CN2879192Y - Sample receiving desk for new type super-high vacuum system sample transferring device - Google Patents
Sample receiving desk for new type super-high vacuum system sample transferring device Download PDFInfo
- Publication number
- CN2879192Y CN2879192Y CNU2005201125231U CN200520112523U CN2879192Y CN 2879192 Y CN2879192 Y CN 2879192Y CN U2005201125231 U CNU2005201125231 U CN U2005201125231U CN 200520112523 U CN200520112523 U CN 200520112523U CN 2879192 Y CN2879192 Y CN 2879192Y
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- receiving platform
- platform main
- vacuum system
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Abstract
The utility model discloses a sample accepting station for a new style ultra-vacuum system, comprising a conductive contact, a gripping mechanism and a main frame of the accepting station. The main frame of the accepting station is a two-end-open box matching with the shape of sample bracket, gripping closely with the main frame of the accepting station through a gripping mechanism. The conductive contact is installed inside the main frame of the accepting station, and can be inserted into the hole (with the center open) of the molybdenum bolt of the sample bracket. The utility model, through together using the sample bracket, promotes simplicity and effectiveness of the overall structure. The processing & manufacturing and application & operation become more easily, with more favorite compatibility. Therefore, the device can be used in ultra-vacuum scanning tunneling microscope system, molecular beam epitaxy system, extreme condition electrical transport testing system and other systems.
Description
Technical field
The utility model relates to a kind of accessory that is used for the sample transferring device of ultra-high vacuum system, sample reception platform.The sample transferring device that is particularly useful for scanning tunnel microscope (STM), molecular beam epitaxy (MBE) and extreme condition (high-intensity magnetic field, as 10 teslas, utmost point low temperature is as 2K) electronic transport test macro.
Background technology
Ultra-high vacuum system is meant under the environment of artificial ultrahigh vacuum, to the system that dissimilar samples is grown, sign and rerum natura are measured.Current, ultra-high vacuum system has been applied in each research fields such as semiconductor, physics, chemistry, material and bio-science.Sample transferring device is the important component part of ultra-high vacuum system, is made up of sample holder, sample transmission rod (or passing the sample hand) and sample reception platform three parts usually, is used for the various piece of system that sample is sent to.Sample transferring device structure more complicated in present most ultra-high vacuum system, it is little to transform leeway, so cost of manufacture is higher, compatible relatively poor to different vacuum systems.
As Fig. 1 a, b, c for this reason, we have developed a kind of super high vacuum system sample feeding apparatus, its sample holder comprises the holder of rectangular build molybdenum, the molybdenum screw of two hollows and matrix insulation liner, molybdenum holder two ends have through hole, be used to install the molybdenum screw, the center section of this molybdenum holder bottom has a boss, boss has threaded hole, the molybdenum screw fixes by molybdenum nut and molybdenum holder, the nut lower end of molybdenum screw is installed with first electrode, be used for importing electric current, also be respectively arranged with dead ring between first electrode and the molybdenum holder and between nut and the molybdenum holder with insulation liner fixed sample and to sample.
The utility model content
Problem at above-mentioned existence, the purpose of this utility model is to provide a kind of sample reception platform that is used for super high vacuum system sample feeding apparatus, can with the supporting use of sample holder of above-mentioned super high vacuum system sample feeding apparatus, thereby saved cost, simplify operation, increased the scope of using.
For achieving the above object, a kind of sample reception platform that is used for super high vacuum system sample feeding apparatus of the utility model comprises: conductive contact, gripping mechanism and receiving platform main body, described receiving platform main body is the box body of a both ends open that matches with sample holder profile, this sample holder clamps by described gripping mechanism and described receiving platform main body, described conductive contact is installed in this receiving platform main body, and can insert in the hole of the molybdenum screw center of sample holder opening.
Further, described conductive contact is the beryllium copper pin, circumferentially have an arc line type groove near what insert an end in the sample holder molybdenum screw center drilling, the other end has screw thread, an end that has a screw thread is by dead ring and the insulation of described receiving platform main body, and is fixed on the described receiving platform main body by the metal nuts that matches with described screw thread.
Further, described gripping mechanism is the beryllium copper spring that is installed on the described receiving platform main body madial wall, by described gripping mechanism described sample holder is fixed in the described receiving platform main body.
Further, described beryllium copper spring is fixedly mounted on the described receiving platform main body madial wall by an insulation liner, and described receiving platform main body also is equipped with an electrode and a sample test platform simultaneously, and this sample test platform is an insulating trip.
