CN2837850Y - Sample tray for sample conveying device of ultra-high vacuum system - Google Patents
Sample tray for sample conveying device of ultra-high vacuum system Download PDFInfo
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- CN2837850Y CN2837850Y CNU2005201125227U CN200520112522U CN2837850Y CN 2837850 Y CN2837850 Y CN 2837850Y CN U2005201125227 U CNU2005201125227 U CN U2005201125227U CN 200520112522 U CN200520112522 U CN 200520112522U CN 2837850 Y CN2837850 Y CN 2837850Y
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Abstract
The utility model discloses a sample tray for a sample conveying device of an ultrahigh vacuum system, which comprises a molybdenum tray, two hollow molybdenum bolts and an insulation liner piece, wherein through holes in which the molybdenum bolts can be installed are formed on both ends of the molybdenum tray, a dummy club is formed in the middle of the lower part of the molybdenum tray, a screwed hole is formed on the dummy club, and the molybdenum bolts are fixed to the molybdenum tray by molybdenum nuts. A first electrode penetrates through the lower ends of screw caps of the molybdenum bolts and is used for fixing a sample through the insulation liner piece and for leading in currents to the sample, and an insulation ring is respectively arranged between the first electrode and the molybdenum tray and between the nuts and the molybdenum tray. The integral structure of the utility model is simpler and more effective, processing manufacture and application and operation are easier, and compatibility is better; therefore, the sample tray can be applied to the sample conveying device for a microscope system with an ultrahigh vacuum scan tunnel, a molecular beam extension system, an extreme condition electrical conveying test system and the combined system thereof.
Description
Technical field
The utility model relates to a kind of accessory of sample transferring device of ultra-high vacuum system, and the sample holder is particularly useful for scanning tunnel microscope (STM), molecular beam epitaxy (MBE) and extreme condition electronic transport test macro sample transferring device.
Background technology
Ultra-high vacuum system is meant under the environment of artificial ultrahigh vacuum, to the system that dissimilar samples is grown, sign and rerum natura are measured.Current, ultra-high vacuum system has been applied in each research fields such as semiconductor, physics, chemistry, material and bio-science.Sample transferring device is the important component part of ultra-high vacuum system, is made up of sample holder, sample transmission rod (or passing the sample hand) and sample reception platform three parts usually, is used for the various piece of system that sample is sent to.The sample holder structure more complicated of the sample transferring device in present most ultra-high vacuum system, it is little to transform leeway, so cost of manufacture is higher, compatible relatively poor to different vacuum systems.
The utility model content
At the problem of above-mentioned existence, the purpose of this utility model is to provide a kind of sample holder that is used for the ultra-high vacuum system sample transferring device, and this apparatus structure is succinctly effective, thereby has saved cost, has simplified operation, has increased the scope of using.
For achieving the above object, a kind of sample holder that is used for the ultra-high vacuum system sample transferring device of the utility model comprises: the molybdenum holder, the molybdenum screw of two hollows and insulation liner, described molybdenum holder two ends have through hole, be used to install described molybdenum screw, the center section of this molybdenum holder bottom has a boss, described boss has threaded hole, described molybdenum screw fixes by molybdenum nut and described molybdenum holder, the nut lower end of described molybdenum screw is installed with first electrode, be used for importing electric current, also be respectively arranged with dead ring between described first electrode and the molybdenum holder and between described nut and the molybdenum holder with described insulation liner fixed sample and to sample.
Further, described molybdenum holder is rectangular build, also is provided with at least 2 silk mouths on it, and this mouth connects along described molybdenum holder short transverse, and is positioned at below the described dielectric substrate, by being screwed into location molybdenum screw to regulate the height of dielectric substrate.
Further, the hole that open at described molybdenum screw center is a turbination at the nut place, is cylindrical at the screw rod place.
Further, between described sample and insulation liner, also be disposed with second electrode and heating resistor, be provided with another dead ring between described second electrode and the molybdenum holder.
Further, be provided with the insulation pad between described sample and described second electrode, an available insulator in described first electrode substitutes.
