CN106423335A - Locking device used for locking sample stand to sample stage - Google Patents
Locking device used for locking sample stand to sample stage Download PDFInfo
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- CN106423335A CN106423335A CN201510468456.5A CN201510468456A CN106423335A CN 106423335 A CN106423335 A CN 106423335A CN 201510468456 A CN201510468456 A CN 201510468456A CN 106423335 A CN106423335 A CN 106423335A
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- slide block
- specimen holder
- locking
- spring
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Abstract
The invention discloses a locking device used for locking a sample stand to a sample stage. A locking part is utilized to fully fix the sample stand to the sample stage and the locking device can be unlocked through an unlocking part, thus the problem that the sample stand in the prior art cannot be firmly locked on the sample stage is overcome. The locking device used for locking the sample stand to the sample stage can be widely used for systems of a molecular beam epitaxy (MBE) system, a scanning tunnel microscope system, angle-resolved photoemission spectroscopy and the like.
Description
Technical field
The present invention relates to a kind of locking device for specimen holder being locked to sample stage, specifically, this
Invention be related to one kind in the locked state using locking piece specimen holder is fastened to completely sample stage and
The sample locking device discharging specimen holder can be unlocked by unlock piece.
Background technology
In scientific research apparatus, it usually needs sample is fixed on specimen holder, then specimen holder is placed
On sample stage.Sample stage is used for storing sample it is often necessary to coordinate with mechanical hand or sample transmission rod
Become to include the access of the specimen holder of sample.A lot of specimen holders are essentially all to rely on gravity directly to put at present
Put on sample stage, therefore sample can only be placed upwards, otherwise may landing from sample stage, to grinding
Study carefully work and bring unpredictable consequence.Also there is one kind at present and specimen holder is slightly compressed to by sample by shell fragment
Device to prevent it from dropping in sample platform, the specimen holder fixing device with shell fragment 1 ' as shown in Figure 1,
But this pressure can not be too greatly in order to avoid the access of impact specimen holder be it is therefore desirable to pay special attention to specimen holder
The angle deposited, in case specimen holder is from sample stage landing.
Content of the invention
It is an object of the invention to provide specimen holder can be firmly-fixed to sample stage and energy by one kind
Enough easily line access is entered to specimen holder thus can be used for the locking device of multiple operations.
For realizing this purpose, the present invention proposes a kind of locking for specimen holder is locked to sample stage
Device, described specimen holder is used for fixing sample, and wherein said sample stage is provided with open slot, described sample
Product frame inserts in this open slot, makes specimen holder be located at the side of sample stage, described open slot limits described
Specimen holder is moving up and down perpendicular to the direction of described sample stage, and described locking device includes lock body mechanism
And unlock piece, described lock body mechanism is installed on the opposite side of described sample stage, and described lock body mechanism includes
Locking piece, in the state of specimen holder locking, described locking piece enters from the described opposite side of sample stage
And abut described specimen holder, when needing to access sample, by the unblock of described unlock piece, make described
Locking piece is return and is unclamped described specimen holder.
This locking device can be securely locked specimen holder to sample stage by lock body mechanism, and solves
Latch fitting ensure that and is easily unlocked when needing and accessing sample.
As the improvement of the present invention, the lower surface of described specimen holder is provided with locking piece receiving portion, in institute
In the state of stating specimen holder locking, described locking piece inserts in described locking piece receiving portion.Preferably should
Locking piece receiving portion caves inward and the shape complementarity with described locking piece.
Accepted by the locking piece that the lower surface setting in specimen holder forms embedded cooperation with locking piece
Portion enables to more firm to the locking of described specimen holder.
As the improvement of the present invention, described lock body mechanism also includes the first slide block, the second slide block and first
Spring, described locking piece is arranged on described second slide block, and described first slide block can be in described unblock
Move along this pushing direction under the impetus of part, and can in the presence of described first spring edge
The direction motion contrary with above-mentioned pushing direction, described first slide block and described second slide block shape respectively
It is bonded to each other that Cheng Youyi inclined-plane makes both pass through this inclined-plane, and relatively can slide along this inclined-plane.
As a further improvement on the present invention, described lock body mechanism also includes main body rack and capping, institute
Stating the first spring is compression spring and is put in the way of the direction of motion parallel to described first slide block
Put, the two ends of this first spring are respectively contained in described main body rack and described first slide block, institute
State capping and be provided with boss, this boss is configured to ensure that described second slide block is only capable of along with described first
Move in the direction that the direction of motion of slide block is perpendicular.