The sample holder of the utility model and super high vacuum system sample feeding apparatus is used, its one-piece construction is effectively succinct more, processing and fabricating and use operation become more easy, compatible better, therefore be applicable to multiple systems such as UHV STM system (STM), molecular beam epitaxy system (MBE), extreme condition electronic transport test macro.
Description of drawings
Fig. 1 a, b are that the master of sample holder looks, schematic top plan view, and Fig. 1 c is the STRUCTURE DECOMPOSITION figure of Fig. 1 a.
Fig. 2 a is the sample transmission rod synoptic diagram, and Fig. 2 b is the enlarged drawing of sample transmission rod front end.
Fig. 3 is the utility model structural representation.
Fig. 4 beryllium copper pin is installed in the local enlarged diagram on the receiving platform main body.
Fig. 5 a is the utility model structural representation of electronic transport test macro under extreme conditions.
Fig. 5 b is the rear view of Fig. 5 a.
Fig. 6 is the installation partial enlarged view of Fig. 5 a receiving platform main body and beryllium copper spring.
Fig. 7 is the installation section enlarged diagram of Fig. 6 receiving platform main body and beryllium copper spring.
Embodiment:
As Fig. 1 a, b, shown in the c, the sample holder comprises rectangular build molybdenum holder 3, the molybdenum screw 8 of two hollows and insulation liner 4, molybdenum holder 3 two ends have through hole, be used to install molybdenum screw 8, the center section of molybdenum holder 3 bottoms has a boss, boss has threaded hole 9, molybdenum screw 8 fixes by molybdenum nut 1 and molybdenum holder 3, the nut lower end of molybdenum screw 8 is installed with first electrode 7, be used for importing electric currents with insulation liner 4 fixed samples 5 and to sample 5, also be respectively arranged with dead ring 2 between first electrode 7 and the molybdenum holder 3 and between nut 1 and the molybdenum holder 3,6, also be provided with 4 silk mouths 10 in the molybdenum holder 3, silk mouth 10 connects along molybdenum holder 3 short transverses, and is positioned at below the dielectric substrate 4, by being screwed into location molybdenum screw to regulate the height of dielectric substrate 4; Wherein, the hole that open at molybdenum screw 8 centers is a turbination at the nut place, is cylindrical at the screw rod place, and dead ring 2,6 is made by alundum (Al or processable ceramic, and insulation liner 4 is made by alundum (Al or processable ceramic, and first electrode 7 is made by tantalum or molybdenum.
Sample transmission rod comprises shown in Fig. 2 a, b: magnetic force bar 11 and stainless steel or molybdenum system sample transmission rod head 12, and an end of sample transmission rod head 12 is the screw rod 14 that matches with threaded hole 9, the other end 13 is fixed on the magnetic force bar 11.
The utility model as shown in Figure 3, comprise: the receiving platform main body 17 of beryllium copper pin 15, beryllium copper spring 16 and high pure metal (as oxygen-free copper) system, receiving platform main body 17 is the box body of a both ends open that matches with sample holder profile, the sample holder can place in the receiving platform main body 17 by sample transmission rod, and by being installed in the beryllium copper spring 16 and 17 clampings of receiving platform main body on receiving platform main body 17 madial walls, beryllium copper pin 15 is installed in the receiving platform main body 17, and can insert in the hole of opening at molybdenum screw 8 centers.As shown in Figure 4, circumferentially have an arc line type groove near what beryllium copper pin 15 inserted an end in sample holder molybdenum screws 8 center drillings, when beryllium copper pin 15 and molybdenum screw 8 center drillings mutually time-setting position slightly be offset, utilize the elasticity of beryllium copper self also beryllium copper pin 15 can be inserted molybdenum screw 8 center drillings smoothly, the other end has screw thread, an end that has screw thread is by dead ring 18 and 17 insulation of receiving platform main body, and be fixed on the receiving platform main body 17 by the metal nuts 19 that matches with screw thread, dead ring 18 is made by alundum (Al or processable ceramic.