Further, also be provided with the metal pad that is used for described sample bed hedgehopping on the described insulation liner.
Further, also comprise a beryllium copper electrode, this beryllium copper electrode is fixed on the side of described molybdenum holder by an insulating trip, and is electrically connected with described sample.
Further, described beryllium copper electrode is a beryllium copper spring.
The beneficial effects of the utility model are, because its one-piece construction is effectively succinct more, processing and fabricating and use operation become more easy, compatibility is better, therefore can be applicable to the device for transferring samples of UHV STM system (STM), molecular beam epitaxy system (MBE), extreme condition electronic transport test macro and association system thereof.
Description of drawings
Fig. 1 a, b are that the master of the utility model embodiment 1 looks, schematic top plan view, and Fig. 1 c is the STRUCTURE DECOMPOSITION figure of Fig. 1 a.
Fig. 2 a is the sample transmission rod synoptic diagram, and Fig. 2 b is the enlarged drawing of sample transmission rod front end.
Fig. 3 is a sample reception platform synoptic diagram.
Fig. 4 a is the exploded view of the utility model embodiment 2, and Fig. 4 b is the exploded view of the utility model embodiment 3.
Fig. 5 a is the improvement synoptic diagram that the utility model is applied to the MBE system, and Fig. 5 b is that the utility model is applied to the improvement synoptic diagram that sample under the extreme condition (high-intensity magnetic field, utmost point low temperature) transports test macro.
Embodiment:
As Fig. 1 a, b, shown in the c, the utility model comprises rectangular build molybdenum holder 3, the molybdenum screw 8 of two hollows and insulation liner 4, molybdenum holder 3 two ends have through hole, be used to install molybdenum screw 8, the center section of molybdenum holder 3 bottoms has a boss, boss has threaded hole 9, molybdenum screw 8 fixes by molybdenum nut 1 and molybdenum holder 3, the nut lower end of molybdenum screw 8 is installed with first electrode 7, be used for importing electric currents with insulation liner 4 fixed samples 5 and to sample 5, also be respectively arranged with dead ring 2 between first electrode 7 and the molybdenum holder 3 and between nut 1 and the molybdenum holder 3,6, also be provided with 4 silk mouths 10 in the molybdenum holder 3, silk mouth 10 connects along molybdenum holder 3 short transverses, and is positioned at below the dielectric substrate 4, locate the height of molybdenum screw by being screwed into, thereby clamp sample 5 with adjusting dielectric substrate 4; Wherein, the hole that open at molybdenum screw 8 centers is a turbination at the nut place, is cylindrical at the screw rod place, and dead ring 2,6 is made by alundum (Al or processable ceramic, and insulation liner 4 is made by alundum (Al or processable ceramic, and first electrode 7 is made by tantalum or molybdenum.
Sample transmission rod comprises shown in Fig. 2 a, b: magnetic force bar 11 and stainless steel or molybdenum system sample transmission rod head 12, and an end of sample transmission rod head 12 is the screw rod 14 that matches with threaded hole 9, the other end 13 is fixed on the magnetic force bar 11.Receiving platform as shown in Figure 3, comprise: the receiving platform main body 17 of beryllium copper pin 15, beryllium copper spring 16 and high pure metal (as oxygen-free copper) system, receiving platform main body 17 is the box body of a both ends open that matches with sample holder profile, the sample holder can place main body 17 inside by sample transmission rod, and by being installed in the beryllium copper spring 16 and main body 17 clampings on main body 17 madial walls, beryllium copper pin 15 is installed in the main body 17, and can insert in the hole of opening at molybdenum screw 8 centers.
