around using metal bellows
It is connect with edge of a knife flange with vacuum measurement chamber, it is ensured that vacuum sealing when mobile, and be driven by motor, complete spectral reflectivity
After measurement, the intracavitary bar shaped tooling of vacuum measurement will be stayed in and lifted, separated with sample stage, then residue will be loaded by sample feeding mechanism
The sample stage of bar shaped tooling retracts vacuum and low temperature and irradiates intracavitary irradiation test position, continues ultraviolet irradiation test.
Further, in sample spectra albedo measurement, using comparison method integrating sphere mensuration, standard white plate is as
Know the standard sample of spectral reflectivity.
Further, the detent fit of upper surface of the bar shaped tooling to lower surface equipped with pin hole and sample stage positions.
Wherein, UV source is the irradiation bomb of near ultraviolet or far ultraviolet, and near ultraviolet source is vertically placed among above irradiation chamber
On flange, extreme-ultraviolet source slant setting is on irradiation chamber on inclined flange.
Wherein, the top center for irradiating chamber is laid with optical window, for being transmitted near ultraviolet radiation in irradiation examination
It tests in the test sample on face, and lays in optical window two sides and connect with optical window axis at the far ultraviolet flange of 30 ° of angles
Mouthful, for ultraviolet radiation to be transmitted to the test sample on irradiation test face.
Further, irradiation chamber guide rail irradiates the spoke of chamber for sample stage in vacuum measurement chamber test position and vacuum and low temperature
Support and guiding during being moved back and forth according to testing position.
Further, temperature control cold plate is set on vacuum and low temperature irradiation cavity wall, using polytetrafluoroethylene (PTFE) and vacuum and low temperature spoke
It is insulated according to chamber, and is pierced by vacuum and low temperature irradiation chamber using metal hose and is connect with temperature control unit；It places the upper surface of temperature control cold plate
Sample stage, and temperature control is carried out to test sample, avoid the temperature-rise effect of test sample to ultraviolet irradiation simulation test accuracy
It influences.
Further, heat sink, heat sink inner surface spraying is set pitch-dark on vacuum and low temperature irradiation cavity wall, and passes through liquid nitrogen
Refrigeration, temperature control, temperature are not higher than -100 DEG C, are used for space low temperature environmental simulation.
Of the invention has the effect that for the spectral reflectivity in-situ test system under vacuum environment
1 loads diffusing reflection integrating sphere detector using three-dimensional moving mechanism, under vacuum conditions to ultraviolet irradiation test sample
Product group carries out spectral reflectivity in situ measurement one by one, and measurement wave-length coverage is 200~2500nm, uncertainty of measurement 1%,
Measurement reproducibility is 0.5%；
2 can be placed on test specimen group on sample stage in irradiation chamber progress ultraviolet irradiation test, complete in irradiation test
Test specimen group is sent to measurement chamber using mobile mechanism afterwards and carries out spectral reflectivity in-situ test；The sample that needs are taken out later
Product are separated with sample stage, then send remaining sample back to irradiation chamber；Gate valve between irradiation chamber and measurement chamber can be finally closed,
The case where not influencing irradiation test, the sample left is taken out from test chamber；
3 sample sets spectral reflectivity in-situ tests, sample separation and sample presentation sampling are controlled by computer integration, are automated
Degree is high.
Detailed description of the invention
Fig. 1 is the spectral reflectivity in-situ test system schematic diagram under vacuum environment of the present invention.
In figure: 1-spectrophotometer system, 2-vacuum measurement chambers, 3-electric gate valves, 4-vacuum and low temperatures irradiate chamber
Survey device, 5-UV sources, 6-sample feeding mechanisms, 7-kinetic control systems；
Schematic layout pattern when Fig. 2 is is that test sample group is in spectral reflectivity test position, in vacuum measurement chamber 2.
In figure: 2.1-three-dimensional moving mechanisms, 2.2-diffusing reflection integrating sphere detectors, 2.3-test samples, 2.4-items
Shape tooling, 2.5-measurement chamber guide rails, 2.6-sample separating mechanisms, 2.7-standard white plates, 2.8-sample stages；
When Fig. 3 is is that test sample group is in irradiation test position, vacuum and low temperature irradiates the schematic layout pattern in chamber 4.
In figure: 4.1-optical windows, 4.2-far ultraviolet flange-interfaces, 4.3-irradiation chamber guide rails, 4.4-temperature control cold plates,
4.5-is heat sink；
Fig. 4 is the structural schematic diagram for being sample feeding mechanism 6.
In figure: 6.1-sample transfer bars, 6.2-edge of a knife flanges, 6.3-metal bellows, 6.4-screw rods, 6.5-motors.