As the another kind improvement of the present invention, described lock body mechanism also includes second spring, this second bullet
Spring is placed in the way of perpendicular to described first spring and described second slide block is applied along leaving
The power in the direction of described specimen holder motion.
Described first spring and described second spring are configured to institute in the state of described specimen holder locks
State the first spring to apply to described second slide block along towards described sample by described first slide block
The power in the direction of frame motion applies to described second slide block along leaving more than described second spring
State the power in the direction of specimen holder motion.
As another improvement of the present invention, described second spring is extension spring and its two ends difference
It is fixed on described second slide block and described main body rack, described first slide block is provided with notch and is used for making institute
State second spring to pass through.
As another improvement of the present invention, described capping is made up of upper capping and lockhole capping, described
It is respectively arranged with described boss, described upper capping is provided with for making in upper capping and the capping of described lockhole
The aperture that described locking piece passes through, the capping of described lockhole is provided with for making what described unlock piece passed through to open
Hole is so that described unlock piece can pass through the first slide block described in this opening contacts.
As the another kind improvement of the present invention, being inserted into towards described specimen holder of described locking piece is described
The surface of the direction of insertion of sample stage with respect to this direction of insertion tilt, and described locking piece towards
Described specimen holder is removed the surface of the removing direction of described sample stage perpendicular to this direction of insertion, described
Direction of insertion contrary with described removing direction.
As the present invention another improvement, described locking piece receiving portion cave inward and with described lock
The shape complementarity determining part therefore ensures that and is locked securely.
The invention still further relates to a kind of rotating sample platform combination, it includes central rotating shaft and multiple locking mould
Block, each locking module described includes：Specimen holder and sample stage, wherein said multiple locking modules are led to
Cross sample stage to be contained on central rotating shaft；Wherein, the combination of this rotating sample platform also includes locking device general
Described specimen holder is locked to described sample stage.
In sum, using the above-mentioned locking device for specimen holder being locked to sample stage, can solve
The problem of sample certainly cannot be firmly fixed on sample stage, and this device is easy to operate, need not answer
Miscellaneous operation.
Brief description
Fig. 1 is the locking device for specimen holder is locked to sample stage of the prior art with shell fragment
Axonometric chart；
Fig. 2 shows according to one embodiment of the invention for specimen holder is locked to sample stage
Locking device side schematic view；
Fig. 3 is the axonometric chart of the main body rack according to one embodiment of the invention；
Fig. 4 is the axonometric chart of the first slide block according to one embodiment of the invention；
Fig. 5 show according to one embodiment of the invention eliminate upper capping lock body mechanism and
The side schematic view of specimen holder；
Fig. 6 shows the side schematic view of the rotating sample platform assembly of the present invention.
Specific embodiment
As shown in Figure 2 and Figure 5, according to one embodiment of the invention for specimen holder is locked to sample
The locking device of sample platform includes：Lock body mechanism 1, unlock piece 2, specimen holder 3 and sample stage 4.Lock body
Mechanism 1 includes the first slide block 5, the second slide block 6, compression spring 7, extension spring 8, main body rack
9th, upper capping 10 and lockhole capping 11.
As shown in figure 3, the upper surface along longitudinal Y of the base plate of main body rack 9 is provided with slide rail 12,
First slide block 5 can slide on this slide rail, and this slide rail 12 can be double slideway slide rail, this two
It is provided with along the cylindrical protrusions 13 in longitudinal Y-direction on base plate between individual slideway, in this cylinder
The hole 17 of raised 13 one end being provided centrally with receiving extension spring 8 (as shown in Figure 5),
The lower end along longitudinal Y in this hole is provided with the lower fixed part (not shown) for fixing extension spring 8.
The back plate of this main body rack 9 is formed with the blind hole 15 of at least one given depth, is preferably formed with two
Individual blind hole 15, this two blind holes 15 originate in the surface towards the first slide block of this back plate and along horizontal stroke
Extend certain depth, for accommodating the one of compression spring 7 (as shown in Figure 5) in X to back plate
End.Or, it is possible to use shoulder hole replaces above-mentioned blind hole, as long as enabling above-mentioned functions.