When sample transmits, at first rotating magnetic force bar 11 handles is screwed into sample transmission rod front end screw rod 14 and makes in the threaded hole 9 of sample holder the sample holder is locked on the screw rod 14, promote magnetic force bar 11 handles then, utilize magnetic force to drive inner stock and do linear movement, with the sample delivery near the sample reception platform.Next regulate the position of sample holder, make the beryllium copper pin 15 on the receiving platform can insert the diplopore of molybdenum screw 8 in the sample holder smoothly with respect to receiving platform.At this moment, the beryllium copper spring on the receiving platform 16 also can make the sample holder be clamped on the receiving platform under the acting in conjunction of beryllium copper spring 16 and beryllium copper pin 15 to the certain extruding of sample holder one side generation.At last, the screw rod 14 of outwarding winding is withdrawn sample transmission rod, and whole biography sample process has just been finished, and this moment, sample 5 was along with the sample holder just has been fixed on the sample reception platform.Two beryllium copper pins 15 of receiving platform are directly to contact with two molybdenum screws 8 of sample holder, can lead to big current flow heats sample, for element semiconductor, can adopt the structure of present embodiment to obtain clean sample surfaces by removing the impurity that adheres on the sample directly for the alive mode heated sample of sample.
In the electronic transport test macro that under extreme conditions (refers to utmost point low temperature, high-intensity magnetic field here), the utility model is shown in Fig. 5 a, 6, beryllium copper spring 16 is fixedly mounted on receiving platform main body 17 madial walls by an insulation liner 20 (alundum (Al or processable ceramic are made), as shown in Figure 7, metallic screw 23 passes the hole of opening on receiving platform main body 17, insulation liner 20 and the beryllium copper spring 16, be set with dead ring 25,26 between metallic screw 23 and the receiving platform main body 17, be fixed on the receiving platform main body 17 by will insulate liner 20 and beryllium copper spring 16 of metal nuts 24.Shown in Fig. 5 b, receiving platform main body 17 also is equipped with an electrode 22 and a sample test platform 21 simultaneously, and this sample test platform 21 is an insulating trip, is made by alundum (Al or processable ceramic, is used to test the sample that is fixed in the above.
Claims (4)
1, a kind of sample reception platform that is used for super high vacuum system sample feeding apparatus, it is characterized in that, comprise: conductive contact, gripping mechanism and receiving platform main body, described receiving platform main body is the box body of a both ends open that matches with sample holder profile, this sample holder clamps by described gripping mechanism and described receiving platform main body, described conductive contact is installed in this receiving platform main body, and can insert in the hole of the molybdenum screw center of sample holder opening.
2, a kind of sample reception platform that is used for super high vacuum system sample feeding apparatus according to claim 1, it is characterized in that, described conductive contact is the beryllium copper pin, circumferentially have an arc line type groove near what insert an end in the sample holder molybdenum screw center drilling, the other end has screw thread, an end that has a screw thread is by dead ring and the insulation of described receiving platform main body, and is fixed on the described receiving platform main body by the metal nuts that matches with described screw thread.
3, a kind of sample reception platform that is used for super high vacuum system sample feeding apparatus according to claim 1 and 2, it is characterized in that, described gripping mechanism is the beryllium copper spring that is installed on the described receiving platform main body madial wall, by described gripping mechanism described sample holder is fixed in the described receiving platform main body.
4, a kind of sample reception platform that is used for super high vacuum system sample feeding apparatus according to claim 3, it is characterized in that, described beryllium copper spring is fixedly mounted on the described receiving platform main body madial wall by an insulation liner, described receiving platform main body also is equipped with an electrode and a sample test platform simultaneously, and this sample test platform is an insulating trip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005201125231U CN2879192Y (en) | 2005-06-30 | 2005-06-30 | Sample receiving desk for new type super-high vacuum system sample transferring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005201125231U CN2879192Y (en) | 2005-06-30 | 2005-06-30 | Sample receiving desk for new type super-high vacuum system sample transferring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2879192Y true CN2879192Y (en) | 2007-03-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2005201125231U Expired - Fee Related CN2879192Y (en) | 2005-06-30 | 2005-06-30 | Sample receiving desk for new type super-high vacuum system sample transferring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2879192Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109444331A (en) * | 2018-09-30 | 2019-03-08 | 中国科学技术大学 | A kind of ultrahigh vacuum heating device and its heating means |
| CN113884523A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Transfer vacuum sample holder, small sample holder and vacuum interconnection system |
-
2005
- 2005-06-30 CN CNU2005201125231U patent/CN2879192Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109444331A (en) * | 2018-09-30 | 2019-03-08 | 中国科学技术大学 | A kind of ultrahigh vacuum heating device and its heating means |
| CN113884523A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Transfer vacuum sample holder, small sample holder and vacuum interconnection system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070314 |