Specific embodiment
Introduced below is the specific embodiment as the content of present invention, below by specific embodiment to the present invention
Content work further illustrates.Certainly, description following detailed description is only the content of example different aspect of the invention, and
It should not be construed as limiting the invention range.
Fig. 1 is the spectral reflectivity in-situ test system composition schematic diagram under vacuum environment of the invention.Wherein, it is divided light
It spends meter systems 1 and sample beam and reference beam is introduced by vacuum survey by vacuum-packed ultraviolet, near-infrared mixing silica fibre
Chamber 2, and test signal return by vacuum cable through walls that vacuum measurement is intracavitary are measured, the meter of the data of spectral reflectivity is carried out
It calculates and handles；Vacuum measurement chamber 2 provides vacuum degree under room temperature and is better than 1 × 10-3Pa measures environment；Vacuum measurement chamber 2 is low with vacuum
3, in the case where closing electric gate valve 3, vacuum measurement chamber 2 and vacuum are separated using electric gate valve between temperature irradiation chamber 4
Low temperature irradiation chamber 4 can use the vacuum-pumping system being respectively equipped with, and carry out independent pumping；Vacuum and low temperature irradiation chamber 4 provides very
Reciprocal of duty cycle is not higher than -100 DEG C of sample irradiation experimental enviroment better than 2 × 10-4Pa, environment temperature；UV source 5 provides spectrum
The near ultraviolet radiation that range is 200nm~400nm, irradiated area is Φ 300mm, irradiation intensity is 10~15 ultraviolet constants,
The ultraviolet radiation that spectral region is 115nm~200nm, irradiated area is Φ 150mm, irradiation intensity is 10 ultraviolet constants；
Sample feeding mechanism 6 pushes the irradiation test position of the slave vacuum and low temperature irradiation chamber 4 of test sample group to 2 test position of vacuum measurement chamber
Back and forth movement, sample disengaged position operation；Kinetic control system 7 for the test of test specimen group spectral reflectivity, it is mobile,
Isolated centralized control.
Fig. 2 be that test sample group is in spectral reflectivity test position, the schematic layout pattern in vacuum measurement chamber 2.Its
In, the diffusing reflection integrating sphere detector 2.2 being loaded on work top is moved to vacuum measurement chamber 2 by three-dimensional moving mechanism 2.1
After interior predetermined test position, spectral reflectivity test is carried out one by one to the sample sets by ultraviolet irradiation under vacuum environment；It is logical
Vacuum-packed ultraviolet, near-infrared mixing silica fibre is crossed to introduce the sample beam of spectrophotometer system 1 and reference beam
Diffusing reflection integrating sphere detector 2.2 is used as measurement standard light source, and utilizes vacuum cable through walls by diffusing reflection integrating sphere detector
The control and spectrophotometer system 1 that 2.2 test signal is transmitted to outside vacuum measurement chamber 2 carry out the acquisition sum number of test signal
According to processing.
Further, test sample 2.3 is pasted in the groove of 2.4 upper surface of bar shaped tooling, 2.4 lower surface of bar shaped tooling
Detent fit equipped with pin hole and 2.8 upper surface of sample stage positions, and shares 7 bar shaped toolings, each bar shaped tooling have 7 it is recessed
Slot；Sample stage 2.8 is placed in 2.5 top of measurement chamber guide rail；It measures chamber guide rail 2.5 and is tested for sample stage in vacuum measurement chamber 2
Position and vacuum and low temperature irradiate the support and guiding during 4 irradiation test position of chamber moves back and forth.
Further, in sample spectra albedo measurement, using comparison method integrating sphere mensuration, standard white plate 2.7 is made
For the standard sample of known spectra reflectivity.
Further, the elevating mechanism of sample separating mechanism 2.6, using metal bellows is fully wrapped around and edge of a knife flange with
Vacuum measurement chamber 2 connects, it is ensured that vacuum sealing when mobile, and be driven by motor.It, will after completing spectral reflectivity measurement
The bar shaped tooling 2.4 stayed in vacuum measurement chamber 2 is lifted, and is separated with sample stage 2.8, then will load remaining item by sample feeding mechanism 6
The sample stage 2.8 of shape tooling 2.4 retracts the irradiation test position in vacuum and low temperature irradiation chamber 4, continues ultraviolet irradiation test.
Further, the bar shaped tooling 2.4 that sample separating mechanism 2.6 will be left behind moves down, and is placed on measurement chamber guide rail 2.5
On；At this point it is possible to close electric gate valve 3 between vacuum measurement chamber 2 and vacuum and low temperature irradiation chamber 4, it is vented vacuum measurement chamber 2,
After vacuum measurement chamber 2 restores normal pressure, opens 2 gate of vacuum measurement chamber and take out the test sample 2.3 left.