As shown in figure 4, the first slide block 5 can be side be in the trapezoidal shape of approximate right angle or other
Suitable shape.The bottom surface of the first slide block 5 is placed in double slideway slide rails of main body rack 9 for sliding surface
On 12, its ramp is contacted with the bottom surface of the second slide block 6 and produces during unblock and relatively slides,
The rear surface of the back plate of its agent-oriention support 9 and the front surface towards lockhole capping 11 are parallel to each other
And perpendicular to bottom surface.Surface and the angle of ramp are acute angle afterwards, and this acute angle is preferably at 50
Spend between 70 degree.This first slide block 5 is provided with notch 16, and this notch 16 is from front surface along horizontal stroke
To X formed backward and after arrival before surface at a certain distance from stop, and this notch is along longitudinally
Y-direction insertion ramp and bottom surface, this notch 16 by front surface be divided into two symmetrical little
Plane, this two facets are respectively formed with a solution lockhole 17, the axis parallel of solution lockhole 17
In horizontal X.It is formed with the blind hole 18 of at least one given depth on the rear surface of this first slide block 5,
It is preferably formed with two blind holes 18, for accommodating the other end of compression spring 7.This two blind holes
18 axis is blind with two in the main body rack back plate of above-mentioned one end for accommodating compression spring 7
The axis in hole 15 is respectively aligned to, thus jointly accommodating two compression springs 7.
Second slide block 6 can be shape or other the suitable shape that side is in almost parallel tetragon.
The top of the second slide block 6 is provided with locking piece 19, this locking piece preferably with the second slide block 6 one bodily form
Become, for example, side can be in the sharp pointed end on the second slide block 6 top of almost parallel quadrangle form
Portion is as locking piece.Its base angle contacting with the first slide block 5 of second slide block 6 is preferably removed,
Thus contributing to the relative slip between the first slide block 5.As shown in Fig. 2 the side of the second slide block 6
Angle between the rear surface of face acute angle and the first slide block 5 and ramp equal so that second sliding when this
When block 6 is placed on the first slide block 5 (when this second slide block 6 bottom surface and the first slide block 5 upper
When inclined-plane contacts), the front surface of this second slide block 6 and rear surface are parallel to longitudinal Y.This second
Slide block 6 is provided with diameter parallel in the through hole 14 of longitudinal Y, and this through hole 14 is propped up with main body
Hole 14 in the cylindrical protrusions 13 of frame 9 is aligned, and for accommodating extension spring 8, and passes through at this
One end of the upper surface positioned at the second slide block 6 along longitudinal Y of perforation 14 is provided with draws for fixation
Stretch the upper fixed part of spring 8, fix together with above-mentioned lower fixed part at the base plate of main body rack
Extension spring 8, on this, fixed part and lower fixed part can be flat recess mouth or can fix
The other structures of extension spring.
Specifically, the bottom surface of the second slide block 6 is bonded to each other with the ramp of described first slide block 5, and
Can in releasing process and again carry out relatively sliding, as described above, second is sliding in locking process
The base angle being contacted with the first slide block 5 of block 6 is removed, thus contributing to reducing the second slide block 6 and the
Resistance to sliding between one slide block 5.Transversely X is promoted to transport backward when the first slide block 5 is unlocked part 3
Dynamic (as shown by the arrows in Figure 2) is thus when compressing compression spring 7 further, upper by being located at respectively
The restriction of the boss 21,22 (as shown in Figure 2) in capping 10 and lockhole capping 11, second is sliding
Block 6 will move under the gravity of its own and the pulling force lower edge longitudinal direction Y-direction of extension spring 8, simultaneously
Locking piece 19 is taken in lock body mechanism.In addition, as described above, due in the first slide block 5
Inside offers notch 16, and when the first slide block 5 moves along X-axis, begin in the stage casing of extension spring 8
It is in eventually in notch 16, so that extension spring 8 will not be interfered with the first slide block 5 to ensure
It is only stretched along longitudinal Y.Replacement as above-mentioned compression spring 7, it is possible to use be arranged to
Enough realize the extension spring of above-mentioned functions.In addition, replacement as above-mentioned extension spring 8 it is also possible to
Using being arranged to realize the compression spring of above-mentioned functions.Or alternatively, stretching bullet can be saved
Spring 8 and above-mentioned functions are realized in the action of gravity that only relies on the second slide block 6.
Further, specimen holder locking in the state of the first spring 7 by the first slide block 5 apply to
The component along the direction moved towards specimen holder of the second slide block 6 applies to more than second spring 8
Two slide blocks 6 along the power leaving the direction that specimen holder moves.
As shown in Fig. 2 the lower surface along longitudinal axis Y of upper capping 10 is provided with a boss 21, lockhole seals
The rear surface along transverse axis X of lid 11 is provided with a boss 22.Locked when being unlocked and again
Regularly, this boss 21 and boss 22 jointly limit the second slide block 6 can only be along the stretching of extension spring 8
Direction, i.e. longitudinal Y-direction move up and down, and can only transport up and down along perpendicular to the direction of unlock piece push-and-pull
Dynamic.On this, capping 10 has aperture, to allow locking piece 19 during the second slide block 6 motion can pass through this hole
Mouthful, this aperture can be rectangular opening or the aperture of other any shapes being suitable to make locking piece pass through.
Lockhole capping 11 is provided with two through holes concentric with two solution lockholes 17 of the first slide block 5 as lock
Hole, is used for making unlock piece pass through and enters the first slide block.On this, capping 10 and lockhole capping 11 can be led to
Cross bolt fixing with main body rack 9.
Specimen holder 3 is substantially square thin slice, and its upper surface is used for carrying sample.Excellent as one kind
The embodiment of choosing, the lower surface of specimen holder 3 is formed with a locking piece receiving portion 20 caving inward,
The shape design of this locking piece receiving portion becomes the shape complementarity with locking piece 19.As described above, lock
Determine the acute angle that part 19 can be the second slide block 6 top in almost parallel quadrangle form for the such as side
Terminal part.The surface of the direction of insertion being inserted into described sample stage 4 towards specimen holder 3 of this locking piece
Tilt with respect to this direction of insertion, thus contributing to inserting specimen holder in sample stage；And this locking
Part towards specimen holder 3 be removed described sample stage 4 removing direction surface perpendicular to specimen holder
Direction of insertion or removing direction so that in the locked state this specimen holder not readily disengage from sample stage,
It is especially true when sample stage is placed at an angle.The bottom of sample stage 4 is provided with permission locking piece 19
The port passing through, in the locked state locking piece 19 this locking piece receiving portion will be embedded by this port
Apply power upwards in 20 and in the presence of compression spring 7 to specimen holder 3.Sample stage 4 is provided with
Accommodate the open slot of specimen holder 3, under specimen holder lock-out state, this open slot limits specimen holder 3 and exists
Move upwards in direction perpendicular to sample stage 4, that is, specimen holder 3 is by locking piece 19 and this open slot
It is fully latched under the collective effect of upside.As a kind of alternative embodiment, under specimen holder 3
Surface can be not provided with locking piece receiving portion, and correspondingly a plane is formed on the top of locking piece 19, should
Plane can form face with the lower surface of specimen holder 3 and contact.By the effect of compression spring 7 via
One slide block 5 is transferred to the second slide block 6 thus extruding locking piece 19 to specimen holder 3 lower surface, and
And by specimen holder under the collective effect on the upside of the sample stage open slot of the upper surface acting on specimen holder 3
3 lockings.
In this embodiment, unlock piece 2 is made up of two needle-like portion, during operation this two needle-like portion with
Two lockholes in lockhole capping 11 are respectively with one heart；Touch after this two needle-like portion insertion lockholes,
Transversely X is moved so that compression spring 7 is entered one by the first slide block 5 to the back plate 7 of main body rack
Step compression；Meanwhile, the second slide block 6 is downward under the pulling force effect of self gravitation and extension spring 8
Motion is so that locking piece 19 covers 10 rectangular opening thus completing to unlock by upper along under longitudinal Y-direction.