When sample transmits, at first rotating magnetic force bar 11 handles is screwed into sample transmission rod front end screw rod 14 in the threaded hole 9 of sample holder and makes the sample holder be locked on the magnetic force bar 14, promote magnetic force bar 11 handles then, utilize magnetic force to drive inner stock and do linear movement, with the sample delivery near the sample reception platform.Next regulate the position of sample holder, make the beryllium copper pin 15 on the receiving platform can insert the diplopore of molybdenum screw 8 in the sample holder smoothly with respect to receiving platform.At this moment, the beryllium copper spring on the receiving platform 16 also can make the sample holder be clamped on the receiving platform under the acting in conjunction of beryllium copper spring 16 and beryllium copper pin 15 to the certain extruding of sample holder one side generation.At last, the screw rod 14 of outwarding winding is withdrawn sample transmission rod, and whole biography sample process has just been finished, and this moment, sample 5 was along with the sample holder just has been fixed on the sample reception platform.Two beryllium copper pins 15 of receiving platform are directly to contact with two molybdenum screws 8 of sample holder, can lead to big current flow heats sample, for element semiconductor, can adopt the structure of present embodiment to obtain clean sample surfaces by removing the impurity that adheres on the sample directly for the alive mode heated sample of sample.
Shown in Fig. 4 a, present embodiment and embodiment 1 different place is also to be disposed with between second electrode 20 and heating resistor 19, the second electrodes 20 and the molybdenum holder 3 to be provided with another dead ring 18 between sample 5 and insulation liner 4.
For high resistance (insulation) sample, obviously can not directly heat with electric current.Present embodiment adopts the double-level-metal electrode for the high resistance sample, and first electrode 7 only is used for fixing sample 5, the second electrodes 20 and is used for clamping heating resistor 19.When second electrode, 20 two ends pass to electric current, heating resistor 19 heating, indirect heating sample 5.
Shown in Fig. 4 b, the difference of present embodiment and embodiment 2 is to be provided with insulation pad 21, the first electrodes 7 and can replaces with insulator between the sample 5 and second electrode 20.
For metal sample, consider that some occasion has special requirement to the ground connection of sample 5, change insulator into one in first electrode 7 of fixed sample 5 (symmetry two), with sample 5 and 20 insulation of second electrode, just can when heating, avoid electric current to cause short circuit simultaneously by sample 5.
In addition, can also adopt structure shown in Fig. 5 a, b.Shown in Fig. 5 a, filled up two disjunct metal pads 22 on the insulation liner 4 of sample holder, the shape of pressing from both sides two metal electrodes 7 of sample 5 usefulness simultaneously also can correspondingly change, and makes sample 5 be raised by whole.Because of sample 5 surfaces higher with respect to the position of sample holder, so but the electron beam glancing incidence to sample 5 surfaces.Because the pad 22 of sample 5 bottoms is a metal,, the electron beam of glancing incidence can not cause the electric charge accumulation simultaneously even having part to bang to pad 22 yet.Therefore this sample holder is particularly suitable for being equipped with the ultrahigh vacuum MBE system of high electron energy diffractometer (RHEED).(RHEED adopts the way of high energy electron glancing incidence sample surfaces to monitor the MBE growth.) shown in Fig. 5 b, beryllium copper spring 24 has been installed across an insulcrete 23 in side of the present utility model, and be electrically connected with sample 5.Beryllium copper spring 24 is not still lost elasticity under liquid helium temperature, can be used on the occasion (as liquid helium temperature) of utmost point low temperature.Want the rerum natura of measuring samples under utmost point low temperature (as 2K), high-intensity magnetic field (as 10 teslas), available platinum line is linked the measured structure on the sample with beryllium copper spring 24, simultaneously the 15 usefulness leads of the beryllium copper spring on the sample reception platform shown in Figure 3 are connected, reed is just corresponding in twos to have become the electrode of measuring samples 5.In addition, beryllium copper spring 24 also can be replaced with the beryllium copper sheet.Application in Here it is the utility model electronic transport test macro under extreme conditions.
Claims (8)
1, a kind of sample holder that is used for the ultra-high vacuum system sample transferring device, it is characterized in that, comprise: the molybdenum holder, the molybdenum screw of two hollows and insulation liner, described molybdenum holder two ends have through hole, be used to install described molybdenum screw, the center section of this molybdenum holder bottom has a boss, described boss has threaded hole, described molybdenum screw fixes by molybdenum nut and described molybdenum holder, the nut lower end of described molybdenum screw is installed with first electrode, be used for importing electric current, also be respectively arranged with dead ring between described first electrode and the molybdenum holder and between described nut and the molybdenum holder with described insulation liner fixed sample and to sample.