When Fig. 3 is is that test sample group is in irradiation test position, vacuum and low temperature irradiates the schematic layout pattern in chamber 4.Its
In, vacuum and low temperature irradiation 4 top center of chamber is laid with optical window 4.1, for being transmitted near ultraviolet radiation in irradiation examination
It tests in the test sample 2.3 on face, and lays the remote purple with 4.1 axis of optical window at 30 ° of angles in 4.1 two sides of optical window
Outward flange interface 4.2, the test sample 2.3 for being transmitted to ultraviolet radiation on irradiation test face；
Further, irradiation chamber guide rail 4.3 irradiates chamber in 2 test position of vacuum measurement chamber and vacuum and low temperature for sample stage
4 irradiation test positions move back and forth during support and guiding.
Further, 4.4 lower surface of temperature control cold plate is fixed on vacuum and low temperature by mounting structure and irradiates on 4 inner wall of chamber, adopts
It is insulated with polytetrafluoroethylene (PTFE) and vacuum and low temperature irradiation chamber 4, and is pierced by vacuum and low temperature irradiation chamber 4 and temperature control unit using metal hose
Connection；Sample stage 2.8 is placed in 4.4 upper surface of temperature control cold plate, and carries out temperature control to test sample 2.3, avoids test sample 2.3
Influence of the temperature-rise effect to ultraviolet irradiation simulation test accuracy.
Further, heat sink 4.5 inner surface sprays pitch-dark emissivity better than 0.95, and passes through liquid nitrogen refrigerating, temperature control, temperature
Not higher than -100 DEG C, it to be used for space low temperature environmental simulation.
Fig. 4 be 6 schematic diagram of sample feeding mechanism.Sample transfer bar 6.1 is connect with sample stage 2.8, complete using metal bellows 6.3
Package and edge of a knife flange 6.2 are connect with vacuum and low temperature irradiation chamber 4, it is ensured that vacuum sealing when mobile, and silk is driven by motor 6.5
Bar 6.4 moves sample transfer bar 6.1, so that sample stage 2.8 is moved along irradiation chamber guide rail 4.3, after electric gate valve, into measurement
Chamber guide rail 2.5, thus realize sample stage from 2 test position of vacuum measurement chamber and vacuum and low temperature irradiation 4 irradiation test position of chamber
Back and forth movement；And when test sample 2.3 separates, sample stage 2.8 is moved to sample disengaged position, cooperates sample seperator
Structure 2.6 carries out test sample 2.3 and separates.
Further, three-dimensional moving mechanism 2.1 sample separating mechanism 2.6, electric gate valve 3, sample feeding mechanism 6 pass through fortune
Autocontrol system 7 carries out centralized control, to realize the test of 2.3 spectral reflectivity of test sample, mobile, separation control.
Although the detailed description and description of the specific embodiments of the present invention are given above, it should be noted that
We can carry out various equivalent changes and modification to above embodiment according to the concept of the present invention, and generated function is made
It, should all be within protection scope of the present invention when with the spirit still covered without departing from specification and attached drawing.
Claims (8)
1. for the spectral reflectivity in-situ test system under vacuum environment, including vacuum and low temperature irradiation chamber and vacuum measurement chamber,
Two horizontal cavity horizontal distributions are separated between vacuum measurement chamber and vacuum and low temperature irradiation chamber by gate valve, vacuum and low temperature spoke
There is vacuum-pumping system respectively according to chamber and vacuum measurement chamber, is evacuated respectively in the case where electric gate valve is closed, spectrophotometric
Sample beam and reference beam are introduced vacuum measurement by vacuum-packed ultraviolet, near-infrared mixing silica fibre by meter systems
Chamber, and test signal return by vacuum cable through walls that vacuum measurement is intracavitary, carry out the calculating of the data of spectral reflectivity
And processing；Vacuum and low temperature, which irradiates, is arranged UV source above chamber, sample feeding mechanism pushes test sample group and irradiates from vacuum and low temperature
The irradiation test position of chamber to vacuum measurement chamber test position back and forth movement and sample disengaged position operation；Movement control
System processed irradiates in the top of chamber for the test of test specimen group spectral reflectivity, mobile, separation centralized control, vacuum and low temperature
The heart is laid with optical window, near ultraviolet radiation to be transmitted to the test sample on irradiation test face, and in optics
The far ultraviolet flange-interface with optical window axis at 30 ° of angles is laid in window two sides, for transmiting everywhere ultraviolet radiation
In in the test sample on irradiation test face.
2. in-situ test system as described in claim 1, wherein the top setting three-dimensional moving mechanism of vacuum measurement chamber, three
It ties up and loads diffusing reflection integrating sphere detector on the work top of mobile mechanism, the work top of three-dimensional moving mechanism is moved to very
After sky measures intracavitary predetermined test position, spectral reflectivity is carried out one by one to the sample sets by ultraviolet irradiation under vacuum environment
Test；Sample beam and reference beam introduce diffusing reflection integrating sphere detector as measurement standard light source, and through walls using vacuum
Cable surveys the spectrophotometer system outside vacuum measurement chamber that the test signal of diffusing reflection integrating sphere detector is transmitted to
The acquisition and data processing of trial signal.
3. spectral reflectivity in-situ test system as described in claim 1, wherein vacuum and low temperature, which irradiates, is arranged control on cavity wall
Warm cold plate, using polytetrafluoroethylene (PTFE) and vacuum and low temperature irradiation chamber insulation, and using metal hose be pierced by vacuum and low temperature irradiation chamber with
The connection of temperature control unit；Sample stage is placed in the upper surface of temperature control cold plate, and carries out temperature control to test sample.
4. in-situ test system as claimed in claim 3, wherein the lower surface of the upper surface of sample stage and several bar shaped toolings
Cooperation positioning, the upper surface of several bar shaped toolings are respectively provided with the groove for pasting test sample, and sample stage is placed in measurement chamber and leads
Above rail；Chamber guide rail is measured for sample stage in the irradiation test position of test position and vacuum and low temperature the irradiation chamber of vacuum measurement chamber
Set the support and guiding during moving back and forth.
5. in-situ test system as described in claim 1, wherein be provided with sample separating mechanism, sample point below sample stage
Structure of disembarking is fully wrapped around using metal bellows and edge of a knife flange is connect with vacuum measurement chamber, it is ensured that vacuum sealing when mobile,
And be driven by motor, after completing spectral reflectivity measurement, the intracavitary bar shaped tooling of vacuum measurement will be stayed in and lifted, with sample
Platform separation, then the sample stage for loading remaining bar shaped tooling is retracted into vacuum and low temperature by sample feeding mechanism and irradiates intracavitary irradiation test position
It sets, continues ultraviolet irradiation test.
6. in-situ test system according to any one of claims 1-4, wherein in sample spectra albedo measurement, use
Comparison method integrating sphere mensuration, standard sample of the standard white plate as known spectra reflectivity.
7. in-situ test system as described in claim 1, wherein the lower surface of bar shaped tooling is upper equipped with pin hole and sample stage
The detent fit on surface positions.
8. in-situ test system according to any one of claims 1-4, wherein UV source is near ultraviolet or far ultraviolet
Radiation source, near ultraviolet radiation source are vertically placed on flange intermediate above irradiation chamber, and far ultraviolet radiation source slant setting is irradiating
Above chamber on inclined flange.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106872372B (en) * | 2017-03-17 | 2023-11-17 | 广西电网有限责任公司电力科学研究院 | Constant temperature integrating sphere device for gas analysis |
| CN110320389A (en) * | 2019-08-02 | 2019-10-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of original position property test system and sample mounting procedure |
| CN112229809A (en) * | 2020-10-15 | 2021-01-15 | 北京卫星环境工程研究所 | Device and method for in-situ measurement and control of thermal object performance based on space environment effect test |
| CN113063732B (en) * | 2021-03-24 | 2023-01-31 | 北京卫星环境工程研究所 | Solar absorption ratio in-situ detection device and method in vacuum low-temperature environment |
| CN113418859B (en) * | 2021-06-18 | 2023-01-31 | 北京卫星环境工程研究所 | Two-dimensional sample switching system |
| CN113405996A (en) * | 2021-06-25 | 2021-09-17 | 北京卫星环境工程研究所 | Lunar soil reflection spectrum simulation measuring device and method in deep low temperature environment |
| CN113607728B (en) * | 2021-07-06 | 2023-08-11 | 哈尔滨工业大学 | Optical system in-situ measurement mechanism integrating linear motion with multiple degrees of freedom |
| CN116087102B (en) * | 2023-01-13 | 2023-11-03 | 中国科学院空间应用工程与技术中心 | Experimental device for ice satellite and open-sea ocean extreme environment simulation system |
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| CN102621107A (en) * | 2012-03-09 | 2012-08-01 | 中国科学院长春光学精密机械与物理研究所 | In-situ optical measurement device for aerospace material space environment irradiation measurement |
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