In a preferred mode of operation, as shown in Fig. 2 lock body mechanism 1 is fixed on sample stage 4
Lower section, specimen holder 3 is pushed the open slot of sample stage 4 so that specimen holder 3 is in the process being pushed into
Middle locking piece 19 is pressed downward in lock body mechanism 1, and continue to be pushed home into until locking piece
Receiving portion 20 is aligned with locking piece 19 so that locking piece 19 embeds lock in the presence of compression spring 7
Determine in part receiving portion 20, thus specimen holder 3 is pressed upwards on to the upside of sample stage open slot, by
Specimen holder 3 is fastened to sample stage 4 and no any relative freedom by completely, there is not the danger of landing
Danger.Without lock body mechanism 1, specimen holder 3 can be freely movable along sample stage 4, if therefore sample
There is upset or be inverted in sample platform 4, or in moving process, stress is larger, then have from sample stage 4
The danger of upper landing.When accessing sample, unlock piece 3 insertion lockhole simultaneously promotes the first slide block 5, makes
Obtain the second slide block 6 to move downward thus locking piece 19 is retracted into lock body mechanism 1, specimen holder 3 quilt
Unblock, thus obtain the degree of freedom along sample stage 4 movement again, can carry out accessing operation.
Fig. 6 shows the side schematic view of the rotating sample platform assembly of the present invention, this rotation style
Sample platform assembly includes central rotating shaft and multiple locking module, and each locking module wherein said includes sample
Frame and sample stage, the plurality of locking module is contained on central rotating shaft by sample stage；Wherein, this rotation
Style sample platform assembly also includes specimen holder is locked to the locking device of described sample stage.Without lock
Body mechanism 1, specimen holder 3 can move freely along sample stage 4.On this rotatable sample platform 4 one
Sample segment will be in inversion state, if do not locked, specimen holder will landing from sample platform 4；
When this sample stage assembly rotates, the centrifugal force of generation will make specimen holder 3 depart from sample stage 4 to be thrown out of
Go.By lock body mechanism 1 being fixed on the lower section of sample stage 4, i.e. in the phase of the side carrying sample
Toss about so that the locking piece 19 of lock body mechanism 1 embeds the locking piece receiving portion 20 of specimen holder 3 lower surface,
Thus specimen holder 3 is fastened to sample stage 4 completely so that specimen holder 3 does not have with respect to sample stage 4
Any degree of freedom, does not fall out even at inversion state, or even specimen holder 3 during rotation
Also will not be thrown out of.When accessing sample, unlock piece 3 insertion lockhole simultaneously promotes the first slide block 5,
Second slide block 6 is moved downward thus locking piece 19 is retracted into lock body mechanism 1, specimen holder 3
It is unlocked, thus obtain the degree of freedom along sample stage 4 movement again, accessing operation can be carried out.
Although show various embodiments above according to different embodiments and occupation mode it is understood that
Be that these embodiments are schematic and do not limit the scope of the invention.The technology of this area
Personnel can carry out various deformation, change, additional and improvement under the teaching of this specification.
The design of this device is simple, compact, and modularized design ensures that it has good compatibility,
Can be widely used in a lot of environment, such as molecular beam epitaxy system (MBE) in vacuum environment,
The systems such as system of Scanning Tunneling Microscope, angle resolved photoelectron spectroscope.
Claims (11)
1. a kind of locking device for specimen holder (3) being locked to sample stage (4), described sample
Frame (3) is used for fixing sample it is characterised in that described sample stage (4) is provided with open slot, institute
State specimen holder (3) to insert in this open slot, make described specimen holder (3) be located at described sample stage (4)
Side, described open slot limits described specimen holder (3) in the side perpendicular to described sample stage (4)
To up and down motion, described locking device includes lock body mechanism (1) and unlock piece (2), described lock body
Mechanism (1) is installed on the opposite side of described sample stage (4), and described lock body mechanism (1) includes lock
Determine part (19), in the state of described specimen holder (3) locking, described locking piece (19) is from sample
The described opposite side of platform (4) enters and abuts described specimen holder (3), when needing to access sample,
By the unblock of described unlock piece (2), described locking piece (19) is made to return and unclamp described sample
Frame (3).
2. locking device according to claim 1 it is characterised in that：Described specimen holder (3)
Lower surface be provided with locking piece receiving portion (20), described specimen holder (3) locking in the state of,
Described locking piece (19) is inserted in described locking piece receiving portion (20).
3. locking device according to claim 1 it is characterised in that：Described lock body mechanism (1)
Also include the first slide block (5), the second slide block (6) and the first spring (7), described locking piece (19)
It is arranged on described second slide block (6), described first slide block (5) can be in described unlock piece (2)
Impetus under move along this pushing direction, and can be in the effect of described first spring (7)
Under move along the direction contrary with above-mentioned pushing direction, described first slide block (5) and described second
Slide block (6) be respectively formed with an inclined-plane so that both to pass through this inclined-plane bonded to each other, and being capable of edge
This inclined-plane relatively to slide.
4. locking device according to claim 3 it is characterised in that：Described lock body mechanism (1)
Also include main body rack (9) and capping, described first spring (7) is compression spring and with parallel
Mode in the direction of motion of described first slide block (5) is placed, and the two ends of this first spring are distinguished
It is placed in described main body rack (9) and described first slide block (5), described capping is provided with boss,
This boss is configured to ensure that described second slide block (6) is only capable of along the fortune with described first slide block (5)
The perpendicular direction motion in dynamic direction.
5. locking device according to claim 3 it is characterised in that：Described lock body mechanism (1)
Also include second spring (8), this second spring (8) is with the side perpendicular to described first spring (7)
Formula is placed and described second slide block (6) is applied along leaving the side that described specimen holder (3) moves
To power.
6. locking device according to claim 5 it is characterised in that：Described first spring (7)
It is configured to described first bullet in the state of described specimen holder (3) locks with described second spring (8)
Spring (7) is applied to described second slide block (6) along towards institute by described first slide block (5)
The power stating the direction that specimen holder (3) moves applies to described second to slide more than described second spring (8)
Block (6) along the power leaving the direction that described specimen holder (3) moves.
7. locking device according to claim 5 it is characterised in that：Described second spring (8)
It is extension spring and its two ends is individually fixed in described second slide block (6) and described main body rack (9),
Described first slide block (6) is provided with notch (16) and is used for making described second spring (8) pass through.
8. locking device according to claim 4 it is characterised in that：Described capping is by upper capping
(10) form with lockhole capping (11), described upper capping (10) and described lockhole cover (11)
On be respectively arranged with described boss (21,22), described upper capping (10) is provided with described for making
The aperture that locking piece (19) passes through, described lockhole capping (11) is provided with for making described unlock piece
The perforate passing through is so that described unlock piece (2) can pass through the first slide block described in this opening contacts.
9. the locking device according to any one of the claims it is characterised in that：Described lock
Determine the direction of insertion being inserted into described sample stage (4) towards described specimen holder (3) of part (19)
Surface tilts with respect to this direction of insertion, and described locking piece (19) towards described specimen holder (3)
Perpendicular to this direction of insertion, described inserts on the surface of removing direction being removed described sample stage (4)
Enter direction contrary with described removing direction.
10. locking device according to claim 2 it is characterised in that：Described locking piece receiving portion
(20) cave inward and the shape complementarity with described locking piece (19).
A kind of 11. rotating sample platform assemblies, it includes central rotating shaft and multiple locking module, described every
Individual locking module includes：
Specimen holder (3),
Sample stage (4),
Wherein said multiple locking module is contained on central rotating shaft by sample stage；
It is characterized in that：
Also include the locking device described in one of claim 1-10, described specimen holder (3) is locked
To described sample stage (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510468456.5A CN106423335B (en) | 2015-08-04 | 2015-08-04 | It is a kind of for specimen holder to be locked to the locking device of sample stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510468456.5A CN106423335B (en) | 2015-08-04 | 2015-08-04 | It is a kind of for specimen holder to be locked to the locking device of sample stage |
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| Publication Number | Publication Date |
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| CN106423335A true CN106423335A (en) | 2017-02-22 |
| CN106423335B CN106423335B (en) | 2018-12-25 |
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| CN201510468456.5A Active CN106423335B (en) | 2015-08-04 | 2015-08-04 | It is a kind of for specimen holder to be locked to the locking device of sample stage |
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| CN108408260A (en) * | 2018-03-19 | 2018-08-17 | 中国科学院物理研究所 | Sample storage locking device |
| CN109444331A (en) * | 2018-09-30 | 2019-03-08 | 中国科学技术大学 | A kind of ultrahigh vacuum heating device and its heating means |
| CN111876729A (en) * | 2020-07-02 | 2020-11-03 | 中国科学技术大学 | STM-MBE combined system |
| CN114132746A (en) * | 2021-12-06 | 2022-03-04 | 广东润鹏生物技术有限公司 | Capillary tube rack transfer mechanism, transfer process and molecular diagnosis platform |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN106423335B (en) | 2018-12-25 |
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