2, a kind of sample holder that is used for the ultra-high vacuum system sample transferring device according to claim 1, it is characterized in that, described molybdenum holder is rectangular build, also be provided with at least 2 silk mouths on it, this mouth connects along described molybdenum holder short transverse, and be positioned at below the described dielectric substrate, by being screwed into location molybdenum screw to regulate the height of dielectric substrate.
3, a kind of sample holder that is used for the ultra-high vacuum system sample transferring device according to claim 2 is characterized in that, the hole that open at described molybdenum screw center is a turbination at the nut place, is cylindrical at the screw rod place.
4, according to the arbitrary described a kind of sample holder that is used for the ultra-high vacuum system sample transferring device of claim 1 to 3, it is characterized in that, between described sample and insulation liner, also be disposed with second electrode and heating resistor, be provided with another dead ring between described second electrode and the molybdenum holder.
5, a kind of sample holder that is used for the ultra-high vacuum system sample transferring device according to claim 4 is characterized in that, is provided with the insulation pad between described sample and described second electrode, and an available insulator in described first electrode substitutes.
6, according to the arbitrary described a kind of sample holder that is used for the ultra-high vacuum system sample transferring device of claim 1 to 3, it is characterized in that, also be provided with the metal pad that is used for described sample bed hedgehopping on the described insulation liner.
7, according to the arbitrary described a kind of sample holder that is used for the ultra-high vacuum system sample transferring device of claim 1 to 3, it is characterized in that, also comprise a beryllium copper electrode, this beryllium copper electrode is fixed on the side of described molybdenum holder by an insulating trip, and is electrically connected with described sample.
8, a kind of sample holder that is used for the ultra-high vacuum system sample transferring device according to claim 7 is characterized in that described beryllium copper electrode is a beryllium copper spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005201125227U CN2837850Y (en) | 2005-06-30 | 2005-06-30 | Sample tray for sample conveying device of ultra-high vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005201125227U CN2837850Y (en) | 2005-06-30 | 2005-06-30 | Sample tray for sample conveying device of ultra-high vacuum system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2837850Y true CN2837850Y (en) | 2006-11-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2005201125227U Expired - Fee Related CN2837850Y (en) | 2005-06-30 | 2005-06-30 | Sample tray for sample conveying device of ultra-high vacuum system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108408260A (en) * | 2018-03-19 | 2018-08-17 | 中国科学院物理研究所 | Sample storage locking device |
| CN108504992A (en) * | 2018-06-12 | 2018-09-07 | 清华大学 | Electrode evaporation coating device |
| CN109444331A (en) * | 2018-09-30 | 2019-03-08 | 中国科学技术大学 | A kind of ultrahigh vacuum heating device and its heating means |
| CN110823929A (en) * | 2019-11-28 | 2020-02-21 | 中国科学院上海应用物理研究所 | Sample transfer table for soft X-ray transmission imaging |
-
2005
- 2005-06-30 CN CNU2005201125227U patent/CN2837850Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108408260A (en) * | 2018-03-19 | 2018-08-17 | 中国科学院物理研究所 | Sample storage locking device |
| CN108504992A (en) * | 2018-06-12 | 2018-09-07 | 清华大学 | Electrode evaporation coating device |
| CN108504992B (en) * | 2018-06-12 | 2023-10-03 | 清华大学 | Electrode vapor deposition device |
| CN109444331A (en) * | 2018-09-30 | 2019-03-08 | 中国科学技术大学 | A kind of ultrahigh vacuum heating device and its heating means |
| CN110823929A (en) * | 2019-11-28 | 2020-02-21 | 中国科学院上海应用物理研究所 | Sample transfer table for soft X-ray transmission imaging